Abstract: Provided is an optical foreign substance detection device using light scattering and image analysis to detect and analyze a foreign substance included in a target object, and the optical foreign substance detection device includes an optical housing; a light irradiation unit connected to and installed in a lower portion of the optical housing, and has a plurality of light sources arranged to irradiate light toward the target object below that the light sources irradiate light so that light scattering is generated by a foreign substance; an optical unit built into an upper portion of the optical housing, and captures the target object so the foreign substance included in the target object is detected by using light scattering of the foreign substance by the light irradiated from the light source and creates an image; and a user device that receives, stores, reproduces, and analyzes the image created from the optical unit.

Abstract: Disclosed is a surface foreign substance detector for a transparent or translucent film. The surface foreign substance detector for a transparent or translucent film according to the present invention comprises: an optical unit; an optical housing accommodating the optical unit therein; a light emission unit emitting light to the film; and a film holder providing a loading surface such that the film can be loaded thereon and made of a light-absorbing material capable of absorbing light or reflecting the light at a predetermined ratio or less. According to the present invention, the holder supporter is manufactured by using a material capable of generating a predetermined electrostatic force or more between the holder supporter and the foreign substances floating in a surrounding space to prevent foreign substances floating or scattered in a surrounding work space from being moved to the film side, thereby improving detection reliability.

Abstract: The present invention relates to a test film for detecting surface particles in a clean room in order to prevent inferior products by measuring the contamination level of the clean room using the surface particles. The present invention provides a test film for detecting surface particles in a cleanroom, the test film comprising a substrate which has a predetermined thickness and is formed of a transparent synthetic resin material; a first adhesive layer which is formed at one side of the substrate and collects the surface particles; a release film which is adhered to the first adhesive layer and is separated from the first adhesive layer when the surface particles are collected; a second adhesive layer which is formed at the other side of the substrate; and a protective film which is adhered to the second adhesive layer so as to protect the substrate and has gradations indicated thereon.