Abstract: This focus test mask is provided with a test pattern that is projected onto a wafer via a projection optical system. This test pattern includes: a plurality of line patterns that are lined up in a direction of measurement; phase shift sections that are provided in areas adjacent to each of the plurality of line patterns and that are used to shift the phase of light passing through; and reference patterns that are used to obtain an image that forms a reference when the shift in the line pattern image is measured. Spaces between the plurality of line patterns are set at a size that allows each line pattern to be regarded as equivalent to being isolated lines.

Abstract: To provide an immersion microscope objective lens capable of making a numerical aperture NA larger than 1.45 even if an ordinary oil is used, the objective lens includes, in order from an object, a first lens group, a second lens group, and a third lens group. The first lens group includes a first cemented lens constructed by a plano-convex lens having a plane surface facing to the object cemented with a meniscus lens having a convex surface facing to an image, and two or more cemented positive lenses disposed to the image side of the first cemented lens. The second lens group includes one or more cemented lens. The third lens group includes, in order from the object, a cemented meniscus lens having a strong concave surface facing to the image, and a cemented meniscus lens having a strong concave surface facing to the object. Given conditional expressions are satisfied.

Abstract: A camera for recording an image captured using image-capturing element in a recording medium is provided with a focal point detection device for detecting a focal point adjustment state of a photographic lens in each focal point detection region of a plurality of focal point detection regions set inside an photographic field. When electronic zoom shooting is carried out, part of an imaged picture is trimmed and an image for recording in the recording medium is created. For a plurality of focal point detection regions the focal point detection regions are changed according to the trimming range of the imaged picture. Focal point adjustment of the photographic lens is carried out based on focal point detection results for focal point detection regions that have been changed.

Abstract: A control system for the adjustment and calibration of electromagnetic devices, such as E-I core electromagnetic devices, using adaptive gain adjustment. A controller is provided with an input current and an output force and provides an output signal indicative of a force gain estimate, wherein the force gain estimate is the ratio of the output force to the input current.

Abstract: An ultraviolet laser apparatus according to the present invention comprises a laser generating portion having a single-wavelength oscillating laser for generating laser light having a single wavelength falling within a wavelength range from an infrared band to a visible band, an optical amplifier having a fiber optical amplifier for amplifying the laser light generated by the laser generating portion, and a wavelength converting portion for wavelength-converting the amplified laser light into ultraviolet light by using a non-linear optical crystal, whereby ultraviolet light having a single wavelength is generated.

Abstract: A surface inspection apparatus includes an illumination means for illuminating a pattern formed through a predetermined pattern forming process containing a process of exposure of a resist layer formed on a substrate having a periodicity with a linearly polarized light, a setting means for setting a direction of the substrate such that a plane of vibration of the linear polarization and a direction of repetition of the pattern are obliquely to each other, an extraction means for extracting a polarization component having a plane of vibration perpendicular to that of the linear polarization out of specularly reflected light from the pattern, and an image forming means for forming an image of the surface of the substrate based on the extracted light. A pattern forming condition in the pattern forming process is specified based on the light intensity of the image of the surface of the substrate formed by the image forming means.

Abstract: An imaging device of the present invention includes an image capturing unit, a noise obtaining unit, a fixed noise calculating unit, and a noise eliminating unit. The image capturing unit generates image data by photoelectrically converting, pixel by pixel, a subject image formed on an available pixel area of a light-receiving surface. The noise obtaining unit reads a noise output from a partial area of the available pixel area. The fixed noise calculating unit calculates an estimation of fixed pattern noise of the available pixel area based on the noise output read from the partial area. The noise eliminating unit subtracts the fixed pattern noise from the image data.

Abstract: A stage apparatus including: a movement member movable with a plate member placed on a placement surface; and a fixing apparatus that fixes said plate member to said placement surface in parallel with said movement member passing through a prescribed first region.

Abstract: A liquid immersion photolithography system has an exposure system that exposes an exposure area on a substrate with electromagnetic radiation and includes a projection optical system. In addition, a liquid flow is provided between the projection optical system and the exposure area. Further, a member at one side of the projection optical system provides the liquid flow having a desired velocity profile when the liquid flow is present in the exposure area.

Abstract: When exposing a substrate by projecting a pattern image onto the substrate via a projection optical system (PL) and liquid (1), an exposure method includes a determination of a liquid immersion condition to be performed to the substrate, such as a liquid type, depending on a film (SP) formed as a liquid contact surface of the substrate. The liquid type is selected by switching between a first liquid supply section (11) and a third liquid supply section (21). It is possible to smoothly perform immersion exposure for the substrate (P) on which a different photo-resist layer is provided.

Abstract: A signal correcting method includes: obtaining multiple types of signals at each of a plurality of points; extracting a point with signal values corresponding to the multiple types of signals, which have a predetermined relationship to signal values of the multiple types of signals at a target point; and correcting the multiple types of signals at the target point based upon the signal values corresponding to the multiple types of signals at the target point and the signal values corresponding to the multiple types of signals at the extracted point.

Abstract: A liquid immersion photolithography system has an exposure system that exposes a substrate with electromagnetic radiation and includes a projection optical system that focuses the electromagnetic radiation on the substrate. A liquid supply system provides liquid flow between the projection optical system and the substrate. In addition, a plurality of nozzles are arranged so as to provide a substantially uniform velocity distribution of the liquid flow between the substrate and the projection optical system.

Abstract: An image correction apparatus includes: an image obtaining unit that obtains image data from outside constituted of a plurality of pixels each having a value in a color component among a plurality of color components; an average value calculation unit that calculates average values of color component values corresponding to individual color components in the image data; and a correction unit that corrects the color component values of individual pixels to match the average values of the color component values corresponding to individual color components with at least one specific reference value.

Abstract: An electronic camera includes: an image-capturing device that stores a signal electrical charge achieved by performing photoelectric conversion on a subject image projected on a photosensitive surface and reads out the signal electrical charge to generate an image signal; and a photographing preparation device that executes photographing preparations for photoelectric conversion performed at the image-capturing device. And the photographic preparation device executes at least some of the photographing preparations for photographing a next frame during an electrical charge read period at the image-capturing device.

Abstract: A diffractive optical element includes a first diffractive element and a second diffractive element that is made of a material different from that of the first diffractive element and is cemented with the first diffractive element, forming a diffraction grating at the cemented surface. A shade film is formed on a wall surface of each groove of the diffraction grating to enhance the angular characteristic of the grating.

Abstract: An image processing method for converting a first image, which is expressed in a colorimetric system made up of a plurality of color components and is constituted of a plurality of pixels each holding color information corresponding to a single color component, to a second image constituted with a plurality of pixels all holding color information corresponding to at least one common color component, includes: a color difference information generation step in which color difference information is generated by using color information in the first image; a color gradient analysis step in which a color gradient indicating an extent of color change is determined based upon the color difference information having been generated; and an image conversion step in which the first image is converted to the second image based upon the color gradient having been determined.

Abstract: Fluidic optical elements and systems use isotopically specified fluids for processing light passing therethrough. The isotopic composition of the fluid may be adjusted to vary the optical properties. The properties of the isotopically specified fluid may be monitored and adjusted to obtain the desired optical characteristics of the fluidic optical element. In one embodiment, a method of optically processing light includes directing light through an optical element that includes an isotopically specified fluid disposed in a confined space. The isotopically specified fluid is selected to provide a preset desired effect on the light directed therethrough for optically processing the light.

Abstract: A film of aluminum 2 is formed on a glass substrate (BK7) 1 by vacuum evaporation, and a multilayer optical thin film 3 is formed by an ion sputtering method on this aluminum film 2. Afterwards, such a member is cut into small pieces by means of dicing, and the aluminum 2 is then etched by a sodium hydroxide solution, so that the glass substrate 1 and the multilayer optical thin film 3 are separated. When the aluminum thickness exceeds 90 nm, clouding occurs in the multilayer optical thin film 3, and when the aluminum thickness is less than 10 nm, the separation of the glass substrate and multilayer optical thin film cannot be performed cleanly. Accordingly, the aluminum thickness is set in a range of 10 to 90 nm.

Abstract: The complete vertical inversion of a combination of the resin layer 2 and resin layer 3 in (a) is (b). Accordingly, (a) and (b) have the same optical characteristics. Between the resin layer 2 and resin layer 3, the resin layer that is sandwiched between the substrate 1 and the uppermost resin layer (i.e., the resin layer 2 in (a) and the resin layer 3 in (b)) does not have its surface directly contacting the outside air, but the uppermost resin layer (i.e., the resin layer 3 in (a) and the resin layer 2 in (b)) has its surface contacting the outside air.

Abstract: Methods and apparatus for increasing the efficiency of a voice coil motor (VCM) are disclosed. According to one aspect of the present invention, a cylindrical and radially symmetric VCM includes a plurality of sets of magnets, and a single coil. The plurality of sets of the magnets are each arranged in an array configuration, and cooperate to form a magnetic field. The coil receives current and has a plurality of windings. A first space is defined within the coil, and the plurality of sets of the magnets are arranged such that a first set of the magnets is positioned within the first space and a second set of the magnets is positioned external to the coil.