Abstract: The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.

Abstract: The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space. Electron optics having at least two electrodes are disposed between the filament and the ionization space.

Abstract: A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: A vacuum pump includes a housing having an inlet and an outlet, at least one rotor arranged in the housing configured to convey a gaseous medium from the inlet to the outlet, a motor configured to rotate the rotor, a control device connected to the motor configured to control the motor, and at least one sensor connected to the control device. The at least one sensor is configured to sense at least one operating parameter of the vacuum pump. The control device comprises a correlation module. The correlation module is configured to correlate the sensed at least one operating parameter with at least one critical parameter. The motor is controlled on the basis of the at least one critical parameter.

Abstract: The invention concerns an ion trap, including a first ring-shaped end cap electrode and a second ring-shaped end cap electrode, between which is formed a ring-shaped ion storage cell, as well as a plurality of radially inner disk-shaped ring electrodes and a plurality of radially outer disk-shaped ring electrodes, which delimit the ring-shaped ion storage cell. The invention also relates to a mass spectrometer that has such an ion trap as well as a control device that is designed to actuate the disk-shaped ring electrodes and the end cap electrodes for the storage, selection, excitation and/or detection of ions in the ring-shaped ion storage cell.

Abstract: A mass spectrometer includes an ion trap, which has an interior for storing ions, a signal generator, which is connected to an electrode of the ion trap, which delimits the interior, for coupling in a voltage signal, in particular a radiofrequency voltage signal, and an ionization device for ionizing a gas to be ionized and supplied to the interior. The ionization device is connected to the signal generator in order to use the voltage signal (URF, UStim1, Ustim2) of the signal generator, which is coupled into the electrode, for generating ions.

Abstract: The invention relates to a mass spectrometer for analysing a gas by mass spectrometry, comprising: a controllable inlet system for pulsed feeding of the gas to be analysed from a process region outside the mass spectrometer into an ionisation region, an ionisation device for ionising the gas to be analysed in the ionisation region, an ion transfer device for transferring the ionised gas from a ionisation region via an ion transfer region into an analysis region, and an analyser for detecting the ionised gas in the analysis region. The invention further relates to an associated method for mass spectrometrically analysing a gas.

Abstract: A processing chamber is connected to a lock chamber. For evacuating the lock chamber and/or the processing chamber a vacuum pump system is provided. The latter comprises a vacuum pump equipment having at least one vacuum pump. Further, the vacuum pump system comprises a valve device for connection to the lock chamber as well as a controller. For noise reduction, a cyclically occurring operating parameter is determined by means of the controller. From said parameter it is determined at which point in time the valve is opened such that temporally before the opening of the valve the rotational speed of at least one of the vacuum pumps can be reduced. This results in a considerable noise reduction at continuing good pump-out times.

Abstract: A multi-stage rotary vane pump comprising at least two rotor elements. The rotor elements are supported by a rotor shaft. The rotor elements and the rotor shaft are in the form of a single piece.

Abstract: A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion (28) to the outer portion. Each spring arm comprises at least one hollow space.

Abstract: A vacuum pump is provided that includes rotor elements arranged in a suction chamber. An outlet duct is connected to an exhaust pipe. For the purpose of silencing, sound expansion spaces are provided in the outlet duct, which are integrated into the pump housing. Alternatively or in addition to these sound expansion spaces, sound expansion spaces may be provided in an inlet duct which is used for the inlet of gas ballast, said sound expansion spaces being preferably likewise integrated into the pump housing.

Abstract: A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Abstract: A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Abstract: A vacuum pump system is provided that includes a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: A vacuum pump comprises rotor elements arranged in a suction chamber. An outlet duct is connected to an exhaust pipe. For the purpose of silencing, sound expansion spaces are provided in the outlet duct, which are integrated into the pump housing. Alternatively or in addition to these sound expansion spaces, sound expansion spaces may be provided in an inlet duct which is used for the inlet of gas ballast, said sound expansion spaces being preferably likewise integrated into the pump housing.

Abstract: A multistage Roots pump comprise a plurality of pump chambers in a pump housing. They constitute respective pump stages, wherein each pump stage comprises two two-toothed rotary pistons. The pump stages are separated from each other by partition walls. In the partition walls essentially radially extending connecting ducts are arranged. The connecting ducts are connected with an inflow chamber whose inflow opening has a larger cross-section than the connecting ducts.

Abstract: A connection device serves for connecting a first tube end, which can be connected to a vacuum pump, to a second tube end which can be connected to a chamber to be evacuated. To this end, the connection element has a tube element for fluidically connecting the vacuum pump to the chamber to be evacuated. The tube element is connected on each side via a connection element to the respective tube end. At least one of the two connection elements is configured here in such a way that it is exclusively suitable for transmitting torques. Furthermore, a decoupling element is provided for mechanically decoupling the at least one connection element, which is exclusively suitable for transmitting torques, from the corresponding tube end.

Abstract: Dual- or multi-shaft vacuum pump comprising an engine, a first shaft and at least one second shaft, wherein the first shaft and the second shaft are synchronously driven by the motor via a common drive belt. The first shaft has a pumping element and the second shaft likewise has a pumping element which cooperates with the pumping element of the first shaft in order to convey a gaseous medium from an inlet to an outlet. The first shaft has a first emergency running gear and the second shaft likewise has a second emergency running gear which meshes with the first emergency running gear.

Abstract: A method for analyzing a gas by mass spectrometry includes exciting ions of the gas to be analyzed in an FT ion trap, and recording a first frequency spectrum in a first measurement time interval during or after the excitation of the ions. The first frequency spectrum contains ion frequencies of the excited ions and interference frequencies. The method also includes recording a second frequency spectrum in a second measurement time interval. The second frequency spectrum contains the interference frequencies, but not the ion frequencies of the first frequency spectrum. The method further includes comparing the first frequency spectrum with the second frequency spectrum to identify the interference frequencies in the first frequency spectrum. The disclosure also relates to a mass spectrometer which is suitable for carrying out the method for analyzing the gas by mass spectrometry.