Abstract: A valve unit includes a rotary valve having a predetermined clearance between an inner surface of a main body and a valve element. The magnet coupling includes eight outer peripheral magnets and eight inner peripheral magnets having N-poles and S-poles each on an outer or inner peripheral side. The outer peripheral magnets are disposed such that the N-poles and the S-poles are disposed alternately in a circumferential direction and such that a distance between the central axis and an outer peripheral surface of the outer peripheral magnets is between 90% and 100% of a distance between the central axis and an outer surface of the main body closest to the central axis in a direction perpendicular to the central axis. The inner peripheral magnets are disposed opposite to the outer peripheral magnets such that the N-poles and the S-poles are disposed alternately in the circumferential direction.

Abstract: A valve stem is disposed so as to be capable of moving linearly reciprocally in a case connected to a valve section for opening and closing a flow channel. The valve stem is urged toward the valve section by a spring. A manual lever is rotatably supported on the upper end of the valve stem. The valve stem is divided into a first rod part connected to the manual lever and a second rod part positioned on the valve section side, a connecting pin fixed to the first rod part is inserted through an elongated elongated hole formed in the second rod part along an axial direction, and the first rod part is able to move in the range of the elongated hole relative to the second rod section.

Abstract: The present invention provides a fluid device coupler and a fluid device coupling structure which can achieve satisfactory workability while saving space without reducing sealing performance. The fluid device coupler 10 according to the present invention is to couple a connecting portion 55 of opposed fluid devices 50, and comprises a coupling base 20 having a depressed part 21 at least partially curved in an arc shape, a first end edge 22 and a second end edge 23 continuous with an inner surface of the depressed part, and an opening portion 24 formed between the first end edge and the second end edge to allow the insertion of the connecting portion of the fluid devices, and a blockage member 30 protrudable from the first end edge side toward the second end edge side and retractable from the second end edge side toward the first end edge side, the blockage member being configured to shut the opening portion of the coupler in the state protruding from the first end edge side.

Abstract: A flow rate measurement unit includes: an inflow passage; an outflow passage; a screening passage including an inlet and outlet; an injector that injects a substance into the inflow passage; a first detector that irradiates the inlet with the light having the predetermined wavelength, and detects a first intensity; a second detector that irradiates the outlet with the light having the predetermined wavelength, and detects a second intensity; and a first controller that calculates a flow rate of the liquid by dividing a predetermined volume of the screening passage from the inlet to the outlet by a time difference obtained by subtracting a first time from a second time. The first time is taken from when the substance is injected until the first intensity reaches a peak, and the second time is taken from when the substance is injected until the second intensity reaches a peak.

Abstract: A pressure control valve for opening/closing a circular outlet port that connects a vacuum chamber used in a semiconductor manufacturing apparatus and an exhaust pump for evacuating the vacuum chamber, the pressure control valve including a valve unit that contacts and separates from a valve seat provided radially outward from the outlet port, wherein the valve unit includes: a hollow portion located between an upper surface of the valve unit on the vacuum chamber side and a lower surface of the valve unit on the exhaust pump side; a first rubber heater covering a first rear surface of the upper surface in the hollow portion; and a second rubber heater covering a second rear surface of the lower surface in the hollow portion.

Abstract: An inspection device includes: an illumination device that irradiates the inspection object with light; a rotation unit that rotates the inspection object; a fiber optical plate that holds optical fibers in parallel and has a light incident surface and a light emission surface at which outlets of the optical fibers are disposed; an imaging unit that includes sensor elements arranged in a row and respectively corresponding to the outlets, and takes an image of the inspection object; a control device that determines whether a quality of the inspection object is good or poor based on the image; and an oblique ray attenuation body that is disposed between the light emission surface and the imaging unit, and includes attenuation function elements arrayed in parallel and each having a straight cylindrical shape that surrounds an optical path between each of the outlets and each of the sensor elements.

Abstract: A pipe welding structure includes: a channel plate that includes a fluid channel; through-hole plates stacked on the channel plate, each of the through-hole plates having through holes that communicate with each other and forming a combined through hole; and a pipe inserted into the combined through hole and welded to one of the through-hole plates disposed farthest from the channel plate, the pipe internally including a pipe channel that connects to the fluid channel.

Abstract: A manufacturing method is provided for a fluid control apparatus, in which the flow of a fluid is controlled by bringing a diaphragm valve element into contact with or separating the diaphragm valve element from a valve seat. The diaphragm valve element may be a joint body that is a combination of (a) a seat member that makes contact with the valve seat and (b) a body member. The joint body is formed by machining a material joint body obtained by welding together a seat-member material which is a material for the seat member and a body member material which is a material for the body member. The welding is performed on contact faces of the seat-member material and the body-member material of the material joint body in a range wider than contact faces of the seat member and the body member of the joint body.

Abstract: An arm-type assistance device includes a pillar, a first support portion, a first arm, a second support portion, a second arm, a third arm, an operating unit, and a cargo holding unit. The first arm includes a first member, a first air cylinder, and a second member. The first support portion, the first member, the second support portion, and the second member form a parallel linkage. The parallel linkage is assisted by the first air cylinder. The arm-type assistance device further includes a controller that is configured to control pressure of first air cylinder. The third arm includes a second air cylinder. The controller controls pressure of the second air cylinder. A dimension in an axial direction of the second arm is greater than a dimension in an axial direction of the first arm.

Abstract: A diaphragm to be used in a chemical flow control device that controls a flow of a chemical in a semiconductor manufacturing process and to which a pressure of a working gas is applied. The diaphragm includes a membrane portion and a permeation reduction layer. The membrane portion is made of fluoroplastic that is resistant to the chemical. The permeation reduction layer is less likely to pass the working gas in comparison to the membrane portion and disposed on a surface of the membrane portion to which the pressure of the working gas is applied.

Abstract: An electromagnetic valve manifold includes an electromagnetic valve and a manifold base. The electromagnetic valve includes a manual shaft. The manual shaft is configured to be manually operated to be switched between a first switching position, in which the manual shaft allows movement of the valve member relative to the valve hole, and a second switching position in which the manual shaft restricts movement of the valve member relative to the valve hole. The manual shaft includes a projection that is projected into and retracted from the valve hole. The valve member includes at least one recess in an outer surface of the valve member. The manual shaft is configured such that, in a state in which the manual shaft is located in the second switching position, the projection is projected into the valve hole and engaged with the recess, so as to restrict movement of the valve member.

Abstract: A method of producing a tin-based perovskite layer includes: preparing a first solution by dissolving a tin-based perovskite compound in a solvent that does not contain dimethyl sulfoxide (DMSO); after the preparing of the first solution, mixing the DMSO with the first solution; and applying the first solution mixed with the DMSO to a base. The mixing is performed a predetermined time before the applying of the first solution mixed with the DMSO to the base.

Abstract: A board testing apparatus including: an image obtaining device that obtains an image of an inspection object area in a printed circuit board, the inspection object area including a component mounting area; and a control device that detects a foreign substance in the inspection object area based on the image, determines that the foreign substance is defective upon detecting that the foreign substance overlaps the component mounting area or is adjacent to the component mounting area when a lump part of the foreign substance has an area greater than an area threshold value or a length greater than a length threshold value, and determines that the foreign substance is non-defective upon detecting that the foreign substance neither overlaps the component mounting area nor is adjacent to the component mounting area even when the lump part has the area or the length.

Abstract: An apparatus for hair inspection includes: an inspection unit that obtains, with a plurality of color lights, a color image of an inspection object board that is the printed circuit board as an inspection target; and a control device that: obtains a hue image of the inspection object board from the color image; obtains a saturation image of the inspection object board from the color image; detects first hair including at least one of brown hair and blond hair in at least the resist area of the hue image based on a hue difference of the first hair relative to the resist area; and detects second hair including at least one of black hair and grey hair in at least the resist area of the saturation image based on a saturation difference of the second hair relative to the resist area.

Abstract: An inspection device includes: an illumination device that irradiates standard and inspection objects with near-infrared light; a spectroscope that disperses reflected light; an imaging device that takes images of first and second optical spectrums of the reflected light dispersed by the spectroscope to obtain standard spectroscopic image data and inspection spectroscopic image data; and a processor. The processor executes a predetermined arithmetic operation with regard to at least one of (i) each pixel row of the standard spectroscopic image data perpendicular to a wavelength dispersion direction and (ii) each pixel column of the standard spectroscopic image data parallel to the wavelength dispersion direction. The processor, based on luminance values of pixels belonging to the pixel row or column, determines a characteristic of the pixel row and grasps a wavelength sensitivity characteristic of the imaging element under the near-infrared light emitted from the illumination device.

Abstract: An inspection device includes: an irradiator that radiates, before content is placed into the pocket, ultraviolet light toward one face of the container film; imaging devices that take images of the container film from another face side of the container film; and a processor that determines, based on the images, whether the pocket includes a pinhole, at least two of the imaging devices being each disposed on respective sides of the container film in a width direction such that the pocket is placed between the two imaging devices, and while the container film is being conveyed along a conveyance path, the two imaging devices take images of the pocket at a timing when the pocket is located at an upstream-side position, a middle-side position, and a downstream-side position of the conveyance path.

Abstract: An inspection device performs an inspection in manufacture of a Press Through Package (PTP) sheet, and includes: an illumination device; a spectroscope that disperses reflected light from the PTP sheet; an imaging device that takes an image of an optical spectrum of the disperses light and acquires spectroscopic image data; and a controller. Before the inspection is performed, the controller grasps disturbance data that is one of either spectral data of a predetermined content placed in the pocket portion and attributed to ambient light, or approximate spectral data approximate to the spectral data of the predetermined content attributed to the ambient light, and corrects either spectral data of the content as an inspection object obtained based on the spectroscopic image data acquired by the imaging device, or a reference value used for determining the spectral data of the content as the inspection object.

Abstract: A temperature control system includes a first chiller, a first tank, a first tank bypass channel, a first mixing valve that adjusts a mixing ratio of a fluid flowing from the first tank into the first chiller to a fluid flowing from the first tank bypass channel into the first chiller, a second chiller, a second tank, a second tank bypass channel, a second mixing valve that adjusts a mixing ratio of a fluid flowing from the second tank into the second chiller to a fluid flowing from the second tank bypass channel into the second chiller, a first supply valve, a first return valve, a first on-off value, a second supply valve, a second return valve, a second on-off valve, and a controller that controls the valves.

Abstract: A butterfly valve includes a purge gas flow path supplying a purge gas for preventing inflow of a control fluid into a magnetic fluid sealing portion from a flow path through an insertion hole. The purge gas flow path is provided with an opening and closing valve for opening and closing the purge gas flow path and a pressure gauge for measuring a pressure value in the purge gas flow path, in the stated order from the upstream side. The purge gas flow path is connected to a portion between the magnetic fluid sealing portion and the flow path of the butterfly valve on the downstream side of the pressure gauge, and communicates with the flow path through the insertion hole. The butterfly valve further includes a control device that controls at least the opening and closing valve. The control device is provided with a monitoring program for monitoring a pressure value.

Abstract: An electromagnetic valve manifold includes an electromagnetic valve including a discharge port, a manifold base including a discharge passage that is connected to the discharge port, and a check valve. The check valve includes a valve member, a valve housing including a valve seat, and an urging member. The valve housing includes a valve chamber that accommodates the valve member, a peripheral wall that defines the valve chamber, a valve hole that connects the valve chamber to the discharge port, and a discharge opening that connects the valve chamber to the discharge passage. The check valve is disposed in the discharge passage. The discharge opening is formed in the peripheral wall, at least a part of the discharge opening overlapping with the valve seat in a direction orthogonal to a moving direction of the valve member.