Patents Assigned to HERAEUS
  • Patent number: 4680438
    Abstract: Disclosed is a laminated material for electrical contacts having a support of base metal or of a base metal alloy, a contact layer of titanium nitride which in turn is covered with a mixed layer of titanium nitride and at least one noble metal. Also disclosed is a method for making the laminated material in a single step in a vacuum apparatus with reactive formation of the titanium nitride.
    Type: Grant
    Filed: February 6, 1986
    Date of Patent: July 14, 1987
    Assignee: W. C. Heraeus GmbH
    Inventors: Karin Witting, Dieter Poss, Rudolf Schnabl
  • Patent number: 4677273
    Abstract: An electron-beam welding apparatus includes a vacuum chamber and a gantry entirely within the chamber for adjustably supporting an electron-beam welding gun with x, y and z coordinates of adjustability with respect to mutually perpendicular x-, y- and z-axes within the chamber. The gantry includes apparatus telescoping along the z-axis for adjustably supporting the electron-beam welding gun with respect to the z-axis.
    Type: Grant
    Filed: September 12, 1986
    Date of Patent: June 30, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Russell K. Colegrove, William M. Stone
  • Patent number: 4676814
    Abstract: Disclosed is a method for the axial building up, in a vertical arrangement, of a hollow cylindrical soot body having no internal support and consisting substantially of silicon dioxide by means of at least one flame hydrolysis build-up burner serving for the soot production. In this method the soot is deposited at the beginning of the build-up onto an auxiliary body, and during the build-up the build-up burner and the growing soot body are rotated relative to one another, and the burner is at the same time held at an unvarying distance from the growing end of the hollow cylinder and centrally above the predetermined cross section of the upwardly growing end of the cylinder wall. The penetration of soot into the interior of the cylinder is prevented by means of a directed gas stream.
    Type: Grant
    Filed: May 21, 1986
    Date of Patent: June 30, 1987
    Assignee: Heraeus Quarzschmelze GmbH
    Inventors: Dieter Ross, Hans-Ulrich Bonewitz, Uwe Christiansen, Karl-Friedrich Klein, Albert Muhlich, Karlheinz Rau, Wolfgang Ruffing, Fritz Simmat, Anton Steinkohl, Ralf Takke
  • Patent number: 4674884
    Abstract: Cell for gas analyzers, having a casing with a cylindrical bore which is divided by an axial wall of separation into two chambers. The one chamber serves for the gas being measured and the other for a reference medium. The chambers terminate in windows at both ends. To make such a cell resistant to pressure and corrosion, the reference medium is constituted by a transparent, glass-clear material which is disposed in the cylindrical bore. At each end of the cylindrical bore there is provided an annular shoulder for the support of an annular gasket and a window. The windows are held by annular compression flanges and annular gaskets.
    Type: Grant
    Filed: August 13, 1984
    Date of Patent: June 23, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Helmut Heimel, Albert Randow, Rudi Ross, Gerhard Wiegleb
  • Patent number: 4672203
    Abstract: A multi-stage valve having a valve housing containing an inlet port and an outlet port that communicate through means of an elongated chamber formed in the housing. An outer sealing unit is mounted in the chamber and is adapted to close in sealing contact against one of the ports. A control orifice is passed through the first sealing unit to restrict the flow through the port when the unit is sealed thereagainst. A second inner sealing unit is mounted in the chamber behind the outer unit and is arranged to close thereagainst to seal the orifice. The two units are coupled by a lost motion mechanism which permits the sealing units to close in sequence between a fully closed position, an intermediate position wherein the flow through the valve is restricted by the orifice and a fully opened position wherein the flow through the valve is unrestricted.
    Type: Grant
    Filed: November 14, 1985
    Date of Patent: June 9, 1987
    Assignee: Inficon Leybold-Heraeus, Inc.
    Inventor: David H. Holkeboer
  • Patent number: 4669938
    Abstract: An apparatus for loading a furnace with semiconductor wafers is known, which has at least two heat treatment chambers (1A, 1B, 1C, 1D), each of them having an associated stationary loading unit (8) with a receptacle movable in the direction of the furnace axis via a feed apparatus and having a loading system (2A, 2B, 2C, 2D) for semiconductor wafers. In order to provide such an apparatus for automatically loading the furnace with semiconductors which facilitates loading and overcomes the disadvantages of the known apparatuses, the apparatus according to the invention has a common central loading station (9) for all the semiconductor loading systems (2), and these loading systems are removable from the loading unit (8).
    Type: Grant
    Filed: September 25, 1986
    Date of Patent: June 2, 1987
    Assignee: Heraeus Quarzschmelze GmbH
    Inventor: Geoffrey Hayward
  • Patent number: 4669873
    Abstract: A spectrophotometer obtains transmitted, reflected, or radiated light from at least two measuring points on at least one object and a spectroscopic light disperser disperses the obtained light spectroscopically to measuring cells for electrically indicating the spectrum of the obtained light, whereby the spectrum may be analyzed for indicating optical properties of the object at the measuring point from which the light was obtained. At least one fibre-glass cable respectively carries the light obtained at each measuring point to the spectroscopic light disperser. The ends of the fibres of each cable at the spectroscopic light dispersion are arranged in a row and the row of fibre ends of each cable are parallel to each other in a matrix of fibre ends. At least one light stop allows light from only one fibre-glass cable at a time to carry the light to the spectroscopic light disperser.
    Type: Grant
    Filed: February 21, 1985
    Date of Patent: June 2, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventor: Peter Wirz
  • Patent number: 4670651
    Abstract: An apparatus for the performance of the SNMS process, having a separate ion source, a sample holder, a system for the production of a radio-frequency plasma and a mass analyzer, in which the ion source and the mass analyzer are disposed side by side on the same side of the chamber provided for the radio-frequency plasma, and in which the sample mounted on the sample holder is situated within the chamber provided for the radio-frequency plasma. This apparatus can be used not only for the performance of the two kinds of SNMS operation (DMB and SBM) but also secondary ion mass spectroscopy (SIMS) under optimum spatial conditions.
    Type: Grant
    Filed: September 25, 1985
    Date of Patent: June 2, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Stefan Meier, Karl-Heinz Muller
  • Patent number: 4666495
    Abstract: A method of manufacturing practically stria-free, bubble-free, and homogeneous quartz-glass plates of any desired configuration and with a surface area that exceeds the cross-section of the full circular quartz-glass cylinder that is employed as a starting material. The cylinder is continuously lowered into a furnace shell flooded with an inert gas, in which it is heated to a flowing temperature in the range of 1700.degree. to 1900.degree. C. until some of the quartz-glass flows off into a graphite crucible. The crucible is preferably clad with zirconium-oxide.
    Type: Grant
    Filed: April 4, 1986
    Date of Patent: May 19, 1987
    Assignee: Heraeus Quarzschmelze GmbH
    Inventors: Karl Kreutzer, Fritz Simmat
  • Patent number: 4662086
    Abstract: Disclosed is a self-contained radiant unit in the form of a portal for use particularly as a drying and baking tunnel for the automobile industry which is equipped with a plurality of infrared lamps on its inner surfaces. Air inlet openings are provided in the roof and/or side walls of the portal, at least over the region midway along with their horizontal extension, for the turbulence-free removal of the vapors emanating from the surface of the object being treated as well as of suspended particles present in the drying and baking zone.
    Type: Grant
    Filed: November 18, 1985
    Date of Patent: May 5, 1987
    Assignee: Heraeus Quarzschmelze GmbH
    Inventors: Udo Hennecke, Norbert Mittelstadt, Eberhard Muller
  • Patent number: 4661409
    Abstract: A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atmosphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substance provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.
    Type: Grant
    Filed: November 13, 1985
    Date of Patent: April 28, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Jorg Kieser, Michael Neusch
  • Patent number: 4659986
    Abstract: To permit testing of electrical connectors mounted on a strip, a pair of jaws, similarly to substantially transversely extended clothespin jaws, are provided, the inside surface of one (A) of the jaws (A, B) carrying a conductive strip (4) adapted to be engaged by one terminal of elements to be tested, the other terminal of the test elements being connected to a test track (7), for example applied over the conductive strip with an intervening insulating layer; (20) individual components (2) can be tested by foreshortening one terminal pin (5b) of the components and extending electrically conductive fingers, preferably of resistance material (6) for spring-clip engagement (8) with the foreshortened pins. The conductive strip (4) and the track (7) are brought out to external accessible terminal connectors (9). Alternatively, the test track is applied to a support strip (1) on which the elements (2) are located.
    Type: Grant
    Filed: September 19, 1984
    Date of Patent: April 21, 1987
    Assignee: W.C. Heraeus GmbH
    Inventors: Werner Elster, Horst Koch, Gustav Ost, Werner Simon, Karl Deckelmann, Ino Taitl
  • Patent number: 4658404
    Abstract: Disclosed is an induction furnace with a furnace bottom comprising a crucible, an induction winding and a gas-tight casing, also having a lid, for the furnace bottom, which lid has at least one gas connection, a charging valve and a pouring arrangement. The furnace bottom and lid are connected by a flange joint and tiltably mounted by means of a picot bearing and a drive about a tipping axis in a furnace stand. The pivot bearing is secured to the lid, the tipping mechanism engages the lid, and the furnace bottom is separable from the lid by unfastening the flange joint, the lid remaining in the furnace stand.
    Type: Grant
    Filed: August 18, 1986
    Date of Patent: April 14, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Georg Sick, Otto Stenzel, Heinz Kohnert, Hans-Johann Kemmer
  • Patent number: 4653650
    Abstract: A rack for supporting wafers has a pair of parallel struts with kerfs therealong for supporting the wafers. A dummy wafer is attached to the struts near each end of the struts to connect the struts structurally as the rack and serve as rack-handling handles. The dummy wafers are parallel to the adjacent kerfs and thus the wafers therein and dimensioned similarly to the wafers for providing favorable gas and heat distribution when a wafer loaded rack is placed in a furnace. This adapts the rack for diffusion treatment of semiconductor wafers.
    Type: Grant
    Filed: October 23, 1985
    Date of Patent: March 31, 1987
    Assignee: Heraeus Quarzschmelze GmbH
    Inventor: Karl A. Schulke
  • Patent number: 4652358
    Abstract: The invention relates to a cathode system for sputtering apparatus which includes a target plate of ferromagnetic material. A magnet system is situated behind the target plate and has opposed poles positioned so that at least a portion of the lines of force emerging from the poles passes out through the target and returns thereto. The target is placed on a floor which includes strips of ferromagnetic material in the area of the poles of the magnet system. These strips close the magnetic circuit between the magnet system and the target plate. The remainder of the floor is made of nonmagnetic material.
    Type: Grant
    Filed: August 24, 1984
    Date of Patent: March 24, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Gerd Deppisch, Klaus Roll, Karl-Heinz Schuller
  • Patent number: 4648347
    Abstract: In vacuum depositing apparatus, especially for the manufacture of magnetic tapes, a substrate holder is disposed in the form of a cooling cylinder, and in the path of the vapor stream there is a mask for the purpose of geometrically restricting the vapor stream. In order to prevent any condensation of vaporized material in solid form, the surface of the mask facing the vapor stream is not aligned horizontally, and its lowermost edge lies within the projected surface of the crucible opening. The surface of the mask can be heated up to a temperature that is between the vaporizing temperature and the solidification temperature of the vaporized material. In an especially advantageous manner, the surface of the mask is formed by tiles of a ceramic material.
    Type: Grant
    Filed: May 29, 1985
    Date of Patent: March 10, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Volker Bauer, Albert Feuerstein, Horst Ranke
  • Patent number: 4647011
    Abstract: A magnetic valve for use with vacuum which has an improved junction between the stem and the valve disk which prevents detritus from impairing the seal of the valve. The valve has a magnetic drive coil outside a vacuum tight casing and an armature within the casing to which a valve stem is connected. A junction between the valve stem and the valve disk includes a head on one of the two components and a beaded margin enveloping the head on the other of the two components. An annular gasket is disposed between the head and the beaded margin.
    Type: Grant
    Filed: June 27, 1985
    Date of Patent: March 3, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventors: Franz-Peter Contzen, Gerhard Jokisch, Francesco Vittori
  • Patent number: 4645413
    Abstract: A friction pump (molecular pump, turbomolecular pump) has pumping surfaces which include surface areas which face upstream as well as surface areas which face downstream with respect to the pumping direction. In at least a portion of the pumping surfaces, surface areas of different roughness are present, such that the roughness of the surface areas facing downstream with respect to the pumping direction is greater than the roughness of the surface areas facing upstream with respect to the pumping direction.
    Type: Grant
    Filed: May 15, 1984
    Date of Patent: February 24, 1987
    Assignee: Leybold-Heraeus GmbH
    Inventor: Gunter Reich
  • Patent number: 4646314
    Abstract: A high-power laser, especially one with a gaseous excitation medium, having an unstable optical resonator is disclosed. Fully reflecting mirrors, whose planes of curvature are parallel to one another, form the ends of the unstable optical resonator. A third mirror is concavely curved in a plane perpendicular with respect to the other two mirrors. The mirrors have a rectangular cross section and are preferably metallic. The mirrors constituting the ends of the unstable optical resonator form a confocal resonator.
    Type: Grant
    Filed: April 7, 1986
    Date of Patent: February 24, 1987
    Assignee: W. C. Heraeus GmbH
    Inventor: Hans Opower
  • Patent number: 4646057
    Abstract: A method of forming chip resistors in which a resistive coating is applied to an insulating substrate which is subsequently divided up into single chip components includes the step of providing end terminations for the individual chip resistors before the sheet is divided up. This is achieved by forming a hole 13 in the substrate 11 at the position of each end termination and then coating the holes with an electrically conductive material 14 which electrically connects with the adjacent region of the resistive coating 12. In order to improve the solderability and the reliability of the end terminations the holes 13 may be filled with solder 15. The electrical value of the resistive element coating may then be adjusted to a precise value by trimming away some of the resistive element material with a laser. Finally, the substrate is divided up into the single chip resistor components.
    Type: Grant
    Filed: February 15, 1985
    Date of Patent: February 24, 1987
    Assignee: W. C. Heraeus GmbH
    Inventor: Quentin M. Reynolds