Abstract: Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described. Semiconductor devices and methods of making the same comprising source ohmic contacts formed using a self-aligned process are also described. The source ohmic contacts can comprise titanium silicide and/or titanium silicide carbide and can act as a getter material.
Type:
Grant
Filed:
August 17, 2020
Date of Patent:
April 26, 2022
Assignee:
Monolith Semiconductor, Inc.
Inventors:
Kevin Matocha, John Nowak, Kiran Chatty, Sujit Banerjee
Abstract: A device may include a P-N diode, formed within a SiC substrate. The device may include an N-type region formed within the SiC substrate, a P-type region, formed in an upper portion of the N-type region; and an implanted N-type layer, the implanted N-type layer being disposed between the P-type region and the N-type region.
Type:
Grant
Filed:
September 5, 2018
Date of Patent:
February 2, 2021
Assignee:
Monolith Semiconductor, Inc.
Inventors:
Kevin Matocha, Kiran Chatty, Blake Powell, Sujit Banerjee
Abstract: Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described. Semiconductor devices and methods of making the same comprising source ohmic contacts formed using a self-aligned process are also described. The source ohmic contacts can comprise titanium silicide and/or titanium silicide carbide and can act as a getter material.
Type:
Grant
Filed:
March 1, 2017
Date of Patent:
October 13, 2020
Assignee:
MONOLITH SEMICONDUCTOR, INC.
Inventors:
Kevin Matocha, John Nowak, Kiran Chatty, Sujit Banerjee
Abstract: Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described.
Type:
Grant
Filed:
April 4, 2014
Date of Patent:
May 19, 2015
Assignee:
MONOLITH SEMICONDUCTOR, INC.
Inventors:
Kevin Matocha, Kiran Chatty, Larry Rowland, Kalidas Chatty
Abstract: Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described.
Type:
Grant
Filed:
May 1, 2014
Date of Patent:
March 31, 2015
Assignee:
Monolith Semiconductor, Inc.
Inventors:
Kevin Matocha, Kiran Chatty, Larry Rowland, Kalidas Chatty
Abstract: Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described.
Type:
Application
Filed:
May 1, 2014
Publication date:
October 9, 2014
Applicant:
Monolith Semiconductor, Inc.
Inventors:
Kevin Matocha, Kiran Chatty, Larry Rowland, Kalidas Chatty
Abstract: Semiconductor devices comprising a getter material are described. The getter material can be located in or over the active region of the device and/or in or over a termination region of the device. The getter material can be a conductive or an insulating material. The getter material can be present as a continuous or discontinuous film. The device can be a SiC semiconductor device such as a SiC vertical MOSFET. Methods of making the devices are also described.
Type:
Application
Filed:
April 4, 2014
Publication date:
October 9, 2014
Applicant:
Monolith Semiconductor, Inc.
Inventors:
Kevin Matocha, Kiran Chatty, Larry Rowland, Kalidas Chatty