Abstract: An inspection system includes a light source, a mirror, Galvano mirrors, a casing that holds the mirror and the Galvano mirrors inside and includes an attachment portion for attaching an optical element, and a control unit that controls a deflection angle of the Galvano mirrors, wherein the control unit controls the deflection angle so that an optical path optically connected to a semiconductor device is switched between a first optical path passing through the Galvano mirrors and the mirror, and a second optical path passing through the Galvano mirrors and the attachment portion, and controls the deflection angle so that the deflection angle when switching to the first optical path has been performed and the deflection angle when switching to the second optical path has been performed do not overlap.

Abstract: A distance image acquisition device includes a distance measurement sensor that detects a measurement light by transferring charges generated in a charge generation region in response to incidence of a measurement light reflected by a target object, to a charge accumulation region by using a transfer gate electrode. The charge generation region includes an avalanche multiplication region that causes avalanche multiplication. The control unit divides an entire distance range of a measurement target into the plurality of sections, controls the distance measurement sensor so as to perform measurements about a plurality of sections while varying a time difference between an emission timing of the measurement light by the light source and a transferring timing of the charges by the transfer gate electrode among the plurality of sections, and generates a distance image of the entire distance range based on the results of the measurements about the plurality of sections.

Abstract: A charged particle detector includes a microchannel plate having an input surface having electrons (charged particles) input thereon, a multiplication portion performing multiplication of electrons while maintaining positional information of the electrons, and an output surface outputting electrons multiplied by the multiplication portion; a multi-dynode having a plurality of dynodes multiplying the electrons output from the output surface, and insulation regions positioned between the dynodes; and an anode disposed in a spatial region between the output surface and the multi-dynode, and having collection portions for collecting electrons multiplied by the dynodes and aperture portions for allowing electrons output from the output surface to pass therethrough to the dynodes side. All of the insulation regions overlap the collection portions when viewed in an output direction of the electrons from the output surface.

Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.

Abstract: A sample observation device includes: an emission optical system that emits planar light to a sample on an XZ plane; a scanning unit that scans the sample in a Y-axis direction so as to pass through an emission surface of the planar light; an imaging optical system that has an observation axis inclined with respect to the emission surface and forms an image of observation light generated in the sample; an image acquisition unit that acquires a plurality of pieces of XZ image data corresponding to an optical image of the observation light; and an image generation unit 8 that generates XY image data based on the plurality of pieces of XZ image data. The image generation unit extracts an analysis region of the plurality of pieces of XZ image data acquired in the Y-axis direction, integrates brightness values of at least the analysis region in a Z-axis direction to generate X image data, and combines the X image data in the Y-axis direction to generate the XY image data.

Abstract: A light detection device includes: a back-illuminated light receiving element; a circuit element; a connection member; an underfill; and a light shielding mask. The light shielding mask includes a frame having an opening and a light shielding layer formed on an inner surface of the opening. A first opening edge on the side of the circuit element in the opening is located at the outside of an outer edge of the light receiving element. A second opening edge opposite to the circuit element in the opening is located at the inside of the outer edge of the light receiving element. The opening is narrowed from the first opening edge toward the second opening edge. A width of the frame increases from the first opening edge toward the second opening edge. The underfill reaches a gap between the light receiving element and the light shielding layer.

Abstract: The light source unit includes a base provided with an opening, a support member fixed to the base at the opening, and a light source assembly fixed to the support member at the opening. The light source assembly includes a light source emitting laser light, a lens disposed on an optical axis of the laser light, and a holding member holding the light source and the lens. The support member has a convex receiving surface extending along the spherical surface so as to surround the optical axis when viewed from a direction parallel to the optical axis. The light source assembly is fixed to the support member by coupling the holding member to the receiving surface at a contact portion with the receiving surface. The receiving surface has a portion located on a side away from the optical axis with respect to a coupling part with the holding member.

Abstract: A processed product manufacturing method includes preparing a workpiece containing metal and forming a plurality of first regions and a second region along a surface of the workpiece by the irradiation of a laser beam. The first regions are applied with a tensile residual stress. In the second region applied with a compressive residual stress, a plurality of irradiation points separated from each other in the surface of the workpiece are irradiated with the laser beam. The first regions are formed to be separated from each other and each of the first regions is surrounded by the second region when viewed from a direction orthogonal to the surface.

Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.

Abstract: An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.

Abstract: A spectrometry device includes a light source, an integrator configured to have an internal space in which a long afterglow emission material is disposed and output detection light from the internal space, a spectroscopic detector, an analysis unit configured to analyze a photoluminescence quantum yield of the long afterglow emission material, and a control unit configured to control switching between presence and absence of input of excitation light to the internal space and an exposure time in the spectroscopic detector. The control unit controls the light source so that the input of the excitation light to the internal space is maintained in a first period and the input of the excitation light to the internal space is stopped in a second period, and controls the spectroscopic detector so that an exposure time in the second period becomes longer than an exposure time in the first period.

Abstract: An optical sensor includes an avalanche multiplication region including a first multiplication region having a first conductive type and a second multiplication region having a second conductive type, each of the first multiplication region and the second multiplication region being formed in a layer shape, a charge collection region having the second conductive type disposed on a first side of the second multiplication region, and a first conductive region having the first conductive type disposed on the first side of the second multiplication region. The second multiplication region has a first portion overlapping the charge collection region in a thickness direction of the first multiplication region and the second multiplication region and a second portion overlapping the first conductive region in the thickness direction. A concentration of impurities in the first portion is higher than a concentration of impurities in the second portion.

Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

Abstract: A laser processing device includes: a light source configured to output laser light; a space light modulator for modulating the laser light output from the light source in accordance with a modulation pattern and outputting the modulated laser light; a converging lens for converging the laser light output from the space light modulator to an object, and forming a converging spot on the object; a movement unit for relatively moving the converging spot with respect to the object; and a control unit for relatively moving, while setting a position of the converging spot in a Z direction intersecting with an incident surface of the laser light on the object at a first Z position, the converging spot along a line extended in an X direction along the incident surface by controlling at least the space light modulator and the movement unit.

Abstract: In a sample observation device, an image acquisition unit 6 acquires a plurality of pieces of image data of a sample in a Y-axis direction, and an image generation unit generates luminance image data on luminance of the sample on the basis of the plurality of pieces of image data, binarizes luminance values of each of the plurality of pieces of image data to generate a plurality of pieces of binarized image data, and generates area image data on an existing area of the sample on the basis of the plurality of pieces of binarized image data.

Abstract: An image acquisition system includes a radiation source configured to output radiation toward an object, a rotating stage configured to rotate the object around a rotation axis, a radiation camera having an input surface to which the radiation transmitted through the object is input and an image sensor capable of TDI control, and an image processing apparatus configured to generate a radiographic image of the object at an imaging plane P based on the image data. The angle formed between the rotation axis of the rotating stage and the input surface of the radiation camera is set in accordance with the FOD which is the distance between the radiation source and an imaging plane in the object. The radiation camera is configured to perform TDI control in the image sensor in synchronization with the rotational speed of the object rotated by the rotating stage.

Abstract: In an image acquisition device, when capturing an optical image of a sample S through lane scanning, the number of tile images T included in a tile image row R acquired in one lane is counted, and a determination is made as to whether or not the number of images reaches a planned acquisition count that is set in advance. In a case where it is determined that the number of images does not reach the planned acquisition count, lane scanning with respect to the lane is re-executed. Accordingly, even when a loss of the tile images T occurs due to an environment load, the tile images T are complemented by re-execution of the lane scanning, and thus it is possible to prevent the loss of the tile images T in an observation image.

Abstract: An optical coherence tomography imaging system includes a light source, a lens for converting light emitted from the light source into a plane wave, a beam splitter for splitting the plane wave into a first part and a second part, an imaging lens for focusing the first part of the plane wave into the object and imaging object light from a focal plane into a plane of an image sensor, and a reference optical system for modulating an optical beam path and propagating the second part of the plane wave, as a reference wave, into the plane of the image sensor. Interference light of the reference wave and the object light is detected by the image sensor. The optical axis of the optical coherence tomography imaging system is slanted at an angle to a surface normal of the object.

Abstract: A light emitting element includes: a substrate; a mesa portion formed on the substrate and including an active layer, a first semiconductor layer, and a second semiconductor layer; a metal layer including a first metal part disposed on a top surface of the mesa portion and connected to the second semiconductor layer and a second metal part formed integrally with the first metal part and extending along a side surface of the mesa portion; an insulating layer formed on the side surface; and a resin layer formed on the insulating layer. The first metal part includes an opening region formed with a light passage opening and a connection region for external connection. The second metal part is formed on the side surface via the insulating layer and the resin layer and overlaps the active layer when viewed in a direction perpendicular to a thickness direction of the substrate.

Abstract: An observation apparatus includes a light source unit, an irradiation optical system, an imaging optical system, a modulation unit, an imaging unit, an analysis unit, beam splitters and, and mirrors. The analysis unit obtains a real part of a function ?(t)=log [1+Uobj(t)/Uref(t)], defined by time series data Uobj(t) of a complex amplitude image of object light on an imaging plane and time series data Uref(t) of a complex amplitude image of reference light on the imaging plane, based on time series data I(t) of an intensity image of interference light on the imaging plane and time series data Iref(t) of an intensity image of the reference light on the imaging plane. Further, the analysis unit obtains an imaginary part of ?(t) from the real part of ?(t) using the Kramers-Kronig relations, and further obtains Uobj(t).