Patents Assigned to EV Group GmbH
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Patent number: 10668678Abstract: This invention relates to a die tool, a device and a method for producing, in particular embossing, a monolithic lens wafer that has a large number of microlenses.Type: GrantFiled: July 14, 2017Date of Patent: June 2, 2020Assignee: EV Group GmbHInventors: Michael Kast, Markus Wimplinger
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Patent number: 10279551Abstract: A method for producing a microlens with a carrier wafer, in which a lens in one opening of the carrier wafer is molded into the carrier wafer by stamping of the lens and to a corresponding device for executing the method and to a microlens which has been produced using the method.Type: GrantFiled: April 17, 2018Date of Patent: May 7, 2019Assignee: EV Group GmbHInventors: Erich Thallner, Markus Wimplinger, Michael Kast
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Publication number: 20180229458Abstract: A method for producing a microlens with a carrier wafer, in which a lens in one opening of the carrier wafer is molded into the carrier wafer by stamping of the lens and to a corresponding device for executing the method and to a microlens which has been produced using the method.Type: ApplicationFiled: April 17, 2018Publication date: August 16, 2018Applicant: EV Group GmbHInventors: Erich Thallner, Markus Wimplinger, Michael Kast
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Patent number: 9925597Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.Type: GrantFiled: December 19, 2016Date of Patent: March 27, 2018Assignee: EV Group GmbHInventors: Wolfgang Tiefenbock, Herbert Tiefenbock
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Publication number: 20170305086Abstract: This invention relates to a die tool, a device and a method for producing, in particular embossing, a monolithic lens wafer that has a large number of microlenses.Type: ApplicationFiled: July 14, 2017Publication date: October 26, 2017Applicant: EV Group GmbHInventors: Michael Kast, Markus Wimplinger
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Patent number: 9771223Abstract: The invention relates to a device for processing of substrates, especially wafers, with at least one pretreatment module, at least one aftertreatment module and at least one primary treatment module, and the pretreatment module and the aftertreatment module can be switched as a lock for the primary treatment module, and a corresponding method for processing of substrates, especially wafers.Type: GrantFiled: July 23, 2013Date of Patent: September 26, 2017Assignee: EV Group GmbHInventors: Friedrich Paul Lindner, Peter Oliver Hangweier
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Patent number: 9751698Abstract: The invention relates to a device for processing of substrates, especially wafers, with at least one pretreatment module, at least one aftertreatment module and at least one primary treatment module, and the pretreatment module and the aftertreatment module can be switched as a lock for the primary treatment module, and a corresponding method for processing of substrates, especially wafers.Type: GrantFiled: October 5, 2011Date of Patent: September 5, 2017Assignee: EV GROUP GMBHInventors: Friedrich Paul Lindner, Peter-Oliver Hangweier
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Patent number: 9738042Abstract: This invention relates to a die tool, a device and a method for producing, in particular embossing, a monolithic lens wafer that has a large number of microlenses.Type: GrantFiled: September 2, 2010Date of Patent: August 22, 2017Assignee: EV Group GmbHInventors: Michael Kast, Markus Wimplinger
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Patent number: 9662846Abstract: A method and a device for producing a lens wafer which has a plurality of microlenses, as well as microlenses produced from the lens wafer.Type: GrantFiled: June 24, 2015Date of Patent: May 30, 2017Assignee: EV Group GmbHInventors: Michael Kast, Markus Wimplinger
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Patent number: 9643366Abstract: A method and a device for producing a lens wafer which has a plurality of microlenses, as well as microlenses produced from the lens wafer.Type: GrantFiled: October 26, 2010Date of Patent: May 9, 2017Assignee: EV Group GmbHInventors: Michael Kast, Markus Wimplinger
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Publication number: 20170100780Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.Type: ApplicationFiled: December 19, 2016Publication date: April 13, 2017Applicant: EV Group GmbHInventors: Wolfgang Tiefenbock, Herbert Tiefenbock
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Patent number: 9555479Abstract: A chuck for clamping workpieces or tools in a clamping space with a clamping force (F). The chuck includes at least two chuck jaws movable in translation along one clamping plane (E) in the direction of one center Z of the clamping space and a gear train located at least largely within the chuck for transfer of a driving torque of a drive motor, which can be coupled to the gear train by coupling means of the gear train, to the chuck jaws for movement of the chuck jaws. The coupling means able to be coupled to a corresponding coupling connection of the drive motor. The movement from the maximum size of the clamping space to the minimum size of the clamping space is executed via the gear train from the drive motor.Type: GrantFiled: August 12, 2011Date of Patent: January 31, 2017Assignee: EV Group GmbHInventors: Wolfgang Tiefenböck, Herbert Tiefenböck
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Patent number: 9457552Abstract: Device for stripping a product substrate off a carrier substrate connected to the product substrate by an bonding layer by means of a film frame, a flexible film which is connected to the film frame and which has an adhesive layer for holding the product substrate in a contacting surface section of the film, the film being connected to the film frame in an attachment section of the film which surrounds the contacting surface section, as well as a solvent reservoir formed by the film frame and the film, especially of variable volume, for holding the solvent for detaching the bonding layer, and the product substrate and the bonding layer can be accommodated in the solvent reservoir, and by delivery means for delivering the solvent into the solvent reservoir and by stripping means for stripping the product substrate off the carrier substrate.Type: GrantFiled: May 19, 2015Date of Patent: October 4, 2016Assignee: EV Group GmbHInventors: Friedrich Paul Lindner, Jurgen Burggraf
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Patent number: 9449863Abstract: A device for aligning and prefixing a flat substrate on a carrier substrate for the further processing of the substrate. The device includes aligning means for aligning a substrate's outside contour relative to a carrier substrate's outside contour by engaging the substrate's outside contour. The alignment of the substrate is carried out along a substrate plane E that is parallel to a contact surface of the substrate. Attaching means is provided for at least partial prefixing of the aligned substrate on the carrier substrate.Type: GrantFiled: November 10, 2014Date of Patent: September 20, 2016Assignee: EV Group GmbHInventors: Jurgen Burggraf, Friedrich Paul Lindner, Stefan Pargfrieder, Daniel Burgstaller
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Patent number: 9381732Abstract: Device for stripping a product substrate from a carrier substrate connected to the product substrate by an interconnect layer by means of a flexible film that is mounted on a film frame and that comprises an adhesive layer for holding the product substrate in a bonding surface section of the film, the film being mounted on the film frame in an attachment section of the film that surrounds the bonding surface section, and the film comprising a stripping section that is located between the bonding surface section and the attachment section, the device having stripping means for effecting a stripping of the product substrate from the carrier substrate from a periphery of the product substrate.Type: GrantFiled: November 25, 2014Date of Patent: July 5, 2016Assignee: EV Group GmbHInventors: Friedrich Paul Lindner, Jurgen Burggraf
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Patent number: 9381729Abstract: Device for stripping a product substrate off a carrier substrate connected to the product substrate by an bonding layer by means of a film frame, a flexible film which is connected to the film frame and which has an adhesive layer for holding the product substrate in a contacting surface section of the film, the film being connected to the film frame in an attachment section of the film which surrounds the contacting surface section, as well as a solvent reservoir formed by the film frame and the film, especially of variable volume, for holding the solvent for detaching the bonding layer, and the product substrate and the bonding layer can be accommodated in the solvent reservoir, and by delivery means for delivering the solvent into the solvent reservoir and by stripping means for stripping the product substrate off the carrier substrate.Type: GrantFiled: June 18, 2013Date of Patent: July 5, 2016Assignee: EV Group GmbHInventors: Friedrich Paul Lindner, Jurgen Burggraf
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Patent number: 9278433Abstract: A workholding fixture for holding flat semiconductor substrates with a carrier, a holding body which is fixed or which can be fixed on the carrier with a holding side which faces away from the carrier and at least one negative pressure channel which penetrates the holding body with one suction end on the holding side, the holding side having a defined suction structure of soft material.Type: GrantFiled: March 31, 2010Date of Patent: March 8, 2016Assignee: EV GROUP GMBHInventors: Herbert Tiefenböck, Jürgen Burggraf, Stefan Pargfrieder, Daniel Burgstaller
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Patent number: 9272501Abstract: Device for stripping a product substrate off a carrier substrate connected to the product substrate by an bonding layer by means of a film frame, a flexible film which is connected to the film frame and which has an adhesive layer for holding the product substrate in a contacting surface section of the film, the film being connected to the film frame in an attachment section of the film which surrounds the contacting surface section, as well as a solvent reservoir formed by the film frame and the film, especially of variable volume, for holding the solvent for detaching the bonding layer, and the product substrate and the bonding layer can be accommodated in the solvent reservoir, and by delivery means for delivering the solvent into the solvent reservoir and by stripping means for stripping the product substrate off the carrier substrate.Type: GrantFiled: March 29, 2011Date of Patent: March 1, 2016Assignee: EV Group GmbHInventors: Jürgen Burggraf, Friedrich Paul Lindner
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Patent number: 9186877Abstract: Device for stripping a product substrate from a carrier substrate connected to the product substrate by an interconnect layer by means of a flexible film that is mounted on a film frame and that comprises an adhesive layer for holding the product substrate in a bonding surface section of the film, the film being mounted on the film frame in an attachment section of the film that surrounds the bonding surface section, and the film comprising a stripping section that is located between the bonding surface section and the attachment section, the device having stripping means for effecting a stripping of the product substrate from the carrier substrate from a periphery of the product substrate.Type: GrantFiled: November 24, 2014Date of Patent: November 17, 2015Assignee: EV Group GmbHInventors: Friedrich Paul Lindner, Jurgen Burggraf
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Publication number: 20150290888Abstract: A method and a device for producing a lens wafer which has a plurality of microlenses, as well as microlenses produced from the lens wafer.Type: ApplicationFiled: June 24, 2015Publication date: October 15, 2015Applicant: EV GROUP GMBHInventors: Michael KAST, Markus WIMPLINGER