Abstract: A drag pump for pumping fluid from an inlet to an outlet includes a stator and a rotor. One of the stator or rotor includes a disc having a plurality of channels each of the channels extending from an inlet portion of the disc at or close to an inlet edge towards an outlet portion at or close to an outlet edge. The plurality of channels each has walls for guiding fluid flow from the inlet edge to the outlet edge in response to relative motion between the stator and the rotor. The disc further includes a plurality of protrusions extending from the channels, each of the protrusions being arranged to divide a channel at the inlet or the outlet end of the channel, into sub-channels that extend for a portion of a length of the channel and do not extend for a whole length of the channel.

Abstract: A vacuum exhaust system includes a plurality of turbo pumps that evacuate a plurality of vacuum chambers. A plurality of chamber valves are positioned between the turbo pumps and the plurality of vacuum chambers. A plurality of branch channels are each connected to a corresponding exhaust of the plurality of turbo pumps and a main channel is formed from a confluence of the branch channels. A booster vacuum pump is connected to the main channel. A backing vacuum pump is connected to an exhaust of the booster vacuum pump. A plurality of bypass channels, each having a valve, provide a fluid communication path between at least some of the plurality of vacuum chambers and the booster vacuum pump.

Abstract: A safety device for an orbital pump has first and second interleaved parts which are operable to follow an orbital path with respect to each other, the safety device comprising: a first member fixable with respect to the first interleaved part; and a second member fixable with respect to the second interleaved part, the second member defining an aperture into which the first member is receivable, the aperture being dimensioned to prevent movement of the first interleaved part with respect to the second interleaved part beyond the orbital path. In this way, the members of the safety device help to prevent the moving components of the pump contacting, thereby preventing damage.

Abstract: A method of assigning an identifier to a controller of a modular vacuum pumping and/or abatement system, the method including: determining, by a first controller of the modular vacuum pumping and/or abatement system, that a first identifier is to be assigned to a second controller of the modular vacuum pumping and/or abatement system, wherein the second controller is located at a module of the modular vacuum pumping and/or abatement system; transmitting, by the first controller, a first signal indicative of the first identifier to the second controller; receiving, by a user input device coupled to the module, a user input; and adopting, by the second controller, the first identifier as its identifier in response to the user input.

Abstract: A safety device for an orbital pump has first and second interleaved parts which are operable to follow an orbital path with respect to each other, the safety device comprising: a first member fixable with respect to the first interleaved part; and a second member fixable with respect to the second interleaved part, the second member defining an aperture into which the first member is receivable, the aperture being dimensioned to prevent movement of the first interleaved part with respect to the second interleaved part beyond the orbital path. In this way, the members of the safety device help to prevent the moving components of the pump contacting, thereby preventing damage.

Abstract: A rotor support configured to rotatably mount a rotor shaft in a vacuum pump is disclosed. The rotor support comprises: a rolling bearing for rotatably supporting the shaft; an insert and at least one resilient damping member, the insert and the at least one resilient damping member surrounding the rolling bearing. The insert comprises inner and outer annular portions connected by a plurality of flexible members, the plurality of flexible members being configured to flex in a radial plane and resist movement in an axial plane, thereby absorbing radial movement of the shaft. The at least one resilient damping member is formed of an elastomeric material configured to flex in both a radial and axial direction.

Abstract: A valve includes a housing with at least one inlet and at least one outlet; a valve member located within the housing and being moveable between different positions for controlling, in use, the flow of a fluid from an inlet to an outlet of the valve; wherein the valve further includes at least two spaced-apart valve seats in which the valve member is seated so as to form a cavity bounded by the valve seats, an exterior surface of the valve member and an interior surface of the housing; a first conduit extending between the exterior of the housing and the cavity; and a second conduit extending between the cavity and a bore of the valve member, through which conduits, in use, a purge gas can be introduced into the cavity and bore.

Abstract: A vacuum pumping system which comprises a plurality of vacuum pumping arrangements for evacuating a flammable gas stream and exhausting the gas stream through an exhaust outlet. A housing houses the vacuum pumping arrangements and forms an air flow duct for an air flow for mixing with the exhaust gas stream output from the exhaust outlet in a mixing region in the housing. An airflow generator generates an air flow through the air flow duct to cause mixing of air with the flammable gas stream to a percentage of the flammable gas in the air flow lower than the lower flammability limit of the flammable gas. An airflow sensor senses the flow of air for determining if the air flow is sufficient to dilute the flammable gas to lower than said percentage.

Abstract: A heat exchanger for changing a temperature of a pumped gas flow and a pump comprising the heat exchanger is disclosed. The heat exchanger comprises: at least one tube configured to contain a flow of fluid; said at least one tube being at least partially embedded within a block of material; wherein said heat exchanger comprises mounting means configured to mount said heat exchanger adjacent to a gas port of a pump such that a least a portion of said heat exchanger extends into a path for gas flow flowing through said gas port; wherein the mounting means comprises a flange, the flange being configured to connect with the gas port of the pump, the block being mounted to the flange such that the block extends towards the rotor of the pump when the flange is connected with the gas port of the pump.

Abstract: A multi-stage vacuum pump comprising a stator defining multiple pumping chambers is discussed. The stator comprises a plurality of transfer channels for providing a fluid passage from an outlet port of one of the plurality of pumping chambers to an inlet port of a subsequent pumping chamber. Some of the transfer channels comprise two side channel sections on opposing sides of the stator. One of the transfer channels comprises a single side channel section on one side of the stator. The vacuum pump further comprises a gas ballast inlet channel arranged on an other side of the stator to the one side of the stator.

Abstract: A vacuum pumping system comprising: a high pressure getter pump configured to operate from an initial pressure of between 10 and 10?2 mbar to a second pressure between 10?3 mbar and 10?6 mbar and at least one high vacuum pump configured to operate at higher vacuums than the high pressure getter pump, the two pumps being mounted on a same flange, the flange being configured to mount the vacuum pumping system to a vacuum chamber.

Abstract: A vacuum pump cooler for cooling a pumped fluid in a multistage vacuum pump, the vacuum pump cooler comprising: a plate comprising: a first surface; a second surface opposite to the first surface; and a channel through which a cooling fluid can flow; and one or more fins extending from the second surface of the plate.

Abstract: A seal for use in a vacuum pump comprises a seal element positioned between inner and outer seal carriers located at the inner and outer surfaces of the seal element. Each of the seal element and carriers is substantially toroidal in shape. The outer carrier comprises retention means to hold the seal element in position. The inner carrier comprises at least one recess located in a surface adjacent to the seal element, and the seal element comprises at least one protrusion on an inner surface, which extends into the at least one recess of the inner carrier. A seal system comprises the described seal and first and second flanges. Methods for enhancing the chemical resistance of a seal system for use in a vacuum pump, and the use of the seal or seal system to connect pipework, are also provided.

Abstract: A turbomolecular pump has a housing, a rotor shaft supported by a plurality of bearings for rotation relative to the housing about an axis of rotation, a deflector, a lubricant supply system and a lubricant transfer device provided on the rotor shaft. The bearings include a rolling bearing that receives lubricant from the lubricant supply system to via the lubricant transfer device. The rolling bearing is disposed intermediate the lubricant transfer device and the deflector and the deflector is configured to deflect lubricant that passes through the rolling bearing outwardly with respect to the rotor shaft.

Abstract: The invention provides a rotor assembly for a vacuum pump. The rotor assembly comprises a hub and one or more rotor blade arrays each comprising at least one rotor blade, each rotor blade extending from a rotor blade root contiguous with the hub to a rotor blade tip, wherein each rotor blade comprises a continuous fibre reinforced matrix material. The invention further provides methods of designing and manufacturing rotor blades, and vacuum systems comprising a component comprising a continuous fibre reinforced matrix material.

Abstract: A pump and method for pumping a gas are disclosed. The pump comprises a rotor and a stator. At least one of the rotor or stator comprises at least one liquid opening configured for fluid communication with a liquid source. The liquid opening is configured such that in response to a driving force exerted on liquid from the liquid source a stream of liquid is output from the opening, the stream of liquid forming a liquid blade between the rotor and the stator, gas confined by said stator, said rotor and said liquid blade being driven through said pump from a gas inlet towards a gas outlet.

Abstract: A control system comprising: a suction line; an exhaust line; an operating liquid line; a liquid ring pump comprising a suction input coupled to the suction line, an exhaust output coupled to the exhaust line, and a liquid input coupled to the operating liquid line; a motor configured to drive the liquid ring pump; a first sensor configured to measure a first parameter of an exhaust fluid of the liquid ring pump; a second sensor configured to measure a second parameter of a gas being received by the liquid ring pump via the suction line; and a controller operatively coupled to the first sensor, the second sensor, and the motor, and configured to control the motor based on sensor measurements of the first sensor and the second sensor.

Abstract: An enclosure system may be formed of a lightweight panel with a thin non-porous membrane that enables the extraction and leak detection of hazardous gases from housing equipment such as vacuum pumps, valves, abatement equipment and the like. Additionally, the enclosure system includes a one or multiple layers of wire mesh which prevent projectiles with a high kinetic energy from escaping from the housing equipment thereby minimising the risk of an explosion causing parts or panels to be ejected from the enclosure system.

Abstract: A vibration damping connector system to connect between a vacuum chamber and a vacuum pump such that the vacuum pump is supported by the vibration damping connector system includes a first cylindrical member and a second cylindrical member that provide a flow passage through which gas can flow from the vacuum chamber to the vacuum pump. At least one sealing member is disposed intermediate the first and second cylindrical members to provide a gas seal and a securing system securely connect the first and second cylindrical members. At least one resilient member disposed intermediate the securing system and a cylindrical member so that when the at least one sealing member is compressed by a pressure reduction caused in use by operation of the vacuum pump, the at least one resilient member can expand to enable the securing system to maintain a secure connection.

Abstract: An inter-stage coupling for a multi-stage vacuum booster pump may include a first coupling face configured to be received by a first adjacent stage of the multi-stage vacuum pump; a second coupling face configured to be received by a second adjacent stage of the multi-stage vacuum pump; and a recirculator comprising a recirculation inlet aperture formed in the first coupling face, a recirculation outlet aperture formed in the first coupling face, and a recirculation conduit having a recirculation valve configured to selectively fluidly couple the recirculation inlet aperture with the recirculation outlet aperture. In this way, the pressure in a stage can be relieved by fluidly coupling the outlet aperture with the inlet aperture in order to recirculate built-up gas from one part of the first stage pump to another part of the first stage pump in order to reduce the strain on the rotor.