Abstract: A vacuum pump comprises a first pumping section (106), and, downstream therefrom, a second pumping section (108), The pump comprises a first pump inlet (120) through which fluid can enter the pump and pass through both the first and second pumping sections towards a pump outlet, and a second pump inlet (122) through which fluid can enter the pump and pass through only the second pumping section towards the outlet. The second pumping section (108) comprises an externally threaded rotor (109).

Abstract: The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gas are reduced or eliminated by introducing a reactive gas upstream of the device affected by deposits. The amount of introduced reactive gas is controlled by measuring gas phase concentrations of exhausted gas components upstream and downstream of the affected device, and, from those measurements, determining whether the components are being consumed in deposits on the affected device.

Abstract: The present invention relates to a scroll pump (10) comprising a pump housing (12), a drive shaft having a concentric shaft portion (14) and an eccentric shaft portion (16) connected to an orbiting scroll (20). The shaft is arranged to be driven by a motor (18) so that during use rotation of the shaft imparts an orbiting motion to the orbiting scroll relative to a fixed scroll (22) for pumping fluid between a pump inlet (24) and pump outlet (26) of the compressor. The fixed scroll has an opening through which the shaft extends and is connected to the orbiting scroll on an opposing side of the fixed scroll to the motor. A high vacuum region is located on an orbiting scroll side of the scroll arrangement and a low vacuum region is located generally on a fixed scroll side of the scroll arrangement.

Abstract: The present invention relates to a vacuum pumping system (18) for evacuating gas from a plurality of chambers (12, 14, 16) at different pressures. The pumping system comprises a plurality of compound vacuum pumps (20, 22), wherein each compound pump comprises a plurality of pumping mechanisms (24,26,28) connected in series between a pump inlet (30) and a pump exhaust (32) and an interstage port (34, 36) between pumping mechanisms in the series. The system is configured such that gas evacuated from one of said chambers is pumped through the interstage ports of at least two of said compound pumps.

Abstract: A scroll compressor (10) comprising a scroll pumping mechanism having two co-operating scrolls (14,16) mounted within a pump housing (18) so that on relative orbital movement of the scrolls fluid is pumped from a pump inlet (20) in the pump housing to a pump outlet (22) in the pump housing. The scroll compressor (10) further comprises a filter (24) located within the pump housing (18) along a fluid flow path (26) between the pump inlet (20) and the scroll pumping mechanism (12) for resisting the passage of particulates (28) upstream of the compressor.

Abstract: Apparatus for detecting a flammable atmosphere within a compressor during operation thereof is provided. The apparatus comprising a test chamber which is selectably connected between the compressor and an exhaust duct of the compressor using isolation device; an ignition device which is located within the test chamber for igniting any flammable fluid mixture present therein; and sensor associated with the test chamber for monitoring a parameter indicative of combustion within the test chamber and for outputting a signal indicative of the parameter to a controller.

Abstract: A vibration isolator is described for inhibiting transfer of vibration to an apparatus during evacuation thereof by a pump. The isolator comprising a bellows for isolating from the ambient atmosphere fluid drawn from the apparatus by the pump. A first flange is connected to one end of the bellows for mounting the isolators the apparatus, and a second flange is connected to the other end of the bellows for mounting the isolator to the pump. The bellows surrounds a resilient element, preferably a helical tension spring, which is substantially co-axial with the bellows. The resilient element has a first end located proximate to the first flange and connected to the second flange, and a second end located proximate to the second flange and connected to the first flange.

Abstract: Scroll-type pumping apparatus comprises a stator (104) comprising a fixed scroll member (106) having an end plate with a first spiral wrap (110) extending therefrom; an orbital scroll member (108) having an end plate with a second spiral wrap (112) extending therefrom to intermesh with the first spiral wrap; a plurality of flexible supports (118) each having one end connected to the orbital scroll member and another end connected to the stator to support the orbital scroll member relative to the stator, and a linear drive system (120) for driving the orbital scroll member to orbit relative to the fixed scroll member. The use of a linear drive system in combination with the flexible supports can provide apparatus having no rotational or rubbing parts.

Abstract: A rotor assembly for a multi-stage pump is provided. The assembly includes a drive shaft, a rotor component and a drive component. The rotor component is located on the drive shaft and includes a rotor element for displacing fluid through the pump when the drive shaft is rotated. The drive component is anchored to the drive shaft and transmits torque from the drive shaft to the rotor component to effect rotation of the rotor component. A sleeve element is integrated with either the drive component or the rotor component and is used to space the rotor element from the drive component. An interface surface is located on the sleeve element for interacting with the other one of the drive component and the rotor component in order to maintain orthogonal alignment between the rotor element and the drive shaft. A driver is provided for transmitting torque between the drive component and the rotor component.

Abstract: The present invention provides a positive displacement dry pump comprising: a plurality of vacuum pumping stages comprising a respective plurality of pumping mechanisms driven by one or more drive shafts for pumping fluid in series through the pumping stages from a pump inlet at the high vacuum stage to a pump outlet at the low vacuum stage; a lubrication chamber housing a bearing assembly for supporting the drive shaft for rotational movement, the drive shaft extending from the high vacuum stage to the lubrication chamber through an opening of a head plate of the lubrication chamber; an inter-stage purge port through which gas can enter the pump at an inter-stage location downstream of the high vacuum stage and pass only through the or each vacuum pumping stage downstream of the inter-stage port; a lubrication chamber purge port located in the lubrication chamber through which purge gas can flow from a source of purge gas; wherein the inter-stage port is connected to the lubrication chamber for controlling t

Abstract: Vacuum pump for pumping gas from a process chamber, the pump comprising: a rotor supported for rotation in a pumping chamber by a drive shaft, the shaft extending through a shaft bore in a wall of the pumping chamber extending transversely to the drive shaft, and a seal arrangement provided between the shaft and the transverse wall for resisting the passage of gas through the shaft bore, wherein on rotation of the rotor gas is pumped from a low pressure region at an inlet of the pumping chamber to a high pressure region at an outlet of the pumping chamber, and wherein the rotor and the transverse wall are spaced apart by an axial clearance along which back leakage of gas can flow from the high pressure region to the low pressure region, and an additional leakage path for back leakage is formed spaced away from the seal arrangement along which gas can flow without contact with the seal arrangement so that the amount of gas which contacts the seal arrangement during use of the pump is reduced.

Abstract: A method for the treatment of an aqueous stream containing both anionic and cationic species is provided. The method comprises the following steps. Circulating water continuously through an essentially closed loop, the loop incorporating an ion adsorption unit which, in turn, comprises a water permeable layer of an ion adsorbing material. Feeding an aqueous solution containing the anionic and the cationic species to the essentially closed loop. Passing the circulating water, including the aqueous solution containing the ionic and the cationic species, through the ion adsorbing material in the ion adsorption unit in a continuous manner. While at the same time applying an electric potential across the thickness of the layer of ion adsorbing material and removing from the ion adsorption unit more concentrated aqueous solutions of the separate ionic species. Discharging each of the aqueous solutions from the ion adsorption unit.

Abstract: The present invention provides a vacuum pump (10) which comprises a turbo-molecular pumping mechanism (12) in series with a Siegbahn pumping mechanism (14). A first pump inlet (16) is provided through which gas can pass through both the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism. Additionally, an inter-stage (inlet 18) is provided through which gas can enter the pump at a location between the turbo-molecular pumping mechanism and the Siegbahn pumping mechanism and pass only through the Siegbahn pumping mechanism. There are flow channels (52, 62) in a first plurality of stages (32, 34) of the Siegbahn pumping mechanism which are in fluid communication with the inter-stage inlet (18) and gas entering the pump through the inter-stage inlet is pumped in parallel along said flow channels.

Abstract: A differentially pumped vacuum system includes first, second and third chambers, and a pumping arrangement for evacuating the chambers. The pumping arrangement includes a compound pump having a first inlet connected to an outlet from the first chamber, a second inlet connected to an outlet from the second chamber, a first pumping section and a second pumping section downstream from the first pumping section, the sections being arranged such that fluid entering the compound pump from the first inlet passes through the first and second pumping sections and fluid entering the compound pump from the second inlet passes through, of said sections, only the second section. The pumping arrangement further includes a booster pump having an inlet connected to an outlet from the third chamber, and a backing pump having an inlet connected to the exhaust from the booster pump. Fluid exhaust from the compound pump can be conveyed to either a second booster pump inlet or the backing pump inlet as required.

Abstract: In a method of controlling operation of a processing system, a host computer, a process tool and a component of an evacuation system, for example an abatement tool, are connected to a system bus. The abatement tool monitors signals transmitted on the system bus between the host computer and the process tool, and signals received directly from the process tool. The abatement tool uses information contained within the monitored signals to generate a signal for the process tool regarding an operating characteristic of the abatement tool. This signal is transmitted either directly or over the system bus to the process tool, which uses the generated signal to control an operating state of the process tool.

Abstract: To degas a molten metal, a receptacle containing the molten metal and a layer of slag over the molten metal is positioned in a chamber, and the chamber is evacuated. As the pressure in the chamber reduces, gas is generated at the interface between the molten metal and the slag, which causes the slag to foam. To inhibit overflowing of slag from the receptacle, a gauge outputs a signal indicative of the level of the surface of the slag, and the rate of evacuation of the chamber is reduced to reduce the rate of gas generation.

Abstract: The invention provides a mass spectrometer system (10) comprising a mass spectrometer (12) comprising a plurality of mass spectrometer stages (16, 18, 20, 44) in fluid communication from a low vacuum stage (16) to a higher vacuum stage (44). A split flow multi-stage pump (14) evacuates the mass spectrometer stages. The pump comprises a pump envelope (28) in which a plurality of pumping stages (20, 32, 34) are supported for rotation about an axis X generally parallel to the direction of flow in the mass spectrometer stages for pumping fluid from a main pump inlet (36) to a main pump outlet (38). At least part of a higher vacuum stage (44) is located within the pump envelope at the main pump inlet.

Abstract: A pump shaft (10; 12) and a pump member (16; 18) mountable on the shaft for rotation with the shaft have respective contact surfaces that contact when the pump member is mounted on the shaft. At least one of the contact surfaces is formed such that corrosion products of the surface are substantially incompatible with the other contact surface so that joining of the shaft and pump member at the contact surfaces by corrosion is substantially prevented. The pump shaft and pump member may be parts of a dry pump.

Abstract: A vacuum pump (100) comprises a pumping mechanism having an annular pumping chamber (112, 114, 116) extending about a longitudinal axis (107) and through which fluid is pumped by the pumping mechanism. A plenum (126) located remote from the pumping mechanism has an inlet (128) for receiving fluid to be pumped by the pumping mechanism and a plurality of outlets (132) arranged about the longitudinal axis (107) for supplying fluid to the annular chamber.