Abstract: A three-dimensional-measuring-apparatus inspection gauge includes a plurality of targets to be measured with which a tip of a probe of a three-dimensional measuring apparatus comes into contact; and a frame member that supports the plurality of targets. The plurality of targets are arranged in positions corresponding to each vertex of a triangular prism.

Abstract: An annular optical configuration is provided for utilization in a metrology system to redirect source light. The metrology system includes a camera that provides images of a workpiece at different focus positions through operation of a variable focal length lens and an objective lens configuration (OLC). The OLC includes one of a plurality of objective lenses having respective working distances and working distance focus positions. An annular lighting configuration directs source light toward a first central volume which includes a first working distance focus position of a first objective lens when the first objective lens is included in the OLC. When a second objective lens with a second working distance focus position is included in the OLC, the annular optical configuration is configured to be located in front of the lighting configuration to redirect the source light toward a second central volume which includes the second working distance focus position.

Abstract: The invention relates to the field of interferometry, in particular to Fizeau interferometers for improving a contrast of an interferogram. The Fizeau interferometer comprises a light source, a reference surface, a test surface positioned in on a support of the Fizeau interferometer and an imaging system. The Fizeau interferometer utilizes a polarizing reference surface to improve the contrast of the interferogram. The invention further relates to a method for using the Fizeau interferometer of the invention for improving contrast of an interferogram obtained by the Fizeau interferometer.

Abstract: A metrology system including a heterodyne light source is provided. The heterodyne light source includes a first light source, an acousto-optic modulator and a source optical arrangement. The acousto-optic modulator receives at least one wavelength laser beam from the first light source and generates at least one corresponding frequency shifted laser beam (e.g., with orthogonal polarization). The source optical arrangement includes a receiving optical element portion and a birefringent optical element portion. The receiving optical element portion receives the wavelength laser beam(s) and the corresponding frequency shifted laser beam(s) and directs the beams along an optical path toward the birefringent optical element portion. The birefringent optical element portion combines the beams to output a combined beam (e.g., which may be utilized as part of a measurement process to determine at least one measurement distance to at least one surface point on a workpiece, etc.).

Abstract: There is provided a displacement measuring apparatus capable of reducing power consumption in a sleep mode. An operation mode of a signal processing unit includes a measurement operation execution mode to calculate a displacement or position as a measurement value using a sensor signal from a displacement sensor, and a sleep mode to reduce power consumption compared to the measurement operation execution mode. In the sleep mode, the signal processing unit performs a substitute calculation process at a predetermined sampling frequency to calculate a substitute value related to the displacement or position using fewer sensor signals than in the measurement operation execution mode. The operation-mode control unit assumes that a variation of the displacement sensor has been detected when there is a variation in the substitute value, cancels the sleep mode, and switches the signal processing unit to the measurement operation execution mode.

Abstract: Three-dimensional geometry measurement apparatuses includes: a first identification part that identifies a primary absolute phase value corresponding to each of a plurality of pixels of a first image capturing part; a second identification part that identifies a secondary absolute phase value corresponding to each of a plurality of pixels of a second image capturing part; a conversion identification part that identifies a conversion value for converting primary coordinates or secondary coordinates; and a geometry identification part that converts the primary coordinates or the secondary coordinates on the basis of the conversion value, and identifies a three-dimensional geometry of an object to be measured on the basis of the converted coordinates.

Abstract: A variable focal length lens device includes: a variable focal length optical system configured to change a focal length; a beam splitter configured to cause passing light, which is reflected off an object and passes through the variable focal length optical system, to branch into branched beams; an image-forming lens configured to condense the branched beams respectively; an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens; and an image sensor configured to capture an image of the object by receiving the branched beam condensed by the image-forming lens. An imaging distance on a first optical axis from the image sensor to the image-forming lens and an imaging distance on a second optical axis from the image sensor to the image-forming lens are different from each other.

Abstract: A calibration jig that calibrates a measurement apparatus for measuring a three-dimensional geometry of a measurement target, including: a plurality of elements to be measured, a frame part to which the plurality of elements to be measured are attached, and a mechanism part that moves the frame part, wherein the mechanism part includes: a rotation mechanism that rotates the frame part about a first axis; a first swinging mechanism that swings the frame part about a second axis orthogonal to the first axis; and a second swinging mechanism that swings the frame part about a third axis orthogonal to the first axis and the second axis.

Abstract: A calibration jig which calibrates a measurement apparatus that measures a three-dimensional geometry of a measurement target and includes a plurality of imaging parts that capture the measurement target, the calibration jig including: a plurality of elements to be measured; and a frame part to which the plurality of elements to be measured are attached, wherein each of the plurality of elements to be measured includes a main body part having a predetermined shape; and a plurality of label parts provided on the main body part, wherein an identification code for identifying the elements to be measured is shown on each label part.

Abstract: A method for specifying a position through touch input in a screen displayed on a touch panel display. The position is specified by acquiring an initial contact position with the touch panel display, displaying a position displaying cursor in a position according to the initial contact position, displaying the position displaying cursor in the position according to the initial contact position during the period for which the contact position sensing continues until the distance from the initial contact position to the contact position reaches a predetermined distance and terminating the display of the position displaying cursor where the contact position sensing is terminated before the distance reaches the predetermined distance, and displaying the position displaying cursor in such a way that the position displaying cursor follows movement of the contact position after the distance reaches the predetermined distance.

Abstract: A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of gratings at a predetermined interval; and a protective layer that is made of fluoride and covers the scale gratings and an exposed portion of the face of the substrate.

Abstract: A metrology system includes front and back vision components portions, and is configured to have a workpiece positioned between the two portions. The back vision components portion includes a light source and a diffuser. The front vision components portion includes a variable focal length lens, an objective lens and a camera. The metrology system includes a movement mechanism portion configured to align relative positions between the front and back vision components portions and an aperture defined through the workpiece such that at least a portion of the light from the light source that passes through the diffuser passes through the aperture for providing the illumination for imaging the aperture. The camera acquires an image stack of images of the aperture at different focus positions. Based on an analysis of the image stack, measurements related to workpiece features of the aperture (e.g., including a distance between workpiece features) can be determined.

Abstract: A measurement system includes: measurement target information database that stores measurement point information, including measurement conditions and guidance information for each measurement point, associated with the type of the measurement target; a measuring instrument that performs measurements on the measurement target; an image capturing unit that captures an image of a subject; a display unit; a measurement target identification unit that identifies the type of the measurement target based on the image captured by the image capturing unit; a measurement target information obtaining unit for obtaining the measurement point information corresponding to the type of the measurement target identified by the measurement target identification unit from the measurement target information database; and a setting unit that displays the guidance information included in the measurement point information obtained by the measurement target information obtaining unit on the display unit and sets the measurement con

Abstract: There is provided a test indicator 100 capable of replacing a stylus 210 with another stylus 210 having a different length to increase a reaching range of the stylus 210, and of increasing a rotation angle of the stylus 210 to display an accurate measurement value in a wide measurement range. A calculation unit 400 of the test indicator 100 includes a stylus-length storage unit 420 that sets and stores a length of the stylus 210, and a stylus-length correction calculation unit 400 that changes, according to the length of the stylus 210, a conversion ratio for converting a detection value by an encoder 340 into a measurement value to correct the measurement value.

Abstract: A measuring system includes a measuring probe with a contact portion that contacts a workpiece to be measured. The measuring probe operates with a first update rate during at least part of a moving mode, wherein the moving mode includes movement of the measuring probe such that the contact portion is moved away from the workpiece and/or is moved at a distance from the workpiece that is equal to or greater than a threshold distance. The measuring probe operates with a second update rate (i.e., which is faster than the first update rate) during at least part of a measuring mode, wherein the measuring mode includes movement of the measuring probe such that the contact portion is moved toward the workpiece for obtaining a measurement. In various implementations, the combined use of the first and second update rates effectively reduces power-on drift of the measuring probe.

Abstract: An angle detector includes a rotary scale having a scale pattern in which a plurality of patterns are arrayed along a circumference direction of the rotary scale, and a plurality of detection heads, each of which detects the plurality of patterns from the scale pattern. The plurality of detection heads are shifted from each other in the circumference direction of the rotary scale and are shifted from each other in a radial direction of the rotary scale.

Abstract: A graduation-plate posture inspection method includes an image data acquiring step of acquiring image data on the graduation plate from the camera, a region calculating step of extracting a first contrast region and a second contrast region in the image data, and a contrast processing step of contrasting the first contrast region with the second contrast region based on brightness or color. The contrast processing step includes calculating a difference between pixel values or luminance values of adjacent pixels in each of the first contrast region and the second contrast region to contrast a magnitude of the difference in the first contrast region with a magnitude of the difference in the second contrast region. The relative posture between the camera and the graduation plate is inspected based on a contrast result in the contrast processing step.

Abstract: A measuring probe for a coordinate measuring machine is provided. The measuring probe includes a stylus position detection portion with a sensing coil configuration, signal processing and control circuitry and a temperature dependent compensation portion. The temperature dependent compensation portion includes a temperature dependent component that is coupled to at least part of the sensing coil configuration such that a change in a characteristic of the temperature dependent component due to an increase in temperature of the temperature dependent component causes a ratio of a first current to a second current to increase in the sensing coil configuration, wherein the first and second currents are in at least one first sensing coil and at least one second sensing coil, respectively, of the sensing coil configuration. Such implementations are configured to increase accuracy of the processed signals by at least partially compensating for certain affects that occur due to temperature changes.

Abstract: A metrology system is provided for use with a movement system that moves an end tool (e.g., a probe). The metrology system includes a sensor configuration, a light beam source configuration and a processing portion. The sensor configuration comprises a plurality of light beam sensors. The light beam source configuration directs light beams to the light beam sensors of the sensor configuration. One of the light beam source configuration or the sensor configuration is coupled to the end tool and/or an end tool mounting configuration of the movement system which moves the end tool. The light beams that are directed to the light beam sensors cause the light beam sensors to produce corresponding measurement signals. A processing portion processes the measurement signals from the light beam sensors which indicate the position and orientation of the end tool.