Abstract: Method for actuation control of a microscope, in particular of a Laser Scanning Microscope, in which, at least one first illumination light, preferably moving at least in one direction, as well as at least one second illumination light moving at least in one direction, illuminate a sample through a beam combiner, a detection of the light coming from the sample takes place, whereby, at least one part of the illumination light is generated through the splitting of the light from a common illuminating unit, characterized in that, by means of a common control unit, a controlled splitting into the first and the second illumination light takes place, in which the intensity of the first illuminating light, specified by the user or specified automatically, is assigned a higher priority (is prioritized) compared to the specified value for the second illumination light, and an adjustment for the second illumination light takes place until a maximum value is obtained, which is determined by the value specified for the f

Abstract: The invention relates to a laser scanning microscope (LSM), consisting of at least one light source, from which an illumination beam path in the direction of a sample originates, at least one detection beam path for passing sample light, preferably fluorescence light, onto a detector arrangement, it main colour separator for separating the illumination and detection beam paths, a microlens array for generating a light source grid composed of at least two light sources, a scanner for generating a relative movement between the illumination light and the sample in at least one direction, and a microscope objective, wherein the lens array is arranged in at common part of illumination and detection beam paths.

Abstract: Methods and apparatuses for laser microdissection are provided. For example, by a user at least one first system parameter is adjusted, for example varied, and at least one second system parameter of the laser microdissection system is adjusted automatically by the laser microdissection system such that a cut line has a desired cut line parameter.

Abstract: A process of preparing a lamella from a substrate includes manufacturing a protection strip on an edge portion of the lamella to be prepared from the substrate, and preparing the lamella, wherein the manufacturing the protection strip includes a first phase of activating a surface area portion of the substrate, and a second phase of electron beam assisted deposition of the protective strip on the activated surface area portion from the gas phase.

Abstract: A microscope with means for adjusting the focal range, comprising a first objective lens for transmitting the object light of an illuminated object in the direction of a detector, with a second objective lens being disposed in the direction of the light upstream of the detector, which second objective lens is followed by a first mirror that can be adjusted in the direction of the optical axis, with at least one second mirror for transmitting light from the first objective lens in the direction of the second objective lens and from the second objective lens to the detector being disposed in the optical path, which second mirror is a fully reflective mirror, or a microscope with means for adjusting the focal range, comprising a first objective lens for transmitting the object light of an illuminated object in the direction of a detector, with a second objective lens being disposed in the direction of light upstream of the detector, which second objective lens is followed by a first mirror that can be adjusted i

Abstract: A microscopy method for generating a high-resolution image (55) of a sample (2) comprising the following steps: a) the sample (2) is provided with a marker, which upon excitation emits statistically blinking luminescent radiation, or a sample (2) is used which upon excitation emits locally distributed, statistically blinking luminescent radiation; b) the sample (2) is excited to luminescence by means of structured illumination, wherein the sample is repeatedly illuminated in at least nine different illumination conditions (.01-.09) of the structured illumination by realizing at least three rotary positions, and at least three displacement positions per rotary position of the structured illumination; c) the luminescing sample (2) is repeatedly displayed in each of the different illumination conditions on a flat panel detector having pixels, such that an image sequence (44.01-44.09) is obtained for each of the different illumination conditions (.01-.

Abstract: A method of operating a particle beam microscopy. A particle beam is scanned across a scanning region of a surface of the object. Particles are detected by a detector system for a plurality of impingement locations of the primary beam within the scanning region. A detector system generates detector signals which represent for each of the impingement locations an intensity of the detected particles. Material data of the interaction regions are calculated depending on the detector signals and depending on topography data, which represent a topography of the object surface in the scanning region.

Abstract: A method for high-resolution 3D-localization microscopy of a sample having fluorescence emitters, in which the fluorescence emitters in the sample are excited to emit fluorescent radiation and the sample is displayed with spatial resolution in wide-field microscopy. Excitation is caused such that in reference to the spatial resolution at least some fluorescence emitters are isolated. A three-dimensional localization is determined in a localization analysis, which includes in the depth direction of the display a z-coordinate and a x-coordinate as well as a y-coordinate orthogonal in reference thereto, for each isolated fluorescence emitter showing a precision exceeding the local resolution. A table of localization imprecision is provided, which states the imprecision of the localization, regarding its z-coordinate as a function of the z-coordinate and a number of photons collected during imaging in the wide-field microscopy.

Abstract: A method for the optical detection of an illuminated specimen, wherein the illuminating light impinges in a spatially structured manner in at least one plane on the specimen and several images of the specimen are acquired by a detector in different positions of the structure on the specimen. An optical sectional image and/or an image with enhanced resolution is then calculated. The method includes generating a diffraction pattern in the direction of the specimen in or near the pupil of the objective lens or in a plane conjugate to the pupil. A phase plate with regions of varying phase delays is dedicated to the diffraction pattern in or near the pupil of the objective lens or in a plane conjugate to said pupil, and different phase angles of the illuminating light are set.

Abstract: A particle beam system includes a particle beam source for generating a particle beam, a high voltage source, a beam blanker system with deflection plates 56, 57, and a control circuit. The control circuit provides a first current path 67 between the two deflection plates, wherein a switch 70, a node 72 connected to the high voltage source and a switch 76 are arranged in this order in the first current path starting from the deflection plate 56. The control circuit provides a second current path 85 between the deflection plate 56 and the deflection plate 57, wherein in the second current path, starting from the deflection plate 56, a series connection 88 comprising a voltage source 91 a switch 90, a node 86 connected to the high voltage source and a series connection 92 comprising a voltage source 95 and a switch 94 are arranged in this order.

Abstract: A high-voltage supply unit is provided for a particle beam device. The high-voltage supply unit includes at least one high-voltage cable for feeding a high voltage, and at least one measuring device for measuring the high voltage. The measuring device has at least one first capacitor, and the first capacitor is formed by at least one first section of the high-voltage cable.

Abstract: A combined inspection system for inspecting an object disposable in an object plane 19, comprises a particle-optical system, which provides a particle-optical beam path 3, and a light-optical system, which provides a light-optical beam path 5; and a controller 60, wherein the light-optical system comprises at least one light-optical lens 30 arranged in the light-optical beam, which comprises a first lens surface facing the object plane which has two lens surfaces 34, 35 and a through hole 32, wherein the particle-optical system comprises a beam deflection device 23, in order to scan a primary particle beam 15 over a part of the sample plane 19, and wherein the controller is configured to control the beam deflection device 23 in such a manner that a deflected primary particle beam 15 intersects an optical axis 3 of the particle-optical beam path in a plane which is arranged inside the through hole.

Abstract: Device to adjust the position and/or size of a pinhole in a laser scanning microscope (LSM) where the pinhole is illuminated via a separate light source or the LSM laser and the pinhole is moved at a right angle to the optical axis until the receiver has the maximum intensity and the pinhole position is captured and saved together with the data attributed to the replaceable optical components.

Abstract: A variable imaging system which, starting from the object end, includes an objective of fixed focal length, at least one afocal zoom system, and a tube lens system. An afocal system of fixed magnification is arranged on the beam path between the objective and the afocal zoom system. The system includes means for axial displacement of the afocal system relative to the objective and to the zoom system, such that the position of the common back focal point of objective and afocal system is always set to the position of the entrance pupil of the zoom system, thus ensuring that object imaging is telecentric. The imaging system is suitable for use in microscopes. The invention can also be used to advantage in other optical systems employing tube lens systems of fixed or variable focal length.

Abstract: A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first re

Abstract: A method for operating a particle beam device and/or for analyzing an object in a particle beam device are provided. For example, the particle beam device is an electron beam device, an ion beam device, or a combination device having an electron beam device and an ion beam device. In various embodiments, the method steps of a so-called stereoscopy method and a multi-detector method may be combined with one another in such a manner that simple and rapid analysis of the object is made possible.

Abstract: A transmission electron microscopy system has an illumination system and an objective lens system. A first projection system images the diffraction plane of the objective lens system into a first intermediate diffraction plane. A second projection system images the first intermediate diffraction plane into a second intermediate diffraction plane. A first aperture located in the first intermediate diffraction plane has a central opening of a first radius. A bright field detector located in the second intermediate diffraction plane has a detection surface defined by an inner edge of a second radius. The first radius and the second radius define a maximum angle and a minimum angle, respectively, relative to the optical axis of directions of bright field electrons traversing the sample plane and detectable by the bright field detector.

Abstract: The invention relates to an optical assembly that can be interposed into the observation beam path of a microscope, comprising a first mount. In the first mount, a stack of optical elements for a polarization optical, differential interference contrast method, is arranged to facilitate a first observation method. The stack comprises, inter alia, a polarizer, polarization-optical shearing elements, and an analyzer. The analyzer is arranged in the stack with regard to its polarization direction in a predetermined orientation relative to the polarization direction of the polarizer. The stack of optical elements in the first mount is arranged such as to be interchangeable. Further, the assembly comprises at least one additional mount for receiving optical elements for at least one additional observation method.

Abstract: A light microscope having a specimen plane, in which a specimen to be examined is positioned, having a light source to emit illuminating light, having optical imaging means to convey the illuminating light into the specimen plane, having a first scanning means, with which an optical path of the illuminating light and the specimen can be moved relative to each other to produce an illumination scanning movement of the illuminating light relative to the specimen, having a detector means to detect specimen light coming from the specimen and having electronic means to produce an image of the specimen based on the specimen light detected by the detector means at different specimen regions. A second scanning means is present, with which it can be adjusted which specimen region can be imaged on a determined detector element.

Abstract: A method of operating a particle beam system includes determining a deflection amount and a deflection time of a beam deflection module connected to a data network. The method also includes determining an un-blank time of a beam blanking module connected to the data network, and determining a blank time of the beam blanking module connected to the data network. The method further includes generating a data structure which includes plural data records, wherein each data record includes a command representing an instruction for at least one of the modules, and a command time representing a time at which the instruction is to be sent to the data network. In addition, the method includes sorting the records of the data structure by command time, and generating a set of digital commands based on the data structure. Moreover, the method includes sending the digital commands of the set to the network in an order corresponding to an order of the sorted records.