Abstract: A high-voltage generator device is provided comprising an electric field shaper for shaping an electric field, in particular for a high-voltage generator. The electric field shaper comprising at least one field shaping unit which has a field shaping element. The field shaping element comprises a non-conductive body, in particular a plastic body, and an electrically conductive coating that is arranged on the non-conductive body.

Abstract: A radio-frequency (RF) power variable capacitor capable of operating at, at least, 50 watts in the MHz range. The capacitor has a composite HDK-NDK ceramic dielectric. The HDK (high dielectric constant) component comprises an active matrix of barium strontium titanate, for example. Acoustic resonances are reduced or eliminated by the addition of a metal or metalloid oxide such as magnesium borate (NDK—low dielectric constant), which acts as an acoustic resonance reduction agent (ARRA) in the RF power domain. The acoustic resonances which previously occurred under bias voltage 500 V or 1100 V in prior art RF power variable capacitors are eliminated by the addition of the ARRA.

Abstract: A component part in a vacuum area of an X-ray tube with an opening through which an electron beam is guided. The component part includes a base body made of a first material, wherein the first material is a metal. Arranged on a surface forming the opening is a second material having an atomic number which is smaller than an atomic number of the first material. A target support is attached to an end of the component part. The target support supports a target which is aligned with a lens diaphragm formed at the end of the component part. The target support has a base body made of a first material which is a metal, and a second material formed on a surface of the base body that is selectively exposed to the electron beam and which extends between the target and the lens diaphragm.

Abstract: A device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).

Abstract: The high-frequency amplifier assembly for a high-frequency generator, in particular for a high-frequency generator for operating a plasma generator, is provided with a signal generator for generating a high-frequency signal; a first amplifier transistor for amplifying the signal generated by the signal generator; an output terminal for outputting the amplified signal to an external load; an input network arranged between the signal generator and the first amplifier transistor for providing the high-frequency signal at the input of the amplifier transistor; an output network arranged between the amplifier transistor and the external load for providing a desired load impedance for the amplifier transistor; and an electronic voltage-limiting assembly arranged at the output terminal for limiting the output voltage at the output terminal.

Abstract: Provided is a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.

Abstract: A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7?). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.

Abstract: An X-ray target assembly includes a cylindrical base and a cylindrical multilayered X-ray target that includes at least a heat transfer layer, an X-ray source layer and an adhesion layer provided between the heat transfer layer and the X-ray source layer , wherein the X-ray target is oriented such that the heat transfer layer is closest to the base, wherein the X-ray target is placed on top of a cylindrical carrying element, wherein the in-plane coefficient of thermal expansion of each of the heat transfer layer, the X-ray source layer, the adhesion layer and of the material of the carrying element is different, wherein the in-plane coefficient of thermal expansion of the heat transfer layer is the lowest and that of the material of the carrying element the highest.

Abstract: The invention relates to a directional coupler comprising a non-straight main conductor line for receiving a high power signal and at least one coupling element. The main conductor line is arranged to run in a plane P0. The at least one coupling element is arranged sectionally parallel to the main conductor line. Further, the invention relates to a method for measuring RF voltage and/or RF power using a directional coupler. The method comprises the steps of combining the measured signals of the directional coupler and the measured voltage and current values of the VI sensor unit. In case, one of the measured signals has a low or zero level the sensitivity of the measuring of RF voltage and/or RF power is increased.

Abstract: Provided is a generator that includes a housing, a high-power circuit including a power amplifier, and a low-power circuit. An air flow guidance plate divides the housing into at least two compartments including a high-power compartment and a low-power compartment. The high-power circuit is disposed within the high-power compartment and the low-power circuit is disposed within the low-power compartment.

Abstract: A variable voltage generator circuit is described for generating, from a substantially constant supply voltage VS, a variable high-voltage control voltage VC for a variable power capacitor (1) having a variable-permittivity dielectric. The control voltage generator circuit comprises a top-up circuit (10) for maintaining the voltage VCin on an input capacitor (12) at least at supply voltage VS, and a bidirectional DC-DC converter circuit (20) having a variable voltage conversion factor G controlled by control input signal (27). The bidirectional DC-DC converter (20) is arranged to convert voltage, at the voltage conversion factor G, between the input capacitor voltage VCin and the output voltage VC. When VC<G×VCin, the DC-DC converter circuit (20) uses charge stored in the input capacitor (12) to charge the capacitive load (1). When VC>G×VCin, the DC-DC converter circuit (20) uses charge stored in the load capacitance (1) to charge the input capacitor (12).

Abstract: The present invention relates to a vacuum capacitor (1, 30) comprising an enclosure (9) to contain a vacuum dielectric medium, a first electrode (12) and a second electrode (13) separated by said vacuum dielectric medium, the enclosure (9) comprising a first conductive collar (2) in electrical contact with the first electrode (12) and a second conductive collar (3) in electrical contact with the second electrode (13), the first conductive collar (2) and the second conductive collar (3) being separated by an insulating element (4) of the enclosure (9), wherein the enclosure (9) exhibits at least one protruding edge (6), said protruding edge (6) being in electrical contact with the closest of the first conductive collar (2) or the second conductive collar (3), wherein the vacuum capacitor (1, 30) comprises at least one protection means (7, 37) covering on the outside of the vacuum enclosure the protruding edge (6), wherein the protection means (7, 37) is made at least partially of an elastomer, wherein at least

Abstract: The invention relates to a device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).

Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.

Abstract: The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.

Abstract: The present invention relates to an electrode unit (10, 20) for an electric vacuum capacitor comprising a band-shaped capacitor plate (11, 21) with a height H, wherein the band-shaped capacitor plate (11, 21) is wound in a spiral with a maximum diameter Dmax and a constant distance between successive turns, wherein the band-shaped capacitor plate (11, 21) comprises a first longitudinal edge (11a, 21a) attached to a supporting part (12) and a second longitudinal edge (11b, 21b), the second longitudinal edge (11b, 21b) being free, wherein at the outer extremity of the spiral, the first longitudinal edge (11a, 21a) and the second longitudinal edge (11b, 21b) are connected by an inclined edge (11c, 21c) such that the first longitudinal edge (11a, 21a) is longer than the second longitudinal edge (11b, 21b), wherein the inclined edge (11c, 21c) forms with the longitudinal axis (B) of the band-shaped capacitor plate (11, 21) an angle ? less than or equal to an angle ?max=(45°·?/180°).

Abstract: A generator including a power combiner is provided. The power combiner includes a plurality of inputs, each input connectable to a respective power amplifier for receiving a respective power signal. A plurality of impedance matching circuit branches is connected to a respective one of the plurality of inputs. Each impedance matching circuit branch includes at least one high pass filter section and at least one low pass filter section through which the respective power signal passes. The impedance matching circuit branches are connected so as to combine the power signals from each power amplifier. An output is provided for outputting the combined power signal.

Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.

Abstract: An electronic circuitry module and a method of potting an electronic circuit are provided. The electronic circuit module includes at least one heat generating electronic component and is potted in a potting material. Additionally, a cooling circuit is potted in the potting material. The cooling circuit includes an inlet and an outlet for flow of cooling liquid therebetween.

Abstract: A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7?). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.