Abstract: An inlet assembly includes: a combustion chamber module defining a plenum configured to supply combustion reagents to its combustion chamber, the combustion chamber module having a mount configured to interface with a common head which defines at least one gallery configured to supply the combustion reagents, the mount comprising a plurality of feed apertures positioned for fluid communication of the combustion reagents between the gallery and the plenum. In this way, a mount which is suited to its combustion chamber module interfaces with a standard or common head, which enables the combustion reagents to be supplied from the gallery of the common head via the mount and to the plenum of the combustion chamber module. This enables a common head to be used for different combustion chamber modules, which reduces the number of parts required for the assembly and maintenance of the abatement apparatus.

Abstract: An abatement apparatus includes a combustion chamber formed by a foraminous sleeve defining an upstream portion of the combustion chamber for treating an effluent stream, the upstream portion of the combustion chamber having an inlet for receiving the effluent stream and a wetted sleeve fluidly coupled with foraminous sleeve, the wetted sleeve defining a downstream portion of the combustion chamber, wherein the foraminous sleeve is configured to provide a foraminous axial surface facing downstream towards the downstream portion of the combustion chamber. In this way, the foraminous surface not only faces inwards towards the upstream portion of the combustion chamber, but also faces downstream, towards the downstream portion of the combustion chamber.

Abstract: This application relates to a mist-trap for a wet-scrubber abatement system. The mist trap comprises a demisting chamber having a gas inlet for receiving mist-laden exhaust gas from the wet-scrubber abatement system, a liquid capture surface on which the mist droplets may coalesce to form a liquid, and a gas outlet through which relatively dry gas may exit the chamber. The mist trap is configured such that at least a first portion of the captured liquid exits the chamber via the gas inlet to return to the wet-scrubber abatement system. The application also relates to a water-collecting baffle, an abatement system, and a method of moderating particulate build-up in a primary flow channel of an exhaust draw amplification device.

Abstract: An inlet assembly includes an inlet nozzle configured to deliver an effluent stream into a combustion chamber of an abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter.

Abstract: A modular abatement apparatus is for abatement of an effluent stream from a semiconductor processing tool and comprises: a housing defining a common housing chamber; a plurality of combustion chamber modules positionable within the common housing chamber for treating the effluent stream, each combustion chamber module containing a foraminous sleeve defining a combustion chamber therewithin. In this way, multiple combustion chambers may be provided within a single, common housing, each of which may be configured to treat a particular effluent stream flow. Accordingly, the number of combustion chambers can be selected to match the different types and flowrates of the effluent stream expected from any particular processing tool. This provides an architecture which is readily scalable to suit the needs of different effluent gas stream types and flowrates while retaining a common housing which may interface with upstream and downstream components.

Abstract: A sealing gasket (20) for a vacuum pump comprising: a first sealing member (22) defining a closed shape (preferably a rounded square or rounded rectangle) and comprising: a first surface (30); a second surface (32) opposite the first surface (30); a first inner surface (34); and a first outer surface (36) opposite to the first inner surface (34), wherein the first inner surface (34) and the first outer surface (36) are disposed between the first surface (30) and the second surface (32); a second sealing member (24) defining a closed shape (preferably a rounded square) and comprising: a third surface (40); a fourth surface (42) opposite the third surface (40); a second inner surface (44); and a second outer surface (46) opposite to the second inner surface (44), wherein the second inner surface (44) and the second outer surface (46) are disposed between the third surface (40) and the fourth surface (42); a first longitudinal sealing member (26) connected between the first outer surface (36) and the second oute

Abstract: A sealing gasket (20) for a vacuum pump, the sealing gasket (20) comprising: a first surface (30, 40); a second surface (32, 42) opposite to the first surface (30, 40); opposing side walls (34, 36; 44, 46) disposed between the first surface (30, 40) and the second surface (32, 42); and one or more protrusions (48a, 48b, 48c, 48d) extending from the first surface.

Abstract: The present disclosure relates to a rotor blade for a turbomolecular vacuum pump. The rotor blade has a blade angle of 0° at the root, which increases continuously along substantially the entire span of the rotor blade. The rotor blade tapers from a maximum thickness at the root to a point of minimum thickness over a portion of its span, and is made of a polymer material reinforced with short fibres. This provides a rotor blade with a more complex geometry that has reduced weight and improved performance and cost-effectiveness. The present disclosure also relates to a rotor comprising the rotor blade, a mould for injection moulding the rotor blade or rotor, and a method of injection moulding the rotor blade or rotor.

Abstract: Aspects and embodiments relate to plasma torch device component monitoring, a plasma torch device component monitoring system and a plasma torch device including such a monitoring system or suitable for use with such a system. The monitoring method comprises: collecting electromagnetic radiation generated by a plasma torch in a plasma torch device; analysing the collected electromagnetic radiation generated by the plasma torch; comparing the analysed electromagnetic radiation generated to known electromagnetic radiation associated with one or more components of the plasma torch device; and triggering one or more actions in the event that the analysed emission differs from the known emission. Such a monitoring method can allow for ameliorative action to be taken in the event that degradation of one or more components forming the device is detected.

Abstract: A shell stator (12, 14) for a vacuum pump, the shell stator (12, 14) comprising: a seal groove (50, 52) formed in a surface of the shell stator (12, 14), the seal groove (50, 52) being defined by a first side wall (60), a second side wall (62) opposite to the first side wall (60), and a bottom surface (64) disposed between the first side wall (60) and the second side wall (62), the bottom surface (64) being opposite to an opening of the seal groove (50, 52); wherein the seal groove (50, 52) comprises: a protrusion (68) formed in the first side wall (60) and extending towards the second side wall (62); and an indentation (69) formed in the second side wall (62) opposite to the protrusion (68).

Abstract: The present invention provides a foraminous burner liner for a gas abatement system. The burner liner comprises a hollow body defined by a wall, the wall comprising a plurality of interconnected substantially concentric layers. Each layer of the wall comprises a substantially regular openwork mesh; wherein the substantially regular openwork mesh of each layer is configured such that it is out of phase with one or more adjacent layers, and wherein the wall comprises sufficient layers arranged such that the wall is optically opaque when viewed externally in any radially inward direction normal to the wall.

Abstract: A heat exchanger is disclosed. The heat exchanger comprises a first set of first conduits for conveying a first fluid, first conduits having a triangular cross-section portion; and a second set of second conduits for conveying a second fluid, the second conduits having a triangular cross-section portion, wherein adjacent first conduits are interspaced by an intervening second conduit. In this way, the conduits may be located closely together with a space-efficient configuration which helps to improve the exchange of heat between the first and second fluids while also providing a compact arrangement which minimises the amount of material used to construct the heat exchanger.

Abstract: A method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream from a processing tool and an abatement apparatus are disclosed. The method of optimising operating conditions in an abatement apparatus configured to treat an effluent stream containing PFC from a processing tool comprise: changing an operating parameter which controls an operating condition of the abatement apparatus; determining a change in a PFC concentration present in an exhaust stream of the abatement apparatus; and determining whether to retain the operating parameter based on the change in the PFC concentration. In this way, the concentration of PFC present in the exhaust can be used to determine whether the abatement apparatus is operating under the correct operating conditions or not.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element is enclosed within the wall between the outer and inner facing wall surfaces. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: An inlet assembly for an abatement apparatus includes: an effluent stream conduit configured to convey an effluent stream along a major direction of flow within the effluent stream conduit; an inlet nozzle fluidly coupled with the effluent stream conduit and configured to convey the effluent stream received from the effluent stream conduit to an abatement chamber of the abatement apparatus; and a baffle interposed between the effluent stream conduit and the inlet nozzle, the baffle being shaped and configured to redirect flow of the effluent stream from the effluent stream conduit into the inlet nozzle by inhibiting effluent stream flow along the major direction of flow into the inlet nozzle. A line-of-sight flow from the effluent stream conduit into the inlet nozzle is prevented by the baffle and the effluent stream instead follows a non-line-of-sight or diversionary path from the effluent stream conduit into the inlet nozzle, which improves DRE.

Abstract: The present disclosure relates to a thermal conductivity vacuum gauge assembly. The assembly comprises a body defining an internal chamber for receiving working gas and a heater element disposed within the chamber. The body is defined by a wall having an outer facing wall surface and an opposing inner facing wall surface. A thermal compensation element and a thermal equalisation element are in thermal communication with the body. The body is made of a material with a first thermal conductivity, and the thermal equalisation element is made of a material with a second thermal conductivity that is higher than the first thermal conductivity. The present disclosure also relates to a thermal conductivity vacuum gauge including the assembly.

Abstract: An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent stream from a semiconductor processing tool and comprises: a first abatement device configured to receive the effluent stream and operable to run in an active mode to treat the effluent stream; a second abatement device operable to run in an idle mode; and control logic operable, on receipt of an indication of an alarm condition associated with the first abatement device, to run the second abatement device in the active mode. In this way, a first or primary abatement device is provided which treats the effluent stream and a second or back-up abatement device is provided, should the first abatement device malfunction. However, by only causing the second abatement device to operate in the active mode when the first abatement device malfunctions, significant energy savings can be made.

Abstract: A valve module for a vacuum pumping system, comprising: a plurality of inlets for receiving a fluid; a plurality of pressure sensors, each configured to measure a fluid pressure associated with a respective inlet; a first fluid line manifold; a second fluid line manifold; a plurality of multifurcating conduits, each connecting a respective inlet to both the first and second fluid line manifolds; a plurality of valves disposed in the multifurcating conduits; and a valve controller coupled to the sensors and the valves; wherein the valve controller is configured to control, based on pressure measurements from the sensors, the valves such that a fluid flow through a multifurcating conduit is directed to either only the first fluid line manifold or only the second fluid line manifold.

Abstract: A flammable gas diluter includes a dilution vessel having an outer envelope defining a longitudinal flow passage from an inlet to an outlet; at least one air inlet assembly for directing a flow of air into the inlet of the dilution vessel; a flammable gas inlet arrangement located towards an inlet end of the dilution vessel; two gas flow generators configured to pump a flow of air into the air inlet assembly, the two gas flow generators being located upstream of the flammable gas inlet arrangement; and two dampers, each of the dampers being mounted between a corresponding gas flow generator and the dilution vessel. Control circuitry is configured to open a damper during an operational mode of the corresponding gas flow generator and to close the damper when the corresponding gas flow generator is stopped in standby mode.

Abstract: A flammable gas diluter includes: a dilution vessel comprising an outer envelope defining a longitudinal flow passage from an inlet to an outlet; at least one air inlet for directing a flow of air into the inlet of the diluter; and a flammable gas inlet arrangement. The dilution vessel has a plurality of gas flow directing formations arranged between the flammable gas inlet arrangement and the outlet, each being at a different position along a length of the dilution vessel. At least one of the plurality of gas flow formations is an inwardly directing gas flow formation for directing gas flow away from the outer envelope and at least one of the gas flow formations is an outwardly directing gas flow formation for directing gas flow towards the outer envelope.