Abstract: Various embodiments of the invention relate to a high accuracy phase shift apparatus. The phase shift apparatus comprises a voltage controlled analog phase shifter, a microcontroller unit (MCU) and a digital-to-analog converter (DAC). The MCU generates a digital control signal, which is converted into an analog control signal by the DAC to control the voltage controlled analog phase shifter to achieve desired phase shift angle. The phase shift apparatus may further incorporate a temperature sensor for temperature compensation. The output from the temperature sensor may be used to modify the reference voltage of the DAC, or alternatively be used to modify the digital control signal from the MCU. By incorporation digitalized control and temperature compensation to an analog phase shifter, the disclosed phase shift apparatus achieves high accuracy digitalized control, a flat phase shift over a wide bandwidth, and a stable phase shift over temperature variation.