Abstract: A semiconductor processing member is provided, including a body and a plasma spray coating provided on the body. The coating is an ABO or ABCO complex oxide solid solution composition, where A, B and C are selected from the group consisting of La, Zr, Ce, Gd, Y, Yb and Si, and O is an oxide. The coating imparts both chlorine and fluorine plasma erosion resistance, reduces particle generation during plasma etching, and prevents spalling of the coating during wet cleaning of the semiconductor processing member.

Abstract: A semiconductor processing member is provided, including a body and a plasma spray coating provided on the body. The coating is an ABO or ABCO complex oxide solid solution composition, where A, B and C are selected from the group consisting of La, Zr, Ce, Gd, Y, Yb and Si, and O is an oxide. The coating imparts both chlorine and fluorine plasma erosion resistance, reduces particle generation during plasma etching, and prevents spalling of the coating during wet cleaning of the semiconductor processing member.

Abstract: A component for a semiconductor processing chamber, the component including a substrate and a coating layer provided on a surface of the substrate, wherein the coating layer includes at least a first coating layer having a thermal emissivity of more than 0.98 to 1, having plasma resistance, and having a color value L in a range of 35 to 40 through a thickness direction thereof.

Abstract: A heated electrostatic chuck is provided, including a base having an upper surface and peripheral side surfaces, a thermal barrier coating formed by plasma deposition directly on at least the upper surface of the base, at least one heating element formed on portions of the thermal barrier coating, an electrically insulating layer formed on the heating element and exposed portions of the thermal barrier coating, at least one chucking electrode formed on at least a portion of the electrically insulating layer, and a protective layer formed on the chucking electrode.

Abstract: A heated electrostatic chuck is provided, including a base having an upper surface and peripheral side surfaces, a thermal barrier coating formed by plasma deposition directly on at least the upper surface of the base, at least one heating element formed on portions of the thermal barrier coating, an electrically insulating layer formed on the heating element and exposed portions of the thermal barrier coating, at least one chucking electrode formed on at least a portion of the electrically insulating layer, and a protective layer formed on the chucking electrode.

Abstract: This invention relates to substrate supports, e.g., coated electrostatic chucks, having a dielectric multilayer formed thereon; dielectric multilayers that provide erosive and corrosive barrier protection in harsh environments such as plasma treating vessels used in semiconductor device manufacture; process chambers, e.g., deposition chambers, for processing substrates; methods for protecting substrate supports; and methods for producing substrate supports and electronic devices. The dielectric multilayer comprises (a) an undercoat dielectric layer comprising a metal oxide or metal nitride formed on a surface; and (b) a topcoat dielectric layer comprising a metal oxide formed on the undercoat dielectric layer. The topcoat dielectric layer has an aluminum oxide content of less than about 1 weight percent. The topcoat dielectric layer has a corrosion resistance and/or plasma erosion resistance greater than the corrosion resistance and/or plasma erosion resistance of the undercoat dielectric layer.

Abstract: A cushioning device for a railcar coupling that operates at a very high impedance when subjected to low level forces to thereby reduce the effect of slack between railcars while still providing an effective cushion for absorbing high levels of shock between the railcars. The cushioning device includes a cylinder containing a fluid of liquid and a gas under pressure for absorbing shock due to buff and draft movement and a piston carried in the cylinder. The gas pressure urges the piston toward the draft end of the cylinder while restoring from a buff shock. An internal positioning spring stops further restoring movement of the piston toward the draft end of the cylinder at a selected neutral position spaced from the draft end of the cylinder. The internal positioning spring allows the piston to move from the neutral position toward the draft end of the cylinder if a draft shock occurs of sufficient magnitude while the piston is in the neutral position.

Abstract: A hydraulically driven hammer has a piston which contains metal piston rings on a constant diameter section. The housing has a plurality of axially spaced apart radial ports that extend through the housing into the bore. A valve supplies fluid to the ports to control reciprocation of the piston.

Abstract: A shock absorber for a railcar locates within a center sill of the railcar. The shock absorber has a housing that moves relative to the center sill. A backstop is welded to the center sill for retaining the piston shaft. The backstop has a top, a bottom and two parallel sides. The height of the backstop from the bottom to the top is substantially less than the center sill. The sides of the backstop are welded to the sidewalls of the center sill in a position which provides an upper clearance between the top of the backstop and the top wall of the center sill and a lower clearance between the bottom of the backstop and the bottom of the center sill.

Abstract: A railcar shock absorber has neutral position in which the piston is spaced between buff and draft ends of the cylinder. An external spring is mounted to the shock absorber. A slider rod has one end mounted to the coupling to move relative to the frame of the railcar. The spring has retainers on each end, and the slider rod passes through the retainers. One of the retainers is stationary relative to the frame. The other retainer floats relative to the frame and will abut a neutral stop of the frame when the spring is in the maximum length position. An engagement member on the slider rod will further compress the spring if a draft shock occurs from the neutral position. If a buff shock occurs from the neutral position, the engagement member moves away from the floating retainer.

Abstract: A railcar cushioning device for absorbing impact between railcars is provided having a hydraulic cylinder containing hydraulic fluid. A piston locates within the cylinder and is movable relative to the cylinder between an extended position and a contracted position in response to draft and buff forces. First and second sensors are provided with the piston and cylinder for detecting movement of the piston and cylinder substantially between the contracted and extended positions. By means of a suitable logic circuit or microprocessor, the period of time that it takes for the piston and cylinder to move between the contracted and extended positions can be monitored to determine if the period of time is less than a preselected amount thus indicating that the cushioning unit has failed. A counter may also be provided to count the number of times that the cushioning unit has failed.

Abstract: A rail car has a sliding sill located within a fixed frame and a shock absorber for absorbing shock. The shock absorber has a housing with inner and outer chambers containing oil and gas. A piston extends from the housing. The housing has an end plate on its end which engages a frame stop. The housing has a base end which engages another frame stop. Limiting stops formed on the housing limit the amount of buff movement allowed.

Abstract: A rail car cushion apparatus comprises concentric cylinder and housing members mounted at one end to a seat of a cushion apparatus body and at the other end to a cylinder head. The cylinder head includes a flow chamber and flow passages. A sleeve valve chamber is also included in the cylinder head adjacent to the flow chamber. A sleeve valve is provided in the sleeve valve chamber and is slidably mounted to slide along a piston rod telescopically received in the concentric cylinder and housing members. The sleeve valve is confined for limited movement by a sleeve retainer lip provided in the cylinder head. The retainer lip is discontinous to provide space for the sleeve valve to be inserted into the sleeve valve chamber. The sleeve valve retainer lip alternatively may be formed by a flexible retainer member retained in a groove formed in the cylinder head.

Abstract: A vibratory compactor is connected to a loading boom for exerting compaction forces upon trash and the like. The vibratory compactor includes a generally circular base plate having outboard bearing members located near the periphery thereof, inboard bearing members extending across the central portion thereof stiffening the base plate, gussets connected thereto and extending toward the periphery of the base plate for stiffening the base and supporting inboard bearing members, and vibration isolating means located between the connectors used for connecting the compactor to the loading boom and the inboard and outboard bearing members.