Abstract: An etching gas mixture includes a nitrogen-containing compound and an inert gas. To manufacture an integrated circuit (IC) device, a silicon-containing film on a substrate is etched by using plasma generated from the etching gas mixture, and thus a hole is formed in the silicon-containing film. The nitrogen-containing compound is selected from a compound represented by Formula 1 and a compound represented by Formula 2: (R1)C?N ??[Formula 1] wherein in Formula 1, R1 is a C2 to C3 linear or branched perfluoroalkyl group, (R2)(R3)C?NH ??[Formula 2] wherein in Formula 2, each of R2 and R3 is independently a C1 to C2 linear perfluoroalkyl group.

Abstract: A process and a plant are proposed for producing a synthesis gas including hydrogen and carbon oxides by partial oxidation of carbon-containing fuel in the presence of an oxygen-containing oxidant and a moderator, wherein the obtained raw synthesis gas is laden with soot particles. According to the invention the cooling of the raw synthesis gas is carried out using a crossflow heat exchanger, a shell and tube heat exchanger or a spiral heat exchanger, wherein the carbon-containing input stream or the oxidant stream or the moderator stream or a plurality of these streams serve as the first coolant and are thus preheated before introduction into the partial oxidation plant.

Abstract: The invention provides a scrubbing column for cleaning gas streams laden with absorbent residues, for example with methanol, and also with solid particles, for example with fuel dust. The gas scrubbing is effected by means of a random packing disposed in the lower region of the scrubbing column and the gas scrubbing of the gas stream laden solely with absorbent residues but not with solid particles by means of a structured packing disposed in the upper region of the scrubbing column. The use of the scrubbing column according to the invention in the integrated plant system between a gasification plant and a plant for gas scrubbing which is operated by the Rectisol process, for example, offers particular advantages with regard to its industrial employability owing to the possible connections described, which bring synergies for efficient operation of the integrated plant system.

Abstract: The invention provides a method for on-site monitoring of the quality of the gases delivered to a consumer site, the monitoring being carried out during the delivery, in order to declare the delivery compliant or non-compliant with specifications, being characterized in that, during the delivery, a monitoring of the gas(es) delivered is carried out by the thermal conductivity technique.

Abstract: The invention relates to a process and a plant for producing methanol from an input gas including carbon monoxide and hydrogen using a pre-reactor stage and a main reactor stage. Input gas produced at and under elevated pressure is initially introduced into a pre-reactor stage for catalytic conversion into a first methanol-containing product stream. After separation of methanol from the first methanol-containing product stream and discharging from the pre-reactor stage a remaining gas stream is introduced into a main reactor stage as a residual gas stream after compression to reaction pressure for catalytic conversion into a second methanol-containing product stream, After separation from the second methanol-containing product stream methanol is discharged from the main reactor stage. Using an input gas having a carbon monoxide content of 25% to 36% by volume results in large savings in respect of the compressor output required for the production process.

Abstract: An oxyacetylene type work apparatus including a first container containing acetylene; a first pressure gauge configured to measure the pressure in the first container, a first two-dimensional marking disposed on the first dial, a second container containing oxygen; a second pressure gauge configured to measure the pressure in the second container, a second two-dimensional marking disposed on the second dial, an image capturing device configured to produce images of the first pressure gauge and of the second pressure gauge; an electronic logic circuit configured to process said images of the first and second pressure gauges thereby determining the respective angular positions, and a sensor configured to measure the temperature of the first acetylene container.

Abstract: The invention relates to a process for producing methanol and to a plant for producing methanol. A first fresh gas suitable for production of methanol and having a high carbon dioxide content is pre-compressed by a first compressor stage to obtain a second fresh gas. The second fresh gas is merged with a recycle gas stream and further compressed to synthesis pressure in a second compressor stage. Catalytic conversion of the thus obtained synthesis gas stream in a plurality of serially arranged reactor stages with intermediate condensation and separation of the crude methanol reduces the recycle gas amount in the synthesis circuit to such an extent that recycle gas may be directly recycled to the second fresh gas stream, thus ensuring that no recycle gas compressor stage is required and that the total compressor power may be reduced.

Abstract: Disclosed are Group 6 transition metal-containing thin film forming precursors to deposit Group 6 transition metal-containing films on one or more substrates via vapor deposition processes.

Abstract: A process for establishing vacuum insulation under cryogenic condition and an apparatus compatible with such process are described. When an insulation enclosure filled with high purity CO2 is evacuated to around 100 absolute Pa at ambient temperature, hard vacuum of below 1 absolute Pa may be automatically obtained within the insulation enclosure when temperature drops to around or below ?170° C. This process can be employed to provide vacuum insulation for cold box housing air separation units operated under cryogenic condition.

Abstract: Method and plant for generation of synthesis gas, comprising the steps of air fractionation to give oxygen, nitrogen and tail gas, gasification of a hydrocarbonaceous fuel to give crude synthesis gas and cleaning of the crude synthesis gas by removal of acid gas by means of cryogenic absorption, wherein the absorbent is cooled by means of a compression coolant circuit and the cooling water used is cooled by evaporative cooling by means of the tail gas obtained in the air fractionation.

Abstract: Disclosed are a cold box structure with cold box panels partly built-in and an installation method therefor. The cold box structure is mainly applied to plate-fin heat exchangers, and in particular to high-pressure aluminum plate-fin heat exchangers. The cold box structure comprises a base, a cold box support frame, four cold box panels, and a cold box top plate, and a plate-fin heat exchanger is placed inside the cold box. Some of or all the four cold box panels can be placed inside the cold box support frame as needed. The cold box structure can protect the cold box support frame from being damaged by cryogenic steam ejected from the plate fin-heat exchanger due to leakage, and further enables the discovering of leakage situations of the plate-fin heat exchanger from outer surfaces of the cold box panels in a timely manner.

Abstract: Method for indirectly preheating a fluid upstream of a furnace, wherein the fluid is preheated by indirect heat exchange with fumes discharged from the furnace through a medium in a chamber, and wherein the flow rate of the medium in the chamber is adjusted on the basis of at least one of the following temperatures: the temperature of the discharged fumes, the temperature of the medium in the chamber, the temperature of the preheated fluid, and the temperature of the wall separating the discharged fumes from the medium in the chamber.

Abstract: The invention relates to a process and an apparatus for producing an olefin-containing feed stream for a steam reforming plant. According to the invention, the olefin-containing hydrocarbon starting material is for this purpose heated, vaporized and catalytically hydrogenated. The hydrogenation product stream obtained is separated in a separation apparatus into a gaseous reforming feed stream, which is fed to a steam reforming plant, and a gaseous recycle stream. Here, the entry temperature of the hydrogenation input stream into the hydrogenation reactor is regulated via the degree to which it is heated and/or via the size of the recycle stream. Safe operation of the hydrogenation reactor over a wide range of olefin contents in the hydrocarbon feed is made possible in this way.

Abstract: In a process for the combined production of a) a hydrogen-enriched gas and a carbon monoxide-enriched gas and/or b) a mixture of hydrogen and carbon monoxide by cryogenic distillation and scrubbing, a still liquor is extracted from a scrubbing column and sent to a stripping column, a still liquor is extracted from the stripping column and sent to a separating column for carbon monoxide and methane and a cooling fluid is used at a pressure greater than that of the head of the separating column for cooling at least one fluid extracted at an intermediate level from the scrubbing column.

Abstract: The present invention relates to an online temperature monitoring system and method for a direct air-cooled condenser. A temperature sensor moving system is arranged on the surface of the heat exchange tube bundle of the direct air-cooled condenser, and a temperature sensor is installed on said temperature sensor moving system and moves on a plane parallel to the surface of the heat exchange tube bundle. The data collected by the temperature sensor is uploaded to a connected data processing system. Said system can collect, analyze, store and query data and give an alarm based on the predefined settings. Compared with the distribution of a plurality of monitoring cables in the prior art, the present invention realizes the scanning of a plurality of monitoring points, simplifies the cable distribution, avoids any blind monitoring area, and has flexibility.

Abstract: Furnace operation includes consecutive cycles of a heating step, a stopping step and a restarting step. The fuel and/or the oxidizing agent is preheated upstream of the furnace by indirect exchange with the discharged fumes through a medium passing through a chamber. A first wall separates the fumes from the medium in the chamber. The fuel and/or oxidizing agent is separated from the medium in the chamber by second wall. During restarting, the medium's flow rate Dm is regulated to limit the heating rate of the first wall until it reaches the operational temperature at an end thereof.

Abstract: Method and plant for generating a synthesis gas which consists mainly of carbon monoxide and hydrogen and has been freed of acid gases, proceeding from a hydrocarbonaceous fuel, and air and steam, wherein low-temperature fractionation separates air into an oxygen stream, a tail gas stream and a nitrogen stream, wherein the tail gas stream and the nitrogen stream are at ambient temperature and the nitrogen stream is at elevated pressure, wherein the hydrocarbonaceous fuel, having been mixed with the oxygen stream and steam at elevated temperature and elevated pressure, is converted to a synthesis gas by a method known to those skilled in the art, and wherein acid gas is subsequently separated therefrom by low-temperature absorption in an absorption column, wherein the nitrogen stream generated in the fractionation of air is passed through and simultaneously cooled in an expansion turbine and then used to cool either the absorbent or the coolant circulating in the coolant circuit of the compression refrigeratio

Abstract: A reformer tube for producing synthesis gas by steam reforming of hydrocarbon-containing input gases is proposed where an outer shell tube is divided by means of a separating tray into a reaction chamber and an exit chamber, a dumped bed of a steam-reforming-active solid catalyst is arranged in the reaction chamber, at least one heat exchanger tube is arranged inside the reaction chamber and inside the dumped catalyst bed, whose entry end is in fluid connection with the dumped catalyst bed and whose exit end is in fluid connection with the exit chamber, the exit end of the heat exchanger tube is fed through the separating tray and opens out into a corrosion-protected inner tube which is disposed in the interior of the shell tube and is in fluid connection with a collection conduit for the synthesis gas product, and a gas-permeable thermal insulation layer is arranged between the inner wall of the shell tube and the outer wall of the inner tube.

Abstract: The invention relates to a process and an apparatus for producing an olefin-containing feed stream for a steam reforming plant. According to certain embodiments of the invention, the olefin-containing hydrocarbon starting material is for this purpose vaporized and catalytically hydrogenated. The hydrogenation product stream obtained is separated into a gaseous reforming feed stream, which is fed to a steam reforming plant, and a gaseous recycle stream. As a result of the cooling according to the invention of the gaseous recycle stream down to at least partial condensation thereof and the separate recirculation of the gaseous partial recycle stream and of the liquid partial recycle stream, the procurement of a large and complicated circulation compressor is avoided and electric energy for operating this compressor is saved.

Abstract: The invention relates to a method for constructing or altering a matter- and/or heat-exchange device, said mass- and/or heat-exchange device comprising an assembly of at least one first and one second stackable modular elements (A, B, C, D, E, F, G, H, I, J, K, L), in which the first element is secured over the second element or the second element is secured below the first element in a sealed manner, such that a fluid can flow from the body of the first element to the body of the second element and/or from the body of the second element to the body of the first element.