Abstract: There is disclosed an accelerometer comprising a substrate, a proof mass mounted to the substrate for movement in a first direction perpendicular to the plane of the substrate, the proof mass carrying a first sensing electrode, a second sensing electrode mounted relative to the substrate, wherein the first and second sensing electrodes comprise surfaces extending at an angle relative to the substrate and defining between them a sensing gap the width of which varies with movement of the proof mass in the first direction.
Type:
Grant
Filed:
October 3, 1997
Date of Patent:
August 17, 1999
Assignees:
Cambridge University Technical Services Limited, Matsushita Electric Industrial Co. Ltd., The University of Tokyo
Inventors:
David Frank Moore, Stuart Clyde Burgess, Heather Klaubert, Hiang-Swee Chiang, Narito Shibaike, Takashi Kiriyami
© 2024 Justia
