Abstract: An operation detecting system for a fluid pressure actuator is provided with a first pressure sensor for detecting a first pressure value which is a pressure value in a first pressure acting chamber, a second pressure value which is pressure value in a second pressure acting chamber, and an operation detecting device including a detection program configured to calculate an addition value of the first pressure value and the second pressure value, calculate a time differential value of the addition value, and detect the start time and the stop time of movement of a piston based on a variation in the time differential value over time.

Abstract: A flow path switching valve includes (a) a valve body in a shape of a rectangular parallelepiped having a predetermined surface and an opposite surface, the valve body including an open flow passage having an opening on the predetermined surface, (b) a main body including a plurality of ports having a respective opening on a facing surface thereof facing the predetermined surface, and a plurality of connection flow passages each connected to respective one of the plurality of ports, (c) a pair of plate springs attached to opposite ends of the valve body to support the valve body with a predetermined gap formed between the predetermined surface and the facing surface, the plate springs applying elastic force to the valve body in accordance with an amount of movement of the valve body in a predetermined direction, and (d) an actuator for reciprocating the valve body in the predetermined direction.

Abstract: A micromixer includes: a first channel plate where a first channel and a plurality of first branch channels are each formed by a non-through groove in a front surface, and a first confluence channel is formed by a non-through groove in a rear surface, and includes a first communication channel that communicates the first branch channels with the first confluence channel; a first lid plate that covers the front surface; a second channel plate where a second confluence channel is formed by a non-through groove in the front surface, and a second channel and a plurality of second branch each formed by a non-through groove in the rear surface, and includes a second communication channel that communicates the second branch channels with the second confluence channel; and a second lid plate that covers the rear surface of the second channel plate.

Abstract: The flow path switching valve includes (a) a valve body having an open flow path which opens on a predetermined surface over a predetermined length in a predetermined direction, (b) a main body having a plurality of ports which open on a facing surface facing the predetermined surface at an interval shorter than the predetermined length in the predetermined direction, and a plurality of connection flow paths connected to the plurality of ports, (c) plate springs attached on both ends of the valve body in the predetermined direction so as to support the valve body such that a predetermined gap is formed between the predetermined surface and the facing surface, the plate springs applying elastic force onto the valve body according to a movement amount of the valve body in the predetermined direction, and (d) an actuator which drives the valve body back and forth in the predetermined direction.

Abstract: A coil sheet includes a conductor layer, a thermally resistant organic insulating layer, a thermosetting adhesive layer in a B-stage state, and a base layer, such that the conductor layer and the insulating layer are bonded to the base layer with the adhesive layer. A coil is formed of a laminate sheet including a conductor layer, an insulating layer, and an adhesive layer of the coil sheet which are released from the base layer thereof, wherein the laminate sheet is wound around a specific axis a plurality of times, and the adhesive layer is thermally cured.

Abstract: A temperature control system includes a first temperature adjustment unit storing fluid at a first temperature; a second temperature adjustment unit storing fluid at a second temperature higher than the first temperature; a low-temperature flow path for passing fluid supplied from the first temperature adjustment unit; a high-temperature flow path for passing fluid supplied from the second temperature adjustment unit; a bypass flow path for circulating fluid; a combination flow path for passing fluid from the low-temperature flow path, the high-temperature flow path, and the bypass flow path merged at a merging part; a temperature adjustment part that passes fluid from the combination flow path and cools/heats a member of a semiconductor manufacturing device; and a control device that controls valve positions of variable valves attached to the three flow paths upstream of the merging part and adjusts the flow rate distribution ratio for the three flow paths.

Abstract: A component mounting system includes: a component mounting machine that mounts an electronic component having a predetermined electrode portion on a solder printed on a substrate, the electronic component being fixed to the substrate with a thermosetting adhesive; and an adhesive inspection device. The component mounting machine: sets, with regard to the electronic component to be fixed with the adhesive that cures at a temperature lower than a melting temperature of the solder, a target mounting height along a height direction perpendicular to a face of the substrate on which the adhesive is applied; and mounts the electronic component at the target mounting height. The target mounting height is: an ideal mounting height based on design data; or a height lower than the ideal mounting height by a value that corresponds to a sinking of the electronic component as a result of melting of the solder.

Abstract: A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel.

Abstract: A substrate inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine, and that inspects the solder and a thermosetting adhesive applied on the substrate, the substrate inspection device including: an irradiator that irradiates the solder and the adhesive with light; an imaging device that takes an image of the irradiated solder and the irradiated adhesive; and a processor that: generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders; generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group.

Abstract: A solder printing inspection device that is placed on an upstream side of a component mounting machine that mounts an electronic component on solder that is printed on a substrate by a solder printing machine, and that inspects the solder on the substrate on which a thermosetting adhesive is applied, the solder printing inspection device including: an irradiator that irradiates the solder with light; an imaging device that takes an image of the irradiated solder; a processor that: generates actual solder position information of a solder group that the electronic component is mounted on based on the image, wherein the solder group includes two or more solders; generates, based on design data or manufacturing data, ideal solder inspection reference information indicating a reference inspection position and/or a reference inspection range of the solder included in the solder group; outputs mounting position adjustment information to the component mounting machine.

Abstract: An inspection device for inspecting an inspection object of a PTP sheet including a pocket portion formed in a container film, and a cover film mounted to the container film to close the pocket portion, or a portion of a PTP film forming the PTP sheet, includes: an irradiator that irradiates the inspection object with a predetermined light; an imaging device that takes an inspection image of the irradiated inspection object and a peripheral portion of the inspection object; and a processor that: determines whether the inspection object is defective or non-defective based on inspection image data of the inspection object taken from the inspection image. The inspection image data includes data of respective pixels corresponding to an inspection target area subjected to the defective/non-defective determination, and data of respective pixels corresponding to a non-inspection target area that excludes the inspection target area.

Abstract: An inspection device for inspecting an inspection object portion in a PTP sheet, the inspection device including: an irradiator that irradiates the inspection object portion with light; an imaging device that takes an image of the inspection object portion irradiated with the light; a processor that detects a defect in the inspection object portion from the taken image by using a predetermined luminance threshold value, and determines whether the inspection object portion is non-defective; a verification image generating circuit that generates a verification image in which a virtual defective image is placed in a non-defective image; and a threshold value verifier that causes the processor to determine whether the inspection object portion is non-defective or defective by using the verification image, in place of the image taken by the imaging device, and to verify the luminance threshold value based on a determination result by the processor.

Abstract: A low pass filter including: a coil that includes a band-shaped conductor and is wound a plurality of times around an axis; a capacitor that has one terminal connected to the conductor and the other terminal connected to ground; a cooling plate in contact with an end surface of the wound coil with respect to a direction of the axis; and a ceramic layer that has a flat surface and is disposed on the end surface of the would coil facing the direction of the axis, wherein the ceramic layer contacts the cooling plate, and the cooling plate includes a flow path through which water flows.

Abstract: A three-dimensional measurement device includes: an optical system that splits incident light into two lights and radiates lights to a measurement object and to a reference surface, and recombines the two lights to emit combined light; a first irradiator that emits first light including first polarized light and entering a first surface; a second irradiator that emits second light including second polarized light and entering a second surface; a first imaging system to which the first output light enters wherein the first output light is emitted from the first surface when the first light enters the first surface; a second imaging system to which the second output light enters wherein the second output light is emitted from the second surface when the second light enters the second surface; and an image processor that performs three-dimensional measurement based on interference fringe images obtained by the first and second imaging systems.

Abstract: A board inspection apparatus is disclosed, which includes a surface-side irradiator irradiating a surface of each inspection area of a board, a surface-side camera taking a surface-side image of the surface, a rear face-side irradiator irradiating a rear face of each inspection area, a rear face-side camera taking a rear face-side image of the rear face, and a controller moving the surface-side irradiator and the surface-side camera to a position corresponding to the surface of each inspection area, moving the rear face-side irradiator and the rear face-side camera to a position corresponding to the rear face of each inspection area, and inspecting the surface and the rear face of each inspection area based on the surface-side image and the rear face-side image, respectively.

Abstract: An electromagnetic actuator includes a pair of plate springs each of which is configured to produce elastic force in a predetermined direction in accordance with an amount of deformation; a movable member supported by the pair of plate springs to be movable in the predetermined direction; and a drive unit which is configured to drive the movable member in the predetermined direction in a non-contact state by means of electromagnetic force to be applied between the pair of plate springs in the predetermined direction.

Abstract: A substrate position detection device includes: an irradiator that irradiates a predetermined range of a substrate with a predetermined light; an imager that takes an image of the predetermined range of the substrate irradiated with the predetermined light; a moving mechanism that causes a relative movement of the imager and the substrate; and a controller that: detects a position of the substrate by sequentially executing to a plurality of recognition objects on the substrate: a moving process of relatively moving the imager to a position corresponding to a predetermined recognition object among the plurality of recognition objects on the substrate; an imaging process of taking an image of the predetermined recognition object under a predetermined imaging condition; and a recognition process of recognizing the predetermined recognition object based on image data obtained by the imaging process.

Abstract: A gas-pressure-driven apparatus includes a main body having a working chamber, a movable member moving relative to the main body with a pressure of the working chamber, a pressure sensor for detecting the pressure, a flow rate sensor for detecting the flow rate of the working gas. A method for controlling the apparatus includes calculating a pressure change amount from the detected pressure and an integrated flow rate from the detected flow rate when the pressure is changed in a state in which the volume of the working chamber cannot be changed, calculating an initial volume of the working chamber from the pressure change amount and the integrated flow rate, and calculating a post-change volume of the working chamber from the integrated flow rate and the initial volume after creation of a state in which the volume of the working chamber can be changed from the initial volume.

Abstract: A liquid supply system includes a pump having a fluctuating member separating pump and working chambers thereof, a supply and discharge section which supplies a working gas to the working chamber and discharges the working gas from the working chamber, a suction valve, a discharge valve, a pressure sensor for detecting the pressure within a space including the working chamber, a flow rate sensor for detecting the flow rate of the working gas, and a control section. The control section closes the discharge valve and opens the suction valve, calculates a change in the volume of the working chamber from the detected flow rate, controls the supply and discharge section such that the volume change becomes zero, and uses, as an estimated suction-side hydraulic head pressure of the liquid, the pressure detected in a state in which the volume change has becomes zero.

Abstract: A board inspection apparatus is disclosed, which includes one surface-side irradiator that irradiates a first area on a surface side of a board with first light, a surface-side camera that takes an image of the first area, one rear face-side irradiator that irradiates a second area on a rear face side of the board with second light, a rear face-side camera that takes an image of the second area; and a controller that inspects the first area based on image data obtained from the surface-side camera and the second area based on image data obtained from the rear face-side camera.