Patents Assigned to Headway Technologies, Inc.
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Patent number: 9601138Abstract: A read head is longitudinally biased unidirectionally by laterally abutting soft magnetic layers or multilayers. The soft magnetic layers are themselves magnetically stabilized by layers of antiferromagnetic material that are exchange coupled to them. The same layers of antiferromagnetic materials can be used to stabilize a unidirectional anisotropy of an overhead shield by means of exchange coupling. By including the antiferromagnetic material layer within the patterned biasing structure itself, an additional layer of antiferromagnetic material that normally covers the entire sensor structure is eliminated. The elimination of an entire layer is also advantageous for reducing the inter-sensor spacing in a TDMR (two dimensional magnetic recording) configuration where two sensor are vertically stacked on top of each other.Type: GrantFiled: September 9, 2015Date of Patent: March 21, 2017Assignee: Headway Technologies, Inc.Inventors: Glen Garfunkel, Yan Wu, Junjie Quan, Yewhee Chye
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Patent number: 9589582Abstract: A PMR writer is disclosed wherein a hot seed layer (HS) made of a 19-24 kilogauss (kG) magnetic material is formed between a gap layer and a 10-16 kG magnetic layer in the side shields, and between the leading gap and a 16-19 kG magnetic layer in the leading shield to improve the track field gradient and cross-track field gradient while maintaining write-ability. The HS is from 10 to 100 nm thick and has a first side facing the write pole with a height of ?0.15 micron, and a second side facing a main pole flared side that may extend to a full side shield height of ?0.5 micron. The trailing shield has a second hot seed layer on the write gap and a 16-19 kG magnetic layer that contacts the 10-16 kG side shield magnetic layer thereby forming an all wrap around (AWA) shield configuration.Type: GrantFiled: May 23, 2016Date of Patent: March 7, 2017Assignees: Headway Technologies, Inc., TDK CorporationInventors: Yue Liu, Atsushi Yamaguchi, Yuhui Tang, Jiun-Ting Lee, Yaguang Wei, Xiaomin Liu, Hideyuki Ukita, Moris Dovek, Michitaka Nishiyama
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Patent number: 9573243Abstract: An adaptive feedback control method is provided for a chemical mechanical polish process to minimize a dielectric layer clearing time difference between two annular regions on a substrate. An optical system with an optical window passes below the polishing pad and detects reflected light interference signals from at least two annular regions. A pre-clearing time difference is determined and is used to calculate an adjustment to one or both of a CMP head membrane pressure and a retaining ring pressure. The pressure adjustment is applied before the end of the polish cycle to avoid the need for a second polish cycle and to reduce a dishing difference and a resistance difference in a metal layer in the at least two annular regions. In some embodiments, a second pressure adjustment is performed before the end of the cycle and different CMP head membrane pressure adjustments are made in different pressure zones.Type: GrantFiled: November 4, 2014Date of Patent: February 21, 2017Assignee: Headway Technologies, Inc.Inventors: Terry Moore, Brant Nease
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Patent number: 9577184Abstract: A TMR sensor that includes a free layer having at least one B-containing (BC) layer made of CoFeB, CoFeBM, CoB, CoBM, or CoBLM, and a plurality of non-B containing (NBC) layers made of CoFe, CoFeM, or CoFeLM is disclosed where L and M are one of Ni, Ta, Ti, W, Zr, Hf, Tb, or Nb. One embodiment is represented by (NBC/BC)n where n?2. A second embodiment is represented by (NBC/BC)n/NBC where n?1. In every embodiment, a NBC layer contacts the tunnel barrier and NBC layers each with a thickness from 2 to 8 Angstroms are formed in alternating fashion with one or more BC layers each 10 to 80 Angstroms thick. Total free layer thickness is <100 Angstroms. The free layer configuration described herein enables a significant noise reduction (SNR enhancement) while realizing a high TMR ratio, low magnetostriction, low RA, and low Hc values.Type: GrantFiled: May 15, 2015Date of Patent: February 21, 2017Assignee: Headway Technologies, Inc.Inventors: Tong Zhao, Hui-Chuan Wang, Yu-Chen Zhou, Min Li, Kunliang Zhang
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Publication number: 20170047087Abstract: A main pole has a front end face including a first end face portion and a second end face portion. A plasmon generator has a near-field light generating surface. A surrounding layer has a first surrounding layer end face and a second surrounding layer end face located on opposite sides of the first end face portion in the track width direction. A gap film has a first gap film end face and a second gap film end face located on opposite sides of the near-field light generating surface in the track width direction. Each of the first and second gap film end faces includes a portion located between the first and second surrounding layer end faces, but does not include any portion interposed between the first surrounding layer end face and the first end face portion or between the second surrounding layer end face and the first end face portion.Type: ApplicationFiled: August 12, 2015Publication date: February 16, 2017Applicant: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka SASAKI, Hiroyuki ITO, Shigeki TANEMURA, Hironori ARAKI, Seiichiro TOMITA, Hideo MAMIYA
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Patent number: 9558765Abstract: A spin transfer oscillator (STO) with a seed/FGL/spacer/SIL/capping configuration is disclosed with a composite seed layer made of Ta and a metal layer having a fcc(111) or hcp(001) texture to enhance perpendicular magnetic anisotropy (PMA) in an overlying (A1/A2)YFeCo laminated field generation layer (FGL). The spin injection layer (SIL) may be laminated with a (A1/A2)XFeCo configuration. The FeCo layer in the SIL is exchanged coupled with the (A1/A2)X laminate (x is 5 to 50) to improve robustness. The (A1/A2)Y laminate (y=5 to 30) in the FGL may be exchange coupled with a high Bs layer to enable easier oscillations. A1 may be one of Co, CoFe, or CoFeR where R is a metal, and A2 is one of Ni, NiCo, or NiFe. The STO is typically formed between a main pole and trailing shield in a write head.Type: GrantFiled: May 23, 2016Date of Patent: January 31, 2017Assignee: Headway Technologies, Inc.Inventors: Kunliang Zhang, Min Li, Yuchen Zhou
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Patent number: 9542960Abstract: A thermally-assisted magnetic recording head includes a main pole, a plasmon generator, and first and second side shields. The main pole has a front end face located in the medium facing surface. The plasmon generator has a near-field light generating surface located in the medium facing surface. The front end face of the main pole includes a first end face portion, and a second end face portion greater in width than the first end face portion. The first and second side shields have first and second side shield end faces located on opposite sides of at least part of the near-field light generating surface and at least part of the first end face portion in the track width direction.Type: GrantFiled: May 22, 2015Date of Patent: January 10, 2017Assignee: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Shigeki Tanemura, Kazuki Sato, Hideo Mamiya, Kenichi Takano
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Patent number: 9520147Abstract: A MR sensor is disclosed that has a free layer (FL) with perpendicular magnetic anisotropy (PMA) which eliminates the need for an adjacent hard bias structure to stabilize free layer magnetization and minimizes shield-FL interactions. In a TMR embodiment, a seed layer, free layer, junction layer, reference layer, and pinning layer are sequentially formed on a bottom shield. After patterning, a conformal insulation layer is formed along the sensor sidewall. Thereafter, a top shield is formed on the insulation layer and includes side shields that are separated from the FL by a narrow read gap. The sensor is scalable to widths <50 nm when PMA is greater than the FL self-demag field. Effective bias field is rather insensitive to sensor aspect ratio which makes tall stripe and narrow width sensors a viable approach for high RA TMR configurations. Sensor sidewalls may extend into the seed layer or bottom shield.Type: GrantFiled: December 23, 2014Date of Patent: December 13, 2016Assignee: Headway Technologies, Inc.Inventors: Yuchen Zhou, Kunliang Zhang, Zhigang Bai
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Patent number: 9515253Abstract: A TMR stack or a GMR stack, ultimately formed into a sensor or MRAM element, include insertion layers of Fe or iron rich layers of FeX in its ferromagnetic free layer and/or the AP1 layer of its SyAP pinned layer. X is a non-magnetic, metallic element (or elements) chosen from Ta, Hf, V, Co, Mo, Zr, Nb or Ti whose total atom percent is less than 50%. The insertion layers are between 1 and 10 angstroms in thickness, with between 2 and 5 angstroms being preferred and, in the TMR stack, they are inserted adjacent to the interfaces between a tunneling barrier layer and the ferromagnetic free layer or the tunneling barrier layer and the AP1 layer of the SyAP pinned layer in the TMR stack. The insertion layers constrain interdiffusion of B and Ni from CoFeB and NiFe layers and block NiFe crystalline growth.Type: GrantFiled: June 24, 2015Date of Patent: December 6, 2016Assignee: Headway Technologies, Inc.Inventors: Kunliang Zhang, Hui-Chuan Wang, Junjie Quan, Yewhee Chye, Min Li
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Patent number: 9508364Abstract: A PMR writer is disclosed with an all wrap around (AWA) shield design in which one or more of the leading shield, trailing shield, and side shields are comprised of a composite wherein a magnetic “hot seed” layer made of a >19 kG to 24 kG material adjoins a gap layer, and a side of the hot seed layer opposite the gap layer adjoins a high damping magnetic layer made of a 10-16 kG material (or a 16-19 kG material in the trailing shield) having a Gilbert damping parameter ?>0.04. In a preferred embodiment, the high damping magnetic layer is FeNiRe with a Re content of 3 to 15 atomic %. One or both of the main pole leading and trailing sides may be tapered. Side shields may have a single taper or dual taper structure. Higher writer speed with greater areal density capability is achieved.Type: GrantFiled: September 9, 2015Date of Patent: November 29, 2016Assignee: Headway Technologies, Inc.Inventors: Yuhui Tang, Yaguang Wei, Jiun-Ting Lee
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Publication number: 20160343391Abstract: A thermally-assisted magnetic recording head includes a main pole, a plasmon generator, and first and second side shields. The main pole has a front end face located in the medium facing surface. The plasmon generator has a near-field light generating surface located in the medium facing surface. The front end face of the main pole includes a first end face portion, and a second end face portion greater in width than the first end face portion. The first and second side shields have first and second side shield end faces located on opposite sides of at least part of the near-field light generating surface and at least part of the first end face portion in the track width direction.Type: ApplicationFiled: May 22, 2015Publication date: November 24, 2016Applicant: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka SASAKI, Hiroyuki ITO, Shigeki TANEMURA, Kazuki SATO, Hideo MAMIYA, Kenichi TAKANO
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Patent number: 9502053Abstract: A magnetic head includes a main pole, a write shield, and a gap section. The write shield includes a trailing shield. The trailing shield includes a first portion, a second portion, a third portion and a fourth portion. The second portion and the third portion are located on opposite sides of the first portion in the track width direction. Top surfaces of the first to third portions are coplanar with each other. The fourth portion lies on the top surfaces of the first to third portions. The first portion is higher in saturation flux density than the second to fourth portions.Type: GrantFiled: December 28, 2015Date of Patent: November 22, 2016Assignee: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Kazuki Sato, Shigeki Tanemura, Yukinori Ikegawa, Kazumasa Yasuda
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Patent number: 9495980Abstract: A magnetic head includes a coil, a main pole and a return path section. The return path section includes a yoke section, and a coupling section coupling the yoke section to the main pole. The coil includes a first coil portion surrounding at least part of an outer peripheral surface of the coupling section, and a second coil portion surrounding at least part of the entire perimeter of the main pole as viewed from the medium facing surface. The winding of the coil includes a common portion used in common to form part of the first coil portion and part of the second coil portion.Type: GrantFiled: October 19, 2015Date of Patent: November 15, 2016Assignee: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Kazuki Sato, Hironori Araki, Kazumasa Yasuda, Kenichi Takano
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Patent number: 9489969Abstract: A magnetic head includes a main pole, a write shield and a gap section. The write shield includes a leading shield having a top surface opposed to a bottom end of the main pole. The gap section includes a leading gap section for separating the leading shield from the bottom end of the main pole. The leading gap section is formed using a first nonmagnetic layer and a second nonmagnetic layer. The first nonmagnetic layer has a first front end located closest to but at a distance from the medium facing surface. The second nonmagnetic layer has a second front end located in the medium facing surface.Type: GrantFiled: October 28, 2015Date of Patent: November 8, 2016Assignee: HEADWAY TECHNOLOGIES, INC.Inventors: Yukinori Ikegawa, Yoshitaka Sasaki, Kazuki Sato, Shigeki Tanemura, Hironori Araki, Seiichiro Tomita
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Patent number: 9490054Abstract: A magnetic element is disclosed wherein a composite seed layer such as TaN/Mg enhances perpendicular magnetic anisotropy (PMA) in an overlying magnetic layer that may be a reference layer, free layer, or dipole layer. The first seed layer is selected from one or more of Ta, Zr, Nb, TaN, ZrN, NbN, and Ru. The second seed layer is selected from one or more of Mg, Sr, Ti, Al, V, Hf, B, and Si. A growth promoting layer made of NiCr or an alloy thereof may be inserted between the seed layer and magnetic layer. The magnetic element has thermal stability to at least 400° C.Type: GrantFiled: October 11, 2012Date of Patent: November 8, 2016Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Ru-Ying Tong
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Patent number: 9484049Abstract: A TMR sensor with a free layer having a FL1/FL2/FL3 configuration is disclosed in which FL1 is FeCo or a FeCo alloy with a thickness between 2 and 15 Angstroms. The FL2 layer is made of CoFeB or a CoFeB alloy having a thickness from 2 to 10 Angstroms. The FL3 layer is from 10 to 100 Angstroms thick and has a negative ? to offset the positive ? from FL1 and FL2 layers and is comprised of CoB or a CoBQ alloy where Q is one of Ni, Mn, Tb, W, Hf, Zr, Nb, and Si. Alternatively, the FL3 layer may be a composite such as CoB/CoFe, (CoB/CoFe)n where n is ?2 or (CoB/CoFe)m/CoB where m is ?1. The free layer described herein affords a high TMR ratio above 60% while achieving low values for ? (<5×10?6), RA (1.5 ohm/?m2), and Hc (<6 Oe).Type: GrantFiled: June 6, 2014Date of Patent: November 1, 2016Assignee: Headway Technologies, Inc.Inventors: Hui-Chuan Wang, Tong Zhao, Min Li, Kunliang Zhang
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Patent number: 9478733Abstract: A MTJ for a spintronic device includes a thin seed layer that enhances perpendicular magnetic anisotropy (PMA) in an overlying laminated layer with a (Co/Ni)n composition or the like where n is from 2 to 30. The seed layer is preferably NiCr, NiFeCr, Hf, or a composite thereof with a thickness from 10 to 100 Angstroms. Furthermore, a magnetic layer such as CoFeB may be formed between the laminated layer and a tunnel barrier layer to serve as a transitional layer between a (111) laminate and (100) MgO tunnel barrier. There may be a Ta insertion layer between the CoFeB layer and laminated layer to promote (100) crystallization in the CoFeB layer. The laminated layer may be used as a free layer in a MTJ. Annealing between 300° C. and 400° C. may be used to further enhance PMA in the laminated layer.Type: GrantFiled: October 31, 2014Date of Patent: October 25, 2016Assignee: Headway Technologies, Inc.Inventors: Guenole Jan, Witold Kula, Ru Ying Tong, Yu Jen Wang
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Patent number: 9478241Abstract: A thermally-assisted magnetic recording head includes a main pole, a waveguide, and a plasmon generator. The waveguide includes a core and a cladding. The main pole and the core are located on the same side in the direction of travel of a recording medium relative to the plasmon generator. The main pole has a first end face located in the medium facing surface, and a second end face opposite to the first end face. The core has a front end face opposed to the second end face of the main pole. The cladding includes an interposition section interposed between the front end face of the core and the second end face of the main pole. The front end face of the core and the second end face of the main pole are inclined with respect to the medium facing surface.Type: GrantFiled: February 9, 2016Date of Patent: October 25, 2016Assignee: HEADWAY TECHNOLOGIES, INC.Inventors: Shigeki Tanemura, Yoshitaka Sasaki, Hiroyuki Ito, Xuhui Jin, Hideo Mamiya, Yukinori Ikegawa
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Publication number: 20160307592Abstract: A plasmon generator includes a main body, and a front protrusion protruding from the main body. The front protrusion has a proximal portion which is a boundary with the main body, and a near-field light generating surface located in the medium facing surface of a magnetic head. The main body has a first inclined surface and a second inclined surface each facing toward the medium facing surface. The first inclined surface and the second inclined surface are at a distance from each other and aligned in the track width direction. The proximal portion of the front protrusion is located between the first inclined surface and the second inclined surface.Type: ApplicationFiled: April 20, 2015Publication date: October 20, 2016Applicant: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka SASAKI, Hiroyuki ITO, Shigeki TANEMURA, Hideo MAMIYA, Hironori ARAKI, Seiichiro TOMITA
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Patent number: 9472230Abstract: A plasmon generator includes a main body, and a front protrusion protruding from the main body. The front protrusion has a proximal portion which is a boundary with the main body, and a near-field light generating surface located in the medium facing surface of a magnetic head. The main body has a first inclined surface and a second inclined surface each facing toward the medium facing surface. The first inclined surface and the second inclined surface are at a distance from each other and aligned in the track width direction. The proximal portion of the front protrusion is located between the first inclined surface and the second inclined surface.Type: GrantFiled: April 20, 2015Date of Patent: October 18, 2016Assignee: HEADWAY TECHNOLOGIES, INC.Inventors: Yoshitaka Sasaki, Hiroyuki Ito, Shigeki Tanemura, Hideo Mamiya, Hironori Araki, Seiichiro Tomita
