Abstract: An apparatus basically uses a simple and compact multi-axis magnetic lens to focus each of a plurality of charged particle beams on sample surface at the same time. In each sub-lens module of the multi-axis magnetic lens, two magnetic rings are respectively inserted into upper and lower holes with non-magnetic radial gap. Each gap size is small enough to keep a sufficient magnetic coupling and large enough to get a sufficient axial symmetry of magnetic scale potential distribution in the space near to its optical axis. This method eliminates the non-axisymmetric transverse field in each sub-lens and the round lens field difference among all sub-lenses at the same time; both exist inherently in a conventional multi-axis magnetic lens.

Abstract: This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector,or acts as an electric deflector and an electric stigmator together. A cylindrical 4-coil magnetic device with a magnetic core acts as a magnetic deflector. Both can produce a dipole field while only incurring a negligibly-small 3rd order field harmonic. The magnetic core enhances the strength and more preciously regulates the distribution of the magnetic field originally generated by the coils. Then two ways to construct a Wien filter are proposed. One way is based on both of the foregoing electric and magnetic devices, and the other way is based on the foregoing electric device and a conventional magnetic deflector. The astigmatism in each of such Wien filters can be compensated by the electric stigmator of the electric device.

Abstract: This invention provides a multi-pole type Wien filter, which acts more purely approaching its fundamentally expected performance. A 12-electrode electric device acts as an electric deflector, or acts as an electric deflector and an electric stigmator together. A cylindrical 4-coil magnetic device with a magnetic core acts as a magnetic deflector. Both can produce a dipole field while only incurring a negligibly-small 3rd order field harmonic. The magnetic core enhances the strength and more preciously regulates the distribution of the magnetic field originally generated by the coils. Then two ways to construct a Wien filter are proposed. One way is based on both of the foregoing electric and magnetic devices, and the other way is based on the foregoing electric device and a conventional magnetic deflector. The astigmatism in each of such Wien filters can be compensated by the electric stigmator of the electric device.

Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.

Abstract: The invention is directed to a piece (2) for a saddletree (1) of mat-like general shape conformed to have both a first overall concavity in a first direction of a longitudinal plane of symmetry and a second overall concavity in a second direction of a transverse plane, delimited by an exterior free edge (14) including a pommel portion, a cantle portion and two longitudinal portions, the exterior free edge being adapted to cooperate with a complementary interior free edge of the saddletree, the mat including a plurality of individual portions at least partly separate, placed in the vicinity of each other so that each individual portion can absorb forces and be deformed in bending or in torsion at least partly independently of the other individual portions, the piece being provided with elements for associating it with the saddletree.

Abstract: A test structure and method thereof for determining a defect in a sample of semiconductor device includes at least one transistor rendered grounded. The grounded transistor is preferably located at at least one end of a test pattern designed to be included in the sample. When the test structure is inspected by charged particle beam inspection, the voltage contrast (VC) of the transistors in the test pattern including the grounded transistor is observed for determination of the presence of defect in the sample.

Abstract: This invention provides a design of Wien filter for satisfying Wien Condition so as to ensure the Wien filter's performance. At first, to minimize the magnetic flux leaking out of the Wien filter, the invention proposes three measures to form a magnetic circuit to cover the magnetic device of a Wien filter respectively. The measures especially benefit a Wien filter acting as beam separator or Monochromator in a high resolution SEM. Secondly, based on the Wien filter proposed in cross-reference, several ways are provided for reducing the dissatisfaction of Wien Condition within the Wien filter, which especially modify either or both of the distribution shapes of the on-axis electric and magnetic dipole fields at two ends of the Wien filter. These ways provide more flexibility to reduce the dissatisfaction of Wien Condition in a Wien filter to a given degree at a reasonable manufacturing cost.

Abstract: A display mechanism for a clock movement for controlling the movements of a member for displaying at least one indication related to the time or to the operation of a timepiece, includes a cam having a periphery with a predetermined shape and driven by a base wheel, a lever pivotally mounted relative to a frame member of the movement, between an abutment position associated with an indication position of the display member, and a standby position associated with a predetermined alternative position of the display member. The lever bears a feeler intended for interaction with the periphery of the cam so as to define the abutment position, and the lever further bears a rake engaged with a pinion for driving the display member. An elastic element applies a force onto the lever for positioning it in the abutment position. The mechanism includes a mobile control member having at least a stable standby and a stable indication position.

Abstract: An electrode structure adapted for high applied voltage is provided, which comprises a conductive plate substrate and a covering layer disposed thereon such that a covering percentage of the covering layer over the conductive plate substrate is more than 50%. Since area of the conductive plate substrate covered by the covering layer is larger than the area exposed, the possibility of arcing is reduced and the breakdown voltage applied to the electrode structure may be increased.

Abstract: Tissue is treated using a radiofrequency power supply connected to an applicator having a chamber filled with an electrically non-conductive gas surrounded by a thin dielectric wall. A radiofrequency voltage is applied at a level sufficient to ionize the gas into a plasma and to capacitively couple the ionized plasma with the tissue to deliver radiofrequency current to ablate or otherwise treat the tissue.

Abstract: The invention relates to a method for producing superheated steam in an engine in which highly compressed water is injected into a very hot medium located in the engine, resulting in explosion-like evaporation. Said process is to take place in a specially developed rotational-translational engine in order to utilize a maximum of the thrust of the steam. The engine is to comprise at least two cylinders which have a circular cross-sectional shape (10) and inside which the drive shaft (11) is disposed eccentrically. A rotor (12) that is connected to an element (16) which is inserted through the drive shaft (11) is arranged on the drive shaft. Said element (16) can be moved back and forth in the drive shaft (11) while the ends thereof are fixedly anchored to the rotor (12). The two ends of the rotor (10) are provided with a specially designed triple-roll seal (13) that can lengthen and shorten the rotor (10), which is a requirement when the drive shaft (11) is placed non-axially in a circular cylinder (10).

Abstract: Tissue is treated using a radiofrequency power supply connected to an applicator having a chamber filled with an electrically non-conductive gas surrounded by a thin dielectric wall. A radiofrequency voltage is applied at a level sufficient to ionize the gas into a plasma and to capacitively couple the ionized plasma with the tissue to deliver radiofrequency current to ablate or otherwise treat the tissue.

Abstract: An upper electrode for use in a plasma processing chamber is provided, which includes a center segment and a plurality of outer segments. The outer segments are attached to the center segment to adjust the area of the overall electrode. Gas distribution holes may be selectively formed on the center and outer segments, or both. By adding or removing the outer segments and stacking layers, the dimension of the electrode, the area of gas spurting region and the thickness of the provided upper electrode may be adjusted.

Abstract: A CIS test probe card with an optic assembly is disclosed. At least one embodiment relates to the optic assembly being located close to the CIS test probe card to collimate a light before it is projected through the CIS test probe card to the wafer. At least one embodiment relates to a change in the geometric configuration of the hole(s) and the probe(s) in the CIS test probe card. Small holes corresponding to the CIS chips in a one-on-one fashion can be implemented, such that each small hole is located over a corresponding CIS chip.

Abstract: A detection unit of a charged particle imaging system includes a multi type detection subunit in the charged particle imaging system, with the assistance of a Wien filter (also known as an E×B charged particle analyzer). The imaging system is suitable for a low beam current, high resolution mode and a high beam current, high throughput mode. The unit can be applied to a scanning electron inspection system as well as to other systems that use a charged particle beam as an observation tool.