Abstract: A method for identifying, inspecting, and reviewing all hot spots on a specimen is disclosed by using at least one SORIL e-beam tool. A full die on a semiconductor wafer is scanned by using a first identification recipe to obtain a full die image of that die and then design layout data is aligned and compared with the full die image to identify hot spots on the full die. Threshold levels used to identify hot spots can be varied and depend on the background environments close thereto, materials of the specimens, defect types, and design layout data. A second recipe is used to selectively inspect locations of all hot spots to identify killers, and then killers can be reviewed with a third recipe.
Type:
Grant
Filed:
September 9, 2014
Date of Patent:
May 3, 2016
Assignee:
Hermes-Microvision, Inc.
Inventors:
Steve Lin, Wei Fang, Eric Ma, Zhonghua Dong, Jon Chiang, Yan Zhao, Chester Kuo, Zhongwei Chen
Abstract: The invention provides a gas treatment apparatus comprising an exterior circular gas spray portion including an exterior circular gas channel, and at least two regions and a cover. Each region has an upper gas spray portion and a lower gas spray portion. The upper gas spray portion has a plurality of first gas channels and a plurality of first heat exchange fluid conduits, each the first gas channel is arranged interlaced with each the first heat exchange fluid conduit. The lower gas spray portion comprises a plurality of second gas channels and a plurality of second heat exchange fluid conduits, each the second gas channel is arranged interlaced with each the second heat exchange fluid conduit, and each the second gas channel surrounds each the first gas channel. The combinations of the first gas channels and the second gas channels in adjacent regions respectively are arranged at an angle.
Abstract: A test probe card structure includes a probe card and a connection circuit common plate. The probe card includes a probe substrate, A test circuit board is disposed between the probe substrate and the connection circuit common plate, The test circuit board has a lest circuit connection section attached to and electrically connected with a common circuit adaptation section of the connection circuit common plate. A circuit extension section is formed around the connection circuit common plate, which is all-channel electrically connectable between a tester and the teat circuit connection section. The connection circuit common plate serves to provide an all-channel test circuit convergence connection ability for the test circuit board so as to greatly minify the size of the test circuit board and lower the manufacturing cost of the probe card.
Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.
Abstract: Semiconductor equipment is disclosed in this invention. The semiconductor equipment includes a reaction chamber, a wafer susceptor, and a liner device. The reaction chamber includes an opening and a circular inner wall. The wafer susceptor is capable of carrying at least one wafer. The liner device is disposed between the wafer susceptor and the circular inner wall of the reaction chamber. The liner device is capable of moving vertically between a first position and a second position. The liner device includes at least one venting opening, wherein the venting opening is connected with a venting device. Particles which are accumulated within the liner device can be removed by the venting device.
Abstract: Combination devices that are adapted for marketing and promotion and use a sleeve for insulating beverage containers that is transformable into a toy module, building block, and/or geometric shape.
Abstract: A sealing disc for closing mouths of containers has a foil for inductively introducing heat into the sealing disc. The sealing disc has an edge region. A sealing layer is provided on the side of the foil that is to face the interior of the container, for sealing tight the edge region of the sealing disc on the mouth of the container. One or more layers are located on the side of the foil that is remote from the sealing layer. Further, a hand grip is formed as part of the sealing disc and serves to open the mouth of the container that is closed by the sealing disc. On the side that is remote from the sealing layer, the layer or layers are provided with weakening lines for forming an outline of the hand grip. The weakening lines lead into the edge region of the sealing disc.
Abstract: A wearable electronic ornament has a manually-changeable skin and an electronic screen exhibiting a visual. When a user replaces the skin, the visual automatically changes to match the skin. Visuals are received from a store on the skin, a mobile device of the user, or a remote server, or can be generated by a camera of the mobile device.
Abstract: A sealing disc (10) is used for closing orifices of containers (5). It has a film (20) for inductively coupling heat into the sealing disc (10). A sealing layer (25) is provided on that side of the film (20) which is intended to face the interior of the container (5) in order to seal, in sealtight fashion, the sealing disc (10) on the orifice of the container (5). Lines of weakness (26) are provided in the sealing layer (25) so as to form a removal opening (27) once the film (20) has been drawn off. One or more layers (40), which are connected detachably to the film (20), are provided on that side of the film (20) which is remote from the sealing layer (25). The layers (40) detach mare easily from the lam (20) than the sealing layer (25) and also detach more easily from the orifice of the container (5) than the sealing layer (25).
Abstract: A showerhead is disclosed in this invention. The showerhead includes a bottom portion, at least one plate, and a top portion. The bottom portion includes a plurality of gas tubes which are integratedly formed on the bottom portion. The gas tubes include at least one first gas tube. The at least one plate includes a first plate. The first plate includes a plurality of first openings, wherein the gas tubes pass through the first openings. The top portion is coupled to the bottom portion for forming at least one inner space.
Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.