Patents Assigned to Chlorine Engineers Corp., Ltd.
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Patent number: 5378317Abstract: The method for removing organic film according to the present invention is very effective for removing a photo resist film in a process for manufacturing semiconductor device. A substrate (32) having a photo resist film (31) formed on it is processed in a wet processing tank (34) filled with a processing solution such as a mixed solution containing sulfuric acid and hydrogen peroxide or by a dry processing using oxygen plasma. Then, it is processed in an ozone processing tank (34) filled with a solution where ozone or ozone water has been infused, and the organic film is removed.Type: GrantFiled: August 23, 1993Date of Patent: January 3, 1995Assignee: Chlorine Engineers Corp., Ltd.Inventors: Masaharu Kashiwase, Terumi Matsuoka
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Patent number: 5360526Abstract: An electrode (14) is joined to ridges (12) or ribs of a partition (11) by means of spring members (13), each being in comb form and bent at the toothed portions (16) thereof, so that, while the electrode surface is kept flat, the toothed portions (16) can be held with any desired distance with respect to electrode-supporting portions such as the partition or its ribs, but without causing damage to an ion-exchange membrane.Type: GrantFiled: April 30, 1993Date of Patent: November 1, 1994Assignee: Chlorine Engineers Corp. Ltd.Inventors: Osamu Arimoto, Shinji Katayama, Yoshinari Take
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Patent number: 5354434Abstract: Waste solution of developer, used as developer for a positive type photo resist and containing tetraalkylammonium hydroxide is neutralized with carbon dioxide, and it is filtered through a separation membrane. After removing precipitates of insoluble organic substances, it is sent to an anode chamber of an electrolytic cell divided by a cation exchange membrane, and electrolysis is performed. Low grade organic compounds in aqueous solution of tetraalkylammonium hydroxide obtained from a cathode chamber of a first stage electrolytic cell are oxidized and decomposed and are then supplied to an anode chamber of the next stage electrolytic cell, and high purity tetraalkylammonium hydroxide aqueous solution is obtained from the cathode chamber.Type: GrantFiled: December 15, 1993Date of Patent: October 11, 1994Assignee: Chlorine Engineers Corp. Ltd.Inventors: Hitoshi Satoh, Motoko Fukui, Chisako Kawakami
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Patent number: 5314591Abstract: An electrolyzer includes a stack composed of a plurality of upright electrolytic cell units, each unit including an electrolytic cell unit frame bounding a pair of electrode sheets. Each pair of electrode sheets are anode-side and cathode-side partitions having opposed recesses and projections that are engaged in nesting relationship with each other. A gas-liquid separation chamber is provided which is integral with an upper edge of the electrolytic cell unit frame.Type: GrantFiled: June 25, 1992Date of Patent: May 24, 1994Assignee: Chlorine Engineers Corp., LtdInventors: Shinji Katayama, Yoshinari Take
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Patent number: 4775452Abstract: Disclosed herein is a process for dissolving and recovering noble metals form used catalysts. Noble metal components are leached out from particles supporting or containing at least one noble metal or noble metal compound by subjecting particles them to electrolysis, with the electrolyte being an acid, in the anode compartment of an electrolytic cell which divided by a diaphragm into anode and cathode compartments, and the resulting solution containing noble metals is subjected to electrolysis in a fluidized bed electrolytic cell, thereby causing the noble metals to separate out on to the fluidizing cathode particles. The thus deposited noble metals are again leached out in an electrolytic cell.Type: GrantFiled: December 23, 1986Date of Patent: October 4, 1988Assignee: Chlorine Engineers Corp. Ltd.Inventors: Tadashi Kuninaga, Hiroshi Daidoji, Nobutaka Goto
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Patent number: 4663013Abstract: A method of bonding a cation exchange membrane of the type having a perfluorosulfonic acid group on one face and a perfluorocarboxylic acid group on the other face, with a reinforcing mesh material embedded therein and a fluorine-containing resin sheet is disclosed.Type: GrantFiled: May 1, 1985Date of Patent: May 5, 1987Assignee: Chlorine Engineers Corp. Ltd.Inventors: Isao Kumagai, Makoto Kataoka, Yuji Kinoshita
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Patent number: 4654135Abstract: A cell is disclosed whereby sea water is electrolyzed to form an aqueous hypochlorite solution with reduced formation of interfering deposits on the electrodes. The cell comprises a plurality of electrolytic cell units having a pair of cathodes and an anode placed between said cathodes, an electrolyte inlet at the lower part of an end frame, an electrolyte outlet at the upper part of an end frame. One of a pair of cathodes has an aperture at a position corresponding to the inlet, and the other cathode has an aperture at a position corresponding to the outlet. The anode has apertures at the position corresponding to the inlet and outlet.Type: GrantFiled: December 16, 1985Date of Patent: March 31, 1987Assignee: Chlorine Engineers Corp. Ltd.Inventors: Shinichiro Yamamoto, Shigeki Sudo, Tsuyoshi Ohmizu
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Patent number: 4626331Abstract: In an electrolytic cell of the type which includes a cylindrical electrolytic cell main body divided into a main electrode chamber and an auxiliary electrode chamber by a diaphragm, and having main electrode particles in the main electrode chamber, which are maintained in the fluidized state by an electrolyte supplied to the main electrode chamber, an improvement is disclosed wherein an electrolyte supply port and an electrolyte discharge port are provided to enable flow of electrolyte through said cell to maintain the fluidized state of said particles, and a porous auxiliary electrode is provided in contact with the diaphragm on the side thereof facing said auxiliary electrode chamber, to facilitate flow of gas generated on the auxiliary electrode in the direction of the auxiliary chamber.Type: GrantFiled: November 21, 1985Date of Patent: December 2, 1986Assignee: Chlorine Engineers Corp., Ltd.Inventors: Nobutaka Goto, Nobuyasu Ezawa
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Patent number: 4622113Abstract: Process or producing caustic alkalis or alkali hydroxides by electrolysis, employing a double electrode-type electrolysis tank in which a cation exchange membrane is provided to divide the inside of the tank into cathode and anode compartments, supplying to the anode compartment an alkali chloride, supplying water or a dilute solution of an alkali hydroxide into the cathode compartment, and taking away the alkali hydroxide and the hydrogen gas produced by electrolysis, in a mixed state of gas and liquid from the cathode compartment. The electrolysis tank comprises a number of finger-anodes extending from one of the walls of the tank and a number of finger-like hollow cathodes extending from the other wall of the tank, into which the finger-anodes project to form a gap therebetween, and a cation exchange membrane extending through the gap to divide the inside of the tank into cathode and anode compartments.Type: GrantFiled: November 19, 1984Date of Patent: November 11, 1986Assignees: Toyo Soda Manufacturing Co., Ltd., Chlorine Engineers Corp., Ltd.Inventors: Takao Satoh, Masaki Murakami, Nobuhiro Kawasaki, Teruo Ichisaka, Shinji Katayama
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Patent number: 4605685Abstract: A method for the preparation of a graft polymer membrane comprising an inactive polymer film having TFS as a graft chain. The inactive polymer film is irradiated with ionizing radiation, and the resulting irradiated film is graft-polymerized by contacting said film with TFS.This product may then be sulfonated to provide a cation exchange membrane; or the obtained graft polymer may be haloalkylated, and quarternary aminated to provide an anion exchange membrane; or the graft polymer membrane may be used to prepare a weakly acidic cation exchange membrane by substituting at least part of the benzene rings of the graft polymer by one of the groups among hydroxyl groups, carboxylic acid groups, phosphoric acid groups and phosphorous acid groups.The polymeric membrane products are also disclosed and claimed.Type: GrantFiled: September 6, 1984Date of Patent: August 12, 1986Assignee: Chlorine Engineers Corp., Ltd.Inventors: Takashi Momose, Kazuo Tomiie, Hiroyuki Harada, Hiroshi Miyachi, Hiroko Kato
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Patent number: 4569729Abstract: In an electrolytic cell of the type which includes a cylindrical electrolytic cell main body divided into a main electrode chamber and an auxiliary electrode chamber by a diaphragm, and having main electrode particles in the main electrode chamber, which are maintained in the fluidized state by an electrolyte supplied to the main electrode chamber, an improvement is disclosed wherein an electrolyte supply port and an electrolyte discharge port are provided to enable flow of electrolyte through said cell to maintain the fluidized state of said particles, and a porous auxiliary electrode is provided in contact with the diaphragm on the side thereof facing said auxiliary electrode chamber, to facilitate flow of gas generated on the auxiliary electrode in the direction of the auxiliary chamber.Type: GrantFiled: November 19, 1984Date of Patent: February 11, 1986Assignees: Chlorine Engineers Corp., Ltd., Tanaka Kikinzoku Kogyo K.K.Inventors: Nobutaka Goto, Nobuyasu Ezawa
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Patent number: 4543265Abstract: A cathode for use in electrolysis comprising (1) a corrosion-resistant electrically conductive substrate; and (2) a coating thereon of a mixture of fine particles of (a) nickel or an alloy of nickel, and (b) fine particles of a platinum-group metal oxide uniformly dispersed in the nickel or the alloy of nickel in an amount of about 0.1% to about 50% by weight; and a method for the production thereof.Type: GrantFiled: February 29, 1984Date of Patent: September 24, 1985Assignee: Chlorine Engineers Corp. Ltd.Inventor: Kazuki Kasuya
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Patent number: 4465580Abstract: A cathode for use in electrolysis comprising (1) a corrosion-resistant electrically conductive substrate; and (2) a coating thereon of (a) nickel or an alloy of nickel, and (b) fine particles of a platinum-group metal, a platinum-group metal oxide or a mixture thereof uniformly dispersed in the nickel or the alloy of nickel, the particles being present in the coating in an amount of about 0.1% to about 50% by weight; and a method for the production thereof.Type: GrantFiled: February 2, 1979Date of Patent: August 14, 1984Assignee: Chlorine Engineers Corp. Ltd.Inventor: Kazuki Kasuya
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Patent number: 4448664Abstract: An anode for electrolysis includes an electrically conductive bar erected on an electrolytic cell bottom plate, opposed anode bodies connected to the electrically conductive bar through anode supporting bodies, and reinforcing bodies provided between the opposed anode bodies and outside the anode supporting bodies.Type: GrantFiled: June 6, 1983Date of Patent: May 15, 1984Assignee: Chlorine Engineers Corp., Ltd.Inventors: Tadao Ikegami, Takeshi Miyamoto
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Patent number: 4421614Abstract: The method for bypassing the electric current of at least one cell of an electrolytic apparatus includes a series combination of a resistor and a switch connected in parallel to the terminals of the cell to be repaired or replaced. In another embodiment a plurality of said series combinations may be connected in parallel to each other and be connected in parallel to the terminals of the cell to be bypassed.Type: GrantFiled: December 2, 1981Date of Patent: December 20, 1983Assignee: Chlorine Engineers Corp. Ltd.Inventors: Kenzo Yamaguchi, Yoshinari Take, Akiyoshi Manabe
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Patent number: 4417970Abstract: An electrolytic cell having a plurality of porous and tubular cathodes, a plurality of porous anodes and a plurality of bag-shaped molds being formed by a cation exchange membrane in at least the portions facing and between the vertical faces of the anode and cathodes. The anode accommodating bag-shaped molds have apertures at the bottom through which anode connected electroconductive bars extend, said bars being inserted through and secured at corresponding cell bottom plate apertures by flanges. A partition plate, on the top of the cell main body, has a plurality of openings which correspond to the open tops of the bag-shaped molds. The open top edges of the bag-shaped molds are secured to the partition plate openings by a plurality of lid members.Type: GrantFiled: October 29, 1982Date of Patent: November 29, 1983Assignee: Chlorine Engineers Corp. Ltd.Inventors: Kenzo Yamaguchi, Teruo Ichisaka, Tadao Ikegami, Isao Kumagai
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Patent number: 4409084Abstract: An electrolytic cell for the ion exchange membrane method, which comprises:(a) an electrolytic cell main body;(b) a lid covering the(c) porous and hollow tubular cathodes disposed in the body;(d) a bottom plate having apertures through which an electrically conductive bar can be extended;(e) electrically conductive bars provided with a flange at a lower portion thereof, each inserted through the apertures of the bottom plate into the interior of the body and secured to the bottom plate by the flange;(f) porous anodes each connected to the electrically conductive bar and placed vertically in a face-face relation to the cathode, and disposed between the cathodes;(g) bag-shaped elements, portions of which facing the anodes and the cathodes are formed by a cation exchange membrane, the bottom of which has at least one aperture through which the electrically conductive bar can be extended, and which have each an open top; and(h) a partition plate having openings, which plate is on the top of the body,whereinone orType: GrantFiled: August 13, 1981Date of Patent: October 11, 1983Assignee: Chlorine Engineers Corp. Ltd.Inventors: Kenzo Yamaguchi, Teruo Ichisaka, Tadao Ikegami
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Patent number: 4396727Abstract: A uniform cation exchange membrane having a certain fluorovinyl sulfonic acid monomer grafted onto a certain high-molecular substrate film which exhibits small electrical resistance and great physical strength is herein disclosed.Type: GrantFiled: November 9, 1981Date of Patent: August 2, 1983Assignees: Japan Atomic Energy Research Institute, Chlorine Engineers Corp., Ltd.Inventors: Isao Ishigaki, Jiro Okamoto, Hiroyuki Harada
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Patent number: 4384941Abstract: A process is, herein, disclosed for electrolysis or pure water in an electrolytic cell which is divided into an anode compartment and a cathode compartment by a cation exchange membrane and in which pure water is supplied to the anode compartment for electrolysis to generate oxygen in the anode compartment and hydrogen in the cathode compartment, said cation exchange membrane being produced by grafting a fluorovinyl sulfonic acid monomer onto a membranous polymeric substrate having a monomer unit of the formula: ##STR1## (wherein X is hydrogen, fluorine or CH.sub.3 ; and Y is hydrogen or fluorine), said cation exchange membrane being used in close contact with an anode and a cathode.Type: GrantFiled: February 3, 1982Date of Patent: May 24, 1983Assignees: Japan Atomic Energy Research Institute, Chlorine Engineers Corp. Ltd.Inventors: Jiro Okamoto, Isao Ishigaki, Hiroyuki Harada
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Patent number: 4317709Abstract: In an apparatus for electrolyzing an aqueous solution, which includes a plurality of electrolytic cells disposed at a plurality of vertically spaced levels and divided by partitions from one another, each of said cells having at least one anode and at least one cathode, said cells including an uppermost cell having an inlet for said solution, and a lowermost cell having an outlet for said solution, the improvement wherein:(a) each cell being separated into at least two horizontally adjacent cell units;(b) the separation adapted to direct the solution flow from the top of one unit into the bottom of the adjacent unit enabling solution flow successively through each unit;(c) a last unit of each cell provided with a passage extending from the top of the last unit to the bottom of the unit at a lower level to direct solution flow downwardly;(d) the anode and cathode being vertical in each unit opposite each other forming a bipolar electrode assembly; and(e) each unit with a gas collecting zone above the anode andType: GrantFiled: June 26, 1980Date of Patent: March 2, 1982Assignee: Chlorine Engineers Corp., Ltd.Inventors: Teruo Ichisaka, Yoshitugu Shinomiya