Abstract: A vaporization arrangement for coating substrates disposed in an areal region, or past through an areal region, comprises a rectangular vaporization crucible with a crucible rim, as well as plurality of electron guns each having an X-Y deflecting system. The electron guns are disposed on one side of the drucible axis separately from the crucible in such a manner that their beam axis extend parallel to one another and are directed on a plane passing vertically through the longitudinal axis of the crucible. The arrangement further comprises means for deflecting the electron means onto the surface of the contents of the crucible. Such means include an alternating serial arrangement of linear coils, on the side of the crucible opposite to the electron guns, and pole plates disposed both between the linear coils and at their ends.

Abstract: The invention concerns a converter (2) provided with GTO thyristors the frequency and characteristic shape of its output voltage (U.sub.A) being constrained by a load (3). The frequency of the converter (2) is matched to the constrained output voltage (U.sub.A) with the aid of a regulating circuit (4). Non-simultaneously switched GTO thyristors are switched on and off in a predetermined timed relation to each other (FIG. 3).

Abstract: The invention relates to a turbomolecular vacuum pump (1) with a rotor (6) and at least one antifriction bearing (17) for the rotor, the stationary ring (19) of the antifriction bearing being seated on the wall of a sleeve (21) which in turn is supported through at least two O-rings (26, 27) made from an elastic material on a casing section (13) of the pump. To improve the heat flow from the sleeve (21) to the casing (13) of the pump, the annular space (29) formed by two seal rings (26, 27), the sleeve (21) and the pump casing (13) is filled with a medium (31) promoting heat flow from the sleeve to the adjacent part of the casing.

Abstract: An optical partial pressure gas analyzer employs an electron beam to excite the outer electrons of gas atoms or molecules, and one or more photomultiplier tubes or other similar detectors to detect wavelengths of photons characteristic of the decay of the outer electrons of one or more species of gas molecules. The photomultiplier tubes have a viewing direction substantially at right angles to the electron beam. A Faraday trap or similar device is employed to avoid secondary electron generation. Thin-film interference filters are favorably employed to pass a specific characteristic wavelength of the desired species, and to reject other wavelengths. An electromechanical filter changer permits each photomultiplier tube to analyze two or more gasses alternately.

Abstract: Electron beam welding apparatus, suitable as a mobile welding apparatus, having a solid dielectric insulator for the high voltage electrical conductors and also having liquid coolants for cooling the conductors and the insulator which are heated by the cathode. The apparatus also includes a valve for sealing the cathode and the anode in an outer housing in one position of the valve and for allowing the passage therethrough of an electron beam in another position of the valve and for providing precision television optical viewing of the welded seam. The apparatus also includes high-voltage connecting apparatus including a plug having a resilient tapered insulating member and a socket in the solid dielectric insulator, and having the shape of a tapered opening for the plug for exerting laterally compressive forces on the plug as the plug is inserted into the socket to avoid trapping air in the socket.

Abstract: Process and apparatus for measuring the difference in the concentration of paramagnetic components between an unknown gas and a standard gas by periodically alternate entry of both gases into the gap chamber (2) of a magnetic circuit (1) and by detecting the periodical variations of the magnetic flux caused by the gases in the magnetic circuit.In this process,(a) the two gases are brought into the gap chamber (2) from opposite directions through gas lines (5, 6),(b) the boundary zone between the two gases perpendicular to the magnetic lines of force is moved back and forth in the gap chamber periodically by an alternating flow generator (7), and(c) constantly a portion of the gas mixture is made to escape through an exhaust line (9) from the region of the gap chamber (2) by the inflowing of at least one of the two gases.

Abstract: Arrangement for electrically measuring coating thickness on travelling webs in vacuum deposition apparatus. A plurality of sensors are arranged with respect to a roller around which the web runs each with a spatially limited measuring region. These produce signals which represent a measure for the coating thickness. The signals can be indicated by an evaluating circuit. To avoid a falsification of the measuring signals as a result of the tendency of the travelling web to flutter, according to the invention the sensors (3,4,5) are arranged in the roller (1) against its surface and are distributed lengthwise of the roller. The sensors are connected to the evaluating circuit (7) by a transfer device (28). Preferably, the sensors rotate with the roller.

Abstract: An electron-beam welding apparatus includes a vacuum chamber and a gantry entirely within the chamber for adjustably supporting an electron-beam welding gun with x, y and z coordinates of adjustability with respect to mutually perpendicular x-, y- and z-axes within the chamber. The gantry includes apparatus telescoping along the z-axis for adjustably supporting the electron-beam welding gun with respect to the z-axis.

Abstract: Cell for gas analyzers, having a casing with a cylindrical bore which is divided by an axial wall of separation into two chambers. The one chamber serves for the gas being measured and the other for a reference medium. The chambers terminate in windows at both ends. To make such a cell resistant to pressure and corrosion, the reference medium is constituted by a transparent, glass-clear material which is disposed in the cylindrical bore. At each end of the cylindrical bore there is provided an annular shoulder for the support of an annular gasket and a window. The windows are held by annular compression flanges and annular gaskets.

Abstract: A multi-stage valve having a valve housing containing an inlet port and an outlet port that communicate through means of an elongated chamber formed in the housing. An outer sealing unit is mounted in the chamber and is adapted to close in sealing contact against one of the ports. A control orifice is passed through the first sealing unit to restrict the flow through the port when the unit is sealed thereagainst. A second inner sealing unit is mounted in the chamber behind the outer unit and is arranged to close thereagainst to seal the orifice. The two units are coupled by a lost motion mechanism which permits the sealing units to close in sequence between a fully closed position, an intermediate position wherein the flow through the valve is restricted by the orifice and a fully opened position wherein the flow through the valve is unrestricted.

Abstract: An apparatus for the performance of the SNMS process, having a separate ion source, a sample holder, a system for the production of a radio-frequency plasma and a mass analyzer, in which the ion source and the mass analyzer are disposed side by side on the same side of the chamber provided for the radio-frequency plasma, and in which the sample mounted on the sample holder is situated within the chamber provided for the radio-frequency plasma. This apparatus can be used not only for the performance of the two kinds of SNMS operation (DMB and SBM) but also secondary ion mass spectroscopy (SIMS) under optimum spatial conditions.

Abstract: A spectrophotometer obtains transmitted, reflected, or radiated light from at least two measuring points on at least one object and a spectroscopic light disperser disperses the obtained light spectroscopically to measuring cells for electrically indicating the spectrum of the obtained light, whereby the spectrum may be analyzed for indicating optical properties of the object at the measuring point from which the light was obtained. At least one fibre-glass cable respectively carries the light obtained at each measuring point to the spectroscopic light disperser. The ends of the fibres of each cable at the spectroscopic light dispersion are arranged in a row and the row of fibre ends of each cable are parallel to each other in a matrix of fibre ends. At least one light stop allows light from only one fibre-glass cable at a time to carry the light to the spectroscopic light disperser.

Abstract: A method for producing amorphous carbon coatings on substrates by degrading a gaseous hydrocarbon compound in an ionized gas atmosphere within a reaction chamber. An electromagnetic alternating field is used for the excitation of the plasma. To achieve the object of increasing the deposition rate and permitting substrates even of great surface area to be uniformly coated, the frequency of the electromagnetic alternating field is selected in the microwave region (915 to 2,540 MHz). Furthermore, the microwave energy is put into the gaseous atmosphere by means of at least one ladder-type waveguide situated outside of the reaction chamber. The invention also relates to a substance provided with an amorphous carbon coating, in which an adhesion-mediating coating consisting of a polymer from the group of the siloxanes or silazanes is provided between the substrate and the amorphous carbon coating.

Abstract: Disclosed is an induction furnace with a furnace bottom comprising a crucible, an induction winding and a gas-tight casing, also having a lid, for the furnace bottom, which lid has at least one gas connection, a charging valve and a pouring arrangement. The furnace bottom and lid are connected by a flange joint and tiltably mounted by means of a picot bearing and a drive about a tipping axis in a furnace stand. The pivot bearing is secured to the lid, the tipping mechanism engages the lid, and the furnace bottom is separable from the lid by unfastening the flange joint, the lid remaining in the furnace stand.

Abstract: The invention relates to a cathode system for sputtering apparatus which includes a target plate of ferromagnetic material. A magnet system is situated behind the target plate and has opposed poles positioned so that at least a portion of the lines of force emerging from the poles passes out through the target and returns thereto. The target is placed on a floor which includes strips of ferromagnetic material in the area of the poles of the magnet system. These strips close the magnetic circuit between the magnet system and the target plate. The remainder of the floor is made of nonmagnetic material.

Abstract: In vacuum depositing apparatus, especially for the manufacture of magnetic tapes, a substrate holder is disposed in the form of a cooling cylinder, and in the path of the vapor stream there is a mask for the purpose of geometrically restricting the vapor stream. In order to prevent any condensation of vaporized material in solid form, the surface of the mask facing the vapor stream is not aligned horizontally, and its lowermost edge lies within the projected surface of the crucible opening. The surface of the mask can be heated up to a temperature that is between the vaporizing temperature and the solidification temperature of the vaporized material. In an especially advantageous manner, the surface of the mask is formed by tiles of a ceramic material.

Abstract: A magnetic valve for use with vacuum which has an improved junction between the stem and the valve disk which prevents detritus from impairing the seal of the valve. The valve has a magnetic drive coil outside a vacuum tight casing and an armature within the casing to which a valve stem is connected. A junction between the valve stem and the valve disk includes a head on one of the two components and a beaded margin enveloping the head on the other of the two components. An annular gasket is disposed between the head and the beaded margin.

Abstract: A friction pump (molecular pump, turbomolecular pump) has pumping surfaces which include surface areas which face upstream as well as surface areas which face downstream with respect to the pumping direction. In at least a portion of the pumping surfaces, surface areas of different roughness are present, such that the roughness of the surface areas facing downstream with respect to the pumping direction is greater than the roughness of the surface areas facing upstream with respect to the pumping direction.

Abstract: A method for the processing of values measured in a gas friction vacuum meter, in which the pressure is determined by the drag on a magnetically suspended free ball, by forming a first time value t.sub.n-1 by measuring the time required for N/2 periods of revolution of the ball, and a second time value t.sub.n by the immediately following measurement of the time required for another N/2 periods of revolution of the ball, determining a pressure value by comparing the two times values, repeating this pressure value determination of two time values after each period of rotation for the same number N of periods of revolution of the ball to a total of z determinations, and displaying the average of the pressure value determined Z times. To be able to determine the pressure with optimum measurement times and uncertainties of measurement, the ratio of N to Z is selected at approximately 4:1.

Abstract: A readily mountable metal seal member is made from a profiled metal bar having a cross section approximately in the shape of a keyhole, the thicker portion of which forms the sealing bead of the seal member and the thinner portion serves to mount it in the joint to be sealed. Sections of the thinner portion may be removed over regions to be curved.