Abstract: The present application relates to a scroll compressor comprising a scroll pumping mechanism which comprises an orbiting scroll (20) having an orbiting scroll wall (34) extending axially from an orbiting scroll plate (36) towards a fixed scroll (22) and a fixed scroll having an fixed scroll wall (28) extending axially from a fixed scroll plate (30) towards the orbiting scroll. The compressor further comprises an axially extending drive shaft (14) having an eccentric shaft portion (16) so that rotation of the eccentric shaft portion imparts an orbiting motion to the orbiting scroll relative to the fixed scroll for pumping fluid from an inlet (24) to an outlet (26) of the pumping mechanism.

Abstract: The present application relates to a scroll pump (10) which comprises two scrolls (20, 22) which are co-operable for pumping fluid from an inlet to an outlet on relative orbiting motion of the scrolls. Each scroll (20, 22) comprises a scroll base (30, 36) from which a scroll wall (28, 34) extends generally axially towards the base of the opposing scroll. At least a first portion of one or each of the scroll walls has formed in an axial end face (3 thereof a plurality of pockets (38) distributed along said first portion for disrupting leakage of fluid from a high pressure side of said scroll wall to low pressure side of said scroll wall.

Abstract: The invention provides a vacuum system (12) comprising a plurality of vacuum chambers (14, 16, 18, 20) connected in series and a vacuum pumping arrangement (10) for differential pumping the chambers. The vacuum pumping arrangement comprises a primary pump (22) having an inlet (23) connected for pumping a first vacuum chamber (14) and an outlet (25) for exhausting at or around atmosphere, a booster pump (24) having an inlet (27) connected for pumping a second vacuum chamber (16) and an outlet (29) connected to the inlet (23) of the primary pump; and a secondary pump (26, 28) having an inlet (31, 33) connected for pumping a third vacuum chamber (18, 20) and an outlet (35, 37) connected to the inlet (27) of the booster pump.

Abstract: The present invention relates to a scroll pump (10) comprising two scrolls (20, 22) which are co-operable for pumping fluid from an inlet (24) to an outlet (26) on relative orbiting motion of the scrolls. Each scroll comprises a scroll base (30, 36) from which a spiral scroll wall (28, 34) extends generally axially towards the base of the opposing scroll. The pump comprises a tip seal arrangement comprising an axial end portion of one or both of the scroll walls which locates a tip seal (508) for resisting the passage of pumped fluid across the or both scroll walls between the or both scroll walls and the scroll base of the opposing scroll. The tip seal arrangement limits axial movement of the tip seal towards the scroll base of the opposing scroll along a first spiral region (507) of the or both scrolls between the inlet and the outlet.

Abstract: A turbomolecular vacuum pump (54) comprises a housing (70) and a rotor (52) supported by a bearing arrangement (64) for rotation relative to the housing (70). The bearing arrangement (64) comprises a bearing (72, 74, 76, 78) supported in both radial and axial directions by a resilient support (80) comprising inner (86) and outer (88) annular portions connected by a plurality of flexible members (84), the resilient support (80) having a radial stiffness in the range from 50 to 500 N/mm.

Abstract: A pre-compressed vibration damper is provided for inhibiting transfer of vibration to an apparatus during the evacuation thereof by a pump.

Abstract: A plasma reactor (10) comprises a microwave resonant cavity (12) having a gas inlet (18) and a gas outlet (20), a waveguide (14) for conveying microwave radiation to the resonant cavity, and a plasma torch (40) for injecting into the resonant cavity a plasma stream containing ions for reacting with a gas flowing from the gas inlet (18) to the gas outlet (20).

Abstract: A scroll compressor comprises two scrolls (40, 46) having respective scroll plates (42, 48) and respective scroll walls (44, 50). The scroll walls intermesh so that on relative orbital movement of the scrolls a volume (52, 54) of gas is trapped between the scrolls and pumped from an inlet (31) to an outlet (33). The axial extent (A) of said trapped volume between said scroll plates is less along a first portion (62) of a flow path (56) between the inlet and the outlet than the axial extent (B) of said trapped volume along a second portion (64) of the flow path, and wherein the first portion is closer to the inlet than the second portion along the flow path.

Abstract: The present invention provides a method of treating an exhaust gas stream 12 from a processing chamber 10. The method comprises the steps of: conveying the exhaust gas from the processing chamber using a vacuum pumping arrangement 11, 22 or atmospheric line; abating the exhaust gas in an abatement region 18 of an abatement device 14; and injecting a cooling agent, such as a liquid 26, downstream of the abatement region to cool the abated gases in a cooling region 24 by phase change of the cooling agent.

Abstract: The present invention provides a pump comprising a regenerative pumping mechanism having a generally disc-shaped rotor mounted on an axial shaft for rotation relative to a stator. The rotor has first and second surfaces each having a series of shaped recesses formed in concentric circles thereon, and a stator channel formed in a surface of the stator which faces one of the rotor's first or second surfaces. Each of the concentric circles is aligned with a portion of a stator channel so as to form a section of a gas flow path extending between an inlet and an outlet of the pump, and the rotor divides the section of flow path into sub-sections such that gas can flow towards the outlet simultaneously along any sub-section, channel or rotor side. As a result, the gas being pumped flows in a parallel fashion along both surfaces of the rotor. Thus, this configuration can provide a pumping mechanism where gas pressures on either side of the rotor can be substantially equal or balanced.

Abstract: The present invention provides a pump comprising a regenerative pumping mechanism. A rotor of the pump has a generally disc-shaped pump rotor mounted on an axial driveshaft for rotation relative to a stator, the pump rotor having rotor formations disposed in a surface and defining at least a portion of a flow path for pumping gas from an inlet to an outlet. The rotor formations are formed between the pump rotor and the stator of the pumping mechanism. The pump rotor and the stator comprise an axial gas bearing arrangement for controlling axial clearance between the rotor and the stator during pump operation. Thus, this configuration of pump provides a gas bearing disposed on the rotor which enables an improved control of axial clearance between the pump's rotor and stator components.

Abstract: A vacuum pump rotor suitable for use in a vacuum pump is described for a vacuum pump that comprises a regenerative pumping mechanism. The rotor has a generally disc-shaped configuration and is mounted on an axial shaft for rotation relative to a stator of a vacuum pump. The rotor has a first and second opposing surface on which a rotor formations are disposed, each rotor formation defining a portion of a pump stage formed between the pump rotor and a stator for pumping gas from an inlet to an outlet in the same radial direction along the first and second opposing surface. A conduit is provided to interconnect the portions of the pump stage and assist with pressure imbalance that might occur on opposing sides of the rotor.

Abstract: A multi stage vacuum pump for pumping corrosive fluid with a first flow section of material less resistant to corrosion than the material of a second flow section downstream of the first flow section.

Abstract: A vacuum pump comprises a first pumping section 106, and, downstream therefrom, a second pumping section 108. The pump comprises a first pump inlet 120 through which fluid can enter the pump and pass through both the first and second pumping sections towards a pump outlet, and a second pump inlet 122 through which fluid can enter the pump and pass through only the second pumping section towards the outlet. The second pumping section 108 comprises at least one turbo-molecular pumping stage 109a, 109b and, downstream therefrom, an externally threaded rotor 109c.

Abstract: A method of inhibiting combustion within a vacuum pump is provided. The method steps include monitoring and composition of a fluid within the pump and supplying purge gas to the pump to inhibit the onset of a combustion of the fluid. There is also provided a pumping arrangement comprising a vacuum pump (1) together with means (8) for supplying purge gas to the pump. Sensor means (21a, 21b, 21c) are provided for outputting a signal indicative of the onset of a combustion condition within the pump. Control means (22) receive the signal and, in turn, actuate the supply means (9) dependant on the signal received.

Abstract: A screw pump and pumping arrangement including a screw pump having a chamber and externally threaded rotors mounted on shafts for counter-rotation and flow paths with fluid inlets located at a common low pressure side of the chamber.

Abstract: The present invention relates to a method of setting the pressure in a chamber of a vacuum system to a required pressure, the system comprising a pressure control system including a pump for evacuating gas from the chamber and a flow controller for allowing the flow of gas into the chamber, the method comprising setting an initial flow into and/or out of the chamber for achieving a pressure above the required pressure so as to increase the rate of pressure increase, the initial flow occurring over a transient period which does not allow the pressure to exceed the required pressure, and setting a preset flow into and/or out of the chamber after the transient period has elapsed for achieving and maintaining the required pressure.

Abstract: A pilot (10) is shown for igniting a combustible fluid stream. The pilot comprises an inlet (12), for receiving a fuel gas (14), including a fuel and air/oxygen mixture, into the pilot. Ignition means (16), for example a spark igniter or an ignition electrode, are provided for igniting the fuel gas (14). A generally annular conduit (18) is open along an annular extent forming a circumferential aperture (20). The conduit (18) conveys fuel gas from the inlet to the circumferential aperture. When the fuel gas flowing out of the circumferential aperture (20) is ignited a continuous annular pilot flame is generated radially of the conduit.

Abstract: First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first (120) and second (122) pump stage, and so that molecules entering the second inlet (28) pass to the outlet through an inter-stage volume (121) and second pump stage (122); wherein the first (120) and second (122) pump stages each comprise a turbo-molecular sub-stage (120a, 122a) and a molecular drag sub-stage (120b, 122b).

Abstract: A method for managing deposits within a pump mechanism (81) is provided. Fluid suitable for dissolving, diluting or otherwise disengaging deposits which have accumulated on the internal working surfaces of the pump is brought into contact with the mechanism. The performance of the pump is monitored and this data is used together with process data received from, or associated with, a tool (83) being evacuated by the pump to calculate (80) fluid flow characteristics which are required to compensate for the accumulation of deposits on the internal working surfaces of the pump. Fluid is then introduced (2, 84) into the pumping mechanism in accordance with the calculated fluid flow characteristics.