Abstract: A specimen observation apparatus for obtaining both an optical microscope image and a scanning electron microscope image simultaneously from one specimen. The apparatus includes a transparent glass plate having a transparent electrically conductive layer on a surface thereof for supporting the specimen in a vacuum column. The glass plate seals off one end of the vacuum column. The specimen position is illuminated with light and an electron beam along the same optical axis in the vacuum column to create both an optical microscope image with the light passing through the specimen and a scanning electron microscope image based on information obtained by scanning the electron beam over the specimen. The glass plate, while sealing one end of the vacuum column, is movably disposed about the optical axis. An optical microscope is located outside the vacuum column near to the glass plate.

Abstract: A 10 to 50 microns thick apertured foil is coated on at least one of its sides with a material having a thickness of about 10 to 100 microns. The atomic number of the coating material is such that characteristic X-rays generated are effectively absorbed.

Abstract: In a scanning electron microscope, an objective lens field is generated between a pair of deflecting coils and a specimen by an objective lens having upper and lower magnetic pole pieces. A supplemental magnetic pole piece is installed between said upper and lower magnetic pole pieces so that the half width of the objective lens axial magnetic field distribution is increased and the principal plane of the objective lens is positioned near the lower pole piece. By so doing, the spherical aberration coefficient of the objective lens is reduced and a high resolution scanning image is obtained.

Abstract: In a scanning electron microscope, a circle of least confusion of the electron beam is formed on a specimen without operation of a stigmator, then the circle of least confusion is minimized by a stigmator, thereby enabling lens astigmatism in said microscope to be fully corrected.

Abstract: An electron beam device comprising a scanning means for automatically focusing said electron beam and a related method. The scanning means is controlled at all times to operate under optimum magnification and scanning speed conditions.

Abstract: A specimen anticontamination device for an electron microscope incorporates a cold trap installed outside the magnetic pole pieces of the objective lens. This cold trap effectively absorbs the residual gases which contribute to the specimen contamination, because its position is nearer the residual gas source than the conventional cold trap installed near the specimen and inside the magnetic pole pieces. For this reason, the device is very effective as an anticontamination means particularly in electron microscopes having a narrow objective lens pole piece gap wherein the space available would preclude installation of the conventional anticontamination device.

Abstract: An automatic chemical analyzer comprising an extractor for extracting the desired sample from a plurality of liquid samples, a measuring valve for measuring out a fixed quantity of the extracted sample, a plurality of reagent storage tanks each storing a different kind of reagent according to the analysis intended, a plurality of reagent pumps equal in number to the number of reagent storage tanks, each of said plurality of reagent pumps being connected to each of said plurality of reagent storage tanks for drawing the reagents out of the reagent storage tanks, a reaction device comprising a plurality of reaction tubes for containing the samples and reagents, a reagent selector located between the pumps and the reaction device, said selector connecting a specific reagent pump to the reaction device according to the type of analysis.

Abstract: An electron beam having a narrow rectangular cross section, shaped by two aperture plates and a deflector, is scanned over a workpiece or specimen. The length and width of the narrow rectangular cross section, relative to beam scanning, in accordance with the shape of the pattern being exposed.

Abstract: A computed tomography apparatus in which a fan-shaped X-ray beam is caused to pass through a section of an object, enabling absorption detection on the opposite side of the object by a detector comprising a plurality of discrete detector elements. An electron beam generating the X-ray beam by impacting upon a target is caused to rotate over the target.

Abstract: A reference mark, common to both an electron beam and a workpiece, is arranged above and away from, but in the vicinity of, the workpiece exposure area. The position of the workpiece with respect to the reference mark is ascertained by an optical measuring means such as a Michelson type laser interferometer and the position of the electron beam with respect to the reference mark is ascertained by scanning the electron beam over said reference mark. The relative positions of the electron beam and the exposed workpiece is obtained by comparing the respective positions of the electron beam and workpiece with the reference mark. By so doing, the error between specified and actual positions of the points of impingement of the electron beam on the surface of the workpiece may be corrected.

Abstract: An electron beam with a cross-section shaped by two aperture plates and a deflector sequentially irradiates pattern areas within a plurality of unit squares on a workpiece in the X and Y directions. The workpiece is continuously shifted in the Y direction by a mechanical means, the amount of workpiece shift being detected to control the deflector and the shaping of said beam cross-section.

Abstract: An automatic analyzing apparatus comprising a rotatable reaction device, a plurality of reaction tubes, said reaction device stepwise rotated by a driving means whereby a reaction tube is advanced through a plurality of functional positions, that is, at the initial position of the rotatable reaction device a liquid sample is supplied to a reaction tube together with a first reagent, at the second position the sample and first reagent are stirred, at the third position a second reagent is supplied to said reaction tube, at the fourth position the sample, and first and second reagents are stirred, at the fifth position, the stirred mixture is optically measured, at the sixth position the optically measured mixture is drained off, and at the seventh position the empty reaction tube is washed and rinsed before being returned to the original position where the next liquid sample is supplied.

Abstract: A scanning electron microscope for displaying a scanning image on a cathode ray tube screen. A high magnification image is displayed within a low magnification image displayed on a cathode ray tube screen so that the relative positions of the low and high magnification images can be immediately observed. The magnification and the display area of the high magnification image is varied continuously.

Abstract: An electron gun having a thermionic emitter held by boron carbide heating members or the like, supported by electroconductive members which have additional elastic positioning members arranged to nullify the emitter shift and other effects caused by heat distortion.

Abstract: A scanning electron microscope having a plurality of annular shaped electron detectors. The ratio of two detector output signals is compared with some constant value indicative of a component of the specimen. On the basis of the comparison the output signal of one detector is passed or not passed to an image display means to provide an image indicative of said component.

Abstract: A mass spectrometer comprising superimposed electric and magnetic fields arranged substantially at right angles. The central orbit of the ion beam produced by an ion source is located on an equipotential surface in the electric field. The ion beam is accelerated by a means for producing a constant accelerating voltage. The electric field is swept by a sweep means. The change of the focal length of the superimposed field when the electric field is swept by said sweep means is compensated by a compensating means, thereby providing a mass spectrometer capable of measuring ions having a wide range of mass to charge ratios and capable of scanning at high speed and having a high accuracy mass marker.

Abstract: A nuclear magnetic resonance apparatus incorporating a first trans-receiver coil, an internal lock coil, a decoupling coil, means for tuning said coils to desired frequencies, a first trans-receiving system for supplying the first trans-receiver coil with a first nuclear (such as .sup.1 H) resonance RF wave and detecting the first nuclear resonance F.I.D. signal, a second trans-receiving system for supplying the first trans-receiving coil with a second nuclear (such as .sup.13 C) resonance RF wave and detecting the second nuclear resonance F.I.D. (Free Inductance Decay) signal, a third trans-receiving system for supplying the internal lock coil with a third nuclear (such as .sup.2 D) resonance RF wave and detecting the third nuclear resonance signal, and a transmission system for supplying the first nuclear resonance RF wave to the decoupling coil, it being possible in said apparatus to observe different types of nucleus, viz; .sup.1 H and .sup.

Abstract: In an X-ray generating column, an X-ray microbeam is generated by irradiating a target with a scanning finely focused electron beam and permitting the microbeam to pass a pin hole in a beam guide plate or baffle. The take off direction of the X-ray microbeam is varied by scanning said electron beam over the target. The X-ray microbeam irradiates and passes through a thin slice plane of an object. The X-ray generating column rotates around the object. The rotation and electron beam scanning signals and the output signal of a detector for the X-rays passed through object are memorized by a memory circuit. A calculating circuit then calculates the X-ray absorption coefficient at each micro matrix area on the slice plane of the object, and delivers the respective outputs to an image display means to display an X-ray image of a slice plane of the object.

Abstract: A rock specimen is step scanned in an electron probe x-ray microanalyzer. A plurality of x-ray spectrometers (for example three) forming a part of said electron probe x-ray microanalyzer simultaneously detect characteristic x-rays corresponding to three elements at each scanning point on the rock specimen. The concentration of each element is calculated from the output signals of said plurality of x-ray spectrometers and the calculated elemental concentrations are then converted into atomic ratios accordingly. From this information, the type of mineral at each scanning point is designated by a character which is recorded on a display means in synchronism with the step scanning so as to display a mineral map of the specimen being examined.

Abstract: An electron beam with a cross-section shaped by two aperture plates and a deflector sequentially irradiates pattern areas within a plurality of unit squares on a workpiece in the X and Y directions. The workpiece is continuously shifted in the Y direction by a mechanical means, the amount of workpiece shift being detected to control the deflector and the shaping of said beam cross-section.