Patents Assigned to Infineon Technologies North America Corporation
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Patent number: 8365108Abstract: Aspects of the invention include a computer-implemented method of designing a photomask. In one embodiment, the method comprises: simulating a first photomask patterning process using a first photomask design to create simulated contours; comparing the simulated contours to a desired design; identifying regions not common to the simulated contours and the desired design; creating desired target shapes for a second photomask patterning process subsequent to the first photomask patterning process based upon the identified regions; and providing the desired target shapes for forming of a second photomask design based upon the desired target shapes.Type: GrantFiled: January 6, 2011Date of Patent: January 29, 2013Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Zachary Baum, Henning Haffner, Scott M. Mansfield
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Publication number: 20120089953Abstract: A method for mask layout formation including forming a plurality of phase shapes on either side of a critical feature of a design layout of an integrated circuit chip having a plurality of critical features, wherein each phase shape has an edge; identifying a plurality of transition edges from the edges, wherein each transition edge is parallel to a critical feature; identifying a transition space defined by one of a group including two transition edges, wherein the space is external to all phase shapes, and one transition edge, wherein the space is external to all phase shapes; forming a transition polygon by closing each transition space with at least one closing edge, wherein each closing edge is perpendicular to the plurality of transition edges; transforming each transition polygon into a printing assist feature; and forming a first mask layout or a second mask layout from the printing assist features and the critical features.Type: ApplicationFiled: October 11, 2010Publication date: April 12, 2012Applicants: INFINEON TECHNOLOGIES NORTH AMERICA CORPORATION, INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Zachary Baum, Scott D. Halle, Henning Haffner
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Patent number: 8099684Abstract: Embodiments of the present invention provide a method of placing printing assist features in a mask layout. The method includes providing a design layout having one or more designed features; generating a set of parameters, the set of parameters being associated with one or more printing assist features (PrAFs); adding the one or more PrAFs of the set of parameters to the design layout to produce a modified design layout; performing simulation of the one or more PrAFs and the one or more designed features on the modified design layout; verifying whether the one or more PrAFs are removable based on results of the simulation; and creating a set of PrAF placement rules based on the set of parameters, if the one or more PrAFs are verified as removable. The set of PrAF placement rules may be used in creating a final set of PrAF features to be used for creating the mask layout.Type: GrantFiled: January 8, 2009Date of Patent: January 17, 2012Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Jason E Meiring, Henning Haffner
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Patent number: 7975246Abstract: A method that purposely relaxes OPC algorithm constraints to allow post OPC mask shapes to elongate along one direction (particularly lowering the 1-dimensional MEEF in this direction with the result of an effectively overall lowered MEEF) to produce a pattern on wafer that is circular to within an acceptable tolerance.Type: GrantFiled: August 14, 2008Date of Patent: July 5, 2011Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Derren Neylon Dunn, Michael M Crouse, Henning Haffner, Michael Edward Scaman
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Patent number: 7859025Abstract: A metal ion transistor and related methods are disclosed. In one embodiment, the metal ion transistor includes a cell positioned in at least one isolation layer, the cell including a metal ion doped low dielectric constant (low-k) dielectric material sealed from each adjacent isolation layer; a first electrode contacting the cell on a first side; a second electrode contacting the cell on a second side; and a third electrode contacting the cell on a third side, wherein each electrode is isolated from each other electrode.Type: GrantFiled: December 6, 2007Date of Patent: December 28, 2010Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Fen Chen, Armin Fischer
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Publication number: 20100042967Abstract: A method that purposely relaxes OPC algorithm constraints to allow post OPC mask shapes to elongate along one direction (particularly lowering the 1-dimensional MEEF in this direction with the result of an effectively overall lowered MEEF) to produce a pattern on wafer that is circular to within an acceptable tolerance.Type: ApplicationFiled: August 14, 2008Publication date: February 18, 2010Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATIONInventors: Derren N. Dunn, Michael M. Crouse, Henning Haffner, Michael E. Scaman
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Publication number: 20090191468Abstract: This disclosure includes a SRAF layout that minimizes the number of SRAFs required to reliably print contact shapes. A method is provided that reduces the number of necessary SRAF features on a mask, placing at least two elongated SRAF shapes on the mask such that the elongated SRAF shapes extend past at least one edge of a mask shape in at least one direction.Type: ApplicationFiled: January 29, 2008Publication date: July 30, 2009Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATIONInventors: Michael M. Crouse, Derren N. Dunn, Henning Haffner, Michael E. Scaman
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Publication number: 20090146181Abstract: An integrated circuit system that includes: providing a PFET device including a doped epitaxial layer; and forming a source/drain extension by employing an energy source to diffuse a dopant from the doped epitaxial layer.Type: ApplicationFiled: December 7, 2007Publication date: June 11, 2009Applicants: CHARTERED SEMICONDUCTOR MANUFACTURING LTD., INTERNATIONAL BUSINESS MACHINES CORPORATION, SAMSUNG, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATIONInventors: Chung Woh Lai, Oleg Gluschenkov, Henry K. Utomo, Lee Wee Teo, Jin Ping Liu, Anita Madan, Rainer Loesing, Jin-Ping Han, Hyung-Yoon Choi
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Publication number: 20090146242Abstract: A metal ion transistor and related methods are disclosed. In one embodiment, the metal ion transistor includes a cell positioned in at least one isolation layer, the cell including a metal ion doped low dielectric constant (low-k) dielectric material sealed from each adjacent isolation layer; a first electrode contacting the cell on a first side; a second electrode contacting the cell on a second side; and a third electrode contacting the cell on a third side, wherein each electrode is isolated from each other electrode.Type: ApplicationFiled: December 6, 2007Publication date: June 11, 2009Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATIONInventors: Fen Chen, Armin Fischer
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Publication number: 20080173975Abstract: Disclosed are embodiments of a device and method of forming the device that utilize metal ion migration under controllable conditions. The device embodiments comprise two metal electrodes separated by one or more different dielectric materials. One electrode is sealed from the dielectric material, the other is not. The device is adapted to allow controlled migration of embedded metal ions from the unsealed electrode into dielectric material to form a conductive path under field between the electrodes and, thereby, to decrease the resistance of the dielectric material. Reversing the field causes the metal ions to reverse their migration, to break the conductive metallic path between the electrodes and, thereby, to increase the resistance of the dielectric material. Thus, the device can comprise a simple switch or programmable resistor.Type: ApplicationFiled: January 22, 2007Publication date: July 24, 2008Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATIONInventors: Fen Chen, Armin Fischer, Jason P. Gill
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Patent number: 7393746Abstract: A method forms a gate conductor over a substrate, forms spacers (e.g., nitride spacers) on sides of the gate conductor, and implants an impurity into exposed regions of the substrate not protected by the gate conductor and the spacers. Then the method forms a silicide on surfaces of the exposed regions of the substrate. The method forms a conformal protective layer (e.g., an oxide or other similar material) over the silicide, the spacers, and the gate conductor. Next, the method forms a non-conformal sacrificial layer (e.g., nitride or other material that can be selectively removed with respect to the protective layer) over the protective layer. A subsequent partial etching process partially etches the sacrificial layer such that relatively thinner regions of the sacrificial layer that are over the spacers are completely removed and the relatively thicker regions of the sacrificial layer that are over the substrate are not removed.Type: GrantFiled: October 12, 2006Date of Patent: July 1, 2008Assignees: International Business Machines Corporation, Samsung Electronics Co. Ltd., Infineon Technologies North America Corporation, Chartered Semiconductor Manufacturing, Ltd.Inventors: Thomas W. Dyer, Sunfei Fang, Jiang Yan, Siddhartha Panda, Yong Meng Lee, JunJung Kim
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Patent number: 7286534Abstract: A router (101) includes one or more input ports (104) and one or more output ports (112). The router (101) includes a lookup table (105) to determine routing of the incoming packets or cells. The lookup table is implemented in dynamic random access memory (DRAM) with a portion implemented as static random access memory (SRAM) (202, 204). The SRAM (204) is used to store a first search level of destination addresses. Once the first search level in SRAM (204) has been exhausted, the search moves to the DRAM portion (202).Type: GrantFiled: November 2, 2001Date of Patent: October 23, 2007Assignee: Infineon Technologies North America CorporationInventor: Axel K. Kloth
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Patent number: 7250662Abstract: A conductor with improved magnetic field per current ratio is disclosed. The conductor includes a magnetic liner lining a second surface and sides thereof. The magnetic liner is preferably a super-paramagnet with high susceptibility or a ferromagnet with a microstructure where the size of the non-exchanged coupled micro domains is so small that their energy content is close to or small compared to kT that such films have super-paramagnetic properties and essentially behave like a paramagnet with high susceptibility.Type: GrantFiled: July 31, 2003Date of Patent: July 31, 2007Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Snorri T. Ingvarsson, Rainer E. R. Leuschner, Yu Lu
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Patent number: 7091103Abstract: CMP of integrated circuits containing DRAM arrays with trench capacitors fill the trenches with oxide, resulting in a an array of oxide structures that is dense compared with the concentration in the surrounding support structures and therefore has a higher loading. A conformal layer is deposited over the wafer, increasing the loading in the array, but filling in spaces between active areas. A blanket etch removes material in both the array and the supports. A block etch balances the amount of material in the array and the supports. A supplementary oxide deposition in the array fills spaces between the structures to a nearly uniform density.Type: GrantFiled: December 9, 2002Date of Patent: August 15, 2006Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Jochen Beintner, Laertis Economikos, Michael Wise, Andreas Knorr
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Patent number: 6897107Abstract: A structure and method which enables the deposit of a thin nitride liner just before Trench Top Oxide TTO (High Density Plasma) HDP deposition during the formation of a vertical MOSFET DRAM cell device. This liner is subsequently removed after TTO sidewall etch. One function of this liner is to protect the collar oxide from being etched during the TTO oxide sidewall etch and generally provides lateral etch protection which is not realized in the current processing scheme. The process sequence does not rely on previously deposited films for collar protection, and decouples TTO sidewall etch protection from previous processing steps to provide additional process flexibility, such as allowing a thinner strap Cut Mask nitride and greater nitride etching during node nitride removal and buried strap nitrided interface removal.Type: GrantFiled: November 24, 2003Date of Patent: May 24, 2005Assignees: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Rama Divakaruni, Thomas W. Dyer, Rajeev Malik, Jack A. Mandelman, Venkatachajam C. Jaiprakash
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Patent number: 6888365Abstract: A semiconductor wafer testing system tests one or more die clusters on a semiconductor wafer, using a test circuit to test multiple sections or areas of each die in parallel. The semiconductor wafer testing system has a buffer connected to the die cluster via the test circuit. The buffer writes test data onto a section of each die in the die cluster. The buffer reads test data from the section of each die in the die cluster.Type: GrantFiled: September 12, 2002Date of Patent: May 3, 2005Assignee: Infineon Technologies North America CorporationInventors: Daivid Suitwai Ma, James J. Dietz, George W. Alexander
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Publication number: 20050087519Abstract: A method (and structure) of thermally treating a magnetic layer of a wafer, includes annealing, for a predetermined short duration, a magnetic layer of a single wafer.Type: ApplicationFiled: October 23, 2003Publication date: April 28, 2005Applicants: International Business Machines Corporation, Infineon Technologies North America CorporationInventors: Ulrich Klostermann, Wolfgang Raberg, Philip Trouilloud
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Publication number: 20050009295Abstract: A method of forming at least one deep trench structure having an increased trench depth is provided. The method includes providing at least one deep trench having sidewalls that extend to a common bottom wall in a surface of a substrate. Each deep trench has initial dimensions that are wider than targeted dimensions for the deep trenches. To reduce the initial dimensions to that of the targeted dimensions, an epitaxial silicon film is formed selectively or non-selectively on at least some portions of the sidewalls using a low-temperature ultra-high vacuum epitaxial silicon growth tehnique.Type: ApplicationFiled: July 27, 2004Publication date: January 13, 2005Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORPORATIONInventors: Kevin Chan, Subhash Kulkarni, Gangadhara Mathad, Rajiv Ranade
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Patent number: 6782465Abstract: A linked list DMA descriptor includes an indication of a number of data pointers contained in a subsequent DMA descriptor. The number of data pointers contained in the subsequent DMA descriptor is preferably contained in the memory address of the subsequent DMA descriptor. The number of data pointers is stored by the DMA controller and controls how many read cycles are performed when processing the subsequent DMA descriptor.Type: GrantFiled: October 20, 1999Date of Patent: August 24, 2004Assignee: Infineon Technologies North America CorporationInventor: Andreas Schmidt
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Patent number: 6771701Abstract: A configurable adaptive filter that is used for echo cancellation is disclosed, which includes a method of detecting a voice or no-voice signal. The presence of a voice or no-voice signal is determined by calculating a histogram of signal amplitude value over a period of time. If this histogram has more than a predefined number of samples that are above a threshold then the signal is classified as no-voice or periodic otherwise the signal is classified as a voice signal. A variable maximum amplitude limit and lower amplitude thresholds are disclosed to detect a voice or no-voice from the histogram signal faster than traditional methods utilized in echo cancelers. A configurable hysteresis time is used to ensure the signal register primarily contains voice signal when the filter coefficients of the echo canceler are allowed to adapt.Type: GrantFiled: December 29, 1999Date of Patent: August 3, 2004Assignee: Infineon Technologies North America CorporationInventors: Andre Klindworth, Erik Hogl, Ulrich Fiedler