Abstract: A vacuum pump system having at least two chambers which are arranged in series. A turbomolecular pump is connected to the second or final chamber, and a multistage Roots pump is connected to the first chamber, wherein the outlet of the first chamber is connected to an intermediate inlet of the multistage vacuum pump, and an outlet of the turbomolecular pump is connected to a main inlet of the multistage vacuum pump.

Abstract: A device for storing kinetic energy, which has a flywheel in a housing. The flywheel is mounted in the housing via a shaft. A motor-generator unit is provided for storing energy as well as for energy recovery. In order to improve efficiency, a vacuum pump for evacuating the interior is arranged in the housing. The vacuum pump is disposed on the shaft.

Abstract: A vacuum pump drive comprising at least one electric motor which is connected to the rotor of a vacuum pump via a drive shaft, a frequency converter which is electrically connected to the motor and which supplies a motor input voltage to the motor, and a switchover device with at least one electric switch. The switchover device is designed to connect the motor windings in a star or delta shape depending on the switching position of the switch in order to change the motor characteristic curve. The vacuum pump drive also comprises a measuring device with sensors for detecting physical operating variables of the vacuum pump and a controller which is electrically or optically connected to the switchover device and the measuring device and which is designed to actuate the at least one switch on the basis of the measured value of the operating variable of the vacuum pump in order to produce the star-delta switchover.

Abstract: A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture.

Abstract: A vacuum pump comprises stator elements in a pump housing. The stator elements cooperate with rotor elements. The rotor elements are held by a rotor shaft, wherein the rotor shaft is mounted in the pump housing via bearing elements. The bearing element is surrounded by a supporting element, wherein the supporting element comprises an inner portion, an outer portion and a plurality of spring arms connecting the inner portion (28) to the outer portion. Each spring arm comprises at least one hollow space.

Abstract: A dry vacuum pump, comprising a pump housing, which forms a plurality of suction chambers, wherein rotor elements are arranged in the suction chambers, in order to convey a pump medium from a high-vacuum-side inlet to an outlet. At least one rotor element is arranged in each suction chamber. The rotor elements are connected to a rotor shaft. The rotor shaft is supported by bearings, wherein a high-vacuum-side bearing is arranged in a cut-out. A sealing device is arranged between the high-vacuum-side bearing and at least one suction chamber adjacent to the high-vacuum-side bearing. The cut-out is connected, by means of a first channel, to a region of the dry vacuum pump in which there is a higher pressure than in at least one suction chamber adjacent to the high-vacuum-side bearing.

Abstract: A dry-compressing compressor comprises two screw rotors in a housing defining a suction chamber. At a compressor inlet of the compressor preferably atmospheric pressure prevails and at a compressor outlet of the compressor preferably a pressure of more than 2 bars (absolute) prevails. For each screw rotor at least one displacement element including a helical recess defining a plurality of windings is provided. The at least one displacement element per screw rotor has a single-pass asymmetrical profile.

Abstract: A vacuum pump system comprising a main vacuum pump that is connected to a chamber that is to be evacuated. An auxiliary pump is connected to an outlet of the main vacuum pump. Furthermore, a sealing gas supply device is connected to the main vacuum pump. The sealing gas supply device is switched on and off with the aid of a control device as a function of a predetermined control variable. Additionally, a method for controlling the vacuum pump system.

Abstract: A vacuum pump system for evacuating a chamber, in particular a lock or a process chamber, is provided that includes a main vacuum pump preferably configured as a screw pump. An inlet of the main vacuum pump is connected with the chamber to be evacuated. As seen in the feeding direction of the main vacuum pump an auxiliary vacuum pump is arranged which is in particular a Roots pump. An outlet area of the main vacuum pump is connected with a main outlet on the one hand and an inlet of the auxiliary vacuum pump on the other hand. Further, an outlet of the auxiliary vacuum pump is connected with the main outlet.

Abstract: A vacuum-pump rotor, in particular a vacuum-pump rotor for a turbomolecular pump, having a hub element for connecting to a rotor shaft or for forming a rotor shaft. A plurality of rotor blades are connected to the hub element. In order to form a vacuum-pump rotor by means of which a high tip speed can be achieved, the hub element and/or the rotor blades are produced of a plurality of material layers.

Abstract: A vacuum pump screw rotor, comprising at least two helical displacer elements on a rotor shaft. The at least two displacer elements have different pitches, but the pitches of each displacer element are constant. Furthermore, the displacer elements each have a helical recess, each having a contour that remains the same over its entire length. Hereby, a suction-side displacer element has a recess having an asymmetric contour, and a pressure-side displacer element has a recess having a symmetrical contour.

Abstract: A screw vacuum pump comprises a housing forming a pumping chamber, wherein the housing is made of aluminum or an aluminum alloy. Further provided are two screw rotors arranged in the pumping chamber, each screw rotor comprising at least one displacer element having a helical recess for forming a plurality of windings, wherein the at least one displacer element is made of aluminum or an aluminum alloy. Between the region in which prevail 5% to 30% of the outlet pressure and a pressure-side end of the rotor (pump outlet), at least six, particularly at least eight, and with particular preference at least ten windings are provided.

Abstract: A diffusion pump is provided that includes a housing and a boiling chamber connected to the housing. The boiling chamber has a heating element. The housing has a nozzle that is connected to the boiling chamber. The housing also has a condenser is arranged at an internal surface, where the condenser has a cooling system. The boiling chamber is thermally isolated from the condenser by an isolator. The cooling system is at least partially a water cooling system and is connected to the heating element via a heat pump such that heat from the condenser is supplied to the heating element.

Abstract: A vacuum pump comprises a rotor shaft, which bears one or more rotor elements. The rotor shaft is driven by an electrical driver. A stator is arranged between the rotor elements. The rotor shaft is supported by bearings. The highly heat-generating components such as the driver and the stator are connected to a second housing part in particular by means of a support member. Heat-sensitive components such as the bearing are supported by means of a separate first housing part. The two housing parts can be kept at different temperatures, for example by means of separate cooling devices. Thus, the operating temperature of the in particular pressure-side bearing can be reduced, and therefore the service life can be extended.

Abstract: A rotor disc for a vacuum pump, in particular a turbo molecular pump, having an inner ring. The inner ring is connected to a plurality of blade elements extending radially outward. The inner ring has at least one expansion joint. For assembly, the inner ring can be surrounded by a retaining ring and arranged on a hollow cylindrical carrier element as applicable.

Abstract: A leak detection device has a test chamber which, for evacuation, is connected to an evacuation pump device. Moreover, the test chamber is connected by a test gas line to a test gas pump device. The test gas pump device is connected, at its main inlet, to a test gas detector, such that a detection of test gas can take place using the counter-current principle. A valve device is arranged in the test gas line. This valve device has a test gas chamber for temporary storage of test gas removed from the test chamber.