Abstract: A method for operating vacuum plasma process system includes generating a main plasma in a first operating state and generating an auxiliary plasma in a second operating state. The main plasma is generated in that a first number of RF power generators generate a main plasma, and a second number of RF power generators generate an auxiliary plasma power. The second number is smaller than the first number. The auxiliary plasma facilitates ignition of the main plasma.

Abstract: An HF plasma process excitation configuration includes an HF generator that is connected to a plasma load through a directional coupler. The directional coupler includes a transmission line, a first coupling line for detecting reflected power from the plasma load, and a second coupling line for detecting forward power from the HF generator, is the first coupling line is spaced apart from the transmission line and is terminated at least at one end with a termination resistance. The second coupling line is spaced apart from the transmission line and is terminated at least at one end with a termination resistance. Each coupling line has a predetermined and adjusted characteristic impedance, and the termination resistances each have a resistance value that corresponds within a tolerance to the characteristic impedance of the associated coupling line with a tolerance.

Abstract: A current measurement device for measuring an electrical current, in particular in a contactless manner, in a current-carrying conductor, using a coil arrangement having a coil conductor and a circuit connected to the coil conductor, the coil arrangement being surrounded at least in portions by a coil shield. The coil shield and the circuit are connected to a ground potential independently of each other. The measurement accuracy is thereby increased.

Abstract: A measuring device of an HF plasma system includes an uncoupling device for uncoupling one or a plurality of signals related to a power and at least one filter arrangement to which such a signal is transmitted. The filter arrangement is designed as a band pass filter arrangement and includes a first and a second filter element between which a decoupling device is arranged.

Abstract: A plasma process power delivery system includes one or more event-ascertaining devices within the plasma process power delivery system, a controller in communication with the one or more event ascertaining devices, a first memory, a second memory, a data transmission connection, and a plasma process monitoring system. The data transmission connection is between the first memory and the second memory and is configured to transmit data relating to the plasma process power delivery system between the first memory and the second memory in response to an occurrence of a predefined event ascertained by one or more event-ascertaining devices. The plasma process monitoring system is in communication with the second memory and analyzes circumstances associated with the event that triggers the storage in the second memory using the data stored in the second memory.

Abstract: An MF power generator includes a DC current supply connected to an inverter. The inverter includes at least one switching element connected to a first-polarity current supply potential, and an output network. Each switching element is provided with a decoupling circuit for decoupling the switching element from a voltage of the output network. This enables the low-loss switching of the switching elements.

Abstract: A method is performed for influencing the signal shape of an output signal of an RF power resonance amplifier and an RF excitation arrangement including an RF power resonance amplifier. A basic signal of a basic frequency is amplified and modulated with a modulation signal, and an output oscillating circuit of the RF power resonance amplifier is tuned to a frequency in the range of the basic frequency, and is excited with the basic signal during normal operation. At times that are or can be predetermined, the output oscillating circuit is driven with a driving signal that differs from the basic signal, for a time period that is or can be predetermined. This reduces the dying down time of the output oscillating circuit and increases the steepness of the output signal edges.

Abstract: A cooling device is provided for an electronic unit. In some implementations, the cooling device includes a cooling body, arranged in an essentially airtight sealed housing of the electronic unit, through which a cooling medium may flow. Heat generating elements, for example electronic components, are mounted on the cooling device so as to release the heat to the cooling body by contact transmission. Additional heat exchange means for cooling the air enclosed in the housing are connected to the cooling body with a thermal conducting connection and arranged on said cooling body. Such a cooling device can be produced with a compact construction with effective heat extraction.

Abstract: New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.

Abstract: The impedance of a variable load is matched to the output resistance of an HF generator by performing a first impedance matching for a first load impedance and by performing a second impedance matching for a second load impedance. The first impedance matching is carried out at a first frequency and the second impedance matching is carried out at a second frequency.

Abstract: An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.

Abstract: The power output of an RF plasma supply device is controlled by producing at least a first and second RF power signal by means of a respective RF generator, coupling at least two RF power signals into a coupled RF power, and distributing the coupled RF power between a plasma power that is to be supplied to a plasma load and an equalizing power that is to be supplied to an equalizing load. The power output is controlled by adjusting the levels and/or the phase position of the RF power signals in such a manner that, for plasma power in the range between a predefined lower power limit and a predefined nominal power, an insignificant portion of the coupled RF power constitutes the equalizing power and, for plasma power below the predefined lower power limit, a significant portion of the coupled RF power constitutes the equalizing power.

Abstract: A power module is adapted to be connected to a voltage source and to supply power to a load. The power module includes a switching bridge that includes a first power transistor and a second power transistor, a first gate controller for driving the first power transistor and a second gate controller for driving the second power transistor. The first gage controller includes a first gate transformer, and a leakage inductance of the first gate transformer forms a resonant circuit with an input capacitance of the first power transistor. The second gate controller includes a second gate transformer, and a leakage inductance of the second gate transformer forms a resonant circuit with an input capacitance of the second power transistor.

Abstract: An arc discharge detection device is used for detecting arc discharges in a plasma process. The arc discharge detection device includes a comparator to which an instantaneous signal and a reference value are supplied. The reference value is formed by a setting means from an extreme value of the signal. The extreme value is determined by an extreme value detection device within a predetermined time period, and the comparator changes the state of an arc discharge detection signal when the comparison between the reference value and an instantaneous value of the signal shows that an arc discharge has occurred.

Abstract: Generating drive signals of at least two RF power generators which supply RF power to a plasma process, in which at least two drive signals, each driving one RF power generator, are generated in an RF generator driver. Each drive signal is generated by a respective function generator, such as a digital sine generator, of the generator driver.

Abstract: A radio-frequency power amplifier system operated in a resonant mode of operation includes a uniform power source, a switching element adapted for applying power on and off at a basic frequency from the uniform power source to a resonant circuit connected to a varying-resistance load at an output of the resonant circuit, a plurality of interconnected electrical components, including reactive elements, that together form, in their interconnected state during a particular operating state of the amplifier, one or more parasitic oscillating circuits having undesired resonance frequencies lower than the basic frequency, and one or more attenuating members adapted for attenuating oscillations in the parasitic oscillating circuits to prevent oscillations in the parasitic oscillating circuits from arising and to suppress low-frequency modulations of the basic frequency.

Abstract: A 90° hybrid for splitting or interconnecting radio frequency power includes four gate connections, capacitances and inductances for electric capacitive coupling and magnetic inductive coupling, an arrangement of strip conductors that are disposed approximately parallel to each other and whose ends form gate connections, and whose dimensions and mutual separations are dimensioned to form the electric capacitive and magnetic inductive couplings of the 90° hybrid, and a ferrite ring surrounding the strip conductors to increase the inductive coupling.

Abstract: An excitation system for heating food, water, or both in airplanes uses induction heating. The system includes at least one load circuit including an inductor that is excited with a load circuit AC voltage, a load circuit alternating current, or both the load circuit AC voltage and the load circuit alternating current. The load circuit AC voltage, the load circuit alternating current, or both the load circuit AC voltage and the load circuit alternating current are generated from an AC voltage signal that is amplitude-modulated with a frequency of a mains AC voltage from a voltage supply. The frequency of the AC voltage signal can be predetermined.

Abstract: A power amplifier for generating a sinusoidal high-frequency signal to be supplied to a load includes a current source adapted to supply a constant electrical current during a portion of a period of a fundamental wave, a first driver circuit that generates a first current wave, and a second driver circuit that generates a second current wave, and a filter network. The first driver circuit includes a first switching element adapted to switch at a fundamental frequency of the fundamental wave between a high ohmic state and a low ohmic state to draw current from the current source, a first capacitance connected in parallel to the first switching element, and a first reactive element to phase shift a first periodic signal. The first driver circuit has a first internal resistance.

Abstract: A method of controlling an input voltage of a high frequency amplifier includes measuring power supplied to a load, determining a first control variable for a series element disposed upstream from the high frequency amplifier based on the measured power and a given set point, and determining a second control variable for a switched DC supply unit from a voltage drop across the series element such that the voltage drop does not exceed a given maximum value and does not fall below a given minimum value.