Patents Assigned to Moxtek
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Patent number: 10752989Abstract: A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R1)2Si(OH)2 molecule, where each R1 is independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R1)2Si(OH)2 molecule with the wire grid polarizer and with other (R1)2Si(OH)2 molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.Type: GrantFiled: July 5, 2018Date of Patent: August 25, 2020Assignee: Moxtek, Inc.Inventors: Anubhav Diwan, Matt Linford
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Patent number: 10727023Abstract: An x-ray tube anode can include an electron hole extending from an electron entry at an exterior of the anode into a core of the anode, and an x-ray hole extending from an x-ray exit at the exterior of the anode into the core of the anode. The x-ray hole can intersect the electron hole at the core of the anode. In one embodiment, the electron hole and the x-ray hole can form a seamless bore from the electron entry to the x-ray exit. In another embodiment, the anode can be a single, integral, monolithic material with a single bore extending therethrough. In another embodiment, the core of the anode can include a target material located at a concave wall of the core of the anode.Type: GrantFiled: April 9, 2019Date of Patent: July 28, 2020Assignee: Moxtek, Inc.Inventor: Todd S. Parker
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Patent number: 10690828Abstract: A cube wire grid polarizer or an embedded wire grid polarizer can include an adhesive-free, direct bond between the wire grid polarizer and piece(s) of glass. Consequently, index of refraction mismatch can be avoided and the polarizer can have improved high temperature tolerance. The polarizer can include multiple layers over the wire grid polarizer, with the top of these layers polished, then directly bonded to the piece of glass. Material of the top layer can be selected such that thickness of this layer is not critical, thus allowing polishing.Type: GrantFiled: July 6, 2018Date of Patent: June 23, 2020Assignee: Moxtek, Inc.Inventors: Shaun Ogden, Liang Gao, David Vern Nelson
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Patent number: 10681794Abstract: In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A1 between an anode axis 02 and an electron-beam axis 01 can be ?10° and ?80° and an angle A2 between the anode axis 02 and an x-ray axis 03 can be ?10° and ?80°. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.Type: GrantFiled: January 22, 2020Date of Patent: June 9, 2020Assignee: Moxtek, Inc.Inventors: Ricky B. Steck, Brad Harris
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Patent number: 10656309Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.Type: GrantFiled: August 30, 2019Date of Patent: May 19, 2020Assignee: Moxtek, Inc.Inventors: R. Stewart Nielson, Bradley R. Williams, Mathew Free, Ted Wangensteen
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Patent number: 10649121Abstract: A wire grid polarizer (WGP) can have low transmission of a primarily reflected/absorbed polarization (e.g. low Ts). The WGP can comprise an array of wires on a substrate and a stack of thin films between the substrate and the array of wires. The stack of thin films can include a first layer closest to the substrate, a second layer over the first layer, and a third layer over the second layer and closest to the array of wires. An index of refraction of the first layer can be greater than an index of refraction of the substrate, an index of refraction of the second layer can be greater than the index of refraction of the first layer, and an index of refraction of the third layer can be less than the index of refraction of the first layer.Type: GrantFiled: August 3, 2018Date of Patent: May 12, 2020Assignee: Moxtek, Inc.Inventors: Hua Li, Bin Wang, Brian Bowers
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Patent number: 10641907Abstract: A mounted x-ray window can be strong and transmissive to x-rays, can have a hermetic seal, and can withstand high temperatures. The mounted x-ray window can include a film located on an inner-side of a flange of a housing and can be attached to the flange by a ring of elastic adhesive. The film can comprise silicon nitride. A method of mounting an x-ray window can include placing a ring of elastic adhesive on an inner-side of a flange of a housing, placing a film on the ring of elastic adhesive, and baking the housing, the ring of elastic adhesive, and the film.Type: GrantFiled: February 21, 2017Date of Patent: May 5, 2020Assignee: Moxtek, Inc.Inventors: Kevin Black, Jonathan Abbott
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Patent number: 10636614Abstract: An x-ray window can include a thin film that comprises boron. The thin film can be relatively thin, such as for example ?200 nm. This x-ray window can be strong; can have high x-ray transmissivity; can be impervious to gas, visible light, and infrared light; can be easy of manufacture; can be made of materials with low atomic numbers, or combinations thereof. The thin film can include an aluminum layer. A support structure can provide additional support to the thin film. The support structure can include a support frame encircling an aperture and support ribs extending across the aperture with gaps between the support ribs. The support structure can also include boron ribs aligned with the support ribs.Type: GrantFiled: December 4, 2018Date of Patent: April 28, 2020Assignee: Moxtek, Inc.Inventors: Jared Sommer, Jonathan Abbott
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Patent number: 10624195Abstract: In one embodiment, an x-ray tube 15 can be used closer to a sample. An angle A1 between an anode axis 02 and an electron-beam axis 01 can be ?10° and ?80° and an angle A2 between the anode axis 02 and an x-ray axis 03 can be ?10° and ?80°. In another embodiment, a cap 20 on an anode 12 can block x-rays emitted in undesired directions. The cap 20 can include an internal cavity 24, an electron-beam hole 21, an anode hole 22, and an x-ray hole 23. In another embodiment, an electrical connection between an x-ray tube 15 and a power supply 18 can be reliable and easy to manufacture. The anode 12 can include a hole 31 at an end of the anode 12 sized and shaped for insertion of an electrical connector 32.Type: GrantFiled: September 27, 2018Date of Patent: April 14, 2020Assignee: Moxtek, Inc.Inventors: Ricky B. Steck, Brad Harris
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Patent number: 10616986Abstract: An x-ray source can have a reduced voltage gradient and a consistent voltage gradient, thus allowing less insulation, reduced arcing failure, or both. The x-ray source can comprise a bipolar voltage multiplier and an x-ray tube. The bipolar voltage multiplier can include a negative voltage multiplier and a positive voltage multiplier. An axis extending from an input voltage of the negative voltage multiplier to a negative output bias voltage defines a negative axis. An axis extending from an input voltage of the positive voltage multiplier to a positive output bias voltage defines a positive axis. An angle A1 between the negative axis and the positive axis can be selected for optimal voltage gradient.Type: GrantFiled: November 5, 2018Date of Patent: April 7, 2020Assignee: Moxtek, Inc.Inventors: Eric Miller, Tyler Washburn, Roland Creed
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Patent number: 10602600Abstract: An x-ray source can include a housing with material with an atomic number of ?42 and a thermal conductivity of ?3 W/(m*K) to assist in removing heat from the x-ray source and to block x-rays emitted in undesirable directions. An x-ray source can include a shell that is electrically conductive and that encloses at least part of a voltage multiplier without enclosing a control circuit to minimize or eliminate electromagnetic interference in the control circuitry caused by the voltage multiplier. An x-ray source can include a negative voltage multiplier, a positive voltage multiplier, and a ground plane between the negative voltage multiplier and the positive voltage multiplier. The ground plane can minimize or eliminate electromagnetic interference between the negative voltage multiplier and the positive voltage multiplier. An air-filled channel, associated with the ground plane, can reduce weight of the x-ray source.Type: GrantFiled: October 29, 2018Date of Patent: March 24, 2020Assignee: Moxtek, Inc.Inventors: Ricky B. Steck, Gordon Ernest Smith, Eric Miller, David S. Hoffman
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Patent number: 10534120Abstract: A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.Type: GrantFiled: June 23, 2017Date of Patent: January 14, 2020Assignee: Moxtek, Inc.Inventors: R. Stewart Nielson, Mathew Free, Bradley R. Williams, Matthew R. Linford, Anubhav Diwan, Fred Lane, Shaun Ogden
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Patent number: 10529529Abstract: Electron beam spot characteristics can be tuned in each x-ray tube by moving a focusing-ring along a longitudinal-axis of the x-ray tube. The focusing-ring can then be immovably fastened to the x-ray tube. An x-ray source can include an x-ray tube and a focusing-ring. The focusing-ring can at least partially encircle an electron-emitter, a cathode, an evacuated-enclosure, or combinations thereof. The focusing-ring can be located outside of a vacuum of the evacuated enclosure. The focusing-ring can adjust an electron-beam spot on a target material of the x-ray tube when moved along a longitudinal-axis extending linearly from the electron-emitter to the target material.Type: GrantFiled: February 3, 2017Date of Patent: January 7, 2020Assignee: Moxtek, Inc.Inventors: Dustin Peterson, Richard Zimmerman, Vince Jones, Eric Miller
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Patent number: 10524341Abstract: An electrostatic dissipation device 10 can comprise an elongated enclosure 11 with a longitudinal axis 12. An x-ray source 13 can be oriented to emit x-rays 16 inside of and along the longitudinal axis 12. A fluid-flow device 14 can be oriented to cause fluid to flow across the x-ray source 13 then inside of and along the longitudinal axis 12, the fluid being ionized by the x-rays 16, forming ionized fluid, then out of the elongated enclosure through outlet opening(s) 15. The arrangement of the x-ray source 13 and the fluid-flow device 14 can allow (1) fluid from the fluid-flow device 14 to cool the x-ray source 13, and (2) ion generation along the length of the elongated enclosure 11.Type: GrantFiled: January 17, 2017Date of Patent: December 31, 2019Assignee: Moxtek, Inc.Inventors: Eric Miller, Steven West Wilson
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Patent number: 10499484Abstract: In order to reduce the amount of electrical insulation needed for voltage isolation of large voltages generated by a voltage multiplier, the voltage multiplier can be shaped to smooth out electric field gradients. The voltage multiplier can comprise multiple sections, each section located in a different plane. The voltage multiplier can comprise a negative voltage multiplier and a positive voltage multiplier, each inclined at different angles with respect to each other. The voltage multiplier can include a curved shape.Type: GrantFiled: September 26, 2018Date of Patent: December 3, 2019Assignee: Moxtek, Inc.Inventors: Eric Miller, David S. Hoffman, Vincent F. Jones
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Patent number: 10459138Abstract: An embedded wire-grid polarizer (WGP) can include ribs 13 located over a surface of a transparent substrate 11, gaps 16 between the ribs 13, and a fill-layer 15 substantially filling the gaps 16. The fill-layer can have a relatively high index of refraction, such as greater than 1.4. At a wavelength of light incident upon the WGP, E? transmission can be greater than E? transmission. E? is a polarization of light with an electric field oscillation parallel to a length L of the ribs, and E? is a polarization of light with an electric field oscillation perpendicular to a length L of the ribs. This embedded, inverse WGP is especially useful for polarizing, with high WGP performance, small wavelength (high-energy) regions of the electromagnetic spectrum (e.g. UV) which are difficult to polarize with conventional WGPs (E? transmission >E? transmission).Type: GrantFiled: January 24, 2019Date of Patent: October 29, 2019Assignee: Moxtek, Inc.Inventors: Ted Wangensteen, Bin Wang, Matt George, Paul Steven Mills, Arash Farhang
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Patent number: 10453643Abstract: A transmission-target x-ray tube can include an x-ray window mounted on a window-housing. The window-housing can be made of a high density material (e.g. ?12 g/cm3) with a high atomic number (e.g. ?45), and can include an aperture with an increasing-inner-diameter region, with a smaller diameter closer to the electron-emitter and a larger diameter closer to the window-mount, for blocking x-rays and electrons. An example angle in the increasing-inner-diameter region is between 15 degrees and 35 degrees. The x-ray tube can further comprise a window-cap. The x-ray window can be sandwiched between the window-housing and the window-cap. The window-cap can be made of a high density material (e.g. ?12 g/cm3) with a high atomic number (e.g. ?45) for blocking x-rays in undesirable directions, and can include an aperture for allowing x-rays to transmit in desirable directions.Type: GrantFiled: January 30, 2017Date of Patent: October 22, 2019Assignee: Moxtek, Inc.Inventors: Dustin Peterson, Richard Zimmerman, Rick Steck, Vince Jones, Eric Miller
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Overcoat wire grid polarizer having conformal coat layer with oxidation barrier and moisture barrier
Patent number: 10444410Abstract: A wire grid polarizer (WGP) can be durable and have high performance. The WGP can comprise an array of wires 13 on a substrate 11. An overcoat layer 32 can be located at distal ends of the array of wires 13 and can span channels 15 between the wires 13. A conformal-coat layer 61 can coat sides 13s and distal ends 13d of the wires 13 between the wires 13 and the overcoat layer 32. The overcoat layer can comprise aluminum oxide. An antireflection layer 33 can be located over the overcoat layer 32.Type: GrantFiled: August 30, 2017Date of Patent: October 15, 2019Assignee: Moxtek, Inc.Inventors: R. Stewart Nielson, Bradley R. Williams, Mathew Free, Ted Wangensteen -
Patent number: 10422725Abstract: An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.Type: GrantFiled: February 28, 2018Date of Patent: September 24, 2019Assignee: Moxtek, Inc.Inventors: Matthew R. Linford, Anubhav Diwan, Bhupinder Singh
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Patent number: D877338Type: GrantFiled: December 14, 2018Date of Patent: March 3, 2020Assignee: Moxtek, Inc.Inventors: Vincent Floyd Jones, Daniel N. Paas