Patents Assigned to Edwards Limited
  • Patent number: 10888817
    Abstract: A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.
    Type: Grant
    Filed: March 28, 2018
    Date of Patent: January 12, 2021
    Assignee: Edwards Limited
    Inventors: Andrew Seeley, Duncan Michael Price
  • Patent number: 10865983
    Abstract: An inlet assembly for a burner includes an inlet nozzle defining an inlet aperture, a non-circular outlet aperture, and a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying an effluent gas stream from the inlet aperture to the outlet aperture for delivery to the combustion chamber of the burner. The nozzle bore extends from the inlet aperture to the non-circular outlet aperture. A baffle couples the inlet portion with the outlet portion, and defines a baffle aperture positioned within the nozzle bore. The baffle aperture has a reduced cross-sectional area compared to that of the outlet portion adjacent the baffle. A secondary gas stream nozzle provides a secondary gas stream. The secondary gas stream nozzle being positioned to mix the secondary gas stream with the effluent gas stream within the nozzle bore.
    Type: Grant
    Filed: April 24, 2017
    Date of Patent: December 15, 2020
    Assignee: Edwards Limited
    Inventor: Ian David Benzeval
  • Patent number: 10844864
    Abstract: Turbomolecular stator components include an array of stator blades, arranged to interact with pumped gases. Spacers are used to locate the stator blade array and couple the stator blade array to a housing. The stator components include an outer section that is resilient and arranged to cooperate with the spacers.
    Type: Grant
    Filed: August 2, 2017
    Date of Patent: November 24, 2020
    Assignee: Edwards Limited
    Inventor: Paul Milner
  • Patent number: 10837836
    Abstract: Infra-red sensors are often used in turbo molecular pumps to detect the temperature of the rotor or other mechanical parts and therefore indicate imminent, or potential, running failures. As deposits build up on either the infra-red sensor, or on the surface being monitored, the reading given by the sensor may not be a true representation of the actual surface temperature which can cause the pump controller to fail to stop the pump in time. The present invention provides a method and device for calibrating the sensor by creating a determined temperature rise in the sensor whilst keeping the rotor at ambient temperature. In particular the present invention uses the motor stator as the heater for causing the temperature increase.
    Type: Grant
    Filed: September 6, 2017
    Date of Patent: November 17, 2020
    Assignee: Edwards Limited
    Inventors: Brent Haslett, Andrew Grantham, James Alexander Haylock
  • Publication number: 20200340467
    Abstract: A vacuum pumping and/or abatement system for evacuating and/or abating fluid from an entity, the system comprising: a first module comprising a vacuum pumping apparatus for pumping the fluid from the entity and/or an abatement apparatus for abating the fluid evacuated from the entity; and a second module arranged adjacent to the first module in a first system dimension; wherein the first and second modules each have a maximum size in the first system dimension that is a respective integer multiple of a common fixed system value.
    Type: Application
    Filed: November 5, 2018
    Publication date: October 29, 2020
    Applicants: Edwards Limited, Edwards Limited
    Inventors: Christopher Mark Bailey, Craig Leonard Sands
  • Patent number: 10814336
    Abstract: Known wet electrostatic precipitators are large and inefficient. The present invention enables the production of smaller, more efficient and long lasting wet electrostatic precipitators by the addition of a central bore in the inner electrode through which a first purge flow is passed and directed into the precipitator chamber, perpendicular to the direction of flow of the gas to be treated through the chamber to urge the particulate into the water curtain. A second, larger, cleaning purge flow is also provided to disturb the water curtain such that it cleans the inner electrode of any deposited particulate.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: October 27, 2020
    Assignee: Edwards Limited
    Inventors: Sergey Alexandrovich Voronin, Mark James Attwood, Andrew Arthur Chambers, John Leslie Bidder
  • Patent number: 10816194
    Abstract: A radiant burner for treating an effluent gas stream from a manufacturing processing tool includes: a porous sleeve at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber; and an electrical energy device coupled with the porous sleeve and operable to provide electrical energy to heat the porous sleeve which heats the treatment materials as they pass through the porous sleeve into the treatment chamber. In this way, electrical energy, rather than combustion, is used to raise the temperature within the treatment chamber in order to treat the effluent gas stream.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: October 27, 2020
    Assignee: Edwards Limited
    Inventor: Andrew James Seeley
  • Patent number: 10808713
    Abstract: This is invention relates to a bearing support for a vacuum pump and, in particular, to a polymer bearing support for a vacuum pump. The invention further encompasses vacuum pumps comprising polymer bearing supports, and methods of manufacturing bearing supports.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: October 20, 2020
    Assignee: Edwards Limited
    Inventors: Emiliano Lucchetta, Reuben Day
  • Patent number: 10802941
    Abstract: A monitoring apparatus may include reception logic operable to receive processing characteristic data generated during the processing of the effluent stream; segregation logic operable to segregate the processing characteristic data into contributing processing characteristic data associated with contributing periods which contribute to a condition of the at least one processing tool and non-contributing processing characteristic data associated with non-contributing periods which fail to contribute to the condition; and fault logic operable to utilise the contributing processing characteristic data and to exclude the non-contributing processing characteristic data when determining a status of the condition.
    Type: Grant
    Filed: January 13, 2016
    Date of Patent: October 13, 2020
    Assignee: Edwards Limited
    Inventors: Michael Mooney, Vincent Giorgi
  • Patent number: 10767860
    Abstract: A treatment apparatus for treating an effluent gas includes a combustion chamber; a burner; an inlet for receiving secondary combustion air; an exhaust gas outlet for outputting exhaust gases from the combustion chamber; and a heat exchanger. The heat exchanger is configured to exchange heat between a first fluid and a second fluid flowing through respective first and second fluid flow paths. The first fluid flow path is connected to the inlet and the second fluid flow path is connected to the outlet such that the exhaust gases received at the outlet flow into the second fluid flow path. The heat exchanger comprises a fluid flow communication path for providing a path for flow of a portion of the exhaust gases from the second fluid into the first fluid; and at least one inlet aperture for inputting the first fluid to the combustion chamber.
    Type: Grant
    Filed: October 27, 2016
    Date of Patent: September 8, 2020
    Assignee: Edwards Limited
    Inventor: Gary Peter Knight
  • Patent number: 10767653
    Abstract: The present invention relates to a turbo-molecular vacuum pump comprising bearings for supporting the drive shaft and/or the rotor in relation to a pump body, wherein a first bearing is coupled to the rotor and disposed on supporting mount at the high vacuum side of the rotor and radial struts extend from the supporting mount and form an integral part of the body; the invention is characterised in that the radial struts comprise a hinge portion that can flex to allow relative movement of the inlet flange with respect to the supporting mount to reduce distortion effects.
    Type: Grant
    Filed: December 13, 2016
    Date of Patent: September 8, 2020
    Assignee: Edwards Limited
    Inventors: Alan Ernest Kinnaird Holbrook, Paul Milner
  • Patent number: 10702824
    Abstract: Venturi Scrubbers are used to separate particulate from a large range of fluids. Many provide additional liquid and/or gas to drive the fluid and aid in the removal of particulate. The present invention provides a liquid ring pump through which the fluid to be treated is first passed and then exhausted, with additional work fluid to a Venturi scrubber such that the particulate can be separated from the exhaust fluid.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: July 7, 2020
    Assignee: Edwards Limited
    Inventors: Gary Peter Knight, Andrew James Seeley, Duncan Michael Price
  • Patent number: 10697461
    Abstract: A vacuum pump lubricant supply system has a lubricant reservoir and a wicking element. The body portion has opposed major surfaces and a finger. The lubricant reservoir has a major surface engaging one of the opposed major surfaces of the body portion so that lubricant can migrate through the engaging major surfaces into the body portion. The finger projects from the body portion to engage a lubricant transfer device provided on a rotor shaft so that lubricant can wick from the body portion to the lubricant transfer device via the finger. The body portion has an edge provided with a cut-out so that the major surface of the body portion that engages the major surface of the lubricant container has a total surface area that is less than the total surface area of the major surface of the lubricant container.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: June 30, 2020
    Assignee: Edwards Limited
    Inventor: Oliver James Rudge
  • Patent number: 10670016
    Abstract: A monitoring apparatus comprises at least one sensor for measuring a current of the electric motor to generate a time-based signal and at least one electronic processor configured to transform the time-based signal into a frequency-based signal and to analyse the frequency-based signal to identify a signal pattern representing a pump fault condition. By monitoring the frequency-based signal, the monitoring apparatus can identify a pump fault condition.
    Type: Grant
    Filed: February 25, 2016
    Date of Patent: June 2, 2020
    Assignee: Edwards Limited
    Inventor: Laurent Marc Philippe
  • Patent number: 10661217
    Abstract: The abatement apparatus includes a porous element at least partially defining a treatment chamber and through which treatment materials pass for introduction into the treatment chamber for treatment of an effluent gas stream; and an infra-red heating device operable to emit infra-red energy to heat the porous element which heats the treatment materials as they pass through the porous element into the treatment chamber. In this way, infra-red energy, rather than combustion, can be used to raise the temperature within the treatment chamber in order to treat the effluent gas stream. This allows the apparatus to be used in environments where no fuel gas exists or where the provision of fuel gas is considered undesirable. Also, heating the treatment materials as they pass through the porous sleeve, rather than simply using radiant heat to heat the treatment chamber enables significantly more energy to be imparted into the treatment materials.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: May 26, 2020
    Assignee: Edwards Limited
    Inventors: Duncan Michael Price, Gary Peter Knight
  • Patent number: 10662955
    Abstract: A vacuum pump may include a rotor and a stator, wherein the rotor is supported by metal bearings (such as steel bearings) to allow relative rotation of the rotor with respect to the stator. A liquid PFPE lubricant compound is provided to lubricate the bearings, wherein the lubricant further comprises a solid lubricant that is in suspension in the liquid lubricant. The solid lubricant can comprise any of graphite, graphene and molybdenum disulphide. In other words, the inventive concept encompasses a lubricated bearing arranged to support a rotating shaft in a body under sub-atmospheric conditions, wherein a lubricant used to lubricate the bearing comprises liquid PFPE lubricant having a low vapour pressure, and a solid lubricant that is held in suspension in the liquid lubricant. The solid lubricant may comprise any of graphite, graphene and molybdenum disulphide.
    Type: Grant
    Filed: March 11, 2016
    Date of Patent: May 26, 2020
    Assignee: Edwards Limited
    Inventor: Christopher John Shaw
  • Patent number: 10655626
    Abstract: Liquid ring pumps are used to pump a variety of fluid types. Corrosive fluids are easily handled by the work fluid but can cause corrosion of pumping mechanisms. The present invention provides a magnetically driven liquid ring pump with corrosion resistant pumping mechanisms which achieves a longer time between service intervals.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: May 19, 2020
    Assignee: Edwards Limited
    Inventors: Gary Peter Knight, Andrew James Seeley, Geoffrey Young, Duncan Michael Price
  • Publication number: 20200124050
    Abstract: A twin-shaft pump comprising: a pumping chamber; two rotatable shafts each mounted on bearings is disclosed. Each of the two rotatable shafts comprises at least one rotor element, the rotor elements being within the pumping chamber and the two rotatable shafts extending beyond the pumping chamber to a support member. The support member comprises mounting means for mounting the bearings at a predetermined distance from each other, the predetermined distance defining a distance between the two shafts. A thermal break between the pumping chamber and the support member is provided for impeding thermal conductivity between the pumping chamber and the support member, such that the pumping chamber and support member can be maintained at different temperatures. The support member and the rotor elements are formed of different materials, a coefficient of thermal expansion of a material forming the support member being higher than a coefficient of thermal expansion of a material forming the rotor elements.
    Type: Application
    Filed: June 15, 2018
    Publication date: April 23, 2020
    Applicant: Edwards Limited
    Inventors: Neil Turner, Phillip North, Michael Henry North, Malcolm William Gray, David Alan Turrell
  • Patent number: 10625205
    Abstract: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.
    Type: Grant
    Filed: June 15, 2016
    Date of Patent: April 21, 2020
    Assignee: Edwards Limited
    Inventors: Christopher Mark Bailey, Clive Marcus Lloyd Tunna, Jack Raymond Tattersall, Ingo Stephen Graham, Michael Roger Czerniak, Gary Peter Knight, Darren Mennie, Duncan Michael Price, Derek Martin Baker, Andrew James Seeley
  • Patent number: 10619847
    Abstract: An inlet assembly for a burner includes an inlet nozzle defining an inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the burner, a non-circular outlet aperture, and a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying the effluent gas stream from the inlet aperture to the outlet aperture for delivery to the combustion chamber of the burner.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: April 14, 2020
    Assignee: Edwards Limited
    Inventors: Andrew James Seeley, Duncan Michael Price