Patents Assigned to Monolithic 3D Inc.
  • Patent number: 11978731
    Abstract: A method to process a 3D device, the method including: providing a first substrate including a first level including a first single crystal silicon layer and a plurality of first transistors; providing a second substrate including a second level including a second single crystal silicon layer; performing an epitaxial growth of a SiGe layer on top of the second single crystal silicon layer; performing an epitaxial growth of a third single crystal silicon layer on top of the SiGe layer; forming a plurality of third transistors including the third single crystal silicon layer; forming a plurality of metal layers interconnecting the plurality of third transistors; and then performing a hybrid bonding of the second level onto the first level.
    Type: Grant
    Filed: February 21, 2020
    Date of Patent: May 7, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han
  • Publication number: 20240145289
    Abstract: A method for producing 3D semiconductor devices including: providing a first level including first transistors and a first single crystal layer; forming a first metal layer on top of the first level; forming a second metal layer on top of the first metal layer; forming at least one (ALO) second level on top of or above the second metal layer; performing a lithography step on the second level; forming ALO third level on top of or above the ALO second level; performing processing steps to form first memory cells within the ALO second level and second memory cells within the ALO third level, first memory cells include ALO second transistor, second memory cells include ALO third transistor, first metal layer thickness is at least 50% greater than the second metal layer thickness, ALO first transistor controls power delivery to ALO second transistor; then dicing using a laser system.
    Type: Application
    Filed: December 18, 2023
    Publication date: May 2, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20240147740
    Abstract: A 3D memory device, the device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; a plurality of memory-line pillars, where each memory-line pillar of the plurality of memory-line pillars is directly connected to a plurality of the source or the drain, where the plurality of memory-line pillars are vertically oriented, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the memory controller circuit includes a row buffer, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
    Type: Application
    Filed: January 8, 2024
    Publication date: May 2, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han, Eli Lusky
  • Patent number: 11967583
    Abstract: A semiconductor device, the device comprising: a first substrate; a first metal layer disposed over said substrate; a second metal layer disposed over said first metal layer; a first level comprising a plurality of transistors, said first level disposed over said second metal layer, wherein said plurality of transistors comprise single crystal silicon; a third metal layer disposed over said first level; a fourth metal layer disposed over said third metal layer, wherein said fourth metal layer is aligned to said first metal layer with a less than 200 nm alignment error; and a via disposed through said first level, wherein said via has a diameter of less than 450 nm, wherein said fourth metal layer provides a global power distribution, and wherein said via is directly connected to at least one of said plurality of transistors.
    Type: Grant
    Filed: June 27, 2023
    Date of Patent: April 23, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Publication number: 20240128165
    Abstract: A 3D semiconductor device including: a first level including a plurality of first metal layers; a second level overlays the first level and includes at least one single crystal silicon layer, where the second level includes a plurality of transistors and a plurality of second metal layers, each transistor of the plurality of transistors includes a single crystal channel, where the plurality of second metal layers include interconnections between transistors of the plurality of transistors, where the second level is overlaid by a first isolation layer; a connective path from the plurality of transistors to the plurality of first metal layers, where the connective path includes a via disposed through at least the single crystal silicon layer, where each of at least one of the plurality of transistors includes a two sided gate, and where the single crystal silicon layer thickness is less than two microns.
    Type: Application
    Filed: December 8, 2023
    Publication date: April 18, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Deepak C. Sekar, Brian Cronquist
  • Publication number: 20240128237
    Abstract: A semiconductor device, the device including: a first substrate; a first metal layer disposed over the first substrate; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the plurality of transistors each include single crystal silicon; a third metal layer disposed over the first level; a fourth metal layer disposed over the third metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 200 nm alignment error; and a via disposed through the first level, where the via has a diameter of less than 450 nm, where the fourth metal layer provides a global power distribution, and where processing of the device includes use of a carrier wafer.
    Type: Application
    Filed: December 23, 2023
    Publication date: April 18, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Publication number: 20240128116
    Abstract: 3D semiconductor device including: first level including first single-crystal transistors; a plurality of memory control circuits formed from at least a portion of the first single-crystal transistors; first metal layer disposed atop the first single-crystal transistors; a second metal layer disposed atop the first metal layer; a second level disposed atop the second metal layer includes second transistors and a memory array of first memory cells; third level including second memory cells which include some third transistors, which themselves include a metal gate and is disposed above the second level; a third metal layer disposed above the third level; a fourth metal layer disposed above the third metal layer; a connective path from the third metal layer to the second metal layer with a thru second level via of a diameter less than 800 nm which also passes thru the memory array, adjust memory cell write voltages based on temperature information.
    Type: Application
    Filed: December 17, 2023
    Publication date: April 18, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Patent number: 11961827
    Abstract: A semiconductor device, the device including: a first substrate; a first metal layer disposed over the first substrate; a second metal layer disposed over the first metal layer; a first level including a plurality of transistors, the first level disposed over the second metal layer, where the plurality of transistors each include single crystal silicon; a third metal layer disposed over the first level; a fourth metal layer disposed over the third metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 200 nm alignment error; and a via disposed through the first level, where the via has a diameter of less than 450 nm, where the fourth metal layer provides a global power distribution, and where processing of the device includes use of a carrier wafer.
    Type: Grant
    Filed: December 23, 2023
    Date of Patent: April 16, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Patent number: 11963373
    Abstract: A 3D memory device, the device including: a first structure including a plurality of memory cells, where each memory cell of the plurality of memory cells includes at least one memory transistor, where each of the at least one memory transistor includes a source, a drain, and a channel; a plurality of memory-line pillars, where each memory-line pillar of the plurality of memory-line pillars is directly connected to a plurality of the source or the drain, where the plurality of memory-line pillars are vertically oriented, and where the at least one memory transistor is self-aligned to an overlaying another the at least one memory transistor, both being processed following a same lithography step; and a control level including a memory controller circuit, where the memory controller circuit includes a row buffer, where the control level is bonded to the first structure, and where the bonded includes hybrid bonding.
    Type: Grant
    Filed: January 8, 2024
    Date of Patent: April 16, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han, Eli Lusky
  • Publication number: 20240121968
    Abstract: A 3D semiconductor device including: a first level including a single crystal layer, and a memory control circuit which includes at least one temperature sensor circuit and first transistors; a first metal layer overlaying the first single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors—which may include a metal gate—disposed atop the third metal layer; third transistors disposed atop the second transistors; a fourth metal layer disposed atop the third transistors; a memory array including word-lines and at least four memory mini arrays (each mini array includes at least four rows by four columns of memory cells), each memory cell includes at least one second transistor or at least one third transistor; and a connection path from fourth metal to third metal, the path includes a via disposed through the memory array.
    Type: Application
    Filed: December 19, 2023
    Publication date: April 11, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han, Brian Cronquist, Eli Lusky
  • Publication number: 20240120320
    Abstract: A 3D device, the device including: at least one first level including logic circuits; at least one second level bonded to the first level, where the at least one second level includes a plurality of transistors; connectivity structures, where the connectivity structures include a plurality of transmission lines, where the plurality of transmission lines are designed to conduct radio frequencies (“RF”) signals, and where the bonded includes oxide to oxide bond regions and metal to metal bond regions; and a plurality of vias disposed through the at least one second level, where at least a majority of the plurality of vias have a diameter of less than 5 micrometers.
    Type: Application
    Filed: December 19, 2023
    Publication date: April 11, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han, Brian Cronquist, Eli Lusky
  • Publication number: 20240120332
    Abstract: A semiconductor device, the semiconductor device including: a first silicon level including a first single crystal silicon layer and a plurality of first transistors; a first metal layer disposed over the first silicon level; a second metal layer disposed over the first metal layer; a third metal layer disposed over the second metal layer; a second level including a plurality of second transistors, the second level disposed over the third metal layer; a fourth metal layer disposed over the second level; a fifth metal layer disposed over the fourth metal layer, where the fourth metal layer is aligned to the first metal layer with a less than 240 nm alignment error; where the fifth metal layer includes global power delivery; and a via disposed through the second level, where a typical thickness of the second metal layer is greater than a typical thickness of the third metal layer by at least 50%.
    Type: Application
    Filed: March 30, 2023
    Publication date: April 11, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist
  • Patent number: 11956952
    Abstract: A device, including: a first structure including first memory cells, the first memory cells including first transistors; and a second structure including second memory cells, the second memory cells including second transistors, where the second transistors overlay the first transistors, and a plurality of memory cells control lines, where the first transistors are self-aligned to the second transistors, where a second transistor channel of the second transistors is aligned to a first transistor channel of the first transistors, the aligned is at an atomic level as would have been resulted from an epitaxial growth process.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: April 9, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han
  • Patent number: 11956976
    Abstract: A semiconductor device including: a plurality of transistors, where at least one of the transistors includes a first single crystal source, channel, and drain, where at least one of the transistors includes a second single crystal source, channel, and drain, where the second single crystal source, channel, and drain is disposed above the first single crystal source, channel, and drain, where at least one of the transistors includes a third single crystal source, channel, and drain, where the third single crystal source, channel, and drain is disposed above the second single crystal source, channel, and drain, where at least one of the transistors includes a fourth single crystal source, channel, and drain, where the fourth single crystal source, channel, and drain is disposed above the third single crystal source, channel, and drain, and where the fourth drain is aligned to the first drain with less than 40 nm misalignment.
    Type: Grant
    Filed: August 15, 2023
    Date of Patent: April 9, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Deepak C. Sekar, Zvi Or-Bach
  • Publication number: 20240112942
    Abstract: A 3D semiconductor device, the device including: a first level including a first single crystal layer, the first level including first transistors, where each of the first transistors includes a single crystal channel; first metal layers interconnecting at least the first transistors; a second metal layer overlaying the first metal layers; a first oxide layer disposed over the second metal layer; a second oxide layer disposed over the first oxide layer; and a second level including at least one array of memory cells and second transistors, where each of the memory cells includes at least one of the second transistors, where the second level overlays the first level, where at least one of the second transistors includes at least two independent gates, where the second level is directly bonded to the first level, and where the bonded includes direct oxide-to-oxide bonds.
    Type: Application
    Filed: December 2, 2023
    Publication date: April 4, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20240105490
    Abstract: 3D semiconductor device including: a first level including first single-crystal transistors; a plurality of memory control circuits formed from at least a portion of the first single-crystal transistors; a first metal layer disposed atop the first single-crystal transistors; a second metal layer disposed atop the first metal layer; a second level disposed atop the second metal layer includes second transistors and a memory array of first memory cells; a third level including second memory cells which include some third transistors, which themselves include a metal gate and is disposed above the second level; a third metal layer disposed above the third level; a fourth metal layer disposed above the third metal layer; a connective path from the third metal layer to the second metal layer with a thru second level via of a diameter less than 800 nm which also passes thru the memory array, memory control circuits for wear leveling.
    Type: Application
    Filed: December 8, 2023
    Publication date: March 28, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Brian Cronquist, Deepak C. Sekar
  • Publication number: 20240096798
    Abstract: A 3D device including: a first level including first transistors and a first interconnect; a second level including second transistors and is overlaying the first level; at least four electronic circuit units (ECUs); and a redundancy circuit, where each of the ECUs includes a first circuit which includes a portion of the first transistors, where each of the ECUs includes a second circuit, the second circuit including a portion of the second transistors, where each of the at least four ECUs includes a first vertical bus, where the first vertical bus provides electrical connections between the first circuit and the second circuit, where each of the at least four ECUs includes at least one processor and at least one memory array, where the second level is bonded to the first level, and the bonded includes oxide to oxide bonding regions and metal to metal bonding regions.
    Type: Application
    Filed: November 14, 2023
    Publication date: March 21, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han, Brian Cronquist
  • Patent number: 11937422
    Abstract: A 3D semiconductor device, the device including: a first level including first single crystal transistors; and a second level including second single crystal transistors, where the first level is overlaid by the second level, where a vertical distance from the first single crystal transistors to the second single crystal transistors is less than eight microns, where the second level includes a layer transferred and bonded level, where the bonded includes oxide to oxide bonds, where the first level includes a plurality of processors, and where the second level includes a plurality of memory cells.
    Type: Grant
    Filed: July 4, 2021
    Date of Patent: March 19, 2024
    Assignee: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han
  • Patent number: 11935949
    Abstract: 3D semiconductor device including: a first level including a first single crystal layer and first transistors, and at least one first metal layer-which includes interconnects between the first transistors forming control circuits-which overlays the first single crystal layer; second metal layer overlaying first metal layer; a second level including second transistors, first memory cells (each including at least one second transistor) and overlaying second metal layer; a third level including third transistors (at least one includes a polysilicon channel), second memory cells (each including at least one third transistor and cell is partially disposed atop control circuits) and overlaying the second level; control circuits control data written to second memory cells; third metal layer disposed above third level; fourth metal layer includes global power distribution grid, has a thickness at least twice the second metal layer, disposed above third metal layer; fourth level includes single-crystal silicon, atop f
    Type: Grant
    Filed: November 12, 2023
    Date of Patent: March 19, 2024
    Assignee: Monolithic 3D Inc.
    Inventor: Zvi Or-Bach
  • Publication number: 20240090225
    Abstract: A 3D semiconductor device including: a first level including a single crystal layer, a memory control circuit which includes a plurality of first transistors; a first metal layer overlaying the single crystal layer; a second metal layer overlaying the first metal layer; a third metal layer overlaying the second metal layer; second transistors which include a metal gate are disposed atop the third metal layer; third transistors disposed atop the second transistors; a fourth metal layer disposed atop the third transistors; and a memory array including word-lines, the memory array includes at least four memory mini arrays, each including at least four rows by at least four columns of memory cells, where each of the memory cells includes at least one of the second transistors or at least one of the third transistors, the memory control circuit includes at least one Look Up Table circuit (“LUT”).
    Type: Application
    Filed: November 22, 2023
    Publication date: March 14, 2024
    Applicant: Monolithic 3D Inc.
    Inventors: Zvi Or-Bach, Jin-Woo Han