Patents Assigned to KEY FOUNDRY CO., LTD.
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Publication number: 20230387104Abstract: A semiconductor device including: a semiconductor substrate including a buried layer; and a deep trench isolation a predetermined depth disposed starting from an upper surface of the semiconductor substrate, wherein the deep trench isolation includes: a first point disposed near the upper surface of the semiconductor substrate; a second point disposed near the buried layer; and a third point disposed near a bottom face of the deep trench isolation, and wherein the deep trench isolation has an inclination such that a width of the deep trench isolation increases from the second point to the third point, is disclosed.Type: ApplicationFiled: October 13, 2022Publication date: November 30, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Yon Sup PANG, Young Ju KIM
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Publication number: 20230378172Abstract: A semiconductor device includes a ring-shaped gate electrode having an opening area disposed on a substrate, a source region and a bulk tap region disposed in the opening area, a well region disposed to overlap the ring-shaped gate electrode, a drift region disposed to be in contact with the well region, a first insulating isolation region disposed, on the drift region, to partially overlap the gate electrode, a second insulating isolation region enclosing the bulk tap region, a drain region disposed to be spaced apart from the ring-shaped gate electrode, and a deep trench isolation region disposed adjacent to the drain region.Type: ApplicationFiled: August 7, 2023Publication date: November 23, 2023Applicant: Key Foundry Co., Ltd.Inventor: Hyun Kwang SHIN
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Publication number: 20230378284Abstract: A manufacturing method of a semiconductor device, includes providing a substrate; forming a stacked gate, including a floating gate and a control gate, on the substrate; forming a stacked gate by a deposition of a select gate conductive layer on the stacked gate; forming a trench in the stacked gate by etching the stacked gate to separate a first select gate pattern and a second select gate pattern; and forming a first select gate, a second select gate, a first transistor, and a second transistor simultaneously through an etch-back process of the stacked gateType: ApplicationFiled: July 27, 2023Publication date: November 23, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Min Kuck CHO, Jae Hoon KIM, Seung Hoon LEE
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Patent number: 11825650Abstract: A single poly non-volatile memory device is provided. The single poly non-volatile memory device is formed in a semiconductor substrate, and includes a sensing transistor, a selection transistor, and a capacitor, wherein a thickness of a selection gate insulating film is formed to be thicker than a thickness of a sensing gate insulating film, wherein a thickness of a control gate insulating film of the capacitor is formed to be the same, or greater than, a thickness of the sensing gate insulating film, and wherein the sensing gate of the sensing transistor and the control gate of the capacitor are physically and electrically connected to each other.Type: GrantFiled: December 29, 2021Date of Patent: November 21, 2023Assignee: KEY FOUNDRY CO., LTD.Inventors: Su Jin Kim, Min Kuck Cho, Jung Hwan Lee, In Chul Jung
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Publication number: 20230369391Abstract: A semiconductor device includes a semiconductor substrate comprising a P-type lightly doped semiconductor layer; an undoped silicon layer formed on the P-type lightly doped semiconductor layer; a first deep trench isolation and a second deep trench isolation formed from an upper surface of the semiconductor substrate to the undoped silicon layer and filled with insulating films; and a first N-type highly doped buried layer formed on the undoped silicon layer, and disposed between the first deep trench isolation and the second deep trench isolation, wherein the undoped silicon layer surrounds bottoms of the first and second deep trench isolations, and has a thickness greater than a thickness of the first N-type highly doped buried layer.Type: ApplicationFiled: July 25, 2023Publication date: November 16, 2023Applicant: KEY FOUNDRY CO., LTD.Inventor: Yon Sup PANG
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Patent number: 11799493Abstract: An analog-to-digital converter (ADC) and an operation method thereof are provided. The ADC includes: a comparator which compares a signal input through a first input terminal and a signal input through a second input terminal, and outputs an output value according to the comparison result. A successive approximation register receives the output value of the comparator, sets digital signal values from a most significant bit to a least significant bit, and outputs the digital signal values. A digital-to-analog converter receives the digital signal values, and converts it into an analog signal based on a reference voltage Vref, and outputs it to the second input terminal. A noise component is added to the input signal and to the analog signal Vdac?.Type: GrantFiled: December 9, 2021Date of Patent: October 24, 2023Assignee: KEY FOUNDRY CO., LTD.Inventor: Hun-Bae Choi
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Patent number: 11791409Abstract: A semiconductor device includes a deep well region located on a substrate, a drift region located in the deep well region, a first gate electrode that overlaps with the first body region and the drift region, a second gate electrode that overlaps with the second body region and the drift region, a first source region and a second source region located in the first and second body regions, respectively, a drain region located in the drift region and disposed between the first gate electrode and the second gate electrode, a silicide layer located on the substrate, a first non-silicide layer located between the drain region and the first gate electrode, wherein the first non-silicide layer extends over a top surface of the first gate electrode, and a first field plate contact plug in contact with the first non-silicide layer.Type: GrantFiled: January 5, 2023Date of Patent: October 17, 2023Assignee: KEY FOUNDRY CO., LTD.Inventors: Jin Seong Chung, Tae Hoon Lee
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Publication number: 20230317777Abstract: A semiconductor device is provided. The semiconductor device includes a first region having a first gate structure disposed on a substrate and a second region having a second gate structure disposed on the substrate, a hard mask formed on the substrate, the first gate structure, and the second gate structure, a deep trench formed in the substrate between the first region and the second region, and formed to penetrate the hard mask to reach an inside of the substrate, and a planarized gap-fill insulating layer formed on the second gate structure and formed inside the deep trench. A topmost surface of the planarized gap-fill insulating layer and a topmost surface of the hard mask are coplanar.Type: ApplicationFiled: February 22, 2023Publication date: October 5, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Kwang Il KIM, Min Kuck CHO, Jung Hwan LEE, Yang Beom KANG, Hyun Chul KIM
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Publication number: 20230307075Abstract: An eFuse one-time programmable (OTP) memory includes an eFuse intellectual property (IP) configured to perform one-time writing and multiple readings for a plurality of memory cells, and a serial interface (SI) logic configured to receive a clock signal and a trim signal from a master device, and perform data writing to, or reading from, the eFuse IP based on the clock signal and the trim signal. The trim signal includes a start signal, a mode signal configured for a write mode or a read mode, and control signals configured to read or write for each of a plurality of addresses corresponding to the plurality of memory cells.Type: ApplicationFiled: October 31, 2022Publication date: September 28, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Wan-Chul KONG, Seongjun PARK, Keesik AHN
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Patent number: 11764216Abstract: A semiconductor device includes a ring-shaped gate electrode having an opening area disposed on a substrate, a source region and a bulk tap region disposed in the opening area, a well region disposed to overlap the ring-shaped gate electrode, a drift region disposed to be in contact with the well region, a first insulating isolation region disposed, on the drift region, to partially overlap the gate electrode, a second insulating isolation region enclosing the bulk tap region, a drain region disposed to be spaced apart from the ring-shaped gate electrode, and a deep trench isolation region disposed adjacent to the drain region.Type: GrantFiled: March 8, 2022Date of Patent: September 19, 2023Assignee: KEY FOUNDRY CO., LTD.Inventor: Hyun Kwang Shin
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Patent number: 11757011Abstract: A manufacturing method of a semiconductor device, includes providing a substrate; forming a stacked gate, including a floating gate and a control gate, on the substrate; forming a stacked gate by a deposition of a select gate conductive layer on the stacked gate; forming a trench in the stacked gate by etching the stacked gate to separate a first select gate pattern and a second select gate pattern; and forming a first select gate, a second select gate, a first transistor, and a second transistor simultaneously through an etch-back process of the stacked gate.Type: GrantFiled: November 18, 2021Date of Patent: September 12, 2023Assignee: KEY FOUNDRY CO., LTD.Inventors: Min Kuck Cho, Jae Hoon Kim, Seung Hoon Lee
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Patent number: 11756992Abstract: A semiconductor device includes a semiconductor substrate comprising a P-type lightly doped semiconductor layer; an undoped silicon layer formed on the P-type lightly doped semiconductor layer; a first deep trench isolation and a second deep trench isolation formed from an upper surface of the semiconductor substrate to the undoped silicon layer and filled with insulating films; and a first N-type highly doped buried layer formed on the undoped silicon layer, and disposed between the first deep trench isolation and the second deep trench isolation, wherein the undoped silicon layer surrounds bottoms of the first and second deep trench isolations, and has a thickness greater than a thickness of the first N-type highly doped buried layer.Type: GrantFiled: August 29, 2022Date of Patent: September 12, 2023Assignee: KEY FOUNDRY CO., LTD.Inventor: Yon Sup Pang
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Publication number: 20230247830Abstract: A semiconductor device include a nonvolatile memory device, including a first well region formed in a substrate, a tunneling gate insulator formed on the first well region, a floating gate formed on the tunneling gate insulator, a control gate insulator formed on the substrate, a control gate formed on the control gate insulator, and a first source region and a first drain region formed on opposite sides of the control gate, respectively, and a first logic device, including a first logic well region formed in the substrate, a first logic gate insulator formed on the first logic well region, a first logic gate formed on the first logic gate insulator, wherein the first logic gate comprises substantially a same material as a material of the control gate of the nonvolatile memory device.Type: ApplicationFiled: April 12, 2023Publication date: August 3, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Kwang Il KIM, Yang Beom KANG, Jung Hwan LEE, Min Kuck CHO, Hyun Chul KIM
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Publication number: 20230238069Abstract: Various embodiments of the present disclosure relate to a non-volatile memory device including a sense amplifier and an operation method thereof. The non-volatile memory device may include: a memory cell array comprising a plurality of memory cells; and the sense amplifier configured to read data of the plurality of memory cells and output the read data. The sense amplifier may include: a first stage sense amplifier configured to sense a voltage difference between a reference voltage and a voltage of a bit line connected to at least one memory cell among the plurality of memory cells, and perform a primary amplification of the sensed voltage difference; and a second stage sense amplifier configured to perform a secondary amplification of a first result of the primary amplification and output a second result of the secondary amplification.Type: ApplicationFiled: May 11, 2022Publication date: July 27, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Seong Jun PARK, Sung Bum PARK, Kee Sik AHN
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Patent number: 11696440Abstract: A nonvolatile memory device includes a cell array formed on a substrate, and a control gate pickup structure, wherein the cell array comprises floating gates, and a control gate surrounding the floating gates, wherein the control gate pickup structure comprises a floating gate polysilicon layer, a control gate polysilicon layer surrounding the floating gate polysilicon layer and connected to the control gate, and at least one contact plug formed on the control gate polysilicon layer.Type: GrantFiled: April 25, 2022Date of Patent: July 4, 2023Assignee: KEY FOUNDRY CO., LTD.Inventors: Min Kuck Cho, Seung Hoon Lee
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Publication number: 20230207394Abstract: A semiconductor device includes etch stop films formed on the first gate electrode, the first source region, the first drain region, and the shallow trench isolation regions, respectively. First interlayer insulating films are formed on the etch stop film, respectively. Deep trenches are formed in the substrate between adjacent ones of the first interlayer insulating films to overlap the shallow trench isolation regions. Sidewall insulating films are formed in the deep trenches, respectively. A gap-fill insulating film is formed on the sidewall insulating film. A second interlayer insulating film is formed on the gap-fill insulating film. A top surface of the second interlayer insulating film is substantially planar and a bottom surface of the second interlayer insulating film is undulating.Type: ApplicationFiled: February 17, 2023Publication date: June 29, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Yang Beom KANG, Kang Sup SHIN
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Patent number: 11688795Abstract: A semiconductor device is disclosed. A semiconductor device according to an example of the present disclosure includes a gate electrode of a ring shape having an opening area on a substrate; a P-type deep well region formed in the opening area; a drain region formed on the P-type deep well region; an N-type well region overlapping with the gate electrode; a source region formed in the N-type well region; a bulk tab region formed by being isolated from the source region by a first isolation region; a P-type drift region formed in contact with the N-type well region; and a second isolation region formed near the bulk tab region.Type: GrantFiled: May 3, 2022Date of Patent: June 27, 2023Assignee: KEY FOUNDRY CO., LTD.Inventors: Hyun Kwang Shin, Jung Hwan Lee
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Patent number: 11665896Abstract: A semiconductor device include a nonvolatile memory device, including a first well region formed in a substrate, a tunneling gate insulator formed on the first well region, a floating gate formed on the tunneling gate insulator, a control gate insulator formed on the substrate, a control gate formed on the control gate insulator, and a first source region and a first drain region formed on opposite sides of the control gate, respectively, and a first logic device, including a first logic well region formed in the substrate, a first logic gate insulator formed on the first logic well region, a first logic gate formed on the first logic gate insulator, wherein the first logic gate comprises substantially a same material as a material of the control gate of the nonvolatile memory device.Type: GrantFiled: February 7, 2022Date of Patent: May 30, 2023Assignee: KEY FOUNDRY CO., LTD.Inventors: Kwang Il Kim, Yang Beom Kang, Jung Hwan Lee, Min Kuck Cho, Hyun Chul Kim
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Publication number: 20230145810Abstract: A semiconductor device includes a deep well region located on a substrate, a drift region located in the deep well region, a first gate electrode that overlaps with the first body region and the drift region, a second gate electrode that overlaps with the second body region and the drift region, a first source region and a second source region located in the first and second body regions, respectively, a drain region located in the drift region and disposed between the first gate electrode and the second gate electrode, a silicide layer located on the substrate, a first non-silicide layer located between the drain region and the first gate electrode, wherein the first non-silicide layer extends over a top surface of the first gate electrode, and a first field plate contact plug in contact with the first non-silicide layer.Type: ApplicationFiled: January 5, 2023Publication date: May 11, 2023Applicant: Key Foundry Co., Ltd.Inventors: Jin Seong CHUNG, Tae Hoon LEE
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Publication number: 20230126337Abstract: A semiconductor device including a bootstrap diode is provided. The semiconductor device comprises a first deep well region and a second deep well region disposed in a substrate; a pinch-off region disposed between the first and second deep well regions and configured to have a depth smaller than depths of the first and second deep well regions from a top surface of a substrate; a first buried layer and a second buried layer respectively disposed in the first and second deep well regions; a P-type source region and a N-type drain region respectively disposed in the first and second deep well regions; and a N-type sink region surrounding the P-type source region, where the N-type sink region has a doping concentration higher than a doping concentration of the first deep well region.Type: ApplicationFiled: March 16, 2022Publication date: April 27, 2023Applicant: KEY FOUNDRY CO., LTD.Inventors: Youngbae KIM, Nara JANG, Gyuri HONG