Abstract: A photoelectron emitting member and method of electrically charging fine particles with photoelectrons, wherein the member includes a matrix that is at least composed of a material capable of transmitting ultraviolet rays and a material that is provided on the surface of the matrix or in its neighborhood and which emits photoelectrons upon irradiation with ultraviolet rays or sunlight. The member emitting photoelectrons upon irradiation with ultraviolet rays or sunlight is disposed in an electric field from the side opposite to the irradiated side. The member permits efficient utilization of the energy of ultraviolet rays. When sunlight is applied to the member to have it emit photoelectrons, particles can be electrically charged with energy costs being reduced to substantially zero.

Abstract: A system for supporting a rotor without contact with a stator comprising a magnetic bearing apparatus mounted on the stator and including a controlling magnet means fixed to the stator, a non-controlling magnetic pole fixed to the stator, a biasing magnetic poles sandwiched between the controlling magnet and the non-controlling magnetic pole, and a rotor magnetic pole fixed to the rotor to enable the magnetic path of a biasing flux to run in a plane which includes the longitudinal axis of the stator. The non-controlling and rotor magnetic poles may have teeth facing each other.

Abstract: Waste gases containing ClF.sub.3 are treated by bringing them into contact with iron oxide substantially composed of a ferric oxide (Fe.sub.2 O.sub.3) at a linear velocity of about 10-200 cm/min at ordinary temperatures, or further into contact with an alkali agent at the same linear velocity and temperatures as the above, whereby the content of ClF.sub.3 can be reduced below the permissible level despite simultaneous emission of acidic gases, and yet which is capable of removing the concomitant acidic gases in an effective manner.

Abstract: Ultrapure water of extremely high purity, i.e. a so-called ultra-ultrapure water is formed by the present system for purifying a pure water or ultrapure water, (1) the TOC component which was contained in pipes, etc. and which was subsequently dissolved in a pure water or ultrapure water to be treated, is decomposed and the pure water or ultrapure water is simultaneously sterilized, by the combined use of an oxidizing agent and ultraviolet irradiation, (2) the DO contained in the water to be treated and the DO derived from the addition of the oxidizing agent are decomposed into H.sub.2 O and simultaneous sterilization is effected, by the combined use of H.sub.2 gas and ultraviolet irradiation, (3) the remaining H.sub.

Abstract: A photoelectron emitting member having a multiplex structure comprises a matrix and a protective film. The matrix being selected from the group consisting of elements, inorganic compounds, alloys, mixtures thereof and composites thereof which emit photoelectrons upon exposure to uv rays and other forms of radiation, the protective film comprising at least one material selected from the group consisting of metals, metallic compounds, plastics, polycyclic aromatic hydrocarbon, derivatives thereof or a mixture thereof which is film-forming and not thicker than 0.2 .mu.m. The member can be used in a consistent way over a prolonged period as well as being capable of effective emission of photoelectrons.

Abstract: The present invention provides a turbo-molecular pump in which an exhaust action is achieved by virtue of the combination of stationary blades and rotor blades adapted to rotate at high speed and to cooperate with each other to impart momentum to gaseous molecules rushing in against the blades under an extremely low-pressurized condition. Disposed inside the casing are a fixed shaft and the rotor, the latter being movably supported by a pair of active radial magnetic bearings. A motor is interposed between said pair of magnetic bearings. A dynamic damper is provided at one end of the fixed shaft to inhibit the occurrence of vibrations.

Abstract: An active magnetic bearing apparatus wherein an object designed to be suspended is supported by a plurality of active magnetic bearings and is suspended in a non-contact state so that the object is caused to move in either a rotational or reciprocating manner in such a state. The magnetic force of the respective active magnetic bearings is controlled electrically. A delay control mechanism is provided to cause a delay in the starting-up time for the respective active magnetic bearings so that these bearings are caused to start up sequentially when they are activated, thus making it possible to make the capacity of the power source as small as possible.

Abstract: A rotation control system for preventing unbalance vibrations and synchronous disturbance vibrations of a rotary member suspended by a magnetic bearing. This system includes a vibration detector which detects radial vibration of the rotary member. On the basis of the detected radial vibration, a compensating signal which has the same amplitude and cycle as the vibration component having the rotational frequency is generated. The difference between the detected vibration and the compensating signal is obtained and used for controlling the radial position of the magnetic bearing.

Abstract: An active type magnetic bearing system includes magnetic bearings for suspending a rotary body to permit it to rotate about its rotational axis. A control system supplies the magnetic bearings with signals to control the radial position of the rotary body, and comprises displacement detecting circuits for detecting any displacement of the radial position of the rotary body and a control circuit for producing a control signal which serves to suppress any unstable vibration of the rotary body.

Abstract: A controller for a magnetic bearing system which controls the magnetic attraction force acting between a rotor yoke rigidly secured to a rotary shaft and a pair of electromagnet stators rigidly secured to a casing on the basis of a signal output from a displacement sensor which measures relative displacement between the rotary shaft and the casing. The signal output from the displacement sensor is input to a compensation circuit. The signal output from the compensation circuit is input to both the non-inverting input terminal of one operational amplifier and the inverting input terminal of the other operational amplifier. An exciting coil bias voltage is input to the respective inverting input terminals of the two operational amplifiers.

Abstract: A method of treating a waste gas containing at least boron trichloride and chlorine comprises first treating the waste gas with a treating agent containing a magnesium compound by a dry process and then treating the waste gas with a treating agent containing a calcium compound by a dry process. Thus, it is possible to remove efficiently a chloride and chlorine containing gas from waste gas discharged from a dry etching process or other manufacturing process in the semiconductor industry. In addition, it is possible to reduce the amount of treating agent used, lengthen the treating agent replacing cycle, and facilitate the maintenance of the system.

Abstract: An absorber that is capable of efficient absorption of SiF.sub.4 and/or BCl.sub.3 present in gases that are discharged from semiconductor fabrication plants, ceramic producing plants and other plants is disclosed. The absorber contains an alkali agent, water and a superabsorbent as effective components. This absorber, when used to treat an effluent gas, attains as high reaction rate as in the conventional wet process and can be handled as easily as in the dry process.

Abstract: An electrically powered apparatus is disclosed in which an axial end surface of a rotor and an axis end surface of a stator are arranged to be sliding surfaces for effecting relative sliding motion therebetween, one of the sliding surfaces being provided with grooves adapted to generate fluid dynamic pressure upon relative rotation of said surfaces.

Abstract: A method of and an apparatus for cleaning the air by irradiating the air with ultraviolet rays to electrically charge the fine particles therein, and thereafter removing the charged fine particles from the air are disclosed. The cleaning method of the air (50) has the following steps: irradiating a photo-electron discharge member (21) with ultraviolet rays (22), electrically charging the above mentioned fine particles by using the photo-electrons generated due to this irradiation, and removing the fine particles charged by the photo-electrons from the air (50) by electrostatic filters (10, 24). The apparatus for practicing the method has an ultraviolet ray irradiation portion (9), photo-electron discharge portions (21) and a charged fine particle-collecting portion (10) on an air flow passage from an air intake port to an air exhaust port.

Abstract: A thrust bearing adapted to be rotated reversibly in the normal and opposite directions comprises two flat disc elements disposed in face-to-face contact, one of the elements being provided with spiral grooves on its opposite side surfaces, one of which is reverse to the other with respect to the spiral directions, both elements having a dent formed centrally on their opposing surfaces, respectively, to form a small space in combination in which a core member of sphere is installed with a small clearance between the surfaces of the small space and the core member.