Patents Assigned to INVENSENSE
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Patent number: 12286342Abstract: Embodiments for constant charge or capacitance for capacitive micro-electro-mechanical system (MEMS) sensors are presented herein. A MEMS device comprises a sense element circuit comprising a bias resistance, a charge-pump, and a capacitive sense element comprising an electrode and a sense capacitance. The charge-pump generates, at a bias resistor electrically coupled to the electrode, a bias voltage that is inversely proportional to a capacitance value comprising a value of the sense capacitance to facilitate maintenance of a nominally constant charge on the electrode. A sensing circuit comprises an alternating current (AC) signal source that generates an AC signal at a defined frequency; and generates, based on the AC signal, an AC test voltage at a test capacitance that is electrically coupled to the electrode. The sense element circuit generates, based on the AC test voltage at the defined frequency, an output signal representing the value of the sense capacitance.Type: GrantFiled: December 15, 2022Date of Patent: April 29, 2025Assignee: INVENSENSE, INC.Inventor: Joseph Seeger
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Patent number: 12245004Abstract: Acoustic and other activity detection signaling is provided herein. Operations of a method can include determining a micro-electromechanical system (MEMS) device is no longer in an initialization state and receiving a first signal that instructs the MEMS device to perform event activity detection. The method can also include receiving one or more event signals and determining that an event signal of one or more event signals satisfies a defined event characteristic. The method can also include outputting a second signal that comprises information indicative of a detection of event activity at the MEMS device being more than the defined event characteristic.Type: GrantFiled: August 23, 2022Date of Patent: March 4, 2025Assignee: INVENSENSE, INC.Inventors: Miro Svajda, Stefano Riva
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Patent number: 12238481Abstract: Acoustic activity detection is provided herein. Operations of a method can include receiving an acoustic signal at a micro-electromechanical system (MEMS) microphone. Based on portions of the acoustic signal being determined to exceed a threshold signal level, output pulses are generated. Further, the method can include extracting information representative of a frequency of the acoustic signal based on respective spacing between rising edges of the output pulses.Type: GrantFiled: July 26, 2023Date of Patent: February 25, 2025Assignee: INVENSENSE, INC.Inventors: Tomas Pitak, Igor Mucha, Robert Dick, Michael Tuttle
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Patent number: 12228404Abstract: A dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.Type: GrantFiled: June 13, 2023Date of Patent: February 18, 2025Assignee: INVENSENSE, INC.Inventors: Doruk Senkal, Robert Hennessy, Houri Johari-Galle, Joseph Seeger
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Patent number: 12192704Abstract: The present invention relates to a microelectromechanical system (MEMS) microphone array capsule. In one embodiment, a MEMS microphone includes a MEMS microphone die; an acoustic sensor array formed into the MEMS microphone die, the acoustic sensor array comprising a plurality of MEMS acoustic sensor elements, wherein respective ones of the plurality of MEMS acoustic sensor elements are tuned to different resonant frequencies; and an interconnect that electrically couples the acoustic sensor array to an impedance converter circuit.Type: GrantFiled: December 8, 2022Date of Patent: January 7, 2025Assignee: INVENSENSE, INC.Inventor: Jeremy Parker
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Patent number: 12170869Abstract: The present invention relates to a fixed-fixed membrane for a microelectromechanical system (MEMS) microphone. In one embodiment, a MEMS acoustic sensor includes a substrate; a membrane situated parallel to the substrate; and at least one vent formed into the membrane, wherein the at least one vent is a curved opening in the membrane, and wherein the at least one vent is disposed substantially along a length of the membrane.Type: GrantFiled: September 13, 2022Date of Patent: December 17, 2024Assignee: INVENSENSE, INC.Inventors: Joseph Seeger, Sushil Bharatan, Andrew Randles, Michael John Foster
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Patent number: 12139397Abstract: Selective self-assembled monolayer patterning with sacrificial layer for devices is provided herein. A sensor device can include a handle layer and a device layer that comprises a first side and a second side. First portions of the first side are operatively connected to defined portions of the handle layer. At least one area of the second side comprises an anti-stiction area formed with an anti-stiction coating. The device can also include a Complementary Metal-Oxide-Semiconductor (CMOS) wafer operatively connected to second portions of the second side of the device layer. The CMOS wafer comprises at least one bump stop. The anti-stiction area faces the at least one bump stop.Type: GrantFiled: September 22, 2020Date of Patent: November 12, 2024Assignee: INVENSENSE, INC.Inventors: Daesung Lee, Alan Cuthbertson
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Patent number: 12136904Abstract: Disclosed embodiments provide flexible performance, high dynamic range, microelectromechanical (MEMS) multipath digital microphones, which allow seamless, low latency transitions between audio signal paths without audible artifacts over interruptions in the audio output signal. Disclosed embodiments facilitate performance and power saving mode transitions maintaining high dynamic range capability.Type: GrantFiled: August 23, 2022Date of Patent: November 5, 2024Assignee: INVENSENSE, INC.Inventors: Stefano Valle, Igor Mucha, Alessandro Magnani, Nicola Vannucci
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Patent number: 12069430Abstract: Disclosed embodiments provide flexible performance, high dynamic range, microelectromechanical (MEMS) multipath digital microphones, which allow seamless, low latency transitions between audio signal paths without audible artifacts over interruptions in the audio output signal. Disclosed embodiments facilitate performance and power saving mode transitions maintaining high dynamic range capability.Type: GrantFiled: August 25, 2021Date of Patent: August 20, 2024Assignee: INVENSENSE, INC.Inventors: Stefano Valle, Igor Mucha, Alessandro Magnani
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Patent number: 12013282Abstract: An alternate venting path can be employed in a sensor device for pressure equalization. A sensor component of the device can comprise a diaphragm component and/or backplate component disposed over an acoustic port of the device. The diaphragm component can be formed with no holes to prevent liquid or particles from entering a back cavity of the device, or gap between the diaphragm component and backplate component. A venting port can be formed in the device to create an alternate venting path to the back cavity for pressure equalization for the diaphragm component. A venting component, comprising a filter, membrane, and/or hydrophobic coating, can be associated with the venting port to inhibit liquid and particles from entering the back cavity via the venting port, without degrading performance of the device. The venting component can be designed to achieve a desired low frequency corner of the sensor frequency response.Type: GrantFiled: August 10, 2022Date of Patent: June 18, 2024Assignee: INVENSENSE, INC.Inventors: Jeremy Parker, Kieran Harney
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Patent number: 11990917Abstract: The present invention relates to an incremental analog to digital converter incorporating noise shaping and residual error quantization. In one embodiment, a circuit includes an incremental analog to digital converter, comprising a loop filter that filters an analog input signal in response to receiving a reset signal, resulting in a filtered analog input signal, and a successive approximation register (SAR) quantizer, coupled with the filtered analog input signal, that converts the filtered analog input signal to an intermediate digitized output of a first resolution based on a reference voltage, wherein the SAR quantizer comprises a feedback loop that shapes quantization noise generated by the SAR quantizer as a result of converting the filtered analog input signal; and a digital filter, coupled with the intermediate digitized output, that generates a digitized output signal of a second resolution, greater than the first resolution, by digitally filtering the intermediate digitized output.Type: GrantFiled: June 7, 2022Date of Patent: May 21, 2024Assignee: INVENSENSE, INC.Inventors: Omid Oliaei, Stephen Bart
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Patent number: 11955993Abstract: An audio activity detector device is disclosed. The audio activity detector device comprises a closed loop feedback regulating circuit that supplies an input signal representative of a time-varying voltage signal to a quantizer circuit, wherein the quantizer circuit, as a function of the input signal, converts the input signal to a quantizer discrete-time signal; a first circuit that, as a function of the discrete-time signal, determines a key quantizer statistic value for the quantizer discrete-time signal; and a second circuit that, as a function of the key quantizer statistic value, determines a signal statistic value for the input signal and a gain control value.Type: GrantFiled: December 7, 2020Date of Patent: April 9, 2024Assignee: INVENSENSE, INC.Inventor: Michael Perrott
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Patent number: 11952267Abstract: A modification to rough polysilicon using ion implantation and silicide is provided herein. A method can comprise depositing a hard mask on a single crystal silicon, patterning the hard mask, and depositing metal on the single crystal silicon. The method also can comprise forming silicide based on causing the metal to react with exposed silicon of the single crystal silicon. Further, the method can comprise removing unreacted metal and stripping the hard mask from the single crystal silicon. Another method can comprise forming a MEMS layer based on fusion bonding a handle MEMS with a device layer. The method also can comprise implanting rough polysilicon on the device layer. Implanting the rough polysilicon can comprise performing ion implantation of the rough polysilicon. Further, the method can comprise performing high temperature annealing. The high temperature can comprise a temperature in a range between around 700 and 1100 degrees Celsius.Type: GrantFiled: January 26, 2022Date of Patent: April 9, 2024Assignee: INVENSENSE, INC.Inventors: Alan Cuthbertson, Daesung Lee
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Patent number: 11945713Abstract: Systems and methods are provided that provide a getter in a micromechanical system. In some embodiments, a microelectromechanical system (MEMS) is bonded to a substrate. The MEMS and the substrate have a first cavity and a second cavity therebetween. A first getter is provided on the substrate in the first cavity and integrated with an electrode. A second getter is provided in the first cavity over a passivation layer on the substrate. In some embodiments, the first cavity is a gyroscope cavity, and the second cavity is an accelerometer cavity.Type: GrantFiled: July 8, 2019Date of Patent: April 2, 2024Assignee: INVENSENSE, INC.Inventors: Daesung Lee, Jeff Chunchieh Huang, Jongwoo Shin, Bongsang Kim, Logeeswaran Veerayah Jayaraman
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Patent number: 11933648Abstract: The described technology is generally directed towards a sensor output digitizer. The sensor output digitizer can comprise a multiplexer stage, a multi-stage analog to digital converter, and a digital output combiner. The multiplexer stage can be configured to sequentially select sensor outputs from one or more sensors, resulting in a stream of selected sensor outputs. The multi-stage analog to digital converter can be coupled with the multiplexer stage, and can be configured to convert the stream of selected sensor outputs into a stream of digitized outputs. The digital output combiner can be configured to re-scale and sum intermediate outputs of the multi-stage analog to digital converter to produce a stream of digitized sensor outputs.Type: GrantFiled: June 11, 2021Date of Patent: March 19, 2024Assignee: INVENSENSE, INC.Inventors: Federico Mazzarella, Massimiliano Musazzi
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Patent number: 11913788Abstract: A round robin sensor device for processing sensor data is provided herein. The sensor device includes a multiplexer stage configured to sequentially select sensor outputs from one or more sensors continuously. Continuously and sequentially selecting sensor outputs results in a stream of selected sensor outputs. The sensor device also includes a charge-to-voltage converter operatively coupled to the multiplexer stage and configured to convert a charge from a first sensor of the one or more sensors to a voltage. Further, the sensor device includes a resettable integrator operatively coupled to the charge-to-voltage converter and configured to demodulate and integrate the voltage, resulting in an integrated voltage. Also included in the sensor device is an analog-to-digital converter operatively coupled to the resettable integrator and configured to digitize the integrated voltage to a digital code.Type: GrantFiled: February 25, 2022Date of Patent: February 27, 2024Assignee: INVENSENSE, INC.Inventors: Vadim Tsinker, Frederico Mazzarella, Ali Shirvani
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Patent number: 11888455Abstract: Disclosed embodiments provide glitch prediction based on machine learning algorithms in mixed analog and digital systems, particularly directed to digital microelectromechanical (MEMS) multipath acoustic sensors or microphones, which allow seamless, low latency gain changes without audible artifacts or interruptions in the audio output signal.Type: GrantFiled: May 19, 2022Date of Patent: January 30, 2024Assignee: INVENSENSE, INC.Inventors: Stefano Valle, Alessandro Magnani, Pascal Trotta
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Patent number: 11881874Abstract: A motion sensor with sigma-delta analog-to-digital converter (ADC) having improved bias instability is presented herein. Differential outputs of a differential amplifier of the sigma-delta ADC are electrically coupled, via respective capacitances, to differential inputs of the differential amplifier. To minimize bias instability corresponding to flicker noise that has been injected into the differential inputs, the differential inputs are electrically coupled, via respective pairs of electronic switches, to feedback resistances based on a pair of switch control signals. In this regard, a first feedback resistance of the feedback resistances is electrically coupled to a first defined voltage, and a second feedback resistance of the feedback resistances is electrically coupled to a second defined reference voltage.Type: GrantFiled: February 17, 2022Date of Patent: January 23, 2024Assignee: INVENSENSE, INC.Inventor: Gabriele Pelli
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Patent number: 11847851Abstract: Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.Type: GrantFiled: February 18, 2022Date of Patent: December 19, 2023Assignee: INVENSENSE, INC.Inventors: Julius Ming-Lin Tsai, Mike Daneman, Sanjiv Kapoor
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Patent number: 11846648Abstract: A microelectromechanical system device is described. The microelectromechanical system device can comprise: a proof mass coupled to an anchor via a spring, wherein the proof mass moves in response to an imposition of an external load to the proof mass, and an overtravel stop comprising a first portion and a second portion.Type: GrantFiled: January 7, 2022Date of Patent: December 19, 2023Assignee: INVENSENSE, INC.Inventors: Matthew Julian Thompson, Robert Walmsley