Patents Assigned to Innovalight
  • Patent number: 8247312
    Abstract: A method of printing an ink on a wafer surface configured with a set of non-rounded peaks and a set of non-rounded valleys is disclosed. The method includes exposing the wafer including at least some non-rounded peaks and at least some of the non-rounded valleys in a region to an etchant. The method further includes depositing the ink on the region, wherein a set of rounded peaks and a set of rounded valleys are formed.
    Type: Grant
    Filed: April 24, 2008
    Date of Patent: August 21, 2012
    Assignee: Innovalight, Inc.
    Inventors: Malcolm Abbott, Maxim Kelman, Karel Vanheusden
  • Patent number: 8163587
    Abstract: A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron atoms, the substrate comprising a front substrate surface, and depositing an ink on the front substrate surface in an ink pattern, the ink comprising a set of nanoparticles and a set of solvents. The method further includes heating the substrate in a baking ambient to a first temperature of between about 200° C. and about 800° C. and for a first time period of between about 3 minutes and about 20 minutes in order to create a densified film ink pattern. The method also includes exposing the substrate to a dopant source in a diffusion furnace with a deposition ambient, the deposition ambient comprising POCl3, a carrier N2 gas, a main N2 gas, and a reactive O2 gas, wherein a ratio of the carrier N2 gas to the reactive O2 gas is between about 1:1 to about 1.5:1, at a second temperature of between about 700° C. and about 1000° C.
    Type: Grant
    Filed: July 21, 2009
    Date of Patent: April 24, 2012
    Assignee: Innovalight, Inc.
    Inventors: Giuseppe Scardera, Dmitry Poplavskyy, Michael Burrows, Sunil Shah
  • Patent number: 8148176
    Abstract: A method of distinguishing a set of highly doped regions from a set of lightly doped regions on a silicon substrate is disclosed. The method includes providing the silicon substrate, the silicon substrate configured with the set of lightly doped regions and the set of highly doped regions. The method further includes illuminating the silicon substrate with an electromagnetic radiation source, the electromagnetic radiation source transmitting a wavelength of light above about 1100 nm. The method also includes measuring a wavelength absorption of the set of lightly doped regions and the set of heavily doped regions with a sensor, wherein for any wavelength above about 1100 nm, the percentage absorption of the wavelength in the lightly doped regions is substantially less than the percentage absorption of the wavelength in the heavily doped regions.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: April 3, 2012
    Assignee: Innovalight, Inc.
    Inventors: Maxim Kelman, Giuseppe Scardera
  • Patent number: 8138070
    Abstract: A method of forming a multi-doped junction is disclosed. The method includes providing a first substrate and a second substrate. The method also includes depositing a first ink on a first surface of each of the first substrate and the second substrate, the first ink containing a first set of nanoparticles and a first set of solvents, the first set of nanoparticles containing a first concentration of a first dopant. The method further includes depositing a second ink on a second surface of each of the first substrate and the second substrate, the second ink containing a second set of nanoparticles and a second set of solvents, the second set of nanoparticles containing a second concentration of a second dopant. The method also includes placing the first substrate and the second substrate in a back to back configuration; and heating the first substrate and the second substrate in a first drive-in ambient to a first temperature and for a first time period.
    Type: Grant
    Filed: November 25, 2009
    Date of Patent: March 20, 2012
    Assignee: Innovalight, Inc.
    Inventors: Maxim Kelman, Michael Burrows, Dmitry Poplavskyy, Giuseppe Scardera, Daniel Kray, Elena Rogojina
  • Patent number: 8048814
    Abstract: A method of aligning a set of patterns on a substrate, the substrate including a substrate surface, is disclosed. The method includes depositing a set of silicon nanoparticles on the substrate surface, the set of nanoparticles including a set of ligand molecules including a set of carbon atoms, wherein a first set of regions is formed where the silicon nanoparticles are deposited and the remaining portions of the substrate surface define a second set of regions. The method also includes densifying the set of silicon nanoparticles into a thin film wherein a set of silicon-organic zones are formed on the substrate surface, wherein the first set of regions has a first reflectivity value and the second set of regions has a second reflectivity value. The method further includes illuminating the substrate surface with an illumination source, wherein the ratio of the second reflectivity value to the first reflectivity value is greater than about 1.1.
    Type: Grant
    Filed: May 19, 2009
    Date of Patent: November 1, 2011
    Assignee: Innovalight, Inc.
    Inventors: Andreas Meisel, Michael Burrows, Homer Antoniadis
  • Patent number: 7998359
    Abstract: A method for selectively etching a silicon-containing film on a silicon substrate is disclosed. The method includes depositing a silicon-containing film on the silicon substrate. The method further includes baking the silicon-containing film to create a densified silicon-containing film, wherein the densified film has a first thickness. The method also includes exposing the silicon substrate to an aqueous solution comprising NH4F and HF in a ratio of between about 6:1 and about 100:1, at a temperature of between about 20° C. and about 50° C., and for a time period of between about 30 seconds and about 5 minutes; wherein between about 55% and about 95% of the densified silicon-containing film is removed.
    Type: Grant
    Filed: September 24, 2010
    Date of Patent: August 16, 2011
    Assignee: Innovalight, Inc.
    Inventors: Elena Rogojina, Eric Rosenfeld, Dmitry Poplavskyy
  • Patent number: 7943846
    Abstract: Photoactive materials made from Group IV semiconductor nanoparticles dispersed in an inorganic oxide matrix and methods for making the photoactive materials are provided. In some instances, the nanoparticles are functionalized with organosilanes to provide nanoparticle-organosilane compounds. The photoactive materials may be formed by subjecting the nanoparticles or nanoparticle compounds to a sol-gel process. The photoactive materials are well-suited for use in devices which convert electromagnetic radiation into electrical energy, including photovoltaic devices, photoconductors, and photodetectors.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: May 17, 2011
    Assignee: Innovalight, Inc.
    Inventors: Sanjai Sinha, Elena Rogojina
  • Patent number: 7923368
    Abstract: A method of forming a diffusion region is disclosed. The method includes depositing a nanoparticle ink on a surface of a wafer to form a non-densified thin film, the nanoparticle ink having set of nanoparticles, wherein at least some nanoparticles of the set of nanoparticles include dopant atoms therein. The method also includes heating the non-densified thin film to a first temperature and for a first time period to remove a solvent from the deposited nanoparticle ink; and heating the non-densified thin film to a second temperature and for a second time period to form a densified thin film, wherein at least some of the dopant atoms diffuse into the wafer to form the diffusion region.
    Type: Grant
    Filed: April 25, 2008
    Date of Patent: April 12, 2011
    Assignee: Innovalight, Inc.
    Inventors: Mason Terry, Homer Antoniadis, Dmitry Poplavskyy, Maxim Kelman
  • Patent number: 7910393
    Abstract: A Group IV based nanoparticle fluid is disclosed. The nanoparticle fluid includes a set of nanoparticles—comprising a set of Group IV atoms, wherein the set of nanoparticles is present in an amount of between about 1 wt % and about 20 wt % of the nanoparticle fluid. The nanoparticle fluid also includes a set of HMW molecules, wherein the set of HMW molecules is present in an amount of between about 0 wt % and about 5 wt % of the nanoparticle fluid. The nanoparticle fluid further includes a set of capping agent molecules, wherein at least some capping agent molecules of the set of capping agent molecules are attached to the set of nanoparticles.
    Type: Grant
    Filed: June 29, 2009
    Date of Patent: March 22, 2011
    Assignee: Innovalight, Inc.
    Inventors: Hyungrak Kim, Malcolm Abbott, Andreas Meisel, Elizabeth Tai, Augustus Jones, Dmitry Poplavskyy, Karel Vanheusden
  • Patent number: 7897489
    Abstract: A method of selectively attaching a capping agent to an H-passivated Si or Ge surface is disclosed. The method includes providing the H-passivated Si or Ge surface, the H-passivated Si or Ge surface including a set of covalently bonded Si or Ge atoms and a set of surface substitutional atoms, wherein the set of surface substitutional atoms includes at least one of boron atoms, aluminum atoms, gallium atoms, indium atoms, tin atoms, lead atoms, phosphorus atoms, arsenic atoms, sulfur atoms, and bismuth atoms. The method also includes exposing the set of surface functional atoms to a set of capping agents, each capping agent of the set of capping agents having a set of functional groups bonded to a pair of carbon atoms, wherein the pair of carbon atoms includes at least one pi orbital bond, and further wherein a covalent bond is formed between at least some surface substitutional atoms of the set of surface substitutional atoms and at least some capping agents of the set of capping agents.
    Type: Grant
    Filed: June 17, 2008
    Date of Patent: March 1, 2011
    Assignee: Innovalight, Inc.
    Inventor: Elena Rogojina
  • Patent number: 7851336
    Abstract: A method for forming a passivated densified nanoparticle thin film on a substrate in a chamber is disclosed. The method includes depositing a nanoparticle ink on a first region on the substrate, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 400° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed. The method further includes flowing an oxidizer gas into the chamber; and heating the porous compact to a second temperature between about 600° C. and about 1000° C., and for a second time period of between about 5 seconds and about 1 hour; wherein the passivated densified nanoparticle thin film is formed.
    Type: Grant
    Filed: March 13, 2008
    Date of Patent: December 14, 2010
    Assignee: Innovalight, Inc.
    Inventors: Dmitry Poplavskyy, Maxim Kelman, Mason Terry
  • Patent number: 7776724
    Abstract: A method of forming a densified nanoparticle thin film is disclosed. The method includes positioning a substrate in a first chamber; and depositing a nanoparticle ink, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 300° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed; and positioning the substrate in a second chamber, the second chamber having a pressure of between about 1×10?7 Torr and about 1×10?4 Torr. The method further includes depositing on the porous compact a dielectric material; wherein the densified nanoparticle thin film is formed.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: August 17, 2010
    Assignee: Innovalight, Inc.
    Inventors: Francesco Lemmi, Elena V. Rogojina, Pingrong Yu, David Jurbergs, Homer Antoniadis, Maxim Kelman
  • Patent number: 7727901
    Abstract: A method of forming an ink, the ink configured to form a conductive densified film is disclosed. The method includes providing a set of Group IV semiconductor particles, wherein each Group IV semiconductor particle of the set of Group IV semiconductor particles includes a particle surface with a first exposed particle surface area. The method also includes reacting the set of Group IV semiconductor particles to a set of bulky capping agent molecules resulting in a second exposed particle surface area, wherein the second exposed particle surface area is less than the first exposed particle surface area. The method further includes dispersing the set of Group IV semiconductor particles in a vehicle, wherein the ink is formed.
    Type: Grant
    Filed: April 30, 2008
    Date of Patent: June 1, 2010
    Assignee: Innovalight, Inc.
    Inventors: Elena V. Rogojina, Manikandan Jayaraman, Karel Vanheusden
  • Patent number: 7718707
    Abstract: A set of nanoparticles is disclosed. Each nanoparticle of the set of nanoparticles is comprised of a set of Group IV atoms arranged in a substantially spherical configuration. Each nanoparticle of the set of nanoparticles further having a sphericity of between about 1.0 and about 2.0; a diameter of between about 4 nm and about 100 nm; and a sintering temperature less than a melting temperature of the set of Group IV atoms.
    Type: Grant
    Filed: August 21, 2007
    Date of Patent: May 18, 2010
    Assignee: Innovalight, Inc.
    Inventors: Maxim Kelman, Xuegeng Li, Pingrong Yu, Karel Vanheusden, David Jurbergs
  • Patent number: 7704866
    Abstract: A method for forming a contact to a substrate is disclosed. The method includes providing a substrate, the substrate being doped with a first dopant; and diffusing a second dopant into at least a first side of the substrate to form a second dopant region, the first side further including a first side surface area. The method also includes forming a dielectric layer on the first side of the substrate. The method further includes forming a set of composite layer regions on the dielectric layer, wherein each composite layer region of the set of composite layer regions further includes a set of Group IV semiconductor nanoparticles and a set of metal particles. The method also includes heating the set of composite layer regions to a first temperature, wherein at least some composite layer regions of the set of composite layer regions etch through the dielectric layer and form a set of contacts with the second dopant region.
    Type: Grant
    Filed: March 18, 2008
    Date of Patent: April 27, 2010
    Assignee: Innovalight, Inc.
    Inventors: Karel Vanheusden, Francesco Lemmi, Dmitry Poplavskyy, Mason Terry, Malcolm Abbott
  • Patent number: 7615393
    Abstract: A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron, the substrate including a first substrate surface with a first surface region and a second surface region. The method also includes depositing a first set of nanoparticles on the first surface region, the first set of nanoparticles including a first dopant. The method further includes heating the substrate in an inert ambient to a first temperature and for a first time period creating a first densified film, and further creating a first diffused region with a first diffusion depth in the substrate beneath the first surface region.
    Type: Grant
    Filed: October 29, 2008
    Date of Patent: November 10, 2009
    Assignee: Innovalight, Inc.
    Inventors: Sunil Shah, Malcolm Abbott
  • Patent number: 7572740
    Abstract: A method for producing a Group IV semiconductor thin film in a chamber is disclosed. The method includes positioning a substrate in the chamber, wherein the chamber further has a chamber pressure. The method further includes depositing a nanoparticle ink on the substrate, the nanoparticle ink including set of Group IV semiconductor nanoparticles and a solvent, wherein each nanoparticle of the set of Group IV semiconductor nanoparticles includes a nanoparticle surface, wherein a layer of Group IV semiconductor nanoparticles is formed. The method also includes striking a hydrogen plasma; and heating the layer of Group IV semiconductor nanoparticles to a fabrication temperature of between about 300° C. and about 1350° C., and between about 1 nanosecond and about 10 minutes; wherein the Group IV semiconductor thin film is formed.
    Type: Grant
    Filed: April 1, 2008
    Date of Patent: August 11, 2009
    Assignee: Innovalight, Inc.
    Inventors: Mason Terry, Malcolm Abbott, Maxim Kelman, Andreas Meisel, Dmitry Poplavskyy, Eric Schiff
  • Patent number: 7521340
    Abstract: A method of forming a densified nanoparticle thin film in a chamber is disclosed. The method includes positioning a substrate in the chamber; and depositing a nanoparticle ink, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 300° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed. The method further includes exposing the porous compact to an HF vapor for a second time period of between about 2 minutes and about 20 minutes, and heating the porous compact for a second temperature of between about 25° C. and about 60° C.; and heating the porous compact to a third temperature between about 100° C. and about 1000° C., and for a third time period of between about 5 minutes and about 10 hours; wherein the densified nanoparticle thin film is formed.
    Type: Grant
    Filed: December 4, 2007
    Date of Patent: April 21, 2009
    Assignee: Innovalight, Inc.
    Inventors: Francesco Lemmi, Elena V. Rogojina, Pingrong Yu, David Jurbergs, Homer Antoniadis, Maxim Kelman
  • Patent number: 7279832
    Abstract: This invention provides a phosphor material capable of absorbing primary light and converting that light into white light having a high color rendering index and illumination devices made from the phosphor material. The white light may have a color rendering index of 100 and may be produced with an efficiency of at least 30 lm/w. In one embodiment, the illumination device includes a secondary light source made from a plurality of Group IV semiconductor nanoparticles.
    Type: Grant
    Filed: April 1, 2004
    Date of Patent: October 9, 2007
    Assignee: Innovalight, Inc.
    Inventors: Paul Thurk, David Jursberg
  • Publication number: 20040252488
    Abstract: Light-emitting ceiling tile device, comprising: a plurality of nanostructures, the nanostructures comprising a group IV semiconductor and a capping agent coupled to the group IV semiconductor, wherein the nanostructures have an average dimension of between about 0.5 nm to about 15 nm; and a first electrode electrically coupled to the plurality of nanostructures; and a second electrode electrically coupled to the plurality of nanostructures; wherein the first and second electrodes together are configured to conduct an applied current to the nanostructures, wherein the nanostructures produce light in response to the applied current.
    Type: Application
    Filed: April 1, 2004
    Publication date: December 16, 2004
    Applicant: Innovalight
    Inventor: Paul Thurk