Patents Assigned to Institute of Microelectronics Chinese Academy of Science
  • Publication number: 20250089577
    Abstract: The memory cell includes: a piezoelectric substrate layer, wherein two ends of the piezoelectric substrate layer are respectively provided with a first electrode and a second electrode, and a current-free drive of skyrmion is implemented by applying a voltage to the first electrode and the second electrode; a magnetic layer on a surface of the piezoelectric substrate layer, wherein the magnetic layer is used to form a heterojunction with the piezoelectric substrate layer, and is used to generate, stabilize, and serve as a basic carrier for a movement of the skyrmion; wherein the magnetic layer includes a convex body, the convex body is configured to divide the magnetic layer into a bit region and a memory region, and the bit region is provided with a magnetic tunnel junction used to perform generation and detection functions of the skyrmion.
    Type: Application
    Filed: July 12, 2022
    Publication date: March 13, 2025
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Guozhong Xing, Hao Zhang, Xuefeng Zhao, Ziwei Wang, Changqing Xie, Ming Liu
  • Patent number: 12249632
    Abstract: A method of manufacturing a semiconductor memory device is provided. The method include: providing a stack of a sacrificial layer, a first source/drain layer, a channel layer, and a second source/drain layer on a substrate; defining a plurality of pillar-shaped active regions arranged in rows and columns in the first source/drain layer, the channel layer, and the second source/drain layer; removing the sacrificial layer and forming a plurality of bit lines extending below the respective columns of active regions in a space left by the removal of the sacrificial layer; forming gate stacks around peripheries of the channel layer in the respective active regions; and forming a plurality of word lines between the respective rows of active regions, wherein each of the word lines is electrically connected to the gate stacks of the respective memory cells in a corresponding one of the rows.
    Type: Grant
    Filed: December 12, 2022
    Date of Patent: March 11, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 12249544
    Abstract: There are provided a semiconductor device, a method of manufacturing the same, and an electronic device including the device. According to an embodiment, the semiconductor device may include a substrate, and a first device and a second device formed on the substrate. Each of the first device and the second device includes a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, and also a gate stack surrounding a periphery of the channel layer. The channel layer of the first device and the channel layer of the second device are substantially co-planar.
    Type: Grant
    Filed: May 15, 2023
    Date of Patent: March 11, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 12245442
    Abstract: A semiconductor device including a substrate, a first source/drain layer, a channel layer and a second source/drain layer stacked on the substrate in sequence, and a gate stack surrounding a periphery of the channel layer. The channel layer includes a semiconductor material causing an increased ON current and/or a reduced OFF current as compared to Si.
    Type: Grant
    Filed: July 31, 2017
    Date of Patent: March 4, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huilong Zhu, Guilei Wang, Henry H. Radamson, Yanbo Zhang, Zhengyong Zhu
  • Patent number: 12237213
    Abstract: A method for manufacturing a semiconductor device. A photolithographic coating, including a first film, a photolithographic film, and a second film, is formed on the to-be-connected structure. Refractive indexes of the first film and the second film are smaller than 1. The photolithographic coating is exposed to a light having a first wavelength, to image the to-be-connected structure to a first region of the photolithographic film. The photolithographic coating is exposed to a light having a second wavelength through a mask, to image the mask to a second region of the photolithographic film. A region in which the first region and the second region overlap serves as a connection region corresponding to the to-be-connected structure, and thereby self-alignment between a layer of the to-be-connected structure and a layer where a contact hole is arranged is implemented.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: February 25, 2025
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Libin Zhang, Yayi Wei, Zhen Song
  • Publication number: 20250063713
    Abstract: The present disclosure provides a memory with a three-dimensional vertical structure and a manufacturing method. The memory includes: a semiconductor substrate, a first isolation layer, a first transistor and a second transistor. The first transistor includes a first source layer, a second isolation layer, a first drain layer, a third isolation layer, and a first through hole penetrating to the first source layer. A first active layer, a first gate dielectric layer and a first gate layer are on an inner sidewall of the first through hole. The second transistor includes a fourth isolation layer, a second source layer, a fifth isolation layer, and a second through hole penetrating to the first gate layer. A second active layer, a second gate dielectric layer and a second gate layer are on an inner sidewall of the second through hole. The second through hole is surrounded by the first through hole.
    Type: Application
    Filed: August 9, 2024
    Publication date: February 20, 2025
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Jianfeng GAO, Weibing LIU, Junjie LI, Na ZHOU, Tao Yang, Junfeng LI, Jun LUO
  • Publication number: 20250054838
    Abstract: A three-dimensional integrated circuit and a manufacturing method therefor is used for improving the performance of the integrated circuit when the integrated circuit includes a power gating circuit. The three-dimensional integrated circuit includes a substrate, and a front-section circuit, a rear-section metal interconnection layer, and a rear-section power gating circuit that are formed on the substrate; the rear-section metal interconnection layer is formed on the front-section circuit; the rear-section power gating circuit is located in the rear-section metal interconnection layer; and the front-section circuit is electrically connected to a power supply or a ground wire by means of the rear-section metal interconnection layer and the rear-section power gating circuit.
    Type: Application
    Filed: March 6, 2023
    Publication date: February 13, 2025
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Guanhua YANG, Wendong LU, Ling LI
  • Patent number: 12222641
    Abstract: The present disclosure provides a method for optimizing mask parameters, and the method includes: acquiring a test pattern, light source parameters, and initial mask parameters, the initial mask parameters including a mask thickness and an initial mask sidewall angle; generating multiple sets of candidate mask parameters according to the initial mask sidewall angle in the initial mask parameters; the multiple sets of candidate mask parameters including different mask sidewall angles and the same mask thickness; obtaining an imaging contrast of each set of candidate mask parameters based on the test pattern and the light source parameters; and selecting an optimal mask sidewall angle from the multiple sets of candidate mask parameters according to the imaging contrasts.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: February 11, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Jianfang He, Yayi Wei, Yajuan Su, Lisong Dong, Libin Zhang, Rui Chen, Le Ma
  • Patent number: 12205630
    Abstract: Provided are a symmetric memory cell and a BNN circuit. The symmetric memory cell includes a first complementary structure and a second complementary structure, the second complementary structure being symmetrically connected to the first complementary structure in a first direction, wherein the first complementary structure includes a first control transistor configured to be connected to the second complementary structure, the second complementary structure includes a second control transistor, a drain electrode of the second control transistor and a drain electrode of the first control transistor being symmetrically arranged in the first direction and connected to a bit line, and the symmetric memory cell is configured to store a weight value 1 or 0.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: January 21, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Qing Luo, Bing Chen, Hangbing Lv, Ming Liu, Cheng Lu
  • Patent number: 12205623
    Abstract: Provided is a cache memory, including: a first field-effect transistor, a field-like spin torque layer underneath a magnetic tunnel junction, an electrode, and a second field-effect transistor sequentially arranged and connected; wherein the first field-effect transistor is configured to provide a writing current and to control the on-off of the writing current through a gate electrode; the field-like spin torque layer is configured to generate field-like spin torques for switching a first ferromagnetic layer of the magnetic tunnel junction; the magnetic tunnel junction includes a first ferromagnetic layer, a tunneling layer, a second ferromagnetic layer and a pinning layer arranged sequentially; the electrode is configured to connect the cache memory with the second field-effect transistor; and the second field-effect transistor is configured to control the on-off of the second field-effect transistor through the gate electrode to read the resistive state of the magnetic tunnel junction.
    Type: Grant
    Filed: July 20, 2020
    Date of Patent: January 21, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Chong Bi, Ming Liu
  • Patent number: 12198930
    Abstract: A method for manufacturing a semiconductor device. A photolithographic coating, including a first film, a photolithographic film, and a second film, is formed on the to-be-connected structure. Refractive indexes of the first film and the second film are smaller than 1, so that the photolithographic coating forms an optical structure with a high reflection coefficient. The photolithographic coating is exposed to a light having a target wavelength through a mask. The to-be-connected structure is reflected in the photolithographic coating, and hence serves as another mask and is imaged to the photolithographic film. A pattern of the mask is simultaneously imaged to the photolithographic film. That is, both the to-be-connected structure and the pattern of the mask are imaged to a target region of the photolithographic film, and the target region corresponds to the to-be-connected structure.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: January 14, 2025
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Libin Zhang, Yayi Wei, Zhen Song, Yajuan Su, Jianfang He, Le Ma
  • Patent number: 12197282
    Abstract: A data recovery method for a flash memory includes: reading data from the flash memory by using preset read voltage; calculating a check node error rate corresponding to the data; calculating a read voltage adjustment step size according to the check node error rate; adjusting the preset read voltage according to the read voltage adjustment step size and reading data from the flash memory by using the adjusted preset read voltage, and repeating the operation of calculating a check node error rate corresponding to the data to operation of adjusting the preset read voltage according to the read voltage adjustment step size and reading data from the flash memory by using the adjusted preset read voltage, until the check node error rate is minimum; and selecting a read voltage corresponding to the minimum check node error rate to read data from the flash memory, so as to perform data recovery.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: January 14, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Qianhui Li, Qi Wang, Liu Yang, Yiyang Jiang, Xiaolei Yu, Jing He, Zongliang Huo, Tianchun Ye
  • Patent number: 12199031
    Abstract: An interconnection structure for semiconductor devices formed on a substrate may be arranged under the semiconductor devices. The interconnection structure includes at least one via layer and at least one interconnection layer alternately arranged in a direction from the semiconductor device to the substrate, wherein each via layer includes via holes respectively arranged under at least a part of the semiconductor devices, and each interconnection layer includes conductive nodes respectively arranged under at least a part of the semiconductor devices, and in a same interconnection layer, a conductive channel is provided between at least one conductive node and at least another node; and the via holes in each via layer and the conductive nodes in each interconnection layer corresponding to the via holes at least partially overlap with each other in the direction from the semiconductor device to the substrate.
    Type: Grant
    Filed: May 30, 2019
    Date of Patent: January 14, 2025
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 12198746
    Abstract: An in-memory computing circuit having reconfigurable logic, including: an input stage and N output stages which are cascaded. The input stage includes 2N STT-MTJs. Each output stage includes STT-MTJs, of which a quantity is equal to a half of a quantity of STT-MTJs in a just previous stage. Two STT-MTJs in the previous stage and one STT-MTJ in the subsequent stage form a double-input single-output in-memory computing unit. Each double-input single-output in-memory computing unit can implement the four logical operations, i.e., NAND, NOR, AND, and OR, under different configurations. Data storage and logical operations can be realized under the same circuit architecture, and reconfigurations among different logic can be achieved.
    Type: Grant
    Filed: October 14, 2022
    Date of Patent: January 14, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Yan Cui, Jun Luo, Meiyin Yang, Jing Xu
  • Patent number: 12191394
    Abstract: A strained vertical channel semiconductor device, a method of manufacturing the same, and an electronic apparatus including the same are provided. The method includes: providing a vertical channel layer on a substrate, wherein the vertical channel layer is held by a first supporting layer on a first side in a lateral direction, and is held by a second supporting layer on a second side opposite to the first side; replacing the first supporting layer with a first gate stack while the vertical channel layer is held by the second supporting layer; and replacing the second supporting layer with a second gate stack while the vertical channel layer is held by the first gate stack.
    Type: Grant
    Filed: December 7, 2021
    Date of Patent: January 7, 2025
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Publication number: 20250006556
    Abstract: Provided are a self-aligned nanometer through-silicon-via structure and a method of preparing the same. According to the preset range and positions of the first and second trenches, the second preset pattern is formed, and then the first initial blind hole is formed by etching based on the second preset pattern, so that the position of the nanometer through-silicon-via is determined. The depth of the buried power rail may be determined by etching the silicon substrate with the first preset depth, and the depth of the self-aligned nanometer through-silicon-via may be determined by etching the silicon substrate with the second preset depth or thinning the fourth structure from a side of the silicon substrate.
    Type: Application
    Filed: March 27, 2024
    Publication date: January 2, 2025
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Xianyu CHEN, Huilong ZHU
  • Patent number: 12183807
    Abstract: A semiconductor device and a method for manufacturing the same. A first electrode layer, a semiconductor layer, and a second electrode layer are formed on a substrate. The semiconductor layer is etched form a sidewall to form a cavity. A channel layer is formed at the cavity and sidewalls of the first electrode layer and the second electrode layer. The channel layer includes a first channel part located in the cavity and a second channel part located outside the cavity. The first channel part is filled with a dummy gate layer. The dummy gate layer is etched from a sidewall. The second channel part and the first channel part, which is in contact with upper and lower surfaces of the dummy gate layer are removed to form a recess. The recess is filled with a dielectric material to form an isolation sidewall.
    Type: Grant
    Filed: December 23, 2021
    Date of Patent: December 31, 2024
    Assignees: BEIJING SUPERSTRING ACADEMY OF MEMORY TECHNOLOGY, INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Weixing Huang, Huilong Zhu
  • Patent number: 12176393
    Abstract: Provided are a nanowire/nanosheet device with a support portion, a method of manufacturing the same, and an electronic apparatus including the nanowire/nanosheet device.
    Type: Grant
    Filed: April 26, 2022
    Date of Patent: December 24, 2024
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Publication number: 20240407163
    Abstract: Provided are a NOR-type memory device, a manufacturing method, and an electronic device. The device includes: a plurality of gate stacks extending vertically on a substrate, wherein the gate stack includes a first gate conductor layer and a first filling layer; at least one device layer surrounding a periphery of the gate stack and extending along a sidewall of the gate stack; and a single-crystal vertical channel on a side of the device layer close to the gate stack and in contact with the first filling layer. At least one side surface of the gate stack in the vertical direction is a (100) or (110) crystal plane; and/or the body region includes a second filling layer or the body region includes a second gate conductor layer and a third filling layer, wherein at least one of first and third filling layers is a storage functional layer.
    Type: Application
    Filed: November 9, 2023
    Publication date: December 5, 2024
    Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Zijin YAN, Huilong ZHU
  • Patent number: 12160529
    Abstract: A reconfigurable PUF device based on fully electric field-controlled domain wall motion includes a voltage control layer, upper electrodes, a lower electrode, antiferromagnetic pinning layers, and a magnetic tunnel junction (MTJ). The MTJ includes, from bottom to top, a ferromagnetic reference layer, a potential barrier tunneling layer and a ferromagnetic free layer. In the device, an energy potential well is formed in a middle portion of the ferromagnetic free layer by applying a voltage to the voltage control layer to control magnetic anisotropy, and a current is fed into either of the upper electrodes to drive generation of the magnetic domain walls and pin the magnetic domain walls to the potential well. After the voltage is removed, the potential well is lowered so that the magnetic domain walls are in a metastable state, thereby either a high resistance state or a low resistance state is randomly obtained.
    Type: Grant
    Filed: December 5, 2022
    Date of Patent: December 3, 2024
    Assignee: INSTITUTE OF MICROELECTRONICS OF THE CHINESE ACADEMY OF SCIENCES
    Inventors: Guozhong Xing, Huai Lin, Di Wang, Long Liu, Kaiping Zhang, Guanya Wang, Yan Wang, Xiaoxin Xu, Ming Liu