Abstract: A radiant burner for treating an effluent gas stream from a manufacturing process tool may include: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; and a plenum surrounding the porous sleeve supplying the combustion materials to the porous sleeve, the plenum being configured to provide the combustion materials with varying stoichiometry along a length of the porous sleeve. This approach of varying the stoichiometric ratios of the combustion materials correspondingly varies the heat generated by those combustion materials along the length of the porous sleeve. By varying the stoichiometry of the combustion materials to compensate for variations in the heat generated within the combustion chamber along the length of the porous sleeve, a more uniform temperature can be achieved along the length of the porous sleeve within the combustion chamber.

Abstract: A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.

Abstract: A vacuum system securing device to releasably secure a sealed connection between a first part and a second part of a vacuum system has a shaft having a longitudinal axis and is provided with a plurality of force applying members. The shaft is to be attached to the first part of the vacuum system to define a gap between the first part and the force applying members to receive the second part by a movement of the second part in a lengthways direction of the shaft. The shaft is movable relative to the first part to cause the force applying members to narrow the gap to apply a force pressing the second part towards the first part.

Abstract: At least one gaseous impurity, for example silane, is removed by absorption from a feed gas stream, for example a gas stream comprising nitrogen and hydrogen, the gaseous impurity being less volatile than the feed gas stream. The absorption is effected by a sub-cooled absorbent at a first cryogenic temperature and a first pressure. The absorbent is typically propane. The absorption may be conducted in a liquid-vapor contact column (130). Absorbent containing impurity may be regenerated in a regeneration vessel 150 and returned to the column (130).

Abstract: Liquid ring pumps are used to pump a variety of fluid types. The present invention provides a two stage liquid ring pump through which an exhaust gas comprising compounds to be destroyed is passed. The exhaust gas passes through the first stage to a gas abatement device, following which it is passed back to the second stage of the liquid ring pump for removal of the compounds formed in said abatement device. The stages of the liquid ring pump may be adjustable.

Abstract: A vacuum pumping system comprises a plurality of vacuum pumping arrangements for evacuating an enclosure and an auxiliary vacuum chamber for evacuation by at least one first vacuum pumping arrangement. The vacuum pumping system has a first state for evacuating the enclosure and a second state for conserving power consumed by the system. In a first stage of the second state the first vacuum pumping arrangement is arranged to evacuate an exhaust of at least one second vacuum pumping arrangement and in a second stage the exhaust of the first pumping arrangement is arranged to be evacuated by the auxiliary vacuum chamber.

Abstract: In order to increase the operable range of a DC plasma torch in an abatement apparatus, the apparatus comprises a power control configured for controlling the power of the plasma torch by selective control of the plasma source gas flow regulator.

Abstract: A radiant burner and method are disclosed. The radiant burner is for treating an effluent gas stream from a manufacturing process tool and comprises: a combustion chamber having a porous sleeve through which combustion materials pass for combustion proximate to a combustion surface of the porous sleeve; a combustion characteristic monitor operable to determine combustion performance of the radiant burner by monitoring infra-red radiation emitted from the combustion surface; and a radiant burner controller operable to control operation of the radiant burner in dependence upon combustion performance determined by the combustion characteristic monitor. Accordingly, aspects recognize that if a burner is suffering from an excessive flow of air the burner pad or combustion surface will typically cool, which results in an increase in unwanted emissions in the exhaust produced by a radiant burner. The cooling also results in a reduction in infrared radiation determined by the combustion surface.

Abstract: The present invention relates to a vacuum pump comprising a turbo molecular pumping mechanism wherein an operative characteristic of the turbomolecular pumping mechanism is dependent on the orientation of the vacuum pump and the pump comprises an orientation sensor for sensing the orientation.

Abstract: An inlet assembly for a burner includes a manifold having an inlet aperture and a coaxially aligned outlet aperture, the manifold having a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying an effluent gas from an inlet pipe coupleable with the inlet aperture to the outlet aperture for delivery to a combustion chamber of the burner. A nozzle bore scraper is housed within the nozzle bore. An actuator is operable to reciprocate the nozzle bore scraper relative to the nozzle bore, the nozzle bore scraper reciprocating along the longitudinal axis within the nozzle bore between a rest position and an actuated position to reduce effluent gas deposits within the nozzle bore.

Abstract: A scroll compressor 10 may include an orbiting scroll having an orbiting scroll wall extending axially from an orbiting scroll plate towards a fixed scroll; a fixed scroll having a fixed scroll wall extending axially from a fixed scroll plate towards the orbiting scroll; and an axially extending drive shaft having an eccentric shaft portion so that rotation of the eccentric shaft portion imparts an orbiting motion to the orbiting scroll relative to the fixed scroll. An axial end portion of the orbiting scroll wall has a first seal for sealing between the orbiting scroll wall and the fixed scroll plate, and an axial end portion of the fixed scroll wall has a second seal for sealing between the fixed scroll wall and the orbiting scroll plate; and the first seal or the second seal has an aspect ratio of axial length to radial width which is 1.25:1 or greater.

Abstract: The present invention relates to a rotor for a vacuum pump 150 having a roots pumping mechanism, the rotor comprising at least two hollow lobes 160, 162, 164, 166, each lobe having an outer wall 208 which defines a lobe profile, a hollow cavity 210 generally inward of the outer wall, and at least one strengthening rib 226 located in the cavity to resist stress on the lobes generated during rotation.

Abstract: A monitoring apparatus comprises at least one sensor for measuring a current of the electric motor to generate a time-based signal and at least one electronic processor configured to transform the time-based signal into a frequency-based signal and to analyse the frequency-based signal to identify a signal pattern representing a pump fault condition. By monitoring the frequency-based signal, the monitoring apparatus can identify a pump fault condition.

Abstract: In some examples, a control module for a voltage converter may have an input for connection to an AC supply having an operating voltage range. A first detector is provided for detecting the operating voltage range of the AC supply and generating a first control signal to identify the detected operating voltage range. A second detector is also provided for detecting the operating voltage range of the AC supply and generating a second control signal to identify the detected operating voltage range. The control module has one or more switches for selectively enabling and/or disabling a voltage multiplier in response to said first and second control signals. The present disclosure also relates to a method of controlling a voltage converter.

Abstract: A pumping system for evacuating an enclosure comprises a pumping mechanism (30), a motor (32) for driving the pumping mechanism, and a controller (36) for controlling the motor. The controller sets a maximum value for a rotational frequency of the motor and a maximum value for a current in the motor, and, to optimise the performance of the pumping system, independently adjusts the maximum values during evacuation of the enclosure.

Abstract: A multi-stage vacuum pump comprising: first and second half-shell stator components defining a plurality of pumping chambers and for assembly together along respective longitudinally extending faces; first and second end stator components for assembly at respective longitudinal end faces of the first and second half-shell stator components; gaskets for sealing between the first and second half-shell stator components when assembled together at the longitudinally extending faces; and O-rings for sealing between the first and second end stator components and the first and second half-shell stator components when assembled; wherein annular channels intersect longitudinal recesses and each longitudinal recess comprises a stop fixed relative to the intersection, and the gasket and the longitudinal recess are configured that when the gasket is located in the recess during assembly the gasket is biased against the stop for locating an end portion of the gasket relative to the intersection.

Abstract: The present invention relates to a multi-stage vacuum pump having a plurality of compression stages 12, 14, 16, 18 20 and a booster stage 22. The pump 10 is arranged to pump a chamber 24. The pumping stages include respective rotors supported for rotation on one or more common drive shafts 26. A recirculation valve 28 is associated with the booster stage 22 for selective recirculation of pumped fluid from an outlet 32 to an inlet 30 of the booster stage above a predetermined pressure.

Abstract: The present invention relates to a vacuum pump comprising a vacuum pumping mechanism comprising a rotor supported for rotation by a drive shaft, a first bearing assembly for controlling movement of the rotor during rotation of the drive shaft, a back-up bearing assembly for limiting said movement and a sensor for sensing when said movement is limited by the back-up bearing assembly.

Abstract: A pump insert (50) for supporting a rotor (14) of a pump comprises an annular resilient support (52) for engaging the body (26) of the pump, the support (52) extending about a rolling bearing (10) having an inner race (12) for engaging the rotor (14), an axially preloaded outer race (16) fixed to the support (52), and a plurality of rolling elements (18) located between the races. During assembly, the rolling bearing (10) can be accurately positioned within the support (52) so that there is a very low tolerance stack-up when the insert (50) is fitted to the rotor (14). Consequently, the position of the rotor (14) will hardly change, if at all, when the rolling bearing (10) is replaced during servicing of the pump.

Abstract: A multi-stage vacuum pump may include a sealing arrangement for sealing between the stator components of the pump. The end seals of the arrangement comprise an annular portion for sealing between end stator components and shell components and axial portions which extend from the annular portion and together with separate axial seals seal between the shell components.