Abstract: A noncontact support system includes a table with a port layer having a pattern of interspersed pressure ports and vacuum ports. A pressure conduit layer includes a grid pattern of pressure conduits, connectable to a pressure source, each of the pressure ports being located on an axis passing through an intersection of at least two of the pressure conduits and substantially orthogonal to the grid pattern of pressure conduits. A vacuum conduit layer includes a grid pattern of vacuum conduits, connectable to a suction source, each of the vacuum ports being located on an axis passing through an intersection of at least two of the vacuum conduits and substantially orthogonal to the grid pattern of vacuum conduits. The grid pattern of vacuum conduits is laterally offset from the grid pattern of pressure conduits such that each intersection of pressure conduits is laterally offset from all intersections of the vacuum conduits.

Abstract: A noncontact support platform includes a plurality of pressure nozzles on an outer surface of a PV stage of the noncontact support platform. The pressure nozzles connected to a pressure source for creating an outflow of fluid through the pressure nozzles. A plurality of vacuum nozzles are interspersed with the pressure nozzles on the outer surface and are connected to a vacuum manifold via one or a plurality of hoses to create an inflow of the fluid through the vacuum nozzles. At least one flowmeter is configured to generate a signal that is indicative of a measured inflow via at least one hose of the hoses. A controller is configured to analyze the signal to determine whether the measured inflow is indicative of blockage of a vacuum nozzle and to generate a response when blockage is indicated.

Abstract: A noncontact support platform includes pressure ports distributed on a surface of a table, each connected to a pressure source. Vacuum ports are distributed on the surface of the table, each connected to a vacuum source. Outward flow through the pressure ports and inward flow through the vacuum ports form a fluid cushion to support a workpiece at a nonzero distance from the table. A plurality of channels each connect at least two of the vacuum ports to enable flow of fluid between the connected vacuum ports. When one of the connected vacuum ports is covered by an edge of the workpiece and the other is not, a suction force that is exerted by the connected vacuum ports on the edge is weaker than the suction force that is exerted on a part of the workpiece where both of the connected vacuum ports are covered.

Abstract: A noncontact support system includes a table with a port layer having a pattern of interspersed pressure ports and vacuum ports. A pressure conduit layer includes a grid pattern of pressure conduits, connectable to a pressure source, each of the pressure ports being located on an axis passing through an intersection of at least two of the pressure conduits and substantially orthogonal to the grid pattern of pressure conduits. A vacuum conduit layer includes a grid pattern of vacuum conduits, connectable to a suction source, each of the vacuum ports being located on an axis passing through an intersection of at least two of the vacuum conduits and substantially orthogonal to the grid pattern of vacuum conduits. The grid pattern of vacuum conduits is laterally offset from the grid pattern of pressure conduits such that each intersection of pressure conduits is laterally offset from all intersections of the vacuum conduits.

Abstract: A vacuum wheel for transporting a substrate includes a fixed conduit that is connectable to a suction source. A vacuum surface on a circumference of the vacuum wheel includes vacuum openings that are distributed around the circumference, such that rotation of the wheel causes the vacuum openings to successively fluidically connect to the fixed conduit. When suction is applied to the fixed conduit, suction is applied to one or more of the vacuum openings that are currently fluidically connected to the fixed conduit. At least one contact surface on the circumference of the vacuum wheel is adjacent to, and extends outward beyond, the vacuum surface. When suction is applied to the vacuum openings, the substrate is drawn toward the vacuum surface so as to contact the contact surface without contacting the vacuum surface, creating a friction force that enables transport of the substrate when the wheel rotates.

Abstract: A vacuum wheel for transporting a substrate includes a fixed conduit that is connectable to a suction source. A vacuum surface on a circumference of the vacuum wheel includes vacuum openings that are distributed around the circumference, such that rotation of the wheel causes the vacuum openings to successively fluidically connect to the fixed conduit. When suction is applied to the fixed conduit, suction is applied to one or more of the vacuum openings that are currently fluidically connected to the fixed conduit. At least one contact surface on the circumference of the vacuum wheel is adjacent to, and extends outward beyond, the vacuum surface. When suction is applied to the vacuum openings, the substrate is drawn toward the vacuum surface so as to contact the contact surface without contacting the vacuum surface, creating a friction force that enables transport of the substrate when the wheel rotates.

Abstract: A noncontact support platform includes a plurality of pressure nozzles on an outer surface of a PV stage of the noncontact support platform. The pressure nozzles connected to a pressure source for creating an outflow of fluid through the pressure nozzles. A plurality of vacuum nozzles are interspersed with the pressure nozzles on the outer surface and are connected to a vacuum manifold via one or a plurality of hoses to create an inflow of the fluid through the vacuum nozzles. At least one flowmeter is configured to generate a signal that is indicative of a measured inflow via at least one hose of the hoses. A controller is configured to analyze the signal to determine whether the measured inflow is indicative of blockage of a vacuum nozzle and to generate a response when blockage is indicated.

Abstract: A system for conveying a substrate includes a noncontact support platform for supporting the substrate. A vacuum wheel is located adjacent to the support platform. A rim of the vacuum wheel includes perforations that open between an exterior of the rim and an interior of the vacuum wheel. A fixed suction surface is interior to the vacuum wheel and includes an opening of a conduit that is connectable to a suction source. A chamber is formed by the suction surface, walls of the vacuum wheel, and a section of the peripheral rim that is adjacent to the suction surface and that extends outward from the support platform. When suction is applied to the conduit, the suction is applied via the chamber to the perforations in the rim section so as to exert a pull on the substrate toward the rim such that rotation of the vacuum wheel conveys the substrate.

Abstract: A self-adaptive vacuum grip apparatus includes a vacuum source (51), a vacuum reservoir (54) fluidically connected to the vacuum source; a contact surface (56), and a plurality of conduits (55); where a conduit has an inlet (2) positioned on the contact surface and an outlet (3) fluidically connected to the vacuum reservoir. The conduit is provided with a plurality of fins (4, 5) mounted on the internal wall thereof arranged in two arrays substantially opposite each other. Each of the fins of the arrays, excluding the fin nearest to the inlet and the fin nearest to the outlet of the conduit, is positioned substantially opposite one of a plurality of cavities wherein opposing fin arrays are arranged asymmetrically.

Abstract: An injection system used to generate an acrodynamically induced force, with accordance to the present invention, serving as an air-cushion non-contact supporting system. The system comprises a high pressure manifold (101), connected by high pressure pipe (103), to a high pressure source (102). A SASO-conduit (1), whose inlet (2) is connected to the high pressure manifold, and the outlet (3) is located on the injection-surface (104), of the injection system.