Abstract: An optical substrate guided relay (300) includes an optical substrate (302) having at least one major face (411), an output coupler (303) coupled to a major face (411,412), and an input coupler (301) coupled to a major face (411,412). The input coupler (301) is configured to reflect, via internal layers (414), portions of received light to the optical substrate 302. The input coupler (301) includes either one or more internal layers (414) or a contoured face (1040) with surfaces configured as reflectors that expand the received light and direct it into the optical substrate (302). The output coupler (303) expands a pupil of light in one direction and directs the expanded light away from the optical substrate guided relay.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system includes least mean square (LMS) tone adders that determine harmonically related signals that when combined produce a scanning mirror drive signal. An inner loop of the control system compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonically related signals.

Abstract: Briefly, in accordance with one or more embodiments, a dichroic optic having a first side and a second side opposite to the first side, wherein the second side has an optical filter, wherein each of a light beam having a first wavelength, a second wavelength and a third wavelength enter, exit or reflect from the dichroic optic only from at least one of the first or second sides, wherein prior to incidence on the dichroic optic each of the light beams having the first, second and third wavelengths are non-collinear with each other, wherein the light beam having the first wavelength and the light beam having the second wavelength are substantially collinear within the dichroic optic, wherein the optical filter has a response capable of transmitting at least one of the light beam having the first wavelength and the light beam having the second wavelength, while reflecting the light beam having the third wavelength, and wherein the light beam having the first wavelength, the second wavelength, and the third wavel

Abstract: A spatially aware apparatus includes a projector. Projected display contents can change based on the position, motion, or orientation of the apparatus. The apparatus may include gyroscope(s), accelerometer(s), global positioning system (GPS) receiver(s), radio receiver(s), or any other devices or interfaces that detect, or provide information relating to, motion, orientation, or position of the apparatus.

Abstract: Briefly, in accordance with one or more embodiments, a scanned beam display may utilize one or more post-scan optics while at least partially maintaining an infinite focus, or nearly infinite focus, property of the display. The display may comprise a light source to generate a light beam, a scanning platform to generate a raster scan from the light beam projected as a projected image, one or more post-scan optics to at least partially adjust the projected image, and one or more collimating optics to focus the light beam from the light source, the one or more collimating optics having a selected focal length to at least partially provide infinite, or nearly infinite focus, of the projected image at or beyond a selected distance.

Abstract: A stage configuration is provided, wherein a ceramic plate is used as the z-stage body to decrease the use of the metal plates in the conventional configuration, so that the compact structure of the z-stage may decrease the vibrational movements of the z-stage.

Abstract: A 3D imaging system projects a light spot on an object and images the light spot with a 2D image sensor. The position of the light spot within the field of view of the 2D image sensor is used to determine the distance to the object.

Abstract: Apparatuses and methods for scanned beam endoscopes, endoscope tips, and scanned beam imagers are disclosed. In one aspect, a scanned beam endoscope includes an endoscope tip having a scanner, an illumination optical fiber, and at least one light detection element. The illumination optical fiber may be positioned so that a beam emitted from it passes through one of the openings in the scanner. In another aspect, a scanned beam endoscope includes an endoscope tip having a handle substrate that may be attached to the scanner and include one or more vias formed therein for selectively positioning and aligning the illumination optical fiber, detection optical fibers, or both.

Abstract: A method of characterizing the vibrational performance of a charged particle beam microscope system having at least one encoder is disclosed. The encoder is part of a control system for controlling the speed of a stage whereupon a sample is secured for imaging. A plurality of images each corresponding to a specific encoder working frequency are analyzed to generate imaged pattern vibration amplitude information over an imaging time period. The generated imaged pattern vibration amplitude information is then transformed to generate an imaged pattern vibration amplitude information over a range of encoder working frequencies. Information of system vibrational performance is then derived from the encoder working frequency-based vibration amplitude information. As a result, the vibrational performance of the system is characterized to describe the system vibrational behavior in terms of imaged pattern vibration amplitudes at varying working frequencies of the encoder.

Abstract: A lightweight, compact image projection module has a laser package having a common exit port, and a plurality of lasers mounted in the package and operative for emitting a plurality of laser beams of different wavelengths through the common exit port. An optical assembly focuses the laser beams exiting the common exit port, and includes a common focusing lens through which the laser beams pass along respective paths that are in angular misalignment. An optical corrector element in at least one of the paths corrects the misalignment to produce aligned beams. A scanner sweeps the aligned beams in a pattern of scan lines, each scan line having a number of pixels. A controller causes selected pixels to be illuminated, and rendered visible, by the aligned beams to produce the image.

Abstract: A charged particle detector consists of a plurality independent light guide modules assembled together to form a segmented in-lens on-axis annular detector, with a center hole for allowing the primary charged particle beam to pass through. One side of the assembly facing the specimen is coated with or bonded to scintillator material as the charged particle detection surface. Each light guide module is coupled to a photomultiplier tube to allow light signals transmitted through each light guide module to be amplified and processed separately. A charged particle detector is made from a single block of light guide material processed to have a cone shaped circular cutout from one face, terminating on the opposite face to an opening to allow the primary charged particle beam to pass through. The opposite face is coated with or bonded to scintillator material as the charged particle detection surface.

Abstract: A thermal field emission cathode which is employed in an electron microscope, a critical dimension examine tool, an electron beam lithograph machine, an electron beam tester and other electron beam related systems as an electron source is disclosed. Embodiments disclose changing coating shape, coating position and shorten emitter length to extend the lifetime of the field emission cathode.

Abstract: A lightweight, compact image projection module, especially for mounting in a housing having a light-transmissive window, is operative for sweeping a composite laser beam as a pattern of linear scan lines on a planar projection surface and for causing selected pixels arranged along each linear scan line to be illuminated to produce an image of high quality and in color.

Abstract: A laser drive apparatus includes a plurality of transistors coupled to different power supply voltages. A control circuit selects one of the plurality of transistors to drive a light source. The control circuit also determines a pulse width to drive the selected transistor. A calibration feedback circuit may be used to calibrate power supplies that provide the different power supply voltages. A dither circuit may be used to reduce the number of bits received by the control circuit.

Abstract: A laser drive apparatus includes a plurality of transistors driven by different comparators. The different comparators receive an analog drive value and different ramp signals and produce pulse width modulated output signals. A calibration feedback circuit may be used to calibrate a power supply that provides a power supply voltage. A dither circuit may be used to reduce the number of bits received by the laser drive apparatus.

Abstract: The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect inspection or defect review. However, it would be recognized that the invention has a much broader range of applicability. A system and method in accordance with the present invention provides an operation stage for substrate edge inspection or review. The inspection region includes top near edge, to bevel, apex, and bottom bevel. The operation stage includes a supporting stand, a z-stage, an X-Y stage, an electrostatic chuck, a pendulum stage and a rotation track. The pendulum stage mount with the electrostatic chuck has the ability to swing from 0° to 180° while performing substrate top bevel, apex and bottom bevel inspection or review.

Abstract: An image generation apparatus provides interpolation and distortion correction. The interpolation and distortion correction may be provided in one or two dimensions. Nonlinear image scan trajectories, such as sinusoidal and bi-sinusoidal trajectories are accommodated. Horizontal and vertical scan positions are determined using a linear pixel clock, and displayed pixel intensities are determined using interpolation techniques.

Abstract: A lightweight, compact image projection module, especially for mounting in a housing having a light-transmissive window, is operative for causing selected pixels in a raster pattern of scan lines to be illuminated to produce an image of high resolution in color. The direction of scanning of the scan lines is switched between alternate frames, and the resulting image is the superposition of successive frames integrated for viewing by the human eye.

Abstract: Briefly, in accordance with one or more embodiments, a full color image and an invisible wavelength monochrome image are projected onto a display screen via a scanning platform of a scanned beam display. The monochrome image is re-radiated from a Photoluminescent material of the display screen as a visible wavelength monochrome image. The overall image may be viewed by a viewer as a three-dimensional image by providing the monochrome image to a first eye of the user without the full color image, and providing the full color image to a second eye of the user without the monochrome image.

Abstract: A display system includes and image-guiding substrate with input and/or output structures configured to improve image quality.