Abstract: This invention relates to apparatus and method to fast determine focus parameters in one pre-scan during an e-beam inspection practice. More specifically, embodiments of the present invention provide an apparatus and method that provide accurate focus tuning after primary focusing has been done.

Abstract: An image producing system (1400) delivers images (1414) having reduced speckle by employing one or more drive circuits (1404, 1405, 1406) that deliver both a direct current drive signal (205) and an alternating current drive signal (405) to one or more lasers (1401, 1402, 1403). Specifically, an alternating current drive circuit (403) is used in conjunction with a direct current drive circuit (203) to modulate a drive signal. The modulation can be at a frequency of between 400 MHz and 600 MHz. When lasers, such as the red laser (1401) or the blue laser (1403) of a multi-laser system are modulated in such a fashion, their emitted spectral widths (407) greatly expand, thereby reducing speckle in projected images (1414).

Abstract: Briefly, in accordance with one or more embodiments, an optical relay for a head up display, the optical relay comprises a glare trap having angularly selectivity by being capable of reflecting light having an angle of incidence greater than a first angle, and being capable of transmitting light having an angle of incidence less than a second angle, and a first optic arranged to receive light reflected off the glare trap at an angle of incidence greater than the first angle, and to direct light through the glare trap at an angle of incidence less than the second angle to exit the glare trap.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system includes least mean square (LMS) tone adders that determine harmonically related signals that when combined produce a scanning mirror drive signal. An inner loop of the control system compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonically related signals.

Abstract: The present invention discloses a structure and a method for determining a defect in integrated circuit manufacturing process. Test keys are designed for the structure to be the interlaced arrays of grounded and floating conductive cylinders, and the microscopic image can be predicted to be an interlaced pattern of bright voltage contrast (BVC) and dark voltage contrast (DVC) signals for a charged particle beam imaging system. The system can detect the defects by comparing patterns of the detected VC signals and the predicted VC signals.

Abstract: An imaging system (200) includes a plurality of laser sources (201) configured to produce a plurality of light beams (204). One or more optical alignment devices (220) orient the light beams (204) into a collimated light beam (205). A light modulator (203) modulates the collimated light beam (205) such that images (206) can be presented on a display surface (207). Speckle is reduced with an optical feedback device (221) that causes the laser sources (201) to operate in a coherence collapsed state. Examples of optical feedback devices (221) include partially reflective mirrors and beam splitter-mirror combinations.

Abstract: Briefly, in accordance with one or more embodiments, a display screen for a scanned beam display system comprises an exit pupil expander comprising a reflective layer to reflect an incoming beam from a scanned beam projector to an eyebox. Exit numerical aperture cones emanating from the exit pupil expander resulting from the reflected incoming beam are angularly redirected toward an eyebox disposed near an image plane to result in at least partially overlapping zeroth-order diffraction pattern from multiple spots on the exit pupil expander.

Abstract: A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system operates in the frequency domain and determines harmonic drive coefficients for a scanning mirror drive signal. An inner loop of the control system operates in the time domain and compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonic drive coefficients.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may be driven in a non-resonant mode of operation. The drive signal provided to the MEMS device may be tailored to prevent the MEMS device from exhibiting resonance characteristics and to cause the MEMS device to operate non-resonantly. In one or more embodiments, a filter may be used to tailor the frequency components of the drive signal, for example to sufficiently attenuate frequency components at or near the resonant frequency of the drive signal. A direct current signal may be provided to the MEMS device to provide an offset to scanned light beam for example to provide beam steering, and the sweep range and/or sweep frequency may be adjusted for example to steer the scanning field of view off axis from the user pointing axis.

Abstract: Briefly, in accordance with one or more embodiments, a wedge is disposed after the MEMS scanner in a MEMS scanning display system which redirects the scan cone at the same time stretches and/or squashes the image to reduce or eliminate distortion inherent in scanning projectors, the distortion being a result of a trajectory of the scanned beam caused by the off axis input beam and a transform from a scanning mirror to an image plane.

Abstract: An optical relay (500) includes a glare trap (512) that in one embodiment has one or more surfaces configured to reflect light impinging the surface (550) at an angle less than a first angle (722) relative to a normal line (710), and to transmit light impinging the surface (550) at an angle greater than a second angle (723) relative to the normal line (710). In other embodiments, the glare trap (512) reflects light impinging at an angle greater than a first angle and transmit light impinging at an angle that is less than a second angle. The separation between the first angle (722) and second angle (723) can be on the order of 20 degrees or more, but this angle can be reduced or eliminated when polarized light is used within the optical relay (500).

Abstract: A encoded image projection system (100) is configured to determine the proximity of the system to a projection surface (106). The encoded image projection system (100) includes a light encoder (105) that scans a non-visible light beam (115) on the projection surface (106) selectively when scanning visible light to create an image. A detector (118) is then configured to receive reflections of the non-visible light beam (115) from the projection surface (106). A control circuit (120) is configured to determine the distance (124) between the projection surface (106) and the system from, for example, intensity data or location data received from the detector (118). Where the distances (124) are below a threshold, the control circuit (120) can either reduce the output power of the system or turn the system off.

Abstract: Briefly, in accordance with one or more embodiments, an optical relay for a head up display, the optical relay comprises a glare trap having angularly selectivity by being capable of reflecting light having an angle of incidence greater than a first angle, and being capable of transmitting light having an angle of incidence less than a second angle, and a first optic arranged to receive light reflected off the glare trap at an angle of incidence greater than the first angle, and to direct light through the glare trap at an angle of incidence less than the second angle to exit the glare trap.

Abstract: Briefly, in accordance with one or more embodiments, an optical relay comprises a partially-reflective-coated Fresnel lens or similar low-profile lens such as a diffractive lens or a holographic lens having a first index of refraction and a filler medium having a second index of refraction and being disposed adjacent to the Fresnel lens. The optical relay enables the optical power of the Fresnel or similar low-profile lens embedded within the two layers to influence a beam that is reflected from the optical relay while allowing transmitted light to experience little or no influence from the embedded lens.

Abstract: A scanning beam overlay projection system displays an image on a projection surface by scanning a light beam in a raster pattern. Reflective spots on the projection surface reflect light back to the projection system when illuminated by the light beam. A photodetector in the projection system detects the reflected light, and timing circuits determine where in the raster pattern the reflective spots are located. The image can be scaled and warped to correlate tagged points within the image with the locations of the reflective spots on the projection surface.

Abstract: Briefly, in accordance with one or more embodiments, an optical relay comprises a partially-reflective-coated Fresnel lens or similar low-profile lens such as a diffractive lens or a holographic lens having a first index of refraction and a filler medium having a second index of refraction and being disposed adjacent to the Fresnel lens. The optical relay enables the optical power of the Fresnel or similar low-profile lens embedded within the two layers to influence a beam that is reflected from the optical relay while allowing transmitted light to experience little or no influence from the embedded lens.

Abstract: An apparatus for increasing electric conductivity to a wafer substrate when exposures to electron beam irradiation is disclosed. More specifically, a more free mechanical contact between a wafer and electric contact pins (within an electrostatic chuck) is provided to significantly reduce the scratch and damage on the wafer backside.

Abstract: A substrate guided relay (600) includes an input coupler (601), an output coupler (603), and an optical substrate (602). Light is delivered from the input coupler (601) to the optical substrate (602), and then to the output coupler (603). Partially reflective coatings can be used at interfaces (606,607) between components. Partially reflective coatings or other devices (501) can be also used to create one or more copies of light. Light polarization alteration devices (661,662,663,664,665) can be used within the substrate guided relay (600), alone or in combination, to tailor the polarization of light to the designer's needs. Such devices, such as half-wave plates, provide the designer with increased flexibility regarding the design and manufacture of the substrate guided relay (600).

Abstract: A substrate guided relay (600) includes an input coupler (601), an output coupler (603), and an optical substrate (602). Light is delivered from the input coupler (601) to the optical substrate (602), and then to the output coupler (603). Partially reflective coatings can be used at interfaces (606,607) between components. Partially reflective coatings or other devices (501) can be also used to create one or more copies of light. Light polarization alteration devices (661,662,663,664,665) can be used within the substrate guided relay (600), alone or in combination, to tailor the polarization of light to the designer's needs. Such devices, such as half-wave plates, provide the designer with increased flexibility regarding the design and manufacture of the substrate guided relay (600).

Abstract: A scanned light display system includes a light source operable to emit light and a curved mirror positioned to receive at least a portion of the light. The curved mirror is configured to substantially collimate the received light. The substantially collimated light is scanned to form an image by moving at least one of the light source and the curved mirror relative to each other. Alternatively, the scanned light display system includes a light source operable to emit light, a curved mirror positioned to receive some of the light, and an optical element positioned to receive light reflected from the curved mirror. The optical element is configured to substantially collimate the reflected light. The substantially collimated light is scanned to form an image by moving at least one of the light source, the curved mirror, and the optical element. Scanning mirror assemblies and methods of making are also disclosed.