Abstract: A fluid control valve includes a pressing member, a diaphragm member, and a valve seat. The pressing member presses and deforms the diaphragm member into contact with the valve seat. The valve seat includes a first annular valve seat made of fluorine resin and a second annular valve seat made of heat-resistant resin, which are arranged concentrically adjacent to each other. The heat-resistant resin has a higher deflection temperature under load at 1.82 MPa than the fluorine resin, measured according to ASTM D-648.

Abstract: A heat exchange system is arranged between a chiller device and a temperature control member, and is provided with: supply line for supplying a refrigerant from the chiller device to the temperature control member; a return line for returning the refrigerant from the temperature control member to the chiller device; a bypass line for bypassing the supply line and the return line; a latent heat storage member arranged closer to the chiller device relative to a first connection point connecting the return line and the bypass line; and a flow distribution unit that is arranged at a second connection point connecting the outgoing line and the bypass line, and that is for adjusting a ratio for distributing refrigerant to the temperature control member and the bypass line.

Abstract: A visual inspection assistance device includes: a conveying device that conveys tablets as an object of a visual inspection; an imaging device that takes an image of the tablets that are conveyed by the conveying device; a display device; a central processing unit (CPU) that: determines, based on image data obtained by the imaging device, whether one or more of the tablets are defective, and displays, in the display device, information identifying the one or more of the tablets that have been determined to be defective; and a conveying control device that temporarily stops the conveying device from conveying the tablets in response to the CPU determining that the one or more of the tablets are detective.

Abstract: A butterfly valve includes a purge gas flow path supplying a purge gas for preventing inflow of a control fluid into a magnetic fluid sealing portion from a flow path through an insertion hole. The purge gas flow path is provided with an opening and closing valve for opening and closing the purge gas flow path and a pressure gauge for measuring a pressure value in the purge gas flow path, in the stated order from the upstream side. The purge gas flow path is connected to a portion between the magnetic fluid sealing portion and the flow path of the butterfly valve on the downstream side of the pressure gauge, and communicates with the flow path through the insertion hole. The butterfly valve further includes a control device that controls at least the opening and closing valve. The control device is provided with a monitoring program for monitoring a pressure value.

Abstract: A four-way valve includes a body and a valve component. The body includes a valve chamber and first to fourth communication channels which communicate with the valve chamber at positions arranged in sequence in a predefined rotational direction and cause the valve chamber to communicate with an outside. The valve component is rotatable in the predefined rotational direction and switches the four-way valve to be in at least one of: a first state in which the first and second communication channels communicate with the first region and the third and fourth communication channels communicate with the third region; and a second state in which the second communication channel communicates with the first region, the third communication channel communicates with the second region, and the first and fourth communication channels communicate with the third region.

Abstract: Aboard inspection device includes: an imaging device that takes an image of an area on the board where the adhesive is applied; a CPU that specifies, by a first procedure, a center portion area of the adhesive in the image; specifies, by a second procedure, a foot portion area of the adhesive around the center portion area in the image; specifies an entire area of the adhesive based on the center portion area and the foot portion area; and based on the entire area of the adhesive, determines whether a quality of the adhesive is good or poor. The adhesive has a red color and is applied on a green resist area, and when specifying the foot portion area, the CPU extracts, an area of lower saturation than a predetermined saturation reference value from a saturation image based on the image.

Abstract: An operation detecting system for a fluid pressure actuator is provided with a first pressure sensor for detecting a first pressure value which is a pressure value in a first pressure acting chamber, a second pressure value which is pressure value in a second pressure acting chamber, and an operation detecting device including a detection program configured to calculate an addition value of the first pressure value and the second pressure value, calculate a time differential value of the addition value, and detect the start time and the stop time of movement of a piston based on a variation in the time differential value over time.

Abstract: An inspection device inspects a formation state of a pocket portion formed in a container film of a blister pack and includes: an illumination device that irradiates a container film including the pocket portion with a predetermined electromagnetic wave; an imaging device that takes an image of at least the electromagnetic wave transmitted through a bottom portion of the pocket portion and obtains image data; a control device that extracts, based on the image data, shading pattern data corresponding to a shading pattern occurring in the bottom portion of the pocket portion by irradiation with the electromagnetic wave; a storage that stores a neural network and a model, the model being generated by learning of the neural network using, as learning data, only shading pattern data of a pocket portion without any formation defect among the extracted shading pattern data.

Abstract: A valve unit includes a rotary valve having a predetermined clearance between an inner surface of a main body and a valve element. The magnet coupling includes eight outer peripheral magnets and eight inner peripheral magnets having N-poles and S-poles each on an outer or inner peripheral side. The outer peripheral magnets are disposed such that the N-poles and the S-poles are disposed alternately in a circumferential direction and such that a distance between the central axis and an outer peripheral surface of the outer peripheral magnets is between 90% and 100% of a distance between the central axis and an outer surface of the main body closest to the central axis in a direction perpendicular to the central axis. The inner peripheral magnets are disposed opposite to the outer peripheral magnets such that the N-poles and the S-poles are disposed alternately in the circumferential direction.

Abstract: A valve stem is disposed so as to be capable of moving linearly reciprocally in a case connected to a valve section for opening and closing a flow channel. The valve stem is urged toward the valve section by a spring. A manual lever is rotatably supported on the upper end of the valve stem. The valve stem is divided into a first rod part connected to the manual lever and a second rod part positioned on the valve section side, a connecting pin fixed to the first rod part is inserted through an elongated elongated hole formed in the second rod part along an axial direction, and the first rod part is able to move in the range of the elongated hole relative to the second rod section.

Abstract: The present invention provides a fluid device coupler and a fluid device coupling structure which can achieve satisfactory workability while saving space without reducing sealing performance. The fluid device coupler 10 according to the present invention is to couple a connecting portion 55 of opposed fluid devices 50, and comprises a coupling base 20 having a depressed part 21 at least partially curved in an arc shape, a first end edge 22 and a second end edge 23 continuous with an inner surface of the depressed part, and an opening portion 24 formed between the first end edge and the second end edge to allow the insertion of the connecting portion of the fluid devices, and a blockage member 30 protrudable from the first end edge side toward the second end edge side and retractable from the second end edge side toward the first end edge side, the blockage member being configured to shut the opening portion of the coupler in the state protruding from the first end edge side.

Abstract: A flow rate measurement unit includes: an inflow passage; an outflow passage; a screening passage including an inlet and outlet; an injector that injects a substance into the inflow passage; a first detector that irradiates the inlet with the light having the predetermined wavelength, and detects a first intensity; a second detector that irradiates the outlet with the light having the predetermined wavelength, and detects a second intensity; and a first controller that calculates a flow rate of the liquid by dividing a predetermined volume of the screening passage from the inlet to the outlet by a time difference obtained by subtracting a first time from a second time. The first time is taken from when the substance is injected until the first intensity reaches a peak, and the second time is taken from when the substance is injected until the second intensity reaches a peak.

Abstract: A pressure control valve for opening/closing a circular outlet port that connects a vacuum chamber used in a semiconductor manufacturing apparatus and an exhaust pump for evacuating the vacuum chamber, the pressure control valve including a valve unit that contacts and separates from a valve seat provided radially outward from the outlet port, wherein the valve unit includes: a hollow portion located between an upper surface of the valve unit on the vacuum chamber side and a lower surface of the valve unit on the exhaust pump side; a first rubber heater covering a first rear surface of the upper surface in the hollow portion; and a second rubber heater covering a second rear surface of the lower surface in the hollow portion.

Abstract: An inspection device includes: an illumination device that irradiates the inspection object with light; a rotation unit that rotates the inspection object; a fiber optical plate that holds optical fibers in parallel and has a light incident surface and a light emission surface at which outlets of the optical fibers are disposed; an imaging unit that includes sensor elements arranged in a row and respectively corresponding to the outlets, and takes an image of the inspection object; a control device that determines whether a quality of the inspection object is good or poor based on the image; and an oblique ray attenuation body that is disposed between the light emission surface and the imaging unit, and includes attenuation function elements arrayed in parallel and each having a straight cylindrical shape that surrounds an optical path between each of the outlets and each of the sensor elements.

Abstract: A pipe welding structure includes: a channel plate that includes a fluid channel; through-hole plates stacked on the channel plate, each of the through-hole plates having through holes that communicate with each other and forming a combined through hole; and a pipe inserted into the combined through hole and welded to one of the through-hole plates disposed farthest from the channel plate, the pipe internally including a pipe channel that connects to the fluid channel.

Abstract: A manufacturing method is provided for a fluid control apparatus, in which the flow of a fluid is controlled by bringing a diaphragm valve element into contact with or separating the diaphragm valve element from a valve seat. The diaphragm valve element may be a joint body that is a combination of (a) a seat member that makes contact with the valve seat and (b) a body member. The joint body is formed by machining a material joint body obtained by welding together a seat-member material which is a material for the seat member and a body member material which is a material for the body member. The welding is performed on contact faces of the seat-member material and the body-member material of the material joint body in a range wider than contact faces of the seat member and the body member of the joint body.

Abstract: An arm-type assistance device includes a pillar, a first support portion, a first arm, a second support portion, a second arm, a third arm, an operating unit, and a cargo holding unit. The first arm includes a first member, a first air cylinder, and a second member. The first support portion, the first member, the second support portion, and the second member form a parallel linkage. The parallel linkage is assisted by the first air cylinder. The arm-type assistance device further includes a controller that is configured to control pressure of first air cylinder. The third arm includes a second air cylinder. The controller controls pressure of the second air cylinder. A dimension in an axial direction of the second arm is greater than a dimension in an axial direction of the first arm.

Abstract: A diaphragm to be used in a chemical flow control device that controls a flow of a chemical in a semiconductor manufacturing process and to which a pressure of a working gas is applied. The diaphragm includes a membrane portion and a permeation reduction layer. The membrane portion is made of fluoroplastic that is resistant to the chemical. The permeation reduction layer is less likely to pass the working gas in comparison to the membrane portion and disposed on a surface of the membrane portion to which the pressure of the working gas is applied.

Abstract: An electromagnetic valve manifold includes an electromagnetic valve and a manifold base. The electromagnetic valve includes a manual shaft. The manual shaft is configured to be manually operated to be switched between a first switching position, in which the manual shaft allows movement of the valve member relative to the valve hole, and a second switching position in which the manual shaft restricts movement of the valve member relative to the valve hole. The manual shaft includes a projection that is projected into and retracted from the valve hole. The valve member includes at least one recess in an outer surface of the valve member. The manual shaft is configured such that, in a state in which the manual shaft is located in the second switching position, the projection is projected into the valve hole and engaged with the recess, so as to restrict movement of the valve member.