Patents Assigned to Nikon
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Publication number: 20240152031Abstract: An imaging device includes a first optical system configured to form an intermediate image of a subject, a second optical system that is an optical system configured to form a final image by re-imaging at least a part of the intermediate image and that is configured to change a magnification of the final image, an imaging element configured to image the final image, and a driving part configured to move the second optical system and the imaging element in a direction intersecting an optical axis of the first optical system.Type: ApplicationFiled: March 29, 2021Publication date: May 9, 2024Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Publication number: 20240152053Abstract: A method for manufacturing a semiconductor integrated circuit in each of a plurality of regions on a substrate, the method includes forming an electronic circuit as a part of the semiconductor integrated circuit in each of the plurality of regions by using a mask pattern fixed to a mask substrate, and forming a specific circuit, which expresses specific information specific to each of the semiconductor integrated circuits, on a part of each of the plurality of regions by using a variable shaping exposure apparatus having a variable shaping mask, the specific circuits formed on the plurality of regions being different from each other.Type: ApplicationFiled: December 20, 2021Publication date: May 9, 2024Applicant: NIKON CORPORATIONInventors: Yuho KANAYA, Soichi OWA
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Publication number: 20240155258Abstract: An image sensor includes: a first pixel having a first photoelectric conversion unit that photoelectrically converts light to generate a charge, a first accumulation unit that accumulates the charge generated by the first photoelectric conversion unit, and a first output unit that is connected to the first accumulation unit; a second pixel having a second photoelectric conversion unit that photoelectrically converts light to generate a charge, a second accumulation unit that accumulates the charge generated by the second photoelectric conversion unit, and a second output unit that is connected to and disconnected from the second accumulation unit via a second connection unit; and an adjustment unit that adjusts capacitances of the first accumulation unit and the second accumulation unit if a signal based on the charges generated by the first photoelectric conversion unit and the second photoelectric conversion unit is output from the first output unit.Type: ApplicationFiled: January 18, 2024Publication date: May 9, 2024Applicant: NIKON CORPORATIONInventor: Shigeru MATSUMOTO
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Publication number: 20240153203Abstract: Generating a three-dimensional image of a vortex vein based on OCT volume data. An image processing method is performed by a processor and includes a step of acquiring OCT volume data including a choroid, and a step of extracting choroidal vessels based on the OCT volume data and generating a three-dimensional image of the choroidal vessels.Type: ApplicationFiled: February 22, 2022Publication date: May 9, 2024Applicant: NIKON CORPORATIONInventors: Yasushi TANABE, Hiroshi KASAI, Mariko MUKAI, Yuanting JI
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Publication number: 20240155230Abstract: A focus detection device includes: an imaging unit having a first and second pixel each of which receives light transmitted through an optical system and outputs signal used for focus detection, and a third pixel which receives light transmitted through the optical system and outputs signal used for image generation; an input unit to which information regarding the optical system is input; a selection unit that selects one of the first and second pixel based on the information to the input unit; a readout unit that reads out the signal from one of the first and second pixel based on a selection result at a timing different from reading out the signal from the third pixel to be read out; and a focus detection unit that performs the focus detection based on at least one of the signals of the first and second pixel read out by the readout unit.Type: ApplicationFiled: January 17, 2024Publication date: May 9, 2024Applicant: NIKON CORPORATIONInventors: Sinsuke SAMBONGI, Akira Kinoshita, Yuki Kita
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Publication number: 20240149351Abstract: The problem of slow 3D printing using a beam-guided search (BGS) method is addressed by systems and methods that apply variable volume threshold ratio (VTR) values to a BGS method, to generate a plurality of subvolume groups and a plurality of clipping plane groups corresponding to a model of a 3D printed part or component. The plurality of subvolume groups and the plurality of clipping plane groups are presented to an operator of a 3D printing system, who can select the subvolume group and clipping plane associated with an optimal VTR value (for instance, based on experience and intuition), thereby obtaining a high-quality part or component while speeding up the 3D printing procedure.Type: ApplicationFiled: October 20, 2023Publication date: May 9, 2024Applicant: Nikon CorporationInventor: Abdelmoula Haboub
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Patent number: 11978757Abstract: An image sensor includes: a pixel substrate that includes a plurality of pixels each having a photoelectric conversion unit that generates an electric charge through photoelectric conversion executed on light having entered therein and an output unit that generates a signal based upon the electric charge and outputs the signal; and an arithmetic operation substrate that is laminated on the pixel substrate and includes an operation unit that generates a corrected signal by using a reset signal generated after the electric charge in the output unit is reset and a photoelectric conversion signal generated based upon an electric charge generated in the photoelectric conversion unit and executes an arithmetic operation by using corrected signals each generated in correspondence to one of the pixels.Type: GrantFiled: December 14, 2022Date of Patent: May 7, 2024Assignee: NIKON CORPORATIONInventor: Shigeru Matsumoto
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Patent number: 11977339Abstract: A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.Type: GrantFiled: June 29, 2022Date of Patent: May 7, 2024Assignee: NIKON CORPORATIONInventor: Yuichi Shibazaki
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Patent number: 11979654Abstract: A portable information device includes: an image sensor; a position information acquisition portion that outputs position information; an orientation sensor; and a display that displays an image of an object output from the image sensor and displays relevant information on the object, the relevant information on the object being obtained based on at least measurement data from the position information acquisition portion and the orientation sensor.Type: GrantFiled: March 28, 2023Date of Patent: May 7, 2024Assignee: NIKON CORPORATIONInventors: Hideya Inoue, Toru Iwaoka, Michiko Noborisaka, Masayuki Hatori, Tomohide Hamada
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Patent number: 11979672Abstract: A backside illumination image sensor that includes a semiconductor substrate with a plurality of photoelectric conversion elements and a read circuit formed on a front surface side of the semiconductor substrate, and captures an image by outputting, via the read circuit, electrical signals generated as incident light having reached a back surface side of the semiconductor substrate is received at the photoelectric conversion elements includes: a light shielding film formed on a side where incident light enters the photoelectric conversion elements, with an opening formed therein in correspondence to each photoelectric conversion element, and an on-chip lens formed at a position set apart from the light shielding film by a predetermined distance in correspondence to each photoelectric conversion element. The light shielding film and an exit pupil plane of the image forming optical system achieve a conjugate relation to each other with regard to the on-chip lens.Type: GrantFiled: February 2, 2023Date of Patent: May 7, 2024Assignee: NIKON CORPORATIONInventor: Yosuke Kusaka
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Publication number: 20240146891Abstract: An imaging device includes an imaging sensor that outputs an imaging signal representing a sequence of frame images of a photographic subject. A buffer memory temporarily stores data of the sequence of frame images from the imaging signal. A release switch is actuated by a user to output an image-taking signal. A controller, upon receipt of the image-taking signal from the release switch: (i) generates moving image data from at least some of the plurality of frame images stored in the buffer memory, (ii) generates at least one piece of still image data based on at least one frame image of the plurality of frame images stored in the buffer memory, and (iii) associates the moving image data with the still image data and records the moving image data and the still image data in a recording medium.Type: ApplicationFiled: January 10, 2024Publication date: May 2, 2024Applicant: NIKON CORPORATIONInventor: Takashi KURIYAMA
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Publication number: 20240142877Abstract: An exposure apparatus includes a substrate stage on which substrates are placed, and first projection modules each including a spatial light modulator, the first projection modules projecting wiring patterns each connecting semiconductor chips arranged on each of the substrates onto the substrates, wherein the first projection modules project the wiring patterns onto different substrates, substantially simultaneously.Type: ApplicationFiled: December 19, 2023Publication date: May 2, 2024Applicant: NIKON CORPORATIONInventors: Masaki KATO, Yasushi MIZUNO
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Patent number: 11974056Abstract: An image-capturing unit includes: an image-capturing chip; a power supply circuit unit that outputs electrical power to be fed to the image-capturing chip; a power supply line that feeds electrical power from the power supply circuit unit to the image-capturing chip; a disconnecting unit that is provided to the power supply line and is electrically disconnecting the power supply circuit unit and the image-capturing chip when a leakage current of the image-capturing chip is measured; and an implementation substrate on which the power supply circuit unit, the image-capturing chip, the power supply line and the disconnecting unit are implemented.Type: GrantFiled: July 6, 2021Date of Patent: April 30, 2024Assignee: NIKON CORPORATIONInventors: Hirofumi Arima, Ryoichi Suganuma, Ryuuzou Motoori
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Patent number: 11972325Abstract: A determination method includes causing the state in each of the plurality of pixels to correspond to a plurality of states of a plurality of bits of an Ising model, and setting an evaluation function for evaluating a degree of coincidence between the target image and the formed image as a function of the plurality of bits, and determining which one of the plurality of states is to be set for each of the plurality of pixels on the basis of states of the plurality of bits included in a result obtained by evaluating the evaluation function by an Ising machine.Type: GrantFiled: September 28, 2021Date of Patent: April 30, 2024Assignee: Nikon CorporationInventor: Yosuke Okudaira
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Patent number: 11971540Abstract: An optical system (LS) includes lenses (L22,L23) satisfying the following conditional expressions, ndLZ+(0.01425×?dLZ)<2.12, and ?dLZ<35.0, where ndLZ: a refractive index of the lens with reference to d-line, and ?dLZ: Abbe number of the lens with reference to d-line.Type: GrantFiled: December 15, 2017Date of Patent: April 30, 2024Assignee: Nikon CorporationInventors: Masashi Yamashita, Tomoki Ito, Hiroshi Yabumoto, Hiroshi Yamamoto, Satoshi Miwa, Keisuke Tsubonoya, Ayumu Makida, Takeru Uehara
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Patent number: 11969822Abstract: The processing system is provided with: a liquid supply device which can supply a liquid; a liquid processing device which processes a liquid supplied from the liquid supply device such that a non-liquid-immersion state is generated locally in a partial area including a target portion on a predetermined surface; a beam irradiation section which emits beams toward the target portion; and a moving apparatus which moves the predetermined surface. The beams are irradiated on the target portion to apply a predetermined processing to the target portion, in a state in which the target portion is in the non-liquid-immersion state.Type: GrantFiled: September 30, 2019Date of Patent: April 30, 2024Assignee: NIKON CORPORATIONInventor: Yuichi Shibazaki
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Publication number: 20240134288Abstract: An optical device includes a plurality of laser light sources, an output module having an optical modulator, and a time divider that is disposed between the plurality of laser light sources and the output module and that is configured to divide laser beams emitted from the plurality of laser light sources in time.Type: ApplicationFiled: December 29, 2023Publication date: April 25, 2024Applicant: NIKON CORPORATIONInventors: Yasushi MIZUNO, Masaki Kato
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Publication number: 20240134294Abstract: A measurement device has: a slider which holds a substrate and is movable parallel to the XY plane; a drive system that drives the slider; a position measurement system which emits beams from a head section to a measurement surface in which grating section are provided on the slider, which receives respective return beams of the beams from the measurement surface, and which is capable of measuring position information in at least directions of three degrees of freedom including the absolute position coordinates of the slider; a mark detection system that detects a mark on the substrate; and a controller which detects the marks on the substrate using the mark detection system while controlling the drive of the slider, and which obtains the absolute position coordinates of each mark based on the detection result of each mark and measurement information by the position measurement system at the time of detection.Type: ApplicationFiled: December 27, 2023Publication date: April 25, 2024Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Publication number: 20240134295Abstract: A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.Type: ApplicationFiled: January 4, 2024Publication date: April 25, 2024Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Patent number: 11966032Abstract: A variable magnification optical system comprises, in order from an object side, a negative first lens group, a positive second lens group, a negative third lens group and a positive fourth lens group. Upon varying a magnification, a distance between the first lens group and the second lens group, a distance between the second lens group and the third lens group, and a distance between the third lens group and the fourth lens group are varied. The first lens group consists of, in order from the object side, a negative lens and a positive lens. The second lens group consists of, in order from the object side, a positive 2a lens group, a positive 2b lens group, and a negative 2c lens group. A downsized system having high optical performance is provided.Type: GrantFiled: July 13, 2018Date of Patent: April 23, 2024Assignee: Nikon CorporationInventors: Yoko Komatsubara, Takeshi Umeda