Abstract: The invention relates to a device for synchronizing a periodic high frequency power signal (18) and an external reference signal (10). The device comprises a phase control circuit (100) and a digital oscillator circuit (130). The digital oscillator circuit (130) is connected to the phase control circuit (100). The digital oscillator circuit (130) comprises means for generating the periodic high frequency power signal (18) dependent on the control signal from the phase control circuit. The phase control circuit (100) is configured to determine a phase difference of the periodic high frequency power signal (18) and the external reference signal (10).

Abstract: An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.

Abstract: The invention relates to a filter unit for filtering multiple pulse signals comprising a number of filter circuits, which are connected in parallel. Each filter circuit comprises an input and an output, wherein the input is configured to receive an amplitude of an input signal and the output is configured to activate an output signal. Each filter circuit has an allocated filter level and further comprises a pulse level detection circuit configured to detect a change of state of a pulse level of the input signal. The change of state comprises a transition from a first pulse level to a second pulse level and if the pulse level corresponds to the allocated filter level of the filter circuit the output of said filter circuit is activated.

Abstract: The present invention relates to an electrode unit (10, 20) for an electric vacuum capacitor comprising a band-shaped capacitor plate (11, 21) with a height H, wherein the band-shaped capacitor plate (11, 21) is wound in a spiral with a maximum diameter Dmax and a constant distance between successive turns, wherein the band-shaped capacitor plate (11, 21) comprises a first longitudinal edge (11a, 21a) attached to a supporting part (12) and a second longitudinal edge (11b, 21b), the second longitudinal edge (11b, 21b) being free, wherein at the outer extremity of the spiral, the first longitudinal edge (11a, 21a) and the second longitudinal edge (11b, 21b) are connected by an inclined edge (11c, 21c) such that the first longitudinal edge (11a, 21a) is longer than the second longitudinal edge (11b, 21b), wherein the inclined edge (11c, 21c) forms with the longitudinal axis (B) of the band-shaped capacitor plate (11, 21) an angle ? less than or equal to an angle ?max=(45°·?/180°).

Abstract: A generator including a power combiner is provided. The power combiner includes a plurality of inputs, each input connectable to a respective power amplifier for receiving a respective power signal. A plurality of impedance matching circuit branches is connected to a respective one of the plurality of inputs. Each impedance matching circuit branch includes at least one high pass filter section and at least one low pass filter section through which the respective power signal passes. The impedance matching circuit branches are connected so as to combine the power signals from each power amplifier. An output is provided for outputting the combined power signal.

Abstract: Disclosed is an amplifier circuit for providing an output of at least 100 W, preferably of at least 200 W and most preferably of at least 250 W comprising a field effect transistor. A drain of the field effect transistor is connected with a protective feedback circuit. The protective feedback circuit is arranged to reduce an over-voltage energy at the drain of the field effect transistor if the voltage between the gate and a drain of the field effect transistor exceeds a feedback threshold voltage. Further disclosed is a radio frequency amplifier comprising an amplifier circuit, an electrical radio frequency generator comprising the radio frequency amplifier and a plasma processing system comprising an electrical radio frequency generator. Still further disclosed is a method of protecting a field effect transistor in an amplifier circuit.

Abstract: An electronic circuitry module and a method of potting an electronic circuit are provided. The electronic circuit module includes at least one heat generating electronic component and is potted in a potting material. Additionally, a cooling circuit is potted in the potting material. The cooling circuit includes an inlet and an outlet for flow of cooling liquid therebetween.

Abstract: A variable vacuum capacitor is described in which oil inside the main bellows (21) is pumped through the bellows and through the oil circuit (8) of a heat exchanger by a pump (15). Water passes through coolant channels (6) of the heat exchanger, from inlet (7) to outlet (7?). The extendable capacitor drive shaft (14) is hollow and serves as a conduit, conveying the oil to the bottom of the (bellows 21), thereby ensuring a full circulation of the oil right through the bellows and then through the heat exchanger. Pump drive means (9) may be a gerotor hydraulic motor, coupled to a gerotor oil pump (15) via magnetic coupling (22). Pumping heat transfer fluid (oil) through the bellows allows the capacitor to operate at significantly higher currents and/or lower temperatures, and significantly extends the life of the device.

Abstract: A variable voltage generator circuit is described for generating, from a substantially constant supply voltage VS, a variable high-voltage control voltage VC for a variable power capacitor (1) having a variable-permittivity dielectric. The control voltage generator circuit comprises a top-up circuit (10) for maintaining the voltage VCin on an input capacitor (12) at least at supply voltage VS, and a bidirectional DC-DC converter circuit (20) having a variable voltage conversion factor G controlled by control input signal (27). The bidirectional DC-DC converter (20) is arranged to convert voltage, at the voltage conversion factor G, between the input capacitor voltage VCin and the output voltage VC. When VC<G×VCin, the DC-DC converter circuit (20) uses charge stored in the input capacitor (12) to charge the capacitive load (1). When VC>G×VCin, the DC-DC converter circuit (20) uses charge stored in the load capacitance (1) to charge the input capacitor (12).

Abstract: The invention describes a broadband matching network for coupling to an output of an amplifying device for amplifiers with a nominal operating frequency between 1 MHz and 100 MHz. The broadband matching network comprises a planar transformer with a primary winding arranged on a primary side of the broadband matching network and a secondary winding arranged on a secondary side of the broadband matching network. The primary winding is arranged to be electrically connected to the output of the amplifying device. The broadband matching network is characterized by a center frequency and a bandwidth with a frequency range of at least +/?3%. A first parallel resonance frequency and a second parallel resonance frequency of the broadband matching circuit are arranged around the series resonance frequency such that a frequency dependence of a load impedance provided by the broadband matching network for the amplifying device is reduced.

Abstract: The invention relates to a method and a device for treating poultry eggs with an electron beam bundle to sterilize the calcareous shell, with the following steps: moving at least one egg through the beam path of an electron beam source, irradiating the eggs, whereby the calcareous shell is irradiated with a varying dose, characterized by the following steps: carrying out an irradiation encompassing all regions of the calcareous shell of the egg by means of the electron beam bundle, whereby an element is inserted into the path of the electron beam bundle to distribute the irradiation over all regions of the calcareous shell, whereby owing to the dose being set within a predefined target dose range, the calcareous shell is comprehensively irradiated, or carrying out an irradiation of a rolling/rolled egg by means of the electron beam source in the path of the electron beam bundle, or carrying out an irradiation of the held eggs by means of the electron beam source in the path of the electron beam bundle at

Abstract: A power capacitor (7) is described for use in an RF power delivery system. The power capacitor comprises at least two RF electrodes (18, 19) separated by a capacitor dielectric (17) comprising a solid paraelectric dielectric material whose relative permittivity is controllable by varying a DC bias voltage applied across the dielectric (17) at DC bias electrodes (10, 26, 28). Composite capacitor configurations, an RF power system and a method of controlling the power capacitor are also described.

Abstract: A method of frequency tuning an electrical generator for supplying electrical power to a plasma is provided. Also provided is a plasma processing system and a computer program product. The method, the electrical generator, the plasma processing system, and the computer program product may have the advantage that the stability of the plasma with respect to repeated and essentially identical high and low power pulses is used to reduce the controlling effort and to check the stability of the plasma process.

Abstract: The invention describes a broadband matching network for coupling to an output of an amplifying device for amplifiers with a nominal operating frequency between 1 MHz and 100 MHz. The broadband matching network comprises a planar transformer with a primary winding arranged on a primary side of the broadband matching network and a secondary winding arranged on a secondary side of the broadband matching network. The primary winding is arranged to be electrically connected to the output of the amplifying device. The broadband matching network is characterized by a center frequency and a bandwidth with a frequency range of at least +/?3%. A first parallel resonance frequency and a second parallel resonance frequency of the broadband matching circuit are arranged around the series resonance frequency such that a frequency dependence of a load impedance provided by the broadband matching network for the amplifying device is reduced.

Abstract: The invention describes a method of frequency tuning an electrical generator (100) for supplying electrical power to a plasma, wherein the method comprises a pulsed mode, the pulse mode comprising at least a high power pulse (314) comprising a high power level (304) and a low power pulse (312) comprising a low power level (302) different to zero power, the method comprising the steps of: —providing RF-power with a high power starting frequency set comprising at least one high power starting frequency (502, 504, 506) at the high power pulse (314) with a predefmed high power pulse shape; —providing RF-power with a low power starting frequency set comprising at least one low power starting frequency (512, 514) at the low power pulse (312) with a predefmed low power pulse shape; —determining a reflected high power at the high power starting frequency (502, 504, 506); —tuning the high power starting frequency (502, 504, 506) to a different first high power frequency if the reflected high power exceeds a high power

Abstract: A vacuum variable capacitor includes a pre-vacuum enclosure for reducing a pressure differential across the bellows. The vacuum force load on the drive system can thereby be reduced, allowing faster movement of the movable electrode, faster capacitance adjustment of the vacuum variable capacitor and longer lifetimes of the device.

Abstract: A vacuum variable capacitor includes a pre-vacuum enclosure for reducing a pressure differential across the bellows, wherein a drive is disposed outside the enclosures of the vacuum variable capacitor. The vacuum force load on the drive system can thereby be reduced, allowing faster movement of the movable electrode, faster capacitance adjustment of the vacuum variable capacitor and longer lifetimes of the device.

Abstract: A high-voltage capacitor includes a gas-tight enclosure containing interleaved electrodes. The dielectric of the capacitor is a pressurized gas at a pressure of at least 6 bar, and preferably 10 or 15 bar. In order to withstand this level of internal pressure, the insulating body section of the capacitor may be formed of a high-strength polymeric material.

Abstract: A variable vacuum capacitor includes two pairs of electrodes ganged together in series such that no moving parts are required to connect electrically to any static pans. Two sets, or gangs, of movable electrodes are connected mechanically and electrically together such that they move together and such that they require no electrical connection to any other part of the device. The ganged arrangement means that the device can be constructed with a smaller diameter, but without significantly increasing the overall length of the device. The variable vacuum capacitor may be a component of e.g., a power delivery system for a plasma process, a power delivery system for surface treatment, semi-conductor manufacturing equipment, photovoltaic manufacturing equipment, and flat panel manufacturing equipment.

Abstract: A variable vacuum capacitor includes two pairs of electrodes ganged together in series such that no moving parts are required to connect electrically to any static pans. Two sets, or gangs, of movable electrodes are connected mechanically and electrically together such that they move together and such that they require no electrical connection to any other part of the device. The ganged arrangement means that the device can be constructed with a smaller diameter, but without significantly increasing the overall length of the device.