Abstract: This invention provides an improved method to deliver large amounts of digital content to portable electronic devices at low cost, without requiring the users of such devices to download such content from the Internet. Neither do the users have to purchase or manipulate data storage media such as CDs, DVDs, or memory cards. Moreover, the digital content delivery system of this invention can facilitate digital rights management, a major concern of content publishers.
Abstract: This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 1010 gain and maximum signal output at more than mini Ampere (mA) level.
Abstract: A method of inspecting an EUV reticle is proposed, which uses an electron beam (EB) with low density and high energy to scan the surface of an EUV reticle for inspecting the EUV reticle. A step of conditioning surface charge is followed by a step of inspecting surface of the EUV reticle. The step of conditioning surface can neutralize the surface charge and the step of inspecting can obtain an image of the EUV reticle. The present invention uses a scanning electron microscope (SEM) to provide a primary electron beam for conditioning the surface charge and a focused primary electron beam for scanning the surface.
Abstract: A method of making a showerhead for a semiconductor processing apparatus is disclosed. In one embodiment, the method includes providing a substrate; forming first holes in the substrate; forming a protective film on the substrate, where the protective film covers sidewalls of the first holes; and forming second holes in the substrate, where a part of the protective film within the first holes is removed. In another embodiment, the method includes providing a substrate; forming islands on the substrate; forming a protective film on the substrate, where the protective film does not cover the tops of the islands; and forming holes in the islands.
Abstract: An apparatus for increasing electric conductivity to a wafer substrate when exposures to electron beam irradiation is disclosed. More specifically, a more free mechanical contact between a wafer and electric contact pins (within an electrostatic chuck) is provided to significantly reduce the scratch and damage on the wafer backside.
Type:
Grant
Filed:
July 24, 2008
Date of Patent:
July 10, 2012
Assignee:
Hermes-Microvision, Inc.
Inventors:
Zhong-Wei Chen, Yi Xiang Wang, Juying Dou
Abstract: Tissue is treated using a radiofrequency power supply connected to an applicator having a chamber filled with an electrically non-conductive gas surrounded by a thin dielectric wall. A radiofrequency voltage is applied at a level sufficient to ionize the gas into a plasma and to capacitively couple the ionized plasma with the tissue to deliver radiofrequency current to ablate or otherwise treat the tissue.
Abstract: Tissue is treated using a radiofrequency power supply connected to an applicator having a chamber filled with an electrically non-conductive gas surrounded by a thin dielectric wall. A radiofrequency voltage is applied at a level sufficient to ionize the gas into a plasma and to capacitively couple the ionized plasma with the tissue to deliver radiofrequency current to ablate or otherwise treat the tissue.
Abstract: The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays of grounded and floating conductive cylinders, and the microscopic image can be predicted to be an interlaced pattern of bright voltage contrast (BVC) and dark voltage contrast (DVC) signals for a charged particle beam imaging system. The system can detect the defects by comparing patterns of the detected VC signals and the predicted VC signals.
Abstract: Systems and methods for endometrial ablation. The systems include a handle and elongated introducer sleeve extending to an expandable working end having a fluid-tight interior chamber. A thin dielectric wall surrounds at least a portion of the interior chamber and has an external surface for contacting endometrial tissue. The thin dielectric wall surrounds a collapsible-expandable frame and receives an electrically non-conductive gas. First and second polarity electrodes are exposed to the interior and exterior of the chamber, respectively. A radiofrequency power source operatively connects to the electrode arrangement to apply a radiofrequency voltage across the first and second electrodes, wherein the voltage is sufficient to initiate ionization of the neutral gas into a conductive plasma within the interior chamber, and to capacitively couple the current in the plasma across the thin dielectric wall to ablate endometrial tissue engaged by the external surface of the dielectric structure.
Type:
Application
Filed:
September 19, 2011
Publication date:
May 24, 2012
Applicant:
Hermes Innovations LLC
Inventors:
Akos Toth, Dominique J. Filloux, Csaba Truckai
Abstract: A system for applying radiofrequency energy to tissue comprising a probe, an energy-delivery surface, and an energy source. The energy-delivery surface is elastomeric with an electrically conductive knit component. The energy-delivery surface can be expanded within an interior of a patient's body to engage tissue and energy delivered from the source through the expanded surface.
Abstract: The invention relates to a sealing disk (20) for a closure of a container (10) having an opening (11) delimited by a circumferential edge (12), wherein the sealing disk comprises several layers having an edge. A group (30) of lower layers (31, 32, 33, 34, 35) closes the opening (11) of the container (10) before the first opening thereof. Said group (30) can be sealed onto the circumferential edge (12) of the opening (11) by means of a sealing layer (31). The group (30) is detachably connected to a group (40) of upper layers (41, 42, 43, 44). The opening (11) of the container (10) can be closed again temporarily using the second group (40). The sealing disk (20) comprises at least one grip tab (50), which is formed only by one or more of the layers from the first group (30) of the lower layers.
Abstract: System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.
Type:
Grant
Filed:
July 8, 2010
Date of Patent:
April 24, 2012
Assignee:
Hermes-Microvision, Inc.
Inventors:
Xuedong Liu, Xu Zhang, Joe Wang, Edward Tseng, Zhongwei Chen
Abstract: The present invention discloses a structure and method for determining a defect in integrated circuit manufacturing process, wherein the structure comprises a plurality of normal active areas formed in a plurality of first arrays and a plurality of defective active areas formed in a plurality of second arrays. The first arrays and second arrays are interlaced, and the defect is determined by monitoring a voltage contrast from a charged particle microscope image of the active areas.
Abstract: The present invention provides liposome compositions containing substituted ammonium and/or polyanion, and optionally with a desired therapeutic or imaging entity. The present invention also provide methods of making the liposome compositions provided by the present invention.
Type:
Grant
Filed:
May 2, 2005
Date of Patent:
April 3, 2012
Assignee:
Hermes Biosciences, Inc.
Inventors:
Keelung Hong, Daryl C. Drummond, Dmitri Kirpotin