Abstract: The present disclosure relates to a rotor blade for a turbomolecular vacuum pump. The rotor blade has a blade angle of 0° at the root, which increases continuously along substantially the entire span of the rotor blade. The rotor blade tapers from a maximum thickness at the root to a point of minimum thickness over a portion of its span, and is made of a polymer material reinforced with short fibres. This provides a rotor blade with a more complex geometry that has reduced weight and improved performance and cost-effectiveness. The present disclosure also relates to a rotor comprising the rotor blade, a mould for injection moulding the rotor blade or rotor, and a method of injection moulding the rotor blade or rotor.

Abstract: Aspects and embodiments relate to plasma torch device component monitoring, a plasma torch device component monitoring system and a plasma torch device including such a monitoring system or suitable for use with such a system. The monitoring method comprises: collecting electromagnetic radiation generated by a plasma torch in a plasma torch device; analysing the collected electromagnetic radiation generated by the plasma torch; comparing the analysed electromagnetic radiation generated to known electromagnetic radiation associated with one or more components of the plasma torch device; and triggering one or more actions in the event that the analysed emission differs from the known emission. Such a monitoring method can allow for ameliorative action to be taken in the event that degradation of one or more components forming the device is detected.

Abstract: A shell stator (12, 14) for a vacuum pump, the shell stator (12, 14) comprising: a seal groove (50, 52) formed in a surface of the shell stator (12, 14), the seal groove (50, 52) being defined by a first side wall (60), a second side wall (62) opposite to the first side wall (60), and a bottom surface (64) disposed between the first side wall (60) and the second side wall (62), the bottom surface (64) being opposite to an opening of the seal groove (50, 52); wherein the seal groove (50, 52) comprises: a protrusion (68) formed in the first side wall (60) and extending towards the second side wall (62); and an indentation (69) formed in the second side wall (62) opposite to the protrusion (68).

Abstract: The present invention provides a foraminous burner liner for a gas abatement system. The burner liner comprises a hollow body defined by a wall, the wall comprising a plurality of interconnected substantially concentric layers. Each layer of the wall comprises a substantially regular openwork mesh; wherein the substantially regular openwork mesh of each layer is configured such that it is out of phase with one or more adjacent layers, and wherein the wall comprises sufficient layers arranged such that the wall is optically opaque when viewed externally in any radially inward direction normal to the wall.

Abstract: A heat exchanger is disclosed. The heat exchanger comprises a first set of first conduits for conveying a first fluid, first conduits having a triangular cross-section portion; and a second set of second conduits for conveying a second fluid, the second conduits having a triangular cross-section portion, wherein adjacent first conduits are interspaced by an intervening second conduit. In this way, the conduits may be located closely together with a space-efficient configuration which helps to improve the exchange of heat between the first and second fluids while also providing a compact arrangement which minimises the amount of material used to construct the heat exchanger.

Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element and a thermal equalisation element are in thermal communication with the body. The body is made of a material with a first thermal conductivity, and the thermal equalisation element is made of a material with a second thermal conductivity that is higher than the first thermal conductivity. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent stream from a semiconductor processing tool and comprises: a first abatement device configured to receive the effluent stream and operable to run in an active mode to treat the effluent stream; a second abatement device operable to run in an idle mode; and control logic operable, on receipt of an indication of an alarm condition associated with the first abatement device, to run the second abatement device in the active mode. In this way, a first or primary abatement device is provided which treats the effluent stream and a second or back-up abatement device is provided, should the first abatement device malfunction. However, by only causing the second abatement device to operate in the active mode when the first abatement device malfunctions, significant energy savings can be made.

Abstract: A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.

Abstract: A flammable gas diluter includes a dilution vessel having an outer envelope defining a longitudinal flow passage from an inlet to an outlet; at least one air inlet assembly for directing a flow of air into the inlet of the dilution vessel; a flammable gas inlet arrangement located towards an inlet end of the dilution vessel; two gas flow generators configured to pump a flow of air into the air inlet assembly, the two gas flow generators being located upstream of the flammable gas inlet arrangement; and two dampers, each of the dampers being mounted between a corresponding gas flow generator and the dilution vessel. Control circuitry is configured to open a damper during an operational mode of the corresponding gas flow generator and to close the damper when the corresponding gas flow generator is stopped in standby mode.

Abstract: A flammable gas diluter includes: a dilution vessel comprising an outer envelope defining a longitudinal flow passage from an inlet to an outlet; at least one air inlet for directing a flow of air into the inlet of the diluter; and a flammable gas inlet arrangement. The dilution vessel has a plurality of gas flow directing formations arranged between the flammable gas inlet arrangement and the outlet, each being at a different position along a length of the dilution vessel. At least one of the plurality of gas flow formations is an inwardly directing gas flow formation for directing gas flow away from the outer envelope and at least one of the gas flow formations is an outwardly directing gas flow formation for directing gas flow towards the outer envelope.

Abstract: A fluid routing module for a vacuum pumping system, the fluid routing module comprising: a first fluid inlet; a second fluid inlet; a fluid outlet; a first fluid line coupled between the first fluid inlet and the fluid outlet; a second fluid line coupled between the second fluid inlet and the fluid outlet; a first restrictor configured to restrict a flow of the fluid therethrough, the first restrictor being disposed along the first fluid line; a vacuum pump disposed along the second fluid line; and one or more valves configured to selectably direct a fluid flow through either the first fluid line or the second fluid line.

Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool comprises: determining a concentration of carbon monoxide produced by the abatement apparatus when treating the effluent stream; and adjusting an operating parameter of the abatement apparatus in response to the concentration of carbon monoxide. In this way, the performance of the abatement device can be controlled by simply adjusting the operating parameters of the abatement device in response to the amount of carbon monoxide being produced to create conditions within the abatement apparatus which improve the removal of compounds being treated within the abatement device, while reducing undesirable by-products and without requiring advanced knowledge of the content of the effluent stream.

Abstract: The present disclosure relates to vacuum pump 10 comprising a substantially hermetically sealed enclosure 40, a core pump assembly located within the enclosure 40, and an inert purge gas inlet 70 fluidly connected to the enclosure 40 for supplying inert purge gas to an interior of the enclosure 40 surrounding the core pump assembly. By providing a sealed enclosure 40 around the core pump assembly and supplying inert purge gas thereto via the inlet 70, an inert positive pressure can be applied to the core pump assembly that reduces leakage of process gas from the core pump assembly such that seals therein can be removed or reduced. In particular, the need for elastomer seals that may be expensive and not be suited to high temperature or corrosive process gas conditions can be removed.

Abstract: At least a part of a stator for a vacuum pump, comprising: a plurality of walls defining therebetween at least a part of a pumping chamber; a channel formed within one or more of the walls of the plurality of walls, the channel comprising a first opening at a first end of the channel and a second opening at a second end of the channel, the first opening being an opening in an internal surface of the one or more of the walls and being in fluid communication with the pumping chamber; and a pressure relief valve disposed within the channel.

Abstract: Aspects of the present invention relate to an induction heating system for heating a component. The induction heating system includes a power module for outputting an alternating current, the power module being operable to output the alternating current at a variable supply frequency. A controller is provided to identify at least one resonant frequency of the alternating current supplied to the at least one induction element. The controller is configured to determine an operating temperature of the component in dependence on the at least one identified resonant frequency. Aspects of the present also relate to an induction heating controller; a component having an induction heating element; and to a method of heating a component by inductive heating.

Abstract: A vacuum pump comprising a turbomolecular stage and a drag stage, the vacuum pump comprising a stator and a rotor. The rotor comprises a turbomolecular rotor and a drag rotor attached together. The turbomolecular rotor comprises a hub from which a plurality of blades extend, the hub comprising a mounting portion for mounting to a spindle of a motor and a hollow cylindrical portion, the hollow cylindrical portion extending from the mounting portion towards an outlet end of the turbomolecular stage. The drag rotor comprises a cylindrical skirt and an attachment part extending away from the cylindrical skirt, the attachment part extending within the hollow cylindrical portion of the hub of the turbomolecular rotor and being attached thereto at a point that is closer to the mounting portion than to the outlet end of the turbomolecular rotor.

Abstract: A system comprising a pumping system configured to pump respective exhaust gases from each of a plurality of chemical etching process chambers and to combine the exhaust gases to provide a combined exhaust gas, and a noble gas recovery system configured to process the combined exhaust gas to remove one or more noble gases therefrom.