Abstract: A system and method for generating a linearized sensor signal p from a sensor signal m using a kth-degree polynomial The coefficients of the kth-degree polynomial can be calculated using a least-squares method by a computer. The computer can calculate for 1<j≦k the (2j−1) root of the jth coefficient aj of the kth-degree polynomial and download the coefficients and the resulting roots rj to a storage device in a digital signal processor (DSP).

Abstract: The invention pertains to a method for simultaneously removing metallic ions and particulate material from a pH neutral solution using particle-removing membranes (e.g., ultra high molecular weight polyethylene) having immobilized ligands that possess the capacity and high equilibrium binding constants for ion removal. The method is particularly useful for simultaneously filtering/purifying deionized water.

Abstract: A method for generating a valve drive signal using a variable gain PI controller in a mass flow controller. The method includes multiplying an error signal with a proportional gain factor to generate a proportional signal. The method also includes implementing an integral function on the error signal. The integral function includes an integral gain factor which functions as the variable gain in the PI controller. For set-point signals less than a normalized predetermined percentage of the maximum set-point, the gain factor is equal to [ ( 1 0.1 - 1 ) ⁢   ⁢ A + B ] , where A is a first gain constant and B is a second gain constant.

Abstract: A composition comprising a magnesium halide coated macroporous carbonaceous substrate is provided for effecting moisture removal from a hydrogen halide fluid. Moisture removal is effected by intimately contacting the hydrogen halide fluid with the magnesium halide coated macroporous carbonaceous substrate and separating the fluid from the coated substrate.

Abstract: A process for coating a solid surface (42) with a conditioned liquid composition of substantially uniform thickness is provided. A liquid composition is conditioned by a) degassing either via vacuum or by sparging with a high kinematic viscosity gas; and b) substantially maintaining the viscosity of the liquid composition. The conditioned liquid may then be dispensed onto a solid surface (42) positioned in a sub-atmospheric environment (37) or in a helium-rich environment (37). The solid surface (42) is rotated so that the liquid composition forms a uniformly thick coating free from bubbles on the solid surface (42) and thereby produces a thin film of uniform thickness.

Abstract: A fluid dispensing system is provided which has a first diaphragm pump, a filter connected to receive the discharge of said first pump, and an accumulator/second diaphragm pump connected to receive the discharge of said filter. Hydraulic fluids pumped by cylinder/piston/stepper assemblies independently actuate each of the diaphragm pumps, providing accurate, controllable and repeatable dispense of the subject fluid. There is also structure operable to suck back fluid from downstream of the second pump.

Abstract: A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

Abstract: A system and method for a pulse width modulated (PWM) solenoid driver with a reduced rate of power consumption. The system for driving a solenoid includes a solenoid, a current set-point for establishing a desired current flow through the solenoid, and a step-down regulator circuit for controlling the current through the solenoid based on the difference between the desired current flow and the actual current flow through the solenoid. The step-down regulator circuit has a low internal resistance of not greater than approximately 1 ohm which contributes to the reduced rate of power consumption for the PWM solenoid driver.

Abstract: The present invention provides a system and method for selectively removing organic and inorganic contaminants from plating baths. More particularly, the invented method relates to the use of a source of energy in combination with chemical oxidants, alone or in conjunction with a catalyst to oxidize organic contaminants in the plating bath to a level such that the electroplating bath can be recovered and reused after appropriate chemical adjustment. The oxidative treatment method may be a continuous process or a batch process that is performed in a single pass and the endpoint of the oxidative process detected by a sensor. Residual organics, and chloride ions in the bath are removed from the solution by a chemisorption or physisorption treatment. Inorganic contaminants are removed from the electroplating bath by selective ion exchange resins or electrodialysis, while particulate and suspended colloidal particles are removed by filtration before the treated plating bath is recycled.

Abstract: A method for controlling the gas flow within a digital mass flow controller. The method calculates a digitally enhanced flow rate signal that more accurately represents an actual flow rate through the digital mass flow controller. The digitally enhanced flow rate is calculated using a sensed flow rate signal output from a flow sensor, a scaled first derivative of the sensed flow rate signal, and a scaled, filtered second derivative of the sensed flow rate signal. A set-point signal is compared to the digitally enhanced flow rate signal to generate a digital error signal. The digital error signal is provided to a digitally realized PI (proportional integral) controller. The PI controller generates a digital control signal which is used to control a valve in the digital mass flow controller.

Abstract: A metal anode having at least a portion of which formed in a spiral configuration is disclosed. The spacing between the adjacent spirals of the anode is essentially uniform in order to provide uniform fluid flow and electrical characteristics. The anode may be formed of a metal rod or sheet or may be cast from a metal. The anode surfaces of the spiral may be flat or have a configuration such as a corrugated surface to enhance the surface area of the anode. The use of spacers, electrically conductive or insulative, within the spaces between the spirals to maintain their uniform distance is also disclosed. The use of one or more buss bars enables the anode to be supplied with a constant electrical source and may also function as a means for monitoring anode consumption over time. The anode is preferably used in an electroplating bath as the source of the metal used for plating. This is particularly of value in the electroplating of silicon wafer surfaces.

Abstract: A connector apparatus is provided which is configured to replace a separation module in a system for dispensing a fluid. When it is desired to purge the system of a dispensed fluid, the connector apparatus, having the same configuration of an inlet and an outlet as the separation module, replaces the separation module and a purging fluid is passed through the system.

Abstract: A control system for digitally monitoring and/or controlling pressure to a pneumatic load such as a stop/suckback valve. Pressure is sensed in the pneumatic fluid input lines to the pneumatic load, and a closed loop control is used to maintain the pressure at a predetermined level. In an alternative embodiment, the control system is used to ensure equal dispensing in multi-point dispense apparatus. Thus, pressure is sensed downstream of each valve in fluid communication with a respective nozzle. Any pressure differential detected is corrected by appropriate valve adjustment.

Abstract: A method for forming dendritic metal powders, comprising the steps of: (1) heating a powder comprising non-dendritic particles, under conditions suitable for initial stage sintering, to form a lightly sintered material; and (2) breaking the lightly sintered material to form a powder comprising dendritic particles. In one embodiment, the lightly sintered material is broken by brushing the material through a screen.

Abstract: A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet through fluid dispense. Substantially all wetted surfaces are Teflon® or some similar non-contaminating fluid, for applications such as cleanroom processes. A valve and a filter chamber are incorporated into a pump head to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.

Abstract: Semiconductor piezoresistive sensors are formed by a process using selective laser activation of a doped semiconductor surface. The substrate is a flexible membrane such as a diaphragm or bellows. A layer of insulative dielectric material is first applied to the substrate. A layer of highly resistive doped semiconductor material is then deposited on top of the dielectric layer. Through the use of an alignment device one or more piezoresistive sensors are formed by use of laser annealing of selected areas of the semiconductor material such that the annealed areas have a resistance suitable for use as sensors. Metal contacts are then applied over the end portions of sensors and form an electrical connection to the sensors. The non-annealed portions of doped semiconductor layer act as insulators between the formed piezoresistive sensors.

Abstract: A filter cartridge housing formed of a manifold and a bowl containing a filter cartridge is disclosed. The filtration cartridge and bowl are connected to each other to form a unitary construction. The filtration cartridge and bowl are in fluid communication with the manifold in a manner which prevents mixing of a fluid feed to the module and a permeate removed from the module. A threaded ring substantially fixed in a position relative to either the bowl or the manifold is used to positively drive the manifold and bowl together and apart as needed and to form a secure and liquid tight seal between the two components when they are together. The threaded ring is held by a key in the keyway on of the outer surface of the bowl or manifold. The threads of the ring mate with the threads on the manifold or bowl. As the ring is relatively fixed by the key/keyway to its position on the bowl or manifold, it moves the bowl relative to the manifold as the ring is rotated onto or off of the mating threads.