Patents Assigned to ELM
-
Patent number: 5946559Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: June 7, 1995Date of Patent: August 31, 1999Assignee: Elm Technology CorporationInventor: Glenn Joseph Leedy
-
Patent number: 5915167Abstract: A Three-Dimensional Structure (3DS) Memory allows for physical separation of the memory circuits and the control logic circuit onto different layers such that each layer may be separately optimized. One control logic circuit suffices for several memory circuits, reducing cost. Fabrication of 3DS memory involves thinning of the memory circuit to less than 50 .mu.m in thickness and bonding the circuit to a circuit stack while still in wafer substrate form. Fine-grain high density inter-layer vertical bus connections are used. The 3DS memory manufacturing method enables several performance and physical size efficiencies, and is implemented with established semiconductor processing techniques.Type: GrantFiled: April 4, 1997Date of Patent: June 22, 1999Assignee: Elm Technology CorporationInventor: Glenn J. Leedy
-
Patent number: 5869354Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: September 30, 1994Date of Patent: February 9, 1999Assignee: Elm Technology CorporationInventor: Glenn Joseph Leedy
-
Patent number: 5840593Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: March 10, 1997Date of Patent: November 24, 1998Assignee: Elm Technology CorporationInventor: Glenn Joseph Leedy
-
Patent number: 5834334Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: June 7, 1995Date of Patent: November 10, 1998Assignee: ELM Technology CorporationInventor: Glenn Joseph Leedy
-
Patent number: 5725995Abstract: Each transistor or logic unit on an integrated circuit wafer is tested prior to interconnect metallization. By means of CAD software, the transistor or logic units placement net list is revised to substitute redundant defect-free logic units for defective ones. Then the interconnect metallization is laid down and patterned under control of a CAD computer system. Each die in the wafer thus has its own interconnect scheme, although each die is functionally equivalent, and yields are much higher than with conventional testing at the completed circuit level.The individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silicon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of the test surface. The probe points electrically contact the contacts on the wafer under test by fluid pressure.Type: GrantFiled: June 7, 1995Date of Patent: March 10, 1998Assignee: ELM Technology CorporationInventor: Glenn J. Leedy
-
Patent number: 5654127Abstract: Each transistor or logic unit on an integrated circuit wafer is tested prior to interconnect metallization. By means of CAD software, the transistor or logic units placement net list is revised to substitute redundant defect-free logic units for defective ones. Then the interconnect metallization is laid down and patterned under control of a CAD computer system. Each die in the wafer thus has its own interconnect scheme, although each die is functionally equivalent, and yields are much higher than with conventional testing at the completed circuit level.The individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silicon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of the test surface. The probe points electrically contact the contacts on the wafer under test by fluid pressure.Type: GrantFiled: June 7, 1995Date of Patent: August 5, 1997Assignee: ELM Technology CorporationInventor: Glenn J. Leedy
-
Patent number: 5654220Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: June 7, 1995Date of Patent: August 5, 1997Assignee: ELM Technology CorporationInventor: Glenn Joseph Leedy
-
Patent number: 5637907Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: June 7, 1995Date of Patent: June 10, 1997Assignee: ELM Technology CorporationInventor: Glenn J. Leedy
-
Patent number: 5633209Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.Type: GrantFiled: June 7, 1995Date of Patent: May 27, 1997Assignee: ELM Technology CorporationInventor: Glenn J. Leedy
-
Patent number: 5629137Abstract: Each transistor or logic unit on an integrated circuit wafer is tested prior to interconnect metallization. By means of CAD software, the transistor or logic units placement net list is revised to substitute redundant defect-free logic units for defective ones. Then the interconnect metallization is laid down and patterned under control of a CAD computer system. Each die in the wafer thus has its own interconnect scheme, although each die is functionally equivalent, and yields are much higher than with conventional testing at the completed circuit level.The individual transistor or logic unit testing is accomplished by a specially fabricated flexible tester surface made in one embodiment of several layers of flexible silicon dioxide, each layer containing vias and conductive traces leading to thousands of microscopic metal probe points on one side of the test surface. The probe points electrically contact the contacts on the wafer under test by fluid pressure.Type: GrantFiled: June 7, 1995Date of Patent: May 13, 1997Assignee: ELM Technology CorporationInventor: Glenn J. Leedy
-
Patent number: 5478077Abstract: An apparatus for use in training or playing in various shooting games, such as for a golf approach shot, baseball batting, or gun shooting. A target screen is provided opposite to a shooting point from which a ball or the like is shot out. Four microphones are provided at the circumference of the target screen to detect the collision sound, and another microphone is set at the shooting point to detect the shooting sound of the ball. The duration of flight of the ball, and the collision point on the screen, and the trajectory of the flying ball, are calculated by analyzing the detection time points of each microphone in a control part. The results, i.e., collision point on the target screen, flying trajectory of the ball, etc., are shown on a display unit.Type: GrantFiled: March 22, 1994Date of Patent: December 26, 1995Assignee: Elm Inc.Inventor: Takakazu Miyahara
-
Patent number: D347274Type: GrantFiled: September 20, 1991Date of Patent: May 24, 1994Assignee: Societe Elm LeblancInventor: Rene Prevost
-
Patent number: D351900Type: GrantFiled: September 20, 1991Date of Patent: October 25, 1994Assignee: Societe Elm LeBlancInventor: Rene Prevot
-
Patent number: D407014Type: GrantFiled: December 5, 1997Date of Patent: March 23, 1999Assignee: Elm Packaging CompanyInventor: Raymond P. McCann
-
Patent number: D408282Type: GrantFiled: December 5, 1997Date of Patent: April 20, 1999Assignee: Elm Packaging CompanyInventor: Raymond P. McCann
-
Patent number: D408733Type: GrantFiled: December 5, 1997Date of Patent: April 27, 1999Assignee: Elm Packaging CompanyInventor: Raymond P. McCann
-
Patent number: D408734Type: GrantFiled: December 5, 1997Date of Patent: April 27, 1999Assignee: Elm Packaging CompanyInventor: Raymond P. McCann
-
Patent number: D415024Type: GrantFiled: November 20, 1998Date of Patent: October 12, 1999Assignee: ELM Packaging CompanyInventor: Raymond P. McCann
-
Patent number: D415025Type: GrantFiled: November 20, 1998Date of Patent: October 12, 1999Assignee: ELM Packaging CompanyInventor: Raymond P. McCann