Abstract: A method and apparatus are provided for measuring energy dissipation during oscillatory operation of an atomic force microscope (AFM). Interaction between the AFM's probe and another medium of interest dissipates energy. This dissipation is reflected by an effect on one or more parameters of probe oscillation such as the amplitude of probe tip oscillation and/or the phase of the probe tip relative to the probe's base. The invention is capable of obtaining an indication of energy dissipated during operation of the AFM by measuring one or more of these parameters and by combining them to produce an energy dissipation signal. In the typical case in which the medium of interest is the sample, an indication is obtained of energy dissipated due to interaction between the probe tip and the sample surface.
Abstract: The oscillation parameters of a probe of an atomic force microscope (AFM) typically vary over time. This variation can cause problems during either 1) scanning or measurement functions in which the probe's operative state is one in which oscillatory measurements are taken or 2) the process of bringing the tip to the sample to begin measurement, commonly referred to as engaging the probe, in which the probe's operative state is one in which the probe is about to move into its measuring position. These problems can be eliminated during either process by measuring changes in a parameter or parameters of probe oscillation, determining what changes are not due to probe-sample interaction, and correcting the oscillation parameters accordingly. This may be accomplished in two ways, the first with the probe out of intermittent contact with the sample, and the second during scanning.
Abstract: The mechanical properties of a surface are measured by using a pointed tip on the end of a bendable cantilever such that with force on the other end of the cantilever the tip can be pushed into the surface using the bending of the cantilever as the measure of the constant force. The indentation, scratch, or wear created by the application of forces between the tip and sample is then measured with the same tip and cantilever by raising the cantilever off the surface and putting it into oscillation. The tip is then scanned over the area where the indentation was made with the tip tapping on the surface in order to image the surface.
Type:
Grant
Filed:
February 4, 1997
Date of Patent:
February 2, 1999
Assignee:
Digital Instruments
Inventors:
Jeffrey R. Elings, Virgil B. Elings, Christopher C. Schmitt
Abstract: A stiffener assembly which provides for improved performance of a movable stage arrangement. Often, it is desired to provide a movable stage arrangement in which a stage moves linearly with respect to a stationary base. In many applications, it is necessary for the stage to move to successive rest positions, with movement of the stage inhibited at each of the reset positions. The stiffener of the present invention allows for controlled movement of a stage along its direction of travel, with the stiffener inhibiting undesired movement when the stage is at a rest position. In one form, a stiffener extends in the direction of travel of the stage, with one end of the stiffener assembly mounted to the stationary base, and the other end urged into frictional contact with the movable stage by a force applicator. As a result, the stiffener is placed in frictional contact with the movable stage.
Type:
Grant
Filed:
November 3, 1992
Date of Patent:
May 24, 1994
Assignee:
Digital Instruments
Inventors:
Frank D. Yashar, Charles R. Meyer, John A. Gurley