Abstract: A grating part includes a first transparent substrate having an optical grating on a surface thereof, a second transparent substrate having an optical grating on a surface thereof, and a spacer positioned between the first transparent substrate and the second transparent substrate, the spacer bonding the first transparent substrate and the second transparent substrate.

Abstract: The invention relates to a method for determining a surface map, such as a height map, of a sample surface having a first region with a first reflectivity and a second region with a second reflectivity. The invention further relates to an imaging system for determining a surface map of a sample surface having a first region with a first reflectivity and a second region having a second reflectivity. The invention is further related to a digital data carrier including a computer program which, when run on a processor of an imaging system according to the invention, causes the imaging system to perform the method according to the invention.

Abstract: The invention relates to a method for determining a height map of a surface of a sample through white light interferometry wherein use is made of a white light interferometer with a broad band light source and an optical sensor including pixels. The invention further relates to a white light interferometer including a broad band light source, an optical sensor including pixels and a processor configured for performing the method of the invention. The invention further relates to a digital data carrier including a computer program which, when run on a processor of a white light interferometer according to the invention, causes the white light interferometer to perform the method according to the invention.

Abstract: A metrology system includes an illumination configuration having an illumination source, an objective lens configuration, and an image sensor configuration including an image sensor. The objective lens configuration includes an objective lens and has a lens optical axis. The illumination configuration, the objective lens configuration and the image sensor configuration form an optical path along which illumination from the illumination configuration travels. The illumination configuration provides illumination in an illumination direction toward at least a portion of an edge of a circular workpiece that is along the optical path. At least part of the illumination configuration is tilted relative to the objective lens configuration such that the illumination direction is at a first tilt angle in relation to the lens optical axis.

Abstract: An illumination device has a light source unit, a lens unit, and a filter unit An imaging device receives object light, generated by the illumination light, from the measurement object at a predetermined observation solid angle, and pixels of the imaging device can each identify the different light wavelength ranges. A processing device includes an arithmetic unit configured to obtain a normal vector at each point of the measurement object corresponding to each pixel from inclusion relation between the plurality of solid angle regions, constituting the object light, and the predetermined observation solid angle, and a shape reconstruction unit configured to reconstruct the shape of the measurement object.

Abstract: A measuring probe for a coordinate measuring machine is provided. The measuring probe includes a stylus position detection portion, signal processing and control circuitry and a temperature dependent compensation portion. The stylus position detection portion includes a field generating coil configuration and a sensing coil configuration. The temperature dependent compensation portion includes a temperature dependent component that is coupled to a field generating coil of the field generating coil configuration such that a change in a characteristic of the temperature dependent component due to an increase in temperature of the temperature dependent component causes relatively more current to flow through the field generating coil when driven by the coil drive signal than if the characteristic of the temperature dependent component had not changed.

Abstract: A digital holography metrology system is provided including a heterodyne light source, an interferometric optical arrangement and a sensor arrangement. The heterodyne light source provides combined laser beams of different corresponding frequencies and wavelengths (e.g., for which each combined beam may include a corresponding wavelength laser beam and a corresponding frequency shifted laser beam, which may be orthogonally polarized). The interferometric optical arrangement utilizes the combined beams for providing an output for imaging a workpiece, for which the output includes interference beams. The sensor arrangement includes dichroic components which separate the interference beams to be directed to respective time of flight sensors. The outputs from the time of flight sensors are utilized to determine measurements (e.g., the outputs of the time of flight sensors may be utilized to determine a measurement distance to a surface point on a workpiece, etc.).

Abstract: A temperature compensation apparatus including: a measured temperature acquisition part that acquires temperatures of the three-dimensional measurement apparatus during measurement; a measurement result acquisition part that acquires a measurement result of an object to be measured output by the three-dimensional measurement apparatus; a correction value calculation part that calculates a correction value of the measurement result using a model formula of temperature compensation, including a polynomial composed of values obtained by multiplying each of a plurality of temperatures by coefficients corresponding to each of the plurality of temperature sensors; and a correction part that calculates a corrected measurement value, which is a corrected measurement result obtained by adding the correction value to the measurement result or multiplying the correction value by the measurement result.

Abstract: An optical device provided with an optical parts position adjusting and fixing device for adjusting and fixing the position of the optical parts moving in an optical axis direction, wherein the position adjusting and fixing device is provided with a long slotted hole extended in the optical axis direction formed on a side surface of the optical parts; a fixing means which is mounted on an object to be fixed of the optical parts and which is movable along the long slotted hole; a non-penetrating screw hole formed in the fixing means and which is divided by a slit; and a screw which is screwed into the screw hole and spreads the slit when screwed into the screw hole so as to press the outer surface of the fixing means against the inner surface of the long slotted hole.

Abstract: A measuring probe includes a stylus having one or more contact portions; a detection element configured to detect a movement of the stylus based on a contact made by the contact portions; a signal processing portion configured to process a signal from the detection element to output a measurement signal; and a stylus motion mechanism. The stylus motion mechanism includes a first motion portion configured to enable motion of the stylus from a rest position in a positive axial direction when a corresponding force in the positive axial direction is applied by a contact of a contact portion of the stylus with a workpiece; and a second motion portion configured to enable motion of the stylus from the rest position in a negative axial direction opposite to the positive axial direction when a corresponding force is applied by a contact of a contact portion of the stylus with a workpiece.

Abstract: The measurement machine includes: a holding section where a measurement target is held; a measurement unit (a first measurement unit and a second measurement unit) disposed at a position facing the holding section and provided with sensors that is configured to perform a measurement process on the measurement target; a frame whose position with respect to the holding section is fixed; and a plurality of arms coupling the frame with the measurement unit.

Abstract: A calibration data acquisition method includes: a first holding step of holding an inspection gauge provided with a plurality of portions to be examined in a first posture with a gauge moving apparatus; a first measuring step of acquiring first distance data by measuring a distance between the plurality of portions to be examined with the three-dimensional measuring apparatus; a second holding step of holding the inspection gauge in a second posture with the gauge moving apparatus, after the first measuring step; a second measuring step of acquiring second distance data by measuring a distance between the plurality of portions to be examined of the inspection gauge in the second posture with the three-dimensional measuring apparatus; and a step of generating calibration data including the first distance data and the second distance data.

Abstract: A working machine (base supporting device) includes a base having an upper surface that defines a horizontal plane including X and Y directions; first supports provided for opposite end portions in the X direction of the base and supporting the base in a Z direction; a second support disposed between the opposite end portions of the base supported by the first supports, supporting the base in the Z direction, and being adjustable in a position in the Z direction at which the base is supported; a deflection detecting section that detects an amount of deflection in the Z direction of the base; and a deflection controlling section that controls the second support, in which the deflection controlling section controls, based on the amount of deflection detected by the deflection detecting section, the second support to make the upper surface parallel to the X direction.

Abstract: To provide a fixing device improved in fixation of an annular member to a cylindrical member. The fixing device for fixing the annular member to the cylindrical member that includes a first fixing portion and a second fixing portion. The first fixing portion includes an annular portion and an adjustment portion. The annular portion covers an outer peripheral surface of the cylindrical member from outward in a radial direction. A circumferential length of the annular portion is adjustable with the adjustment portion. The second fixing portion is fixed to the first fixing portion and fixed to the annular member.

Abstract: ID numbers of connected multiple modules are easily automatically set. Each of the multiple modules includes an ID number information holding unit that holds its own ID number information, a first command generation unit that generates a first command for notifying its rear stage of its own ID number information, a first command output unit that outputs the first command from a rear-stage output port, a second command generation unit that generates a second command for notifying its front stage of its own ID number information and ID number information on its rear-stage modules, a second command output unit that outputs the second command from a front-stage output port, and an ID number information update unit that sets, when the first command is received from a front-stage module, new ID number obtained by adding “1” to the ID number of the front-stage module contained in the received first command as its own ID number information in the ID number information holding unit.

Abstract: An image detection device includes: a variable focal length lens whose focal length is periodically changed in response to a drive signal that is periodic; an illuminator configured to illuminate a measurement target; an image detector configured to detect an image of the measurement target through the variable focal length lens; a drive controller configured to output the drive signal to the variable focal length lens; a light-emission controller configured to output a light-emission signal, which is in synchronization with the drive signal, to the illuminator; an oscillation sensor configured to detect oscillation information of the variable focal length lens; and a synchronous controller configured to adjust an output timing of the light-emission signal based on the oscillation information.

Abstract: An automatic measuring apparatus includes a measuring device that measures a dimension of a workpiece, the measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from the workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. A workpiece holding part that holds the workpiece in such a manner that a position and posture of the workpiece is changed at a pressure lower than a predetermined measurement pressure set in advance in the measuring device when the movable element is brought into contact with the workpiece.

Abstract: There is provided an automatic measuring apparatus that automates an inexpensive and easy-to-use contact-type measuring device. An automatic measuring apparatus includes a measuring device including a movable element that is displaceable with respect to a fixed element and moves forward and backward to be brought into contact with or away from a workpiece, and a displacement detection part that detects a displacement or position of the movable element, and an automatic operation part that automates the forward/backward movement of the movable element by power. When the movable element is brought into contact with the workpiece, vibration is applied directly or indirectly to at least one of the workpiece and the measuring device in such a manner that contacting surfaces of the workpiece and the measuring device are in close contact with each other by changing a relative position and posture between the workpiece and the measuring device.