Patents Assigned to Leybold Heraeus GmbH & Co. KG
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Patent number: 4121430Abstract: A cryopump having a generally axially symmetrical housing provided at one end with an entrance opening defined by a plane for passage of molecules of the gas to be pumped and plates defining condensation surfaces arranged to be brought to low temperature for condensation of molecules of the gas to be pumped, and a thermal radiation shield disposed in the region of the entrance opening, with the condensation surfaces being oriented substantially at right angles to the plane of the entrance opening and the radiation shield being composed of a plurality of elongate metal strips so positioned that their longitudinal axes are parallel to the condensation surfaces.Type: GrantFiled: May 4, 1977Date of Patent: October 24, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Werner Bachler, Hans-Joachim Forth, Rudiger Frank
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Patent number: 4115653Abstract: Electron beam vaporizer having a beam generator with a heated cathode, focusing means and electromagnetic deflection means for the deflection and guidance of the beam. An exchangeable, fluid-cooled and preferably rotatable vaporizing crucible associated with the beam generator and having at least one depression in the base thereof for at least one substance to be vaporized. The crucible has passages for the flow of a coolant beneath the depression and the base of the vaporizing crucible is constructed as separate components having a common contact surface so that a removable crucible head is formed. The crucible base is closed off from its environment with regard to the flow passages.Type: GrantFiled: October 4, 1976Date of Patent: September 19, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Gerhard Kienel, Helmut Petersein
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Patent number: 4105273Abstract: An electric plug assembly is formed of a plug having a handle part and a contact part projecting from the handle part and a socket adapted to receive, by insertion, the contact part of the plug. The socket has electric contacts arranged to engage the contact part of the plug in the inserted state of the plug. There are further provided longitudinal, electrically insulating spaced ribs forming part of the plug and constituting a cage surrounding the contact part of the plug and electrically insulating, spaced protrusions arranged in a circular array and forming part of the socket. The protrusions are in an interleaving relationship with the ribs in the inserted state of the plug.Type: GrantFiled: August 22, 1977Date of Patent: August 8, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Siegfried Henschke, Albert Lindberg
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Patent number: 4101221Abstract: A process and apparatus for the photo-optical measurement of the absorption behavior of solid, liquid and gaseous media. The analysis medium and a comparison medium are exposed to two light beams. The light beams are broken up by a chopper means into a periodical sequence of light pulses and the measured difference of the beam attenuations in the analysis medium and comparison medium is evaluated in a circuit which is adjustable with regard to the intensity of the radiation from the optical light source and the sensitivity of the light receiver. The light pulses are divided by defined variation of their intensity into two different pulse series of which one series comprises measuring light pulses and the other series comprises control pulses.Type: GrantFiled: March 23, 1977Date of Patent: July 18, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Gunter Schunck, Albert Randwo
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Patent number: 4078897Abstract: Apparatus for producing monocrystals by potless zone melting, in which the monocrystal, setting out from a seed crystal, passes through a neck and a transitional zone into the main part of the monocrystal. A chamber is provided for the formation of a vacuum or a protective gas atmosphere plus a heating device for the production of the melting heat, driving means for the mechanical movements necessary for the crystal formation, a mounting for the seed crystal, and a supporting device which is applicable to the monocrystal beyond the neck, and a plurality of gripping bodies distributed about the circumference and applicable to the monocrystal radially on its substantially cylindrical surface the gripping bodies are disposed such that they first perform a radial approach to the monocrystal until a virtually force-free contact is made therewith, adapting themselves to the surface geometry and position of the monocrystal, whereupon the gripping force is increased and the gripping bodies are locked.Type: GrantFiled: April 12, 1976Date of Patent: March 14, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Karl Jericho, Joachim Floymayr, Uwe Reimpell, Dieter Drechsel
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Patent number: 4075414Abstract: The invention relates to a system for regulating the depth of immersion of melting electrodes in electrical slag remelting furnaces, consisting of an apparatus for the detection of the resistance and for changing this resistance upon the spatial displacement of the end of the electrode within the slag layer, a signal corresponding to the resistance being relayed to a regulating system for the electrode drive.Type: GrantFiled: November 26, 1975Date of Patent: February 21, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Friedrich Werner Thomas
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Patent number: 4067697Abstract: Device for introducing a specimen into and withdrawing the same from the interior of a chamber sealed from the surrounding environment. The device includes a test bar slidably and sealingly projecting through an opening in the chamber. The test bar has a first length portion which includes a specimen-supporting arrangement and which has a part that is in a sealing relationship with the opening in a first end position of the test bar in which the specimen-supporting arrangement is situated inside the chamber. The test bar further has a second length portion which has a part that is in a sealing relationship with the opening in a second end position of the test bar in which the specimen-supporting arrangement is situated externally of the chamber. A releasable coupling device detachably connects the two length portions of the test bar to one another.Type: GrantFiled: March 12, 1976Date of Patent: January 10, 1978Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Hans-Dietrich Polaschegg
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Patent number: 4061871Abstract: Electron gun for heating, melting and vaporizing purposes having an electron-emitting cathode, at least one beam-forming electrode associated with the cathode, an accelerating anode, an electromagnetic lens and a beam guiding-tube extending in the direction of the beam path and surrounded by an electromagnetic deflection system for the x-axis deflection and one for the y-axis deflection. An envelope tube is disposed outside of the deflection systems and is joined at its extremity to the end of the beam guiding tube by an end plate through which the pole shoes of the x-axis deflection system are brought. The end plate is inclined towards the cathode beginning from the pole shoes of the x-axis deflection system.Type: GrantFiled: April 29, 1976Date of Patent: December 6, 1977Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Peter Sommerkamp, Walter Heil
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Patent number: 4055984Abstract: A device adapted to detecting leaks in an article having readily deformable walls has conventional arrangements for performing a leak detection by overpressure or by vacuum and has a deformable backup wall for engagement with the walls of the article. The backup wall is, on its face oriented towards the article, so configured that between the backup wall and the article there is obtained a coherent fluidtight space which may be evacuated.Type: GrantFiled: July 14, 1976Date of Patent: November 1, 1977Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Joachim Marx
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Patent number: 4049039Abstract: An arrangement for the manufacture of solid forging blocks with manipulator pins in which an electro-slag remelt process is used for filling an ingot having a vertical bore hole. At least one consumable electrode is used, and the ingot with the vertical bore is placed on a block table having at least one power connection in the region of the block table and flush with a depression for slag start material. The filling of the core zone is started with this depression having a depth of substantially at least 25% of the diameter of the block bore. A movable starting disk is applied as a lower boundary of the depression, and the slag start material is placed on top of the disk. After formation of liquid slag, the depression is exclusively filled from material of the consumable electrode. The power connection to the starting disk is fed along during the entire remelt process.Type: GrantFiled: October 15, 1976Date of Patent: September 20, 1977Assignee: Leybold-Heraeus GmbH & Co. KgInventors: Helmut Theodor Grof, Jochen Schumann, Anton Wamser, Rainer Schumann, Werner Friedrich Thomas
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Patent number: 4045707Abstract: System for the power control of high voltage electron beam generators having a cathode and a control electrode associated with the cathode. The system is provided with a high voltage isolation transformer with primary and secondary winding for supplying the control electrode with a control voltage. A system precedes the isolation transformer on the primary side and is adapted to generate square wave pulses susceptible of amplitude modulation. The pulse generator is designed such that the pulses are square wave impulses symmetrical with the null line. The isolation transformer is provided with a tertiary winding on the primary side and the primary winding receives input from an amplifier whose input is connected with the output voltage of the tertiary winding. A rectifier bridge is connected to the secondary winding.Type: GrantFiled: March 29, 1976Date of Patent: August 30, 1977Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Thorn Gernot, Thomas Friedric-Wilhelm
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Patent number: 4024291Abstract: An arrangement for regulating the vapor deposited layer build-up in the production of deposited optically active thin layers on substrates in a vacuum. The optical characteristics of the deposited layer are measured continuously and the measurements are converted into proportional electrical signals. These signals are differentiated twice, with the second derivative serving to provide the zero-axis crossings of the signals. The vapor deposition process is interrupted dependent on the zero-axis crossings.Type: GrantFiled: September 21, 1976Date of Patent: May 17, 1977Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Ingo Wilmanns
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Patent number: 4023920Abstract: A turbomolecular vacuum pump has a housing, a vertically oriented hollow pump rotor situated in the housing, and a vertically upwardly oriented stub shaft affixed to the housing and extending into the hollow pump rotor. The pump rotor is supported on the stub shaft by a magnetic axial bearing and at least one magnetic radial bearing, all disposed in the space surrounded by the hollow pump rotor.Type: GrantFiled: September 26, 1974Date of Patent: May 17, 1977Assignees: Leybold-Heraeus GmbH & Co. KG, Societe de Propulsion-S.E.P.Inventors: Werner Bachler, Rudiger Frank, Helmut Habermann, Maurice Brunet
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Patent number: 4024376Abstract: A measuring device for determining the rate of evaporation of materials in vacuum systems, particularly for producing thin layers of precise thickness on substrates. An electrically conducting housing has an opening which can be aligned with the material to be evaporated. An electrode located within the housing and insulated therefrom, is connected to an evaluation device for the evaporation rate. The electrode is located outside the line of sight through the opening of the housing, and the electrode has a positive potential with respect to the housing. The current flowing between the housing and the electrode is applied to the evaluation device.Type: GrantFiled: June 13, 1975Date of Patent: May 17, 1977Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Karl-Georg Redel
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Patent number: 4020352Abstract: A system for irradiating flowable material has an irradiation chamber; inlet and outlet conduits for introducing the flowable material into and discharging it from the irradiation chamber. The latter includes a spiral passage for guiding the flowable material in a spiral path from the inlet conduit to the outlet conduit. A radiation source is supported within the irradiation chamber in the zone of the spiral passage for irradiating the material flowing therethrough.Type: GrantFiled: July 10, 1975Date of Patent: April 26, 1977Assignee: Leybold-Heraeus GmbH & Co. KGInventors: Peter Mahler, Gerhard Frey, Gotthard Lerch
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Patent number: 3984088Abstract: A vaporizing crucible for vapor depositing systems, especially for electron beam heating, includes a plurality of side-by-side segments held in contact with one another by an adjustable compression device. The individual segments have between them layers of a resilient, electrically conductive material which forms a joint between adjacent segments. The segments are surrounded by a frame in which the adjustable compression device is positioned for the transfer of current and compressing the segments. A layer of resilient conductive material can also be positioned between the compression device and the lateral surfaces of the segments, extending perpendicular to the joints. The frame can also include a hollow base on which the segments rest. A layer of resilient, electrically conductive material can be positioned between the segments and the hollow base.Type: GrantFiled: October 6, 1975Date of Patent: October 5, 1976Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Peter Sommerkamp
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Patent number: 3976908Abstract: An electron beam generator with a linear cathode which has at least one end clamped to enable the cathode to move longitudinally. A beam forming electrode is at the same potential as the cathode and has an exit opening for the electron beam. The beam-forming electrode is provided with connection means to supply beam and heater voltage to the cathode. The clamps used to clamp the cathode, are connection contacts for the ends of the cathode and are outside of the contact points in the emission area of the cathode.Type: GrantFiled: February 5, 1975Date of Patent: August 24, 1976Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Karl Georg Redel
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Patent number: 3969314Abstract: In the formation of mixtures of plastic and fillers, the stability of the mixture is improved by preliminarily intensively predrying the fillers and then mixing the plastic and fillers together while maintaining the mixture completely free of moisture.Type: GrantFiled: July 3, 1974Date of Patent: July 13, 1976Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Hans Grigull
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Patent number: 3969042Abstract: A turbomolecular vacuum pump has a stator, a rotor having a vertical axis of rotation and disposed in the stator; a drive motor for rotating the rotor; a downwardly open, axially extending chamber in the rotor; a vertically upwardly oriented, stationarily supported stub shaft projecting into the rotor chamber; and axial, as well as radial gas bearings disposed within the rotor chamber for generating gas cushions between the rotor and the stub shaft.Type: GrantFiled: November 25, 1974Date of Patent: July 13, 1976Assignee: Leybold-Heraeus GmbH & Co. KGInventor: Werner Bachler
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Patent number: 3938582Abstract: An arrangement for the continuous manufacture of metal ingots by progressive crystallization below a slag layer in a mold open at the bottom. Below the bottom edge of the mold, there are distributed along the periphery of the mold, several blocking elements moveable in the direction of the ingot surface. The edges and surfaces facing the ingot are adapted to the shape of the ingot cross section, and the blocking elements may be sectors of an annular ring.Type: GrantFiled: September 12, 1974Date of Patent: February 17, 1976Assignee: Leybold Heraeus GmbH & Co. KGInventors: Wolfgang Schwartz-Domke, Helmut Grof, Anton Wamser