Abstract: One embodiment provides a method of testing humidity. The method includes measuring i) a first weight of a first device which encloses a plurality of interferometric modulators and ii) a second weight of a second device which encloses a plurality of interferometric modulators, wherein the first and second devices contain a different amount of water vapor. The method further includes comparing the weights of the first and second devices and determining a relative humidity value or a degree of the relative humidity inside one of the two devices based at least in part upon the weight comparison. In one embodiment, the relative humidity value or degree is determined considering at least one of the following parameters: i) temperature-humidity combination inside at least one of the devices, ii) the thickness and width of a seal of the at least one device, iii) adhesive permeability of a component of the at least one device, iv) a desiccant capacity inside the at least one device and v) a device size.

Abstract: Methods and systems for packaging MEMS devices such as interferometric modulator arrays are disclosed. One embodiment of a MEMS device package structure includes a seal with a chemically reactant getter. Another embodiment of a MEMS device package comprises a primary seal with a getter, and a secondary seal proximate an outer periphery of the primary seal. Yet another embodiment of a MEMS device package comprises a getter positioned inside the MEMS device package and proximate an inner periphery of the package seal.

Abstract: An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.

Abstract: An optical device includes a non-transparent substrate. The optical device further includes a first optical layer which is at least partially transmissive and at least partially reflective to incident light. The optical device further includes a second optical layer which is at least partially reflective to incident light. The second optical layer is spaced from the first optical layer. At least one of the first optical layer and the second optical layer is movable between a first position with a first distance between the first and second optical layers and a second position with a second distance between the first and second optical layers. Movement of the at least one of the first optical layer and the second optical layer between the first and second positions modulates the reflectivity of the device.

Abstract: In various embodiments of the invention, an interferometric display device is provided having an external film with a plurality of structures that redirect light from an inactive area of the display to an active area of the display. Light incident on the external film that would normally continue towards an inactive area of the display is either reflected, refracted, or scattered towards an active area of the display comprising moveable and static reflective surfaces that form an optical cavity.

Abstract: Methods of writing display data to MEMS display elements are configured to minimize charge buildup and differential aging. The methods may include writing data with opposite polarities, and periodically releasing and/or actuating MEMS elements during the display updating process. Actuating MEMS elements with potential differences higher than those used during normal display data writing may also be utilized.

Abstract: In one embodiment, the invention provides a method for manufacturing an array of interferometric modulators. Each interferometric modulator comprises first and second optical layers which when the interferometric modulator is in an undriven state are spaced by a gap of one size, and when the interferometric modulator is in a driven state are spaced by a gap of another size, the size of the gap determining an optical response of the interferometric modulator.

Abstract: By varying the spacing between two surfaces, one of which is disposed in front of the other, an interferometric modulator selectively creates constructive and/or destructive interference between light waves reflecting off the two surfaces. The desired spacing can be achieved by deforming one or both surfaces. A heating element associated with a particular surface causes the deformation by heating the material that forms one or both of the surfaces. By varying the amount of applied heat, the amount of deformation is varied, thus allowing the distance between the surfaces to be controlled and thereby creating constructive and/or destructive interference as desired.

Abstract: An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.

Abstract: Embodiments of the present disclosure include a method of fabricating interferometric devices using lift-off processing techniques. Use of lift-off processing in the fabrication of various layers of interferometric modulators, such as an optical stack or a flex layer, advantageously avoids individualized chemistries associated with the plurality of materials associated with each layer thereof. Moreover, use of lift-off processing allows much greater selection in both materials and facilities available for fabrication of interferometric modulators.

Abstract: The invention comprises devices and methods for driving a MEMs pixel, and in particular, an interferometric modulator pixel. In one embodiment a device for modulating light includes a light modulator including a movable optical element positionable in two or more positions, the modulator operating interferometrically to exhibit a different predetermined optical response in each of the two or more positions, and control circuitry connected to the light modulator for controlling said interferometric modulator, where the control circuitry is controllably switchable between two circuit configurations, and where the control circuitry provides current to said light modulator when switching between the two circuit configurations to cause the movable optical element of the light modulator to move between two positions of its two or more positions.

Abstract: A method for sensing the actuation and/or release voltages of a microelectromechanical device include applying a varying voltage to the device and sensing its state and different voltage levels. In one embodiment, the device is part of a system comprising an array of interferometric modulators suitable for a display. The method can be used to compensate for temperature dependent changes in display pixel characteristics.

Abstract: In one embodiment, the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating a first layer comprising a film having a characteristic electromechanical response, and a characteristic optical response, wherein the characteristic optical response is desirable and the characteristic electromechanical response is undesirable; and modifying the characteristic electromechanical response of the first layer by at least reducing charge build up thereon during activation of the microelectromechanical systems device.

Abstract: The time required for an interferometric modulator to switch from a state with a collapsed cavity to a state with an open cavity or vice versa, i.e., the switch time, is decreased by decreasing the viscosity of the gas filling the cavity. The viscosity is decreased by forming at least a partial vacuum in the cavity. The partial vacuum is formed, in turn, by forming a cavity in a housing holding the interferometric modulator. The vacuum can be generated by a vacuum pump. By decreasing the switch time, interferometric modulators in an array of interferometric modulators can be switched more quickly, thereby advantageously increasing the refresh rate for a display using the array.

Abstract: A package structure and method of packaging an interferometric modulator with an integrated desiccant. An interferometric modulator is formed on a transparent substrate. A backplane is joined to the transparent substrate to form a package structure and to encapsulate the interferometric modulator. A desiccant integrated into the backplane or the transparent substrate is provided to absorb moisture within the package.

Abstract: Apparatus and methods of actuating MEMS display elements are disclosed. The disclosed embodiments can be incorporated into other drive schemes for MEMS display elements. In one embodiment, an apparatus for controlling a MEMS display element to display a frame of video data, said MEMS display element comprising a portion of an array of MEMS display elements, includes an array controller configured to assert a potential difference on said MEMS display element during a first portion of a frame display write process to place the MEMS display element in a first display state, and to assert a potential difference on said MEMS display element during a second portion of the frame display write process to place the MEMS display element in a second display state to display the frame of the video data, where the first display state is different from the second display state.

Abstract: A display comprising: a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. The physical property can be a spring constant associated with a movable mirror, a film thickness, an electrode width, a damping force caused by air between a movable mirror and a fixed mirror, a mass of a movable mirror, a material or geometry of the respective MEMS element.

Abstract: Certain embodiments of the invention provide a light sensor comprising at least one interferometric element that absorbs light in at least one wavelength. The interferometric element comprises a first surface and a second surface substantially parallel to the first surface. The second surface is spaced a gap distance from the first surface in a direction substantially perpendicular to the first surface. The light wavelength absorbed is dependent on the gap distance. The interferometric element further comprises a temperature sensor. The temperature sensor is responsive to changes in temperature of at least a portion of the interferometric element due to absorption of light by the interferometric element.

Abstract: A system and method for an optical component that masks non-active portions of a display and provides an electrical path for one or more display circuits. In one embodiment an optical device includes a substrate, a plurality of optical elements on the substrate, each optical element having an optical characteristic which changes in response to a voltage applied to the optical element, and a light-absorbing, electrically-conductive optical mask disposed on the substrate and offset from the plurality of optical elements, the optical mask electrically coupled to one or more of the optical elements to provide electrical paths for applying voltages to the optical elements. In another embodiment, a method of providing an electrical signal to optical elements of a display comprises electrically coupling an electrically-conductive light-absorbing mask to one or more optical elements, and applying a voltage to the mask to activate the one or more optical elements.

Abstract: A light modulator is arranged as an array of rows and columns of interferometric display elements. Each element is divided into sub-rows of sub-elements. Array connection lines transmit operating signals to the display elements, with one connection line corresponding to one row of display elements in the array. Sub-array connection lines electrically connect to each array connection line. Switches transmit the operating signals from each array connection line to the sub-rows to effect gray scale modulation.