Abstract: New bis(sulfonyl)imide and tri(sulfonyl)methide photoacid generator compounds (“PAGs”) are provided as well as photoresist compositions that comprise such PAG compounds.
Abstract: Environmentally friendly nickel electroplating compositions enable the electroplating of nickel deposits which are bright and uniform and inhibit corrosion of gold layers deposited on the bright and uniform nickel deposits. The environmentally friendly nickel electroplating compositions can be used to electroplate bright and uniform nickel deposits on various substrates over a wide current density range.
Abstract: The present invention relates to a polymeric charge transfer layer comprising a polymer and a p-dopant. The polymer comprises as polymerized units, Monomer A, Monomer B, and Monomer C crosslinking agent. The present invention further relates to an organic electronic device, especially an organic light emitting device containing the polymeric charge transfer layer.
Type:
Grant
Filed:
January 8, 2015
Date of Patent:
October 22, 2019
Assignees:
Dow Global Technologies LLC, Rohm and Haas Electronic Materials Korea Ltd., Rohm and Haas Electronic Materials LLC
Inventors:
Liam P. Spencer, Hong-Yeop Na, Yoo-Jin Doh, Chun Liu, Minrong Zhu, Jichang Feng, Zhengming Tang, Shaoguang Feng, Kenneth L. Kearns, Jr., Timothy De Vries, Sukrit Mukhopadhyay, John W. Kramer, Peter Trefonas, III, David D. Devore, William H. H. Woodward
Abstract: Reaction products of primary and secondary diamines and bisanhydrides are included as additives in metal electroplating baths. The metal electroplating baths have good throwing power and deposit metal layers having substantially planar surfaces. The metal plating baths may be used to deposit metal on substrates with surface features such as through-holes and vias.
Type:
Grant
Filed:
October 11, 2018
Date of Patent:
October 8, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Dow Global Technologies LLC
Inventors:
Lingli Duan, Chen Chen, Shaoguang Feng, Zukhra I. Niazimbetova, Maria Anna Rzeznik
Abstract: Indium electroplating compositions containing amine compounds in trace amounts to electroplate substantially defect-free uniform indium which has a smooth surface morphology. The indium electroplating compositions can be used to electroplate indium metal on metal layers of various substrates such as semiconductor wafers and as thermal interface materials.
Type:
Grant
Filed:
May 12, 2017
Date of Patent:
October 1, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Yi Qin, Kristen Flajslik, Mark Lefebvre
Abstract: A coated glass substrate. The coated glass substrate comprises a glass sheet having a thickness from 0.1 to 0.7 mm and coated on a first side with a first optical layer having a positive photo-elastic constant and coated on a second side with a second optical layer having a negative photo-elastic constant.
Type:
Grant
Filed:
December 8, 2015
Date of Patent:
September 3, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Rohm and Haas Company, Dow Global Technologies LLC
Inventors:
Shih-Wei Chang, Lanfang Li, Kathleen M. O'Connell, Weijun Zhou
Abstract: Polymeric reaction products of certain aromatic alcohols with certain diaryl-substituted aliphatic alcohols are useful as underlayers in semiconductor manufacturing processes.
Type:
Grant
Filed:
April 7, 2016
Date of Patent:
August 13, 2019
Assignees:
Rohm and Haas Electronic Materials LLC, Rohm and Haas Electronic Materials Korea Ltd.
Abstract: Provided are purification methods, comprising: (a) providing an organic solvent and a phenolic peroxide formation inhibitor, wherein the organic solvent has a first boiling point at standard atmospheric pressure (bp1) and the phenolic peroxide formation inhibitor has a second boiling point at standard atmospheric pressure (bp2) that satisfy the following inequality (I): bp2?(1.10)(bp1)??(I); and (b) heating the organic solvent and the phenolic peroxide formation inhibitor to a temperature causing the organic solvent and phenolic peroxide formation inhibitor to vaporize, and (ii) condensing the vaporized organic solvent and peroxide formation inhibitor to provide a purified mixture of the organic solvent and peroxide formation inhibitor. The methods find particular use in the purification of solvents that are useful in process chemicals for the manufacture of semiconductor devices.
Abstract: Organic coating compositions, particularly antireflective coating compositions, are provided that comprise that comprise a component that comprises one or more uracil moieties. Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
Type:
Grant
Filed:
December 30, 2011
Date of Patent:
July 30, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Owendi Ongayi, Vipul Jain, Suzanne Coley, Anthony Zampini
Abstract: New photoresist compositions are provided that are useful for immersion lithography. Preferred photoresist compositions of the invention comprises one or more materials that have hetero-substituted carbocyclic aryl groups. Particularly preferred photoresists of the invention can exhibit reduced leaching of resist materials into an immersion fluid contacting the resist layer during immersion lithography processing.
Type:
Grant
Filed:
November 19, 2009
Date of Patent:
July 23, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Deyan Wang, Cheng-Bai Xu, George G. Barclay
Abstract: New photoresist are provided that comprises a low-Tg component and that are particularly useful for ion implant lithography applications. Preferred photoresists of the invention can exhibit good adhesion to underlying inorganic surfaces such as SiON, silicon oxide, silicon nitride and other inorganic surfaces.
Abstract: A specific cysteine derivative is added to electroless copper plating compositions to improve the stability of the electroless copper plating compositions such that the plating activity of the electroless plating copper compositions is not compromised even when electroless plating at low plating temperatures and high stabilizer and high leached catalyst concentrations.
Type:
Grant
Filed:
July 13, 2018
Date of Patent:
May 21, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Alejo M. Lifschitz Arribio, Donald E. Cleary
Abstract: The invention provides compositions comprising BCB-functionalized materials for use in OLEDs applications. The inventive compositions can be used to form hole-transporting materials for use in electroluminescent devices. In particular, the invention provides for compositions, charge transport film layers, and light emitting devices, comprising, or formed from, a polymer, which comprises one or more polymerized units derived from Structure (A).
Type:
Grant
Filed:
August 19, 2015
Date of Patent:
May 21, 2019
Assignees:
Dow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
Inventors:
Liam P. Spencer, Nolan T. McDougal, Peter Trefonas, III, David D. Devore
Abstract: A flux composition which includes one or more organic compounds including one or more sulfonic acid groups, salts or anhydrides thereof is applied to tin or tin alloy deposits. The flux composition is then homogenized on the tin or tin alloy to inhibit tin or tin alloy oxidation and improve brightness of the tin or tin alloy.
Abstract: Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, cyclic sulfonium salt and photoresist compositions that comprise such compounds are provided. In another preferred aspect, acid generator compounds are provided that comprise one or more covalently linked acid-labile moieties, particularly ester-containing acid-labile moieties.
Abstract: Organic coating composition are provided including antireflective coating compositions that can reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing or via-fill layer. Preferred organic coating compositions of the invention comprise one or more resins that can harden upon thermal treatment without generation of a cleavage product. Particularly preferred organic coating compositions of the invention comprise one or more components that comprise anhydride and hydroxy moieties.
Abstract: A light emitting device comprising a polymeric charge transfer layer, wherein the polymeric charge transfer layer is formed from a composition comprising a polymer, said polymer comprising one or more polymerized units derived from Structure A, and one or more polymerized units derived from Structure (B), each as follows: A) a monomer having the Structure (A), as defined herein: and B) a monomer that comprises one or more dienophile moieties.
Type:
Grant
Filed:
August 20, 2015
Date of Patent:
April 9, 2019
Assignees:
Dow Global Technologies LLC, Rohm and Haas Electronic Materials LLC
Inventors:
Liam P. Spencer, Liang Hong, Chun Liu, Minrong Zhu, Jichang Feng, Jing Jing Yan, Zhengming Tang, Shaoguang Feng, Peter Trefonas, III, David D. Devore, Nolan T. McDougal
Abstract: Acid generator compounds are provided that are particularly useful as a photoresist composition component. In one preferred aspect, photoresists are provided that comprise (i) a polymer; (ii) a first onium salt acid generator that produces a first acid upon exposure of the photoresist composition to activating radiation; and (iii) a second onium salt acid generator that 1) comprises a covalently bound acid-labile moiety and 2) produces a second acid upon exposure of the photoresist composition to activating radiation, wherein the first acid and second acid have pKa values that differ by at least 0.5.
Type:
Grant
Filed:
December 28, 2012
Date of Patent:
April 2, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
James W. Thackeray, Paul J. LaBeaume, James F. Cameron
Abstract: Provided are topcoat compositions that include: a matrix polymer; a surface active polymer; an ionic thermal acid generator comprising an anion and a cation, wherein the anion, the cation, or the anion and the cation are fluorinated; and a solvent. Also provided are coated substrates and pattern-forming methods which make use of the topcoat compositions. The invention has particular applicability in photolithographic processes as a photoresist topcoat layer in the manufacture of semiconductor devices.
Type:
Grant
Filed:
October 12, 2017
Date of Patent:
March 26, 2019
Assignee:
Rohm and Haas Electronic Materials LLC
Inventors:
Irvinder Kaur, Doris Kang, Cong Liu, Gerhard Pohlers, Mingqi Li