Abstract: A flux application state inspection device includes: an illuminator that irradiates a circuit board on which an electrode is disposed with visible light at a predetermined incident angle; an imaging device that is disposed above the circuit board such that an optical axis of the imaging device is orthogonal to the circuit board, and images light radiated from the illuminator to the circuit board and reflected from the circuit board to obtain a luminance image that indicates: the electrode as a dark portion; the base material portion as a bright portion having a higher luminance value than a luminance value of the dark portion; and a portion of the electrode on which the flux is disposed as an intermediate luminance portion having an intermediate luminance value between the luminance value of the dark portion and the luminance value of the bright portion.

Abstract: A diaphragm member is formed in a spherical cap shape that is centered on an extension line of a central axis of an operation rod and bulges toward the operation rod. The diaphragm member is held, at its vertex, from both sides in a direction parallel to the central axis, between a first holding piece contacting the diaphragm member from the operation rod side and a second holding piece contacting the diaphragm member from the valve element side. The first and second holding pieces each has a circular shape positioned coaxially with the operation rod. The diameter of the first holding piece is larger than the diameter of the second holding piece. A surface of the first holding piece facing the diaphragm member is a convex spherical surface bulging toward the diaphragm member and having the center on the central axis of the operation rod.

Abstract: An inspection device includes: an illumination device that irradiates the inspection object with light; a rotation unit that rotates the inspection object; a fiber optical plate that holds optical fibers in parallel and has a light incident surface and a light emission surface at which outlets of the optical fibers are disposed; an imaging unit that includes sensor elements arranged in a row and respectively corresponding to the outlets, and takes an image of the inspection object; a control device that determines whether a quality of the inspection object is good or poor based on the image; and an oblique ray attenuation body that is disposed between the light emission surface and the imaging unit, and includes attenuation function elements arrayed in parallel and each having a straight cylindrical shape that surrounds an optical path between each of the outlets and each of the sensor elements.

Abstract: A valve unit includes a rotary valve having a predetermined clearance between an inner surface of a main body and a valve element. The magnet coupling includes eight outer peripheral magnets and eight inner peripheral magnets having N-poles and S-poles each on an outer or inner peripheral side. The outer peripheral magnets are disposed such that the N-poles and the S-poles are disposed alternately in a circumferential direction and such that a distance between the central axis and an outer peripheral surface of the outer peripheral magnets is between 90% and 100% of a distance between the central axis and an outer surface of the main body closest to the central axis in a direction perpendicular to the central axis. The inner peripheral magnets are disposed opposite to the outer peripheral magnets such that the N-poles and the S-poles are disposed alternately in the circumferential direction.

Abstract: A flux application state inspection device that inspects a transparent or translucent flux applied to an electrode of a circuit board, including: a first illuminator that emits first irradiation light that is ultraviolet light or visible light at a first incident angle not less than 0 degree and not greater than 30 degrees; a second illuminator that emits second irradiation light that is visible light having red or green color, at a larger incident angle than the first incident angle; an imaging device that is disposed above the circuit board such that an optical axis of the imaging device is orthogonal to the circuit board, takes a first image of light radiated from the first illuminator and reflected from the circuit board, and takes a second image of light radiated from the second illuminator and reflected from the circuit board.

Abstract: A diaphragm to be used in a chemical flow control device that controls a flow of a chemical in a semiconductor manufacturing process and to which a pressure of a working gas is applied. The diaphragm includes a membrane portion and a permeation reduction layer. The membrane portion is made of fluoroplastic that is resistant to the chemical. The permeation reduction layer is less likely to pass the working gas in comparison to the membrane portion and disposed on a surface of the membrane portion to which the pressure of the working gas is applied.

Abstract: A board testing apparatus including: an image obtaining device that obtains an image of an inspection object area in a printed circuit board, the inspection object area including a component mounting area; and a control device that detects a foreign substance in the inspection object area based on the image, determines that the foreign substance is defective upon detecting that the foreign substance overlaps the component mounting area or is adjacent to the component mounting area when a lump part of the foreign substance has an area greater than an area threshold value or a length greater than a length threshold value, and determines that the foreign substance is non-defective upon detecting that the foreign substance neither overlaps the component mounting area nor is adjacent to the component mounting area even when the lump part has the area or the length.

Abstract: A temperature regulating apparatus includes: a heating section configured to produce a heating liquid; a cooling section configured to produce a cooling liquid; a heating-liquid delivery pipe for delivering the heating liquid to the semiconductor-device manufacturing equipment; a cooling-liquid delivery pipe for delivering the cooling liquid to the semiconductor-device manufacturing equipment; a heating-side return pipe for returning a liquid mixture of the heating liquid and the cooling liquid that have passed through the semiconductor-device manufacturing equipment to the heating section; a cooling-side return pipe for returning the liquid mixture that has passed through the semiconductor-device manufacturing equipment to the cooling section; and at least one of a heating-side heat exchanger configured to exchange heat between the heating liquid and the liquid mixture and a cooling-side heat exchanger configured to exchange heat between the cooling liquid and the liquid mixture.

Abstract: In a non-sealed butterfly valve, a butterfly valve element includes maximum outer diameter portions facing the inner peripheral surface of a flow passage when the butterfly valve element is in a valve-closed position and first chamfered portions reducing the diameter of the butterfly valve element from the maximum outer diameter portions in a direction opposite a rotation direction of the butterfly valve element rotating from the valve-closed position to a valve-open position. The maximum outer diameter portions are provided point-symmetrically about the axis of a rotary shaft, and the first chamfered portions are provided point-symmetrically about the axis of the rotary shaft.

Abstract: A flux application state inspection device includes an illumination device that irradiates, with ultraviolet light, a circuit board having electrodes on which a flux capable of absorbing the ultraviolet light is applied; an imaging device that takes an image of the ultraviolet light radiated to the circuit board; and a central processing unit (CPU) that: sets, with a reference portion of the circuit board as a reference, an inspection area on the circuit board for each component to be mounted on the circuit board, wherein the inspection area corresponds to the component and includes two or more of the electrodes on which the component is mounted, and detects whether an application state of the flux is defective or non-defective, based on the image obtained by the imaging device while the inspection area is irradiated with the ultraviolet light by the illumination device.

Abstract: In a regulator, a receiving portion of a diaphragm member, which receiving portion receives a tip surface of a shaft portion of a valve element, includes, in a part thereof facing the tip surface, a concave spherical surface formed with a first radius, centered on a central axis of the shaft portion. In this regulator, the first radius is a value equal to or greater than a value obtained by subtracting 20% of the value of a diameter of the shaft portion from the value of the diameter; and the part of the tip surface that faces the concave spherical surface is a convex spherical surface formed with a second radius obtained by subtracting 2 to 5% of the value of the first radius from the value of the first radius.

Abstract: A three-dimensional measurement device includes: an irradiator that emits a predetermined light; an optical system that splits the predetermined light into two lights, irradiates a measurement object with a measurement light and irradiates a reference plane with a reference light, and emits a combined light; an imaging device that takes an image of the combined light and obtains an interference fringe image; an objective lens for the measurement light that directs the measurement light toward the measurement object; an objective lens for the reference light that directs the reference light toward the reference plane; an imaging lens that forms an image of the combined light on the imaging device; and a control device that executes three-dimensional measurement of a measurement area on the measurement object based on the interference fringe image.

Abstract: A needle valve includes a linear stepping motor that has a shaft and performs a linear motion of the shaft, an annular valve seat whose axis is parallel to the direction of the linear motion, and a needle valve element that performs a forward/backward motion in the same direction as the linear motion of the shaft with respect to the annular valve seat in accordance with the linear motion of the shaft. The shaft and the needle valve element are connected to each other by engagement of a male screw part of the shaft and a female screw part of the needle valve element, with a degree of freedom in a radial direction orthogonal to the axis of the male screw part.

Abstract: An apparatus for hair inspection includes: an inspection unit that obtains, with a plurality of color lights, a color image of an inspection object board that is the printed circuit board as an inspection target; and a control device that: obtains a hue image of the inspection object board from the color image; obtains a saturation image of the inspection object board from the color image; detects first hair including at least one of brown hair and blond hair in at least the resist area of the hue image based on a hue difference of the first hair relative to the resist area; and detects second hair including at least one of black hair and grey hair in at least the resist area of the saturation image based on a saturation difference of the second hair relative to the resist area.

Abstract: A vacuum open-close valve includes a drive unit for driving a valve element based on an opening-degree command value. The drive unit includes a drive shaft connected to the valve element, a piston connected to the drive shaft at an opposite end from the valve element, a cylinder provided with a piston chamber housing the piston, and a bellofram that is retained by the piston and partitions the piston chamber. A controller is provided with an abnormality detection program configured to calculate an opening-degree difference between an opening-degree command value outputted to the vacuum open-close valve and an actual opening degree of the valve element driven by the opening-degree command value, and determine that the bellofram is damaged when the opening-degree difference is a first predetermined threshold value or more.

Abstract: A fluid control valve includes a pressing member, a diaphragm member, and a valve seat. The pressing member presses and deforms the diaphragm member into contact with the valve seat. The valve seat includes a first annular valve seat made of fluorine resin and a second annular valve seat made of heat-resistant resin, which are arranged concentrically adjacent to each other. The heat-resistant resin has a higher deflection temperature under load at 1.82 MPa than the fluorine resin, measured according to ASTM D-648.

Abstract: In a gas leak detection apparatus, a sealing switching valve, a releasing switching valve, and a pressure sensor are placed in this order from an upstream side in a pipe, which are connected to a main unit. An orifice is provided at an exhaust port of the releasing switching valve. The main unit measures a pipe volume based on an in-sealing pressure drop amount and an in-releasing pressure drop amount, measured by switching a pipe state using the switching valves to a gas supply state, a pipe sealing state, and a pipe pressure releasing state, and a leak amount from the orifice, estimated based on pipe pressure. The main unit measures a leak amount based on the measured pipe volume and an in-detecting pressure drop amount measured by switching the pipe state using the switching valves to the gas supply state and the pipe sealing state.

Abstract: A temperature control system includes a first chiller, a first tank, a first tank bypass channel, a first mixing valve that adjusts a mixing ratio of a fluid flowing from the first tank into the first chiller to a fluid flowing from the first tank bypass channel into the first chiller, a second chiller, a second tank, a second tank bypass channel, a second mixing valve that adjusts a mixing ratio of a fluid flowing from the second tank into the second chiller to a fluid flowing from the second tank bypass channel into the second chiller, a first supply valve, a first return valve, a first on-off value, a second supply valve, a second return valve, a second on-off valve, and a controller that controls the valves.

Abstract: A fluid control valve includes a diaphragm assembly including a shaft member joined to an end of a drive shaft on the side near an annular valve seat, a membrane member made of Perfluoro alkoxy Alkane and located in surface contact with the end face of the shaft member on the opposite side to the end joined to the drive shaft, and a weld part formed by laser welding at the interface between the shaft member and the membrane member to join the shaft member and the membrane member. The shaft member is made of fluorine resin with carbon-based additive dispersed.

Abstract: The present invention provides a fluid device coupler which can achieve satisfactory workability while saving space without reducing sealing performance, wherein the fluid device coupler comprises a coupling base having a depressed part at least partially curved in an arc shape, a first end edge side and a second end edge side continuous with an inner surface of the depressed part, and an opening portion formed between the first end edge side and the second end edge side a blockage member protrudable from the first end edge side toward the second end edge side and retractable in a circumferential direction from the second end edge side toward the first end edge side, and a sliding structure configured to slidably move the blockage member toward the second edge side of the coupling base without changing a distance radially from the coupling base.