Patents Assigned to Entegris, In.
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Patent number: 10850279Abstract: A bottom opening pod utilizing magnetic coupling for securing one or more cassettes within. The pod includes magnetic couplers that provide magnetic coupling between the cassette(s) and the bottom door of the pod. The magnetic couplers may include magnetic elements disposed on a base of the cassette and on the bottom door of the pod. The magnetic coupling secures the cassette(s) to the bottom door without imposition of separation forces between the housing and the bottom door of the pod.Type: GrantFiled: March 27, 2016Date of Patent: December 1, 2020Assignee: ENTEGRIS, INC.Inventor: Gregory Bores
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Patent number: 10845006Abstract: A fluid supply package is described, which includes a fluid storage and dispensing vessel, and a fluid dispensing assembly coupled to the vessel and configured to enable discharge of fluid from the vessel under dispensing conditions, wherein the fluid supply package includes an informational augmentation device thereon, e.g., at least one of a quick read (QR) code and an RFID tag, for informational augmentation of the package. Process systems are described including process tools and one or more fluid supply packages of the foregoing type, wherein the process tool is configured for communicative interaction with the fluid supply package(s). Various communicative arrangements are described, which are usefully employed to enhance the efficiency and operation of process systems in which fluid supply packages of the foregoing type are employed.Type: GrantFiled: September 20, 2019Date of Patent: November 24, 2020Assignee: ENTEGRIS, INC.Inventors: Joseph D. Sweeney, Edward Edmiston Jones, Joseph Robert Despres, Richard S. Ray, Peter C. Van Buskirk, Edward A. Sturm, Christopher Scannell
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Patent number: 10840067Abstract: A fluorine plasma resistant coating on a substrate being a component in a semiconductor manufacturing system is disclosed. In one embodiment the composition includes an AlON coating that overlies a substrate, and an optional yttria coating layer that overlies the AlON coating, with a total coating thickness of about 5-6 microns.Type: GrantFiled: August 8, 2017Date of Patent: November 17, 2020Assignee: ENTEGRIS, INC.Inventor: Nilesh Gunda
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Patent number: 10837603Abstract: A gas supply vessel for storing and dispensing a reagent gas including a filter such that the vessel is capable of delivering the reagent gas, after it is filtered, at a high level of purity. The filter includes a porous sintered body and is effective to provide a desired level of purity of a supplied reagent gas by flowing the reagent gas through the filter during delivery from the vessel at a low pressure, at a relatively low flow rate, and with a relatively low pressure drop across the filter.Type: GrantFiled: February 20, 2019Date of Patent: November 17, 2020Assignee: ENTEGRIS, INC.Inventors: Joseph Robert Despres, Edgar Daniel La Borde, Robert Zeller
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Patent number: 10793947Abstract: A deposited cobalt composition is described, including cobalt and one or more alloy component that is effective in combination with cobalt to enhance adhesion to a substrate when exposed on the substrate to variable temperature and/or delaminative force conditions, as compared to corresponding elemental cobalt, wherein the one or more alloy component is selected from the group consisting of boron, phosphorous, tin, antimony, indium, and gold. Such deposited cobalt composition may be employed for metallization in semiconductor devices and device precursor structures, flat-panel displays, and solar panels, and provides highly adherent metallization when the metallized substrate is subjected to thermal cycling and/or chemical mechanical planarization operations in the manufacturing of the semiconductor, flat-panel display, or solar panel product.Type: GrantFiled: August 10, 2017Date of Patent: October 6, 2020Assignee: ENTEGRIS, INC.Inventors: Philip S. H. Chen, Bryan C. Hendrix, Thomas H. Baum
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Patent number: 10792620Abstract: Grafted, asymmetric, porous, ultra high molecular weight polyethylene membranes having a bubble point between about 5.38 bar (78 psi) and 11.03 bar (160 psi) are disclosed. Monomers are grafted to the porous polymeric membrane surfaces, the monomers having one or more of neutral groups or ion exchange groups grafted to one or more surfaces of the membrane. A combination of two photoinitiators can be used to graft the monomers to the asymmetric, porous, ultra high molecular weight membrane resulting in grafted microporous membranes that have water flow rates that are at least 50% of the water flow rate of an ungrafted, asymmetric, porous ultra high molecular weight polyethylene membrane. The grafted membrane also wets in water.Type: GrantFiled: November 19, 2015Date of Patent: October 6, 2020Assignee: ENTEGRIS, INC.Inventors: Jad Ali Jaber, Alketa Gjoka
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Patent number: 10790167Abstract: A foam brush that has nodules on an outer diameter surface of the brush that have a pitch to diameter ratio (P/D) of between 1.2 and 1.5 and a nodule height to nodule diameter ratio of 0.2 to 0.5 can be used to achieve improved small particle and organic residue removal from substrates following CMP processing. CMP cleaning brushes of the disclosure may also be prepared with foams that are relatively soft and have a compression strength of less than 90 grams/cm2. CMP cleaning brushes with such P/D and H/D ratios, and optionally a compression strength of less than 90 grams/cm2 can be used in a variety of CMP cleaning processes including post copper CMP processes.Type: GrantFiled: February 20, 2015Date of Patent: September 29, 2020Assignee: ENTEGRIS, INC.Inventor: Chintan Patel
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Patent number: 10790187Abstract: The disclosure relates to a cleaning composition that aids in the removal of post-etch residues and aluminum-containing material, e.g., aluminum oxide, in the production of semiconductors that utilize an aluminum-containing etch stop layer. The compositions have a high selectivity for post-etch residue and aluminum-containing materials relative to low-k dielectric materials, cobalt-containing materials and other metals on the microelectronic device.Type: GrantFiled: January 17, 2018Date of Patent: September 29, 2020Assignee: ENTEGRIS, INC.Inventors: Emanuel I. Cooper, Makonnen Payne, WonLae Kim, Eric Hong, Sheng-Hung Tu, Chieh Ju Wang, Chia-Jung Hsu
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Patent number: 10786776Abstract: High-purity gas purifiers for purification of corrosive gases, such as halogen gases or halide gases, and noncorrosive gases, such as hydrogen and inert gases, methods of making and methods of using the gas purifiers, are described. The gas purifier includes a housing made of nickel or stainless steel. Within the housing, the gas purifier includes a purifier resin, including a modifi-er coated onto a substrate. The gas purifier further includes porous nickel membranes located at the inlets and outlets of the device. The inlets and outlets are capable of fluid communication with external fixtures.Type: GrantFiled: August 31, 2018Date of Patent: September 29, 2020Assignee: ENTEGRIS, INC.Inventors: Stenio da Costa Pereira, Peter K. Shogren, Rocky D. Gipson
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Patent number: 10784135Abstract: A substrate container with a substrate retainer mounted to a biased actuation linkage, and a door assembly with latch assist. Various configurations for biasing the substrate retainer in a substrate non-engagement position are disclosed. The biasing helps prevent the substrate retainer from hanging up due to friction that might otherwise counter the gravitational force that is otherwise relied upon for disengagement. The assembly may also include retention clips that positively secure the substrate retainer to the actuation linkage. The latch assist provides springs that deliver stored energy to assist in latching and unlatching the door assembly from the substrate carrier. The latch assist further provides off-center forces that bias the latching mechanism in either an unlatched or a fully latched configuration.Type: GrantFiled: September 12, 2016Date of Patent: September 22, 2020Assignee: ENTEGRIS, INC.Inventors: Anthony Mathius Tieben, Christopher Strickhouser
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Patent number: 10770330Abstract: An electrostatic chuck with a generally non-arcuate top surface shaped protrusions that has edge surfaces similar to a portion of a ellipse. The structure of the protrusions leads to the reduction of particulate material generated by interaction between the supported substrate and chuck. Reduced levels of scratching, abrasion, wear and particulate generation are achieved by improved smoothing and flattening of the protrusion surface.Type: GrantFiled: February 2, 2017Date of Patent: September 8, 2020Assignee: ENTEGRIS, INC.Inventors: John Michael Glasko, I-Kuan Lin, Carlo Waldfried
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Patent number: 10734270Abstract: A vacuum chuck with polymeric embossments is disclosed. The polymeric embossments are formed on the surface of a base substrate and are lapped to a flatness such that a wafer substrate clamped by the vacuum chuck has a peak to valley flatness that is less than a peak to valley flatness across the base substrate. Lapping of the polymeric embossments accommodates for variations in the flatness of the base substrate so long as the embossments are tall enough to stand over the peak to valley height variations in the base substrate.Type: GrantFiled: February 11, 2014Date of Patent: August 4, 2020Assignee: ENTEGRIS, INC.Inventors: John Glasko, Richard A. Cooke, I-Kuan Lin
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Patent number: 10734264Abstract: A semiconductor wafer container assembly includes a container defining an exterior and defining an interior having a wafer storage area adapted to support one or more semiconductor wafers. The container also defines an opening in the container between the exterior and the interior. The container has a door and a latching mechanism to sealingly secure the door closed, and the door is openable for access to the wafer storage area. A passive getter module is removably secured with respect to the exterior of the container by substantially rigid connection structure that is a part of or extends from substantially rigid getter module housing. Getter material is disposed within the housing to decrease concentration of contaminants within the wafer storage area of the container via the access opening and the opening in the container.Type: GrantFiled: May 12, 2016Date of Patent: August 4, 2020Assignee: ENTEGRIS, INC.Inventors: Jeffrey J. King, Matthew A. Fuller, John Burns, Martin Forbes
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Patent number: 10731109Abstract: A cleaning composition and process for cleaning post-chemical mechanical polishing (CMP) residue and contaminants from a microelectronic device having said residue and contaminants thereon. The composition achieves highly efficacious cleaning of the post-CMP residue and contaminant material from the surface of the microelectronic device without compromising the low-k dielectric material or the copper interconnect material. In addition, the cleaning compositions are compatible with ruthenium-containing materials.Type: GrantFiled: April 11, 2018Date of Patent: August 4, 2020Assignee: ENTEGRIS, INC.Inventors: Donald Frye, Jun Liu, Daniela White, Michael White
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Patent number: 10723525Abstract: A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements for rotating the central rotatable cam plate. In various embodiments, a camming slot formed in the rotatable cammed plate is arcuate and defined by opposing cam surfaces which are selectively engaged by a cam follower, such as a roller, attached to a proximal end of a latch arm. The roller can include unitary axle portions that snap into the proximal end of the latch arm and is supported at both axial ends of the roller. The proximal end of the latch arm can include parallel extensions separated by a gap, and have guide in surfaces to deflect the extensions as the axle portions of the roller are forced into position thereby seating the roller at both axial ends.Type: GrantFiled: December 4, 2018Date of Patent: July 28, 2020Assignee: ENTEGRIS, INC.Inventors: Barry Gregerson, Matthew A. Fuller
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Patent number: 10707488Abstract: A carbon material is described, having utility for fabricating an electrode of an electrochemical energy device, wherein the carbon material includes a particulate carbon having a particle size d50 in a range of from 1 to 15 ?m, a bulk density in a range of from 0.3 g/cc to 1.2 g/cc, a surface area as measured by nitrogen BET surface area determination at 25° C. that does not exceed 10 m2/g, and an impurity content of less than 3000 ppm by weight, based on weight of the carbon material. Such carbon material may be utilized in amorphous or graphitic form in an electrode of an electrochemical energy device, such as a negative electrode of a lithium-ion battery or a lithium-ion hybrid capacitor.Type: GrantFiled: June 12, 2017Date of Patent: July 7, 2020Assignee: ENTEGRIS, INC.Inventors: Troy Scoggins, Mackenzie King, Rex Gerald Sheppard
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Patent number: 10676341Abstract: A dispensing assembly for a pressure dispense package includes a connector having separate and distinct liquid and extraction conduits, and having a pressurization gas conduit. A liner fitment adapter may include a longitudinal bore to receive a probe portion of a connector defining a liquid extraction conduit, and may include a lateral bore to enable removal of gas. Insertion of a connector into a dispensing assembly simultaneously makes fluidic connections between (a) a gas extraction conduit and a dispensing volume; (b) a liquid extraction conduit and the dispensing volume, and (c) a pressurization gas conduit and a space to be pressurized within a pressure dispense vessel.Type: GrantFiled: February 15, 2018Date of Patent: June 9, 2020Assignee: Entegris, Inc.Inventors: Glenn M. Tom, Joseph Patrick Menning, Matthew Kusz, Amy Koland, Donald D. Ware, Richard D. Chism
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Patent number: 10672637Abstract: A purge tower assembly for a substrate container. The assembly may include a purge interface body, including a base portion and a top portion, for mounting to a bottom plate of a substrate container. The base portion may include a substantially tubular base sidewall and the top portion may have a top sidewall positioned on the top edge of the base portion. The top portion may include an inlet nozzle for mounting through a rearward inlet in the bottom plate. The inlet nozzle may have a substantially tubular sidewall extending upwardly from the top sidewall and defining an interior of the inlet nozzle. The base portion and the top sidewall may define an offset conduit portion disposed connected to the base portion and the inlet nozzle, the base portion and the inlet nozzle in fluid communication via the offset conduit portion.Type: GrantFiled: September 2, 2016Date of Patent: June 2, 2020Assignee: Entegris, Inc.Inventors: Kyle Glavan, Jeffery J. King, Matthew Fuller
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Patent number: 10668411Abstract: A method of making depth filtration media, such as for use in a depth filter, are described. The resulting depth filtration media includes a core tube having two or more different layers. The layers can be fibers, such as polymeric or inorganic fibers, wrapped layers of a filter material, or pleated and folded layers of a filter material.Type: GrantFiled: July 18, 2017Date of Patent: June 2, 2020Assignee: Entegris, Inc.Inventors: Henry Wang, Dean Tsou, Yi Wei Lu, Bob Shie
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Patent number: 10648587Abstract: A fluid valve incorporates a plunger with a fluid channel. The plunger is connected to a boss coupled to a diaphragm, this boss also includes a fluid channel and the plunger and boss fluid channels are in fluid communication. The boss fluid channel opens to the backside of the diaphragm in the valve cavity and permits substantially complete pressurization or evacuation of the volume behind the diaphragm in the valve. The substantially complete pressurization of the volume behind the diaphragm enables full closure of the diaphragm and improves contact of the diaphragm with the valve seat thereby improving performance of the valve.Type: GrantFiled: March 31, 2017Date of Patent: May 12, 2020Assignee: ENTEGRIS, INC.Inventors: Iraj Gashgaee, George Gonnella, Bruce Garber
