Abstract: A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal which is selected from a plurality of error signals based on a selection criterion.

Abstract: To provide protection for power supplies in which a plurality of paralleled identical DC power cables are provided between a source and a load, one aspect of the present invention provides a method for detecting conditions in parallel DC power cables. The method includes supplying current from a power supply to each of a plurality of DC power cables, determining an average current per cable flowing in the plurality of parallel DC power cables, comparing currents in each of the DC power cables with the determined average current, and signaling the existence of a condition in response to the comparison.

Abstract: A rectifier circuit powers three power conversion modules using a three phase AC input without a neutral connection. The rectifier circuit includes a first bridge rectifier that is connected to a first phase of the three phase AC input and that produces a first rectified waveform. A second bridge rectifier is connected to a second phase of the three phase AC input and produces a second rectified waveform. A third bridge rectifier is connected to a third phase of the three phase AC input and produces a third rectified waveform. A first inductor has one end that is connected to the first bridge rectifier. A second inductor has one end that is connected to the second bridge rectifier. A third inductor has one end that is connected to the third bridge rectifier. Opposite ends of the first, second and third inductors are connected to form a virtual neutral. A protection circuit prevents overvoltage when one of the DC outputs is shorted.

Abstract: A method and apparatus for measuring the characteristics of radio frequency energy in an industrial radio frequency processing system at a plurality of frequencies is disclosed. The method and apparatus measures the characteristics of radio energy using one detector.

Abstract: A power supply including an inverter receiving a DC input signal from a DC input source (11). The inverter is comprised of two half bridges (S1 A, S2A and S1B, S2B). Each inverter is driven by a signal source (13A, 13B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes first and second rectifiers (D1, D2) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined first and second voltage, the respective rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (L1A, C1; L1B, C1) is output to a second harmonic filter (L2, C2) and is then output from the power supply.

Abstract: A predictive failure system for a power delivery system. The power delivery system includes a number of modules which are interconnected to a system monitor. The system monitor collects data on operating parameters of each module and environmental parameters. The system monitor analyzes the data in order to define conditions based upon the parameters. The parameters are then applied against a set of rules to determine whether a warning or a fault indicator should be generated. The system monitor may be implemented locally as part of the power delivery system or may be located remotely from the power delivery system to enable off site data collection and analysis.

Abstract: An arc control system includes a sputtering chamber that houses an anode and a sputtering target formed from a target material and serving as a cathode. A DC power supply provides a DC voltage between the cathode and anode such that a cathode current flows from the anode to the cathode. A resonant network is coupled between the DC power supply and the chamber. The resonant network has sufficient Q so that in reaction to an arc, the cathode current resonates through zero, causing a positive voltage to be applied between the cathode and anode. A reverse voltage clamp is coupled across the resonant network to clamp the cathode voltage to a predetermined reverse voltage. The reverse cathode voltage inhibits subsequent arcing by positively charging insulated deposits on the sputtering target. The arc control system limits the quantity of energy that is dissipated by the arc.

Abstract: Methods and apparatus for controlling a plasma used for materials processing feature cooperative action of a resonant circuit and a switch unit coupled to a plasma vessel and a power supply. A sensor for acquiring a signal associated with a state of a plasma in the plasma vessel supports closed-loop control of the switch unit. Undesirable plasma states detected by the sensor can be eliminated by closing the switch unit to shunt the resonant circuit.

Abstract: A method and apparatus for controlling a power supply. The system includes a power supply and a controller for outputting a command signal to regulate the operation of the power supply. The controller determines the command signal based on at least one error signal which is selected from a plurality of error signals based on a selection criterion.

Abstract: A power holdup circuit having high power factor during line voltage dropouts is provided in a less complex design. No external monitoring and control is required. A monitoring component of the holdup circuit monitors input voltage to maintain the high power factor. Power from a holdup power source is provided during a line voltage dropout. The circuit is configured to switch to holdup power when a predetermined threshold voltage difference between the power supply and a holdup capacitor is exceeded. The threshold voltage is based upon a voltage rating of a zener diode plus a turn-on voltage of a transistor, which is the switching component of the holdup circuit. The holdup capacitor is precharged to a predetermined level through the diode of the transistor. A power factor of not less than about 0.9 is thereby maintained during line voltage dropouts.

Abstract: An industrial power delivery system configured in a modular architecture and having a plurality of modules. The modules interconnect via digital communication links and exchange data using a digital format. The modularity of the system enables the system to be scaled to vary future content of the product.

Abstract: One configuration of the present invention is a radio frequency transformer board that has a planar dielectric substrate having a first surface, an opposite second surface, and a transformer. The transformer includes a first elongate conductor disposed on the first surface and having a first end and a second end, a second elongate conductor disposed on the second surface and having a first end and a second end. The first end of the first conductor and the second end of the second conductor are disposed proximate an edge of the substrate and spaced apart from one another along the edge. The second end of the first conductor and the first end of the second conductor are electrically shorted to one another proximate the edge of the substrate.

Abstract: A data communication system and method is presented for communicating data between the internal assemblies of a material processing system. The data communication system includes at least two digital communication ports for communicating data between internal assemblies of the material processing system. A first digital communication port associated with a first internal assembly in interconnected via a physical link to a second digital communication port associated with a second internal assembly. The first digital communication port includes a serial transmitter for converting the data to a transmit serial stream having at least one information frame. A signal generator formats the transmit serial stream as a transmit signal to be transmitted over the physical link to the second digital communication port. The second digital communication port includes a signal converter for receiving the transmit signal from the first digital communication port and generating a receive serial stream therefrom.

Abstract: A high efficiency stable RF power amplifier with frequency tuning capability is disclosed. The present invention includes a novel circuit configuration which allows the drain or collector terminal of the power transistor to be at ground potential eliminating the need for an electrical insulator between the transistor and the heatsink. In an alternative embodiment, the source or emitter terminal of the power transistor is allowed to be at ground potential. In either case, the amplifier is operated in a switched mode to provide high efficiency amplification at a predetermined frequency band. Additionally, despite the switched mode operation, the amplifier is stable because properly controlled impedances are provided for baseband, sub-harmonic and harmonic frequencies.

Abstract: An apparatus and method for the detection of and recovery from a plurality of electrical transients in a plasma generator system is disclosed. The plasma generator system comprises a plasma chamber and a power amplifier is provided, wherein the apparatus comprises a sensor, the sensor detects an electrical transient in the electrical transients and outputs a first signal when the electrical transient is detected. The system also includes a first circuitry for receiving the first signal, the circuitry controlling said power output from said power amplifier in response to the first signal and outputting a second signal communicating the controlled power output, and a second circuitry for receiving the second signal, the second circuitry outputting a reset signal to the first circuitry, wherein the first circuitry receives the reset signal and resets the power output in response to the reset signal.

Abstract: An RF generator is provided for use in an RF plasma system. The RF generator includes: a power source that is operable to generate RF power signals at a tuned frequency; a sensor unit that is adapted to detect the RF power signals and operable to generate analog signals representative of the RF power signals, where the analog signals include a frequency of interest and a plurality of interfering frequency components; and a sensor signal processing unit that is adapted to receive the analog signals from the sensor unit and to band limit the analog signals within a predefined bandwidth that passes the frequency of interest and rejects interfering frequency components.

Abstract: A technique for measuring the current, voltage and phase of a radio frequency (RF) power wave to an RF load, accounts for the finite length of the voltage and current pickups, and corrects for effects of standing wave components of voltage and current. Voltage and current are computed as complex functions of the voltage pickup signal and the current pickup signal, based on coefficients precalibrated for radio frequency. Alternatively, a corrected current value can be based on the corrected voltage value and complex load impedance. The correction coefficients can be obtained, for each of a plurality of calibrating radio frequencies within an RF range, from voltage and current pickup signals under conditions of (a) open circuit load, (b) short circuit load, (c) fixed known impedance load; and (d) one of voltage and current being applied at a precise input level to a know load from an RF calibration source.

Abstract: A radio frequency (RF) generator apparatus for a plasma processing system that is resistant to nonlinear load mismatch conditions is provided. The apparatus includes an RF oscillator configured to generate an RF signal, an RF amplifier responsive to the RF signal to produce a VHF RF signal having sufficient power to drive a plasma chamber load, and a VHF-band circulator coupled to the amplifier and configured to isolate nonlinearities of the plasma chamber load from the amplifier.

Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.

Abstract: A fuzzy logic control arrangement is provided for an impedance match network of the type that is typically employed between a source of RF power at a given impedance, e.g., 50 ohms, and a non-linear load whose impedance can vary in magnitude and phase, e.g., an RF plasma. The fuzzy logic controller fuzzifies the phase and the magnitude error signals. The error signals are applied to a fuzzy logic interference function based on a number of fuzzy sets. The values of the error signals enjoy some degree of membership in one or more fuzzy sets. Fuzzy logic rules are applied to the phase and magnitude error signals. In a defuzzification stage, drive signal values are obtained for moving the tuning elements of the variable impedances. The drive signal values are weighted according to respective fuzzy inference functions for which the error signals enjoy membership. Then the weighted drive signal values are combined to produce output drive signals.